EP0741420A3 - Mehrachsendrehvorrichtung - Google Patents

Mehrachsendrehvorrichtung Download PDF

Info

Publication number
EP0741420A3
EP0741420A3 EP96302425A EP96302425A EP0741420A3 EP 0741420 A3 EP0741420 A3 EP 0741420A3 EP 96302425 A EP96302425 A EP 96302425A EP 96302425 A EP96302425 A EP 96302425A EP 0741420 A3 EP0741420 A3 EP 0741420A3
Authority
EP
European Patent Office
Prior art keywords
axis defining
curved element
rotation device
support
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP96302425A
Other languages
English (en)
French (fr)
Other versions
EP0741420A2 (de
Inventor
Jona Zumeris
Izhak Rafeli
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nanomotion Ltd
Original Assignee
Nanomotion Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanomotion Ltd filed Critical Nanomotion Ltd
Publication of EP0741420A2 publication Critical patent/EP0741420A2/de
Publication of EP0741420A3 publication Critical patent/EP0741420A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/108—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors around multiple axes of rotation, e.g. spherical rotor motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Friction Gearing (AREA)
EP96302425A 1995-04-06 1996-04-04 Mehrachsendrehvorrichtung Withdrawn EP0741420A3 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
IL11329195 1995-04-06
IL11329195A IL113291A0 (en) 1995-04-06 1995-04-06 A multi-axis rotation device
US08/630,406 US5696421A (en) 1995-04-06 1996-04-01 Multi-axis rotation device

Publications (2)

Publication Number Publication Date
EP0741420A2 EP0741420A2 (de) 1996-11-06
EP0741420A3 true EP0741420A3 (de) 1996-11-13

Family

ID=26323022

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96302425A Withdrawn EP0741420A3 (de) 1995-04-06 1996-04-04 Mehrachsendrehvorrichtung

Country Status (3)

Country Link
US (1) US5696421A (de)
EP (1) EP0741420A3 (de)
IL (1) IL113291A0 (de)

Families Citing this family (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3456349B2 (ja) * 1996-09-05 2003-10-14 ミノルタ株式会社 電気機械変換素子を使用した回転型駆動装置
US6313566B1 (en) * 1997-07-08 2001-11-06 John Cunningham Piezoelectric motor
DE19757139A1 (de) * 1997-12-20 1999-06-24 Philips Patentverwaltung Antriebsvorrichtung für wenigstens zwei Rotationselemente mit wenigstens einem piezoelektrischen Antriebselement
DE19817038A1 (de) * 1998-04-17 1999-10-21 Philips Patentverwaltung Piezomotor
AU9642698A (en) 1998-10-26 2000-05-15 Nanomotion Ltd. Multidirectional motors
WO2000052731A2 (de) * 1999-02-27 2000-09-08 Meier Markus Institut Für Mechanische Systeme Goniometer
KR100291952B1 (ko) * 1999-03-10 2001-06-01 윤덕용 관성마찰에 의한 다축 회전장치
AU4056799A (en) * 1999-05-31 2000-12-18 Nanomotion Ltd. Multilayer piezoelectric motor
US6384514B1 (en) 1999-07-28 2002-05-07 Technology Commercialization Corp. Reversible piezoelectric positioning device and a disk drive using same
JP2001136761A (ja) * 1999-11-02 2001-05-18 Minolta Co Ltd アクチュエータ
DE19961684A1 (de) * 1999-12-21 2001-06-28 Philips Corp Intellectual Pty Aktuator mit einer Kugel und piezo-elektrischen Antrieben
DE10010707C2 (de) * 2000-03-04 2002-01-10 Philips Corp Intellectual Pty Piezoelektrischer Aktuator
US6664714B2 (en) * 2000-03-23 2003-12-16 Elliptec Resonant Actuator Ag Vibratory motors and methods of making and using same
US6362557B1 (en) * 2000-08-28 2002-03-26 International Business Machines Corporation Ultrasonic method and actuator for inducing motion of an object
US6606426B2 (en) 2000-11-03 2003-08-12 Herzel Laor Piezoelectric and electromagnetic actuators for beam alignment and systems and methods using the same
US20050127789A1 (en) * 2001-03-08 2005-06-16 Magnussen Bjoern B. Piezoelectric motors and methods for the production and operation thereof
US20030003962A1 (en) * 2001-06-29 2003-01-02 Tan Vooi-Kia Automatic sliding machanism for portable electronic product, particularly for a sliding front cover of a mobile phone
DE10146703A1 (de) * 2001-09-21 2003-04-10 Elliptec Resonant Actuator Ag Piezomotor mit Führung
US6798120B1 (en) * 2001-10-31 2004-09-28 The Regents Of The University Of California Apparatus and method for manipulation of an object
US7368853B2 (en) * 2002-04-22 2008-05-06 Elliptec Resonant Actuator Aktiengesellschaft Piezoelectric motors and methods for the production and operation thereof
JP2004166479A (ja) * 2002-06-14 2004-06-10 Seiko Epson Corp 回転型駆動装置およびこれを備えた装置
US6849989B2 (en) * 2002-10-31 2005-02-01 Andreas Schmid Translation and rotation positioning motor
JP2004260990A (ja) * 2003-02-06 2004-09-16 Seiko Epson Corp 駆動装置および稼動装置
JP2004320980A (ja) * 2003-04-03 2004-11-11 Seiko Epson Corp 稼働装置および電気機器
JP2004320979A (ja) * 2003-04-03 2004-11-11 Seiko Epson Corp 稼働装置および電気機器
JP2007524339A (ja) * 2004-02-25 2007-08-23 ナノモーション リミテッド 多方向圧電モータ配置
JP4576154B2 (ja) * 2004-05-13 2010-11-04 オリンパス株式会社 超音波モータ
EP1684406A1 (de) * 2004-06-07 2006-07-26 Matsushita Electric Industrial Co., Ltd. Stellglied, feinbewegungsmechanismus mit dem stellglied und kameramodul mit dem feinbewegungsmechanismus
JP4689993B2 (ja) * 2004-09-07 2011-06-01 オリンパス株式会社 振動波モータ
RU2286001C2 (ru) * 2004-12-28 2006-10-20 Общество с ограниченной ответственностью ФИРМА "БКМ" Пьезоэлектрический двигатель
US7196453B2 (en) * 2005-05-23 2007-03-27 United States Of America As Represented By The Secretary Of The Army High-efficiency radial piezoelectric motor
US7459834B2 (en) * 2005-06-22 2008-12-02 Qortek, Inc. Solid state gimbal system
EP1753122A1 (de) * 2005-08-12 2007-02-14 Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO Bewegungsplattform für einen Träger mit fünf Freiheitsgraden
JP4838567B2 (ja) * 2005-10-26 2011-12-14 キヤノン株式会社 周波数制御回路、モータ駆動装置、周波数制御方法、モータ駆動装置の制御方法、及び、制御方法をコンピュータに実行させるプログラム
CN101231932B (zh) * 2007-01-22 2012-06-13 Fei公司 用于旋转和平移样品支架的操纵器
US7884326B2 (en) * 2007-01-22 2011-02-08 Fei Company Manipulator for rotating and translating a sample holder
US20090023607A1 (en) * 2007-05-09 2009-01-22 Nanolnk, Inc. Compact nanofabrication apparatus
JP4981547B2 (ja) * 2007-06-28 2012-07-25 オリンパスイメージング株式会社 駆動装置および撮像装置
JP5376780B2 (ja) * 2007-08-08 2013-12-25 株式会社東芝 圧電モータおよびカメラ装置
EP2051280A1 (de) 2007-10-18 2009-04-22 The Regents of the University of California Motorisierter Manipulator zur Positionierung einer TEM-Probe
JP2009097453A (ja) * 2007-10-18 2009-05-07 Denso Corp 内燃機関の制御装置
KR20130054753A (ko) * 2011-11-17 2013-05-27 삼성전자주식회사 동력 전달 조립체
CN105375812A (zh) * 2014-08-13 2016-03-02 精工爱普生株式会社 压电驱动装置及其驱动方法、机器人及其驱动方法
EP3184960B1 (de) 2015-12-22 2018-06-27 Tesa Sa Motorisierter ausrichtbarer kopf für ein messsystem
US10766624B2 (en) * 2016-01-20 2020-09-08 Honeywell International Inc. Algorithm for efficiently breaking a material
CN114512579B (zh) * 2022-02-18 2022-10-11 广东工业大学 一种Mini/micro芯片柔性飞行刺晶装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4621926A (en) * 1985-04-30 1986-11-11 Lasercon Corporation Interferometer system for controlling non-rectilinear movement of an object
US4727278A (en) * 1985-10-04 1988-02-23 Micro Pulse Systems, Inc. Piezoelectric multiaxis micropositioner
EP0347846A2 (de) * 1988-06-20 1989-12-27 Hitachi, Ltd. Antriebssystem
EP0424609A1 (de) * 1989-09-28 1991-05-02 Rockwell International Corporation Piezoelektrischer Antrieb

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3304773A (en) * 1964-03-26 1967-02-21 Vernon L Rogallo Force transducer
SU497551A1 (ru) * 1973-06-26 1975-12-30 Московский институт электронной техники Устройство дл ориентации
SU693493A1 (ru) * 1977-07-18 1979-10-25 Каунасский Политехнический Институт Вибродвигатель
DE3610540A1 (de) * 1986-03-27 1987-10-01 Kernforschungsanlage Juelich Bewegungseinrichtung zur mikrobewegung von objekten
US4798989A (en) * 1986-09-26 1989-01-17 Research Development Corporation Scanning tunneling microscope installed in electron microscope
US5043621A (en) * 1988-09-30 1991-08-27 Rockwell International Corporation Piezoelectric actuator
US5260622A (en) * 1989-03-24 1993-11-09 Topometrix Corporation High resolution electromechanical translation device
JP2805329B2 (ja) * 1989-04-07 1998-09-30 協和化学工業株式会社 難燃性樹脂組成物および難燃剤
CA2039546A1 (en) * 1990-04-27 1991-10-28 Gordon Walter Culp Robotic articulation
US5041753A (en) * 1990-10-11 1991-08-20 The United States Of America As Represented By The Secretary Of The Navy High torque magnetic angular positioning motor
CA2066084A1 (en) * 1991-05-31 1992-12-01 Gordon Walter Culp Twisting actuators
US5182484A (en) * 1991-06-10 1993-01-26 Rockwell International Corporation Releasing linear actuator
CA2081094A1 (en) * 1992-02-18 1993-08-19 Gordon Walter Culp Walking toothed actuator
IL106296A0 (en) * 1993-07-09 1993-12-28 Nanomotion Ltd Ceramic motor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4621926A (en) * 1985-04-30 1986-11-11 Lasercon Corporation Interferometer system for controlling non-rectilinear movement of an object
US4727278A (en) * 1985-10-04 1988-02-23 Micro Pulse Systems, Inc. Piezoelectric multiaxis micropositioner
EP0347846A2 (de) * 1988-06-20 1989-12-27 Hitachi, Ltd. Antriebssystem
EP0424609A1 (de) * 1989-09-28 1991-05-02 Rockwell International Corporation Piezoelektrischer Antrieb

Also Published As

Publication number Publication date
US5696421A (en) 1997-12-09
EP0741420A2 (de) 1996-11-06
IL113291A0 (en) 1995-07-31

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