EP0789146A4 - Microvalve and method of manufacturing the same, micropump using the microvalve and method of manufacturing the same, and apparatus using the micropump - Google Patents

Microvalve and method of manufacturing the same, micropump using the microvalve and method of manufacturing the same, and apparatus using the micropump

Info

Publication number
EP0789146A4
EP0789146A4 EP96925119A EP96925119A EP0789146A4 EP 0789146 A4 EP0789146 A4 EP 0789146A4 EP 96925119 A EP96925119 A EP 96925119A EP 96925119 A EP96925119 A EP 96925119A EP 0789146 A4 EP0789146 A4 EP 0789146A4
Authority
EP
European Patent Office
Prior art keywords
microvalve
micropump
manufacturing
same
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP96925119A
Other languages
German (de)
French (fr)
Other versions
EP0789146A1 (en
EP0789146B1 (en
Inventor
Tsukasa Funasaka
Takayoshi Fujimori
Hajime Miyazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of EP0789146A1 publication Critical patent/EP0789146A1/en
Publication of EP0789146A4 publication Critical patent/EP0789146A4/en
Application granted granted Critical
Publication of EP0789146B1 publication Critical patent/EP0789146B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F04B53/1037—Flap valves
    • F04B53/1047—Flap valves the valve being formed by one or more flexible elements
    • F04B53/106—Flap valves the valve being formed by one or more flexible elements the valve being a membrane
    • F04B53/1067—Flap valves the valve being formed by one or more flexible elements the valve being a membrane fixed at its whole periphery and with an opening at its centre
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0015—Diaphragm or membrane valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0048—Electric operating means therefor using piezoelectric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0094—Micropumps

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Micromachines (AREA)
  • Reciprocating Pumps (AREA)
EP96925119A 1995-07-27 1996-07-29 Microvalve and method of manufacturing the same, micropump using the microvalve and method of manufacturing the same, and apparatus using the micropump Expired - Lifetime EP0789146B1 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP19228595 1995-07-27
JP192285/95 1995-07-27
JP19228595 1995-07-27
PCT/JP1996/002129 WO1997005385A1 (en) 1995-07-27 1996-07-29 Microvalve and method of manufacturing the same, micropump using the microvalve and method of manufacturing the same, and apparatus using the micropump

Publications (3)

Publication Number Publication Date
EP0789146A1 EP0789146A1 (en) 1997-08-13
EP0789146A4 true EP0789146A4 (en) 1998-10-28
EP0789146B1 EP0789146B1 (en) 2002-04-10

Family

ID=16288742

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96925119A Expired - Lifetime EP0789146B1 (en) 1995-07-27 1996-07-29 Microvalve and method of manufacturing the same, micropump using the microvalve and method of manufacturing the same, and apparatus using the micropump

Country Status (4)

Country Link
EP (1) EP0789146B1 (en)
JP (1) JP3726285B2 (en)
DE (1) DE69620569T2 (en)
WO (1) WO1997005385A1 (en)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2301878A1 (en) * 1997-08-20 1999-02-25 Westonbridge International Limited Micro pump comprising an inlet control member for its self-priming
JP3492570B2 (en) * 1999-10-22 2004-02-03 日本碍子株式会社 Micropipette and dispensing device
US6669669B2 (en) * 2001-10-12 2003-12-30 Insulet Corporation Laminated patient infusion device
US6644944B2 (en) 2000-11-06 2003-11-11 Nanostream, Inc. Uni-directional flow microfluidic components
TW561223B (en) * 2001-04-24 2003-11-11 Matsushita Electric Works Ltd Pump and its producing method
US6715733B2 (en) * 2001-08-08 2004-04-06 Agilent Technologies, Inc. High temperature micro-machined valve
US20040188648A1 (en) * 2003-01-15 2004-09-30 California Institute Of Technology Integrated surface-machined micro flow controller method and apparatus
JP4095005B2 (en) * 2003-09-16 2008-06-04 日本碍子株式会社 DNA chip manufacturing method
US7284966B2 (en) * 2003-10-01 2007-10-23 Agency For Science, Technology & Research Micro-pump
FR2952135B1 (en) * 2009-11-04 2013-02-22 Seb Sa METHOD FOR CONTROLLING A PIEZOELECTRIC PUMP OF HOUSEHOLD APPLIANCE AND HOUSEHOLD APPLIANCE IMPLEMENTING SAID METHOD
DE102011108380B4 (en) * 2011-07-22 2016-07-07 Audi Ag Device for venting and ventilating a fuel tank
HUE067982T2 (en) 2012-03-30 2024-12-28 Insulet Corp Fluid delivery device with transcutaneous access tool, insertion mechanism and blood glucose monitoring for use therewith
DE102013201342A1 (en) * 2013-01-29 2014-07-31 Robert Bosch Gmbh Method for producing a normally-closed check valve for microfluidic components made of a polymer layer system and non-return valve
US10363374B2 (en) 2016-05-26 2019-07-30 Insulet Corporation Multi-dose drug delivery device
EP3730169B1 (en) 2016-08-14 2023-08-02 Insulet Corporation Drug delivery device with detection of position of the plunger
WO2018067645A1 (en) 2016-10-07 2018-04-12 Insulet Corporation Multi-stage delivery system
US10780217B2 (en) 2016-11-10 2020-09-22 Insulet Corporation Ratchet drive for on body delivery system
US10603440B2 (en) 2017-01-19 2020-03-31 Insulet Corporation Cartridge hold-up volume reduction
US10695485B2 (en) 2017-03-07 2020-06-30 Insulet Corporation Very high volume user filled drug delivery device
US11428345B2 (en) 2017-07-11 2022-08-30 Microfab Service Gmbh Micro check valve and system with multiple micro check valves and method for the production thereof
EP4375504B1 (en) 2017-08-03 2026-04-15 Insulet Corporation Micro piston pump
US10973978B2 (en) 2017-08-03 2021-04-13 Insulet Corporation Fluid flow regulation arrangements for drug delivery devices
US11786668B2 (en) 2017-09-25 2023-10-17 Insulet Corporation Drug delivery devices, systems, and methods with force transfer elements
US10874803B2 (en) 2018-05-31 2020-12-29 Insulet Corporation Drug cartridge with drive system
US11229736B2 (en) 2018-06-06 2022-01-25 Insulet Corporation Linear shuttle pump for drug delivery
EP3823580B1 (en) 2018-07-17 2024-12-18 Insulet Corporation Semi-rigid and flexible elements for wearable drug delivery device reservoir
AU2019390474B2 (en) 2018-11-28 2023-03-30 Insulet Corporation Drug delivery shuttle pump system and valve assembly
US11369735B2 (en) 2019-11-05 2022-06-28 Insulet Corporation Component positioning of a linear shuttle pump
WO2022119731A2 (en) 2020-12-02 2022-06-09 Insulet Corporation Drug delivery device including reservoir with flexible lining
EP4274640A1 (en) 2021-01-08 2023-11-15 Insulet Corporation Single actuated precision dose intermediate pumping chamber
US12440617B2 (en) 2021-01-11 2025-10-14 Insulet Corporation Linear activated drug dosing pump system
US12594376B2 (en) 2021-05-21 2026-04-07 Insulet Corporation Compact positive displacement pump for wearable drug delivery device
US12359903B2 (en) 2021-05-28 2025-07-15 Insulet Corporation Spring-based status sensors
US12090498B2 (en) 2021-08-19 2024-09-17 Insulet Corporation Low-friction rolling plunger for a wearable drug delivery device
USD1024314S1 (en) 2022-06-01 2024-04-23 Insulet Corporation Automated drug delivery device
US12533461B2 (en) 2022-08-04 2026-01-27 Insulet Corporation Pump mechanism with double reservoir and stationary fluid ports

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0568902A2 (en) * 1992-05-02 1993-11-10 Westonbridge International Limited Micropump avoiding microcavitation
DE4445686A1 (en) * 1994-12-21 1996-06-27 Fraunhofer Ges Forschung Valve arrangement, in particular for pneumatic controls

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH679555A5 (en) * 1989-04-11 1992-03-13 Westonbridge Int Ltd
DE4006152A1 (en) * 1990-02-27 1991-08-29 Fraunhofer Ges Forschung MICROMINIATURIZED PUMP
JPH0466784A (en) * 1990-07-06 1992-03-03 Seiko Epson Corp Micropump and its manufacturing method
WO1993020351A1 (en) * 1992-04-02 1993-10-14 Seiko Epson Corporation Fluid controlling microdevice and method of manufacturing the same

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0568902A2 (en) * 1992-05-02 1993-11-10 Westonbridge International Limited Micropump avoiding microcavitation
DE4445686A1 (en) * 1994-12-21 1996-06-27 Fraunhofer Ges Forschung Valve arrangement, in particular for pneumatic controls

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO9705385A1 *

Also Published As

Publication number Publication date
DE69620569T2 (en) 2002-10-31
EP0789146A1 (en) 1997-08-13
JP3726285B2 (en) 2005-12-14
DE69620569D1 (en) 2002-05-16
EP0789146B1 (en) 2002-04-10
WO1997005385A1 (en) 1997-02-13

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