EP0829645A2 - Pompe turbo-moléculaire - Google Patents

Pompe turbo-moléculaire Download PDF

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Publication number
EP0829645A2
EP0829645A2 EP97306652A EP97306652A EP0829645A2 EP 0829645 A2 EP0829645 A2 EP 0829645A2 EP 97306652 A EP97306652 A EP 97306652A EP 97306652 A EP97306652 A EP 97306652A EP 0829645 A2 EP0829645 A2 EP 0829645A2
Authority
EP
European Patent Office
Prior art keywords
vane
rotor
turbomolecular pump
blades
rotor blade
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP97306652A
Other languages
German (de)
English (en)
Other versions
EP0829645A3 (fr
Inventor
Yasushi Maejima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Seiki KK
Original Assignee
Seiko Seiki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Seiki KK filed Critical Seiko Seiki KK
Publication of EP0829645A2 publication Critical patent/EP0829645A2/fr
Publication of EP0829645A3 publication Critical patent/EP0829645A3/fr
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Definitions

  • the present invention relates to a turbomolecular pump used as a vacuum device such as for semiconductor manufacturing equipment and for an electron microscope.
  • rotor blades installed to a rotor shaft rotating at a high speed and stator blades fixed to a casing are arranged alternately, and a plurality of stages of pairs of rotor blade and stator blade are provided, by which an exhaust stage, intermediate stage, and compression stage are formed to effect exhaust and compression of gas in a molecular flow region.
  • a rotor blade 1 is, as shown in FIG. 7, made up of a ring-shaped ring portion la and a plurality of flat plate shaped vanes 1b provided radially on the outer peripheral surface of the ring portion la. As shown in FIG. 7, each of vanes 1b is tilted at a predetermined angle with respect to a rotation axis R, and the thickness thereof is substantially uniform.
  • FIG. 8 is a partial plan view of the rotor blade 1
  • FIG. 9 is a sectional view at each position in the lengthwise direction of the vane 1b.
  • the cross section thereof is in a flat plate shape as shown in FIG. 9.
  • the rotor blade is rotated by the rotation of the rotor shaft, and the vane of the rotor blade moves gas molecules by hitting them in the rotation direction, by which exhaust is effected.
  • an object of the present invention is to provide a turbomolecular pump which achieves an improvement in exhaust performance and a reduction in load of the rotation generating source for rotating the rotor blades.
  • the present invention provides a turbomolecular pump comprising:
  • each vane 144b of a rotor blade 144 is curved in the width direction so as to be convex to the rear side with respect to the rotation direction of the vane 144b.
  • each vane 144b of the rotor blade 144 forming the compression stage has a rounded leading edge, and the surface roughness of the surface of each vane 144b is improved, by which the above-mentioned effects are further achieved.
  • FIG. 1 is a sectional view showing the general configuration of a turbomolecular pump in accordance with a first embodiment of the present invention.
  • FIG. 2 is a partial plan view of a rotor blade at a compression stage of the turbomolecular pump.
  • FIG. 3 is a sectional view of each position of a vane of the rotor blade.
  • a turbomolecular pump 10 of this first embodiment comprises a substantially columnar rotor shaft 12, a rotor blade portion 14 installed to the rotor shaft 12, a stator blade portion 18 fixed to the inner periphery of a substantially cylindrical casing 16, a bearing 20 for supporting the rotor shaft 12 by a magnetic force, and a motor 21 for giving a torque to the rotor shaft 12.
  • the rotor blade portion 14 is made up of four types of rotor blades 141, 142, 143, and 144
  • the stator blade portion 18 is made up of four types of stator blades 181, 182, 183, and 184 corresponding to the rotor blades 141, 142, 143, and 144, respectively.
  • the rotor blades 141 to 144 and the corresponding stator blades 181 to 184 are arranged alternately in the vertical direction with some gap lying therebetween.
  • an exhaust stage is formed by the rotor blade 141 and the stator blade 181
  • an intermediate stage is formed by the rotor blades 142 and 143 and the stator blades 182 and 183
  • a compression stage is formed by the rotor blade 144 and the stator blade 184.
  • vanes are provided more densely than the vanes of other portions to prevent the back flow of gas from an outlet port 39.
  • the rotor blade 141, 142, 143 is, like the rotor blade 1 shown in FIG. 7, made up of a ring-shaped ring portion and a plurality of flat plate shaped vanes provided radially on the outer peripheral surface of the ring portion.
  • the size and tilt angle of the vane differ among the rotor blades 141, 142, and 143.
  • the stator blade 181, 182, 183 has vanes similar to those of the rotor blade 141, 142, 143, and the tilt direction of each vane is reverse to the tilt direction of vane of the rotor blade 141, 142, 143.
  • the rotor blade 144 is made up of a ring-shaped ring portion 144a and a plurality of vanes 144b provided radially on the outer peripheral surface of the ring portion 144a.
  • each vane 144b is tilted at a predetermined angle with respect to a rotation axis and curved in the width direction so as to be convex to the rear side with respect to the rotation direction of the vane 144b.
  • each vane 144b has a rounded leading edge 144b-1 and improved surface roughness of a surface 144b-2 on the rear side with respect to the vane rotation direction.
  • the stator blade 184 has the same construction as that of the stator blades 181, 182, and 183.
  • the aforesaid bearing 20 comprises radial electromagnets 22 and 24 and an axial electromagnet 26 for producing a magnetic force in the radial direction with respect to the rotor shaft 12 and a magnetic force in the axial direction, respectively, radial sensors 30 and 32 and an axial sensor 34 for detecting the radial and axial positions of the rotor shaft 12, respectively, and a controller 36 for feedback controlling exciting current of the radial electromagnets 22 and 24 and the axial electromagnet 26 on the basis of the detection signals of the radial sensors 30 and 32 and the axial sensor 34, respectively.
  • the rotor shaft 12 When the turbomolecular pump 10 of this embodiment is driven, the rotor shaft 12 is kept at a predetermined floating position in a non-contact state by the bearing 20 and in this state, the rotor shaft 12 is rotated by the drive of the motor 21.
  • gas molecules move toward the outlet port 39 by being hit by the vanes of the rotor blades 141, 142, and 143 because the gas flow can be handled as a molecular flow.
  • the gas density is high as compared with the exhaust and intermediate stages, so that the gas flow cannot be handled as a molecular flow.
  • each blade 144b of the rotor blade 144 forming the compression stage is curved in the width direction so as to be convex to the rear side with respect to the rotation direction of the vane 144b as shown in FIG. 3. Therefore, when each vane 144b is rotated by the rotation of the rotor blade 144, gas flows along the plate surface without separation at the periphery of each vane 144b, so that the upper side gas can be moved to the lower side, thereby improving the exhaust performance.
  • each vane 144b has a rounded leading edge 144b-1 and improved surface roughness of the surface 144b-2, so that the exhaust performance is further improved.
  • the rotor blade 144 in accordance with the first embodiment is replaced by a rotor blade 145 as shown in FIGS. 5 and 6.
  • the rotor blade 145 is made up of a ring-shaped ring portion 145a and a plurality of vanes 145b provided radially on the outer peripheral surface of the ring portion 145a as shown in FIG. 5.
  • each vane 145b is tilted at a predetermined angle with respect to a rotation axis and curved in the width direction so as to be convex to the rear side with respect to the rotation direction of the vane 145b, and additionally each vane 145b is twisted in the lengthwise direction.
  • the vane of the rotor blade is curved in the width direction so as to be convex to the rear side with respect to the vane rotation direction, so that the improvement in exhaust performance and the reduction in load applied to the rotation generating source for rotor blade can be achieved.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP97306652A 1996-09-12 1997-08-29 Pompe turbo-moléculaire Withdrawn EP0829645A3 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP263523/96 1996-09-12
JP26352396A JPH1089284A (ja) 1996-09-12 1996-09-12 ターボ分子ポンプ

Publications (2)

Publication Number Publication Date
EP0829645A2 true EP0829645A2 (fr) 1998-03-18
EP0829645A3 EP0829645A3 (fr) 1998-11-11

Family

ID=17390728

Family Applications (1)

Application Number Title Priority Date Filing Date
EP97306652A Withdrawn EP0829645A3 (fr) 1996-09-12 1997-08-29 Pompe turbo-moléculaire

Country Status (2)

Country Link
EP (1) EP0829645A3 (fr)
JP (1) JPH1089284A (fr)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1004775A3 (fr) * 1998-11-24 2001-02-07 Seiko Seiki Kabushiki Kaisha Pompe turbomoléculair et appareil à vide
EP0965761A3 (fr) * 1998-06-17 2001-04-11 Seiko Seiki Kabushiki Kaisha Pompe turbo-moléculaire
EP1041287A3 (fr) * 1999-03-31 2002-01-16 Seiko Seiki Kabushiki Kaisha Pompe à vide
WO2002059483A1 (fr) * 2001-01-25 2002-08-01 Leybold Vakuum Gmbh Pompe a vide turbomoleculaire comprenant des ailettes de rotor et des ailettes de stator
US8668436B2 (en) 2008-02-15 2014-03-11 Shimadzu Corporation Turbomolecular pump
US11480182B2 (en) * 2018-08-08 2022-10-25 Edwards Japan Limited Vacuum pump, cylindrical portion used in vacuum pump, and base portion

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5141684B2 (ja) * 2007-04-23 2013-02-13 株式会社島津製作所 ターボ分子ポンプ
KR101647879B1 (ko) * 2014-04-15 2016-08-12 한밭대학교 산학협력단 터보분자식 수증기 압축장치
EP3091235B1 (fr) * 2015-05-04 2020-03-11 Pfeiffer Vacuum Gmbh Disque de rotor
JP7052752B2 (ja) * 2019-01-30 2022-04-12 株式会社島津製作所 ターボ分子ポンプ

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB580806A (en) * 1941-05-21 1946-09-20 Alan Arnold Griffith Improvements in compressor, turbine and like blades
FR1306013A (fr) * 1961-08-04 1962-10-13 Snecma Perfectionnements aux pompes à vide turbomoléculaires
DE2229724B2 (de) * 1972-06-19 1980-06-04 Leybold-Heraeus Gmbh, 5000 Koeln Turbomolekularpumpe
DE7237362U (de) * 1972-10-12 1973-01-11 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe
SU1252552A1 (ru) * 1984-06-01 1986-08-23 Научно-исследовательский институт прикладной математики и кибернетики при Горьковском государственном университете им.Н.И.Лобачевского Ротор радиального турбомолекул рного вакуумного насоса
DE3507274A1 (de) * 1985-03-01 1986-09-04 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Scheiben mit schaufeln hoher stabilitaet fuer turbomolekularpumpen
WO1994007033A1 (fr) * 1992-09-23 1994-03-31 United States Of America As Represented By The Secretary Of The Air Force Soufflante turbomoleculaire

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0965761A3 (fr) * 1998-06-17 2001-04-11 Seiko Seiki Kabushiki Kaisha Pompe turbo-moléculaire
US6474940B1 (en) 1998-06-17 2002-11-05 Seiko Instruments Inc. Turbo molecular pump
EP1004775A3 (fr) * 1998-11-24 2001-02-07 Seiko Seiki Kabushiki Kaisha Pompe turbomoléculair et appareil à vide
US6499942B1 (en) 1998-11-24 2002-12-31 Seiko Instruments Inc. Turbomolecular pump and vacuum apparatus
EP1041287A3 (fr) * 1999-03-31 2002-01-16 Seiko Seiki Kabushiki Kaisha Pompe à vide
WO2002059483A1 (fr) * 2001-01-25 2002-08-01 Leybold Vakuum Gmbh Pompe a vide turbomoleculaire comprenant des ailettes de rotor et des ailettes de stator
US6910861B2 (en) 2001-01-25 2005-06-28 Leybold Vakuum Gmbh Turbomolecular vacuum pump with the rotor and stator vanes
US8668436B2 (en) 2008-02-15 2014-03-11 Shimadzu Corporation Turbomolecular pump
US11480182B2 (en) * 2018-08-08 2022-10-25 Edwards Japan Limited Vacuum pump, cylindrical portion used in vacuum pump, and base portion

Also Published As

Publication number Publication date
EP0829645A3 (fr) 1998-11-11
JPH1089284A (ja) 1998-04-07

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