EP0829649A3 - Structure de clapet de soupape precontrainte pour une microsoupape - Google Patents

Structure de clapet de soupape precontrainte pour une microsoupape Download PDF

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Publication number
EP0829649A3
EP0829649A3 EP97113980A EP97113980A EP0829649A3 EP 0829649 A3 EP0829649 A3 EP 0829649A3 EP 97113980 A EP97113980 A EP 97113980A EP 97113980 A EP97113980 A EP 97113980A EP 0829649 A3 EP0829649 A3 EP 0829649A3
Authority
EP
European Patent Office
Prior art keywords
support structure
valve
valve flap
passage opening
flap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP97113980A
Other languages
German (de)
English (en)
Other versions
EP0829649A2 (fr
EP0829649B1 (fr
Inventor
Martin Dipl.-Phys. Richter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Publication of EP0829649A2 publication Critical patent/EP0829649A2/fr
Publication of EP0829649A3 publication Critical patent/EP0829649A3/fr
Application granted granted Critical
Publication of EP0829649B1 publication Critical patent/EP0829649B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C3/00—Circuit elements having moving parts
    • F15C3/08—Circuit elements having moving parts using reeds
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Electrostatic Spraying Apparatus (AREA)
EP97113980A 1996-09-17 1997-08-13 Structure de clapet de soupape precontrainte pour une microsoupape Expired - Lifetime EP0829649B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19637878 1996-09-17
DE19637878A DE19637878C2 (de) 1996-09-17 1996-09-17 Mikroventil mit vorgespannter Ventilklappenstruktur

Publications (3)

Publication Number Publication Date
EP0829649A2 EP0829649A2 (fr) 1998-03-18
EP0829649A3 true EP0829649A3 (fr) 1998-11-04
EP0829649B1 EP0829649B1 (fr) 2002-10-09

Family

ID=7805898

Family Applications (1)

Application Number Title Priority Date Filing Date
EP97113980A Expired - Lifetime EP0829649B1 (fr) 1996-09-17 1997-08-13 Structure de clapet de soupape precontrainte pour une microsoupape

Country Status (2)

Country Link
EP (1) EP0829649B1 (fr)
DE (2) DE19637878C2 (fr)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU6356600A (en) * 1999-07-30 2001-02-19 Procter & Gamble Company, The Microvalve for controlling fluid flow
US6887615B1 (en) 1999-07-30 2005-05-03 The Procter & Gamble Company Microvalve for controlling fluid flow
US6962170B1 (en) 1999-07-30 2005-11-08 The Procter & Gamble Company Microvalve for controlling fluid flow
US6590267B1 (en) * 2000-09-14 2003-07-08 Mcnc Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods
DE20116898U1 (de) 2001-10-15 2002-01-17 FESTO AG & Co., 73734 Esslingen Mikroventil
FR2834324B1 (fr) * 2001-12-31 2007-04-13 Bosch Gmbh Robert Valve a commande electrique, membrane comportant de telles valves et servomoteur d'assistance de freinage comportant une telle membrane
DE10243997B4 (de) * 2002-09-21 2005-05-25 Festo Ag & Co. Mikroventil in Mehrschichtaufbau
US7195026B2 (en) 2002-12-27 2007-03-27 American Air Liquide, Inc. Micro electromechanical systems for delivering high purity fluids in a chemical delivery system
DE502004006313D1 (de) * 2004-03-10 2008-04-10 Festo Ag & Co Pneumatisches Mikroventil
EP1789707A2 (fr) 2004-07-23 2007-05-30 AFA Controls, LLC Procede pour faire fonctionner des ensembles de microvannes et structures et dispositifs correspondants
FR2892485B1 (fr) * 2005-10-21 2008-01-04 Aldes Aeraulique Sa Dispositif pour regulation et etancheite sur un orifice qui est soit obture, soit ouvert selon les besoins
DE102007034117B4 (de) * 2007-07-21 2011-03-10 Ab Skf Schmiervorrichtung
DE102007034116B4 (de) * 2007-07-21 2009-10-22 Ab Skf Vorrichtung

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4231287A (en) * 1978-05-01 1980-11-04 Physics International Company Spring diaphragm
WO1992022763A1 (fr) * 1991-06-18 1992-12-23 Danfoss A/S Dispositif d'actionnement miniature
US5176358A (en) * 1991-08-08 1993-01-05 Honeywell Inc. Microstructure gas valve control
CH684209A5 (fr) * 1990-11-20 1994-07-29 Westonbridge Int Ltd Clapet intégré et micropompe comprenant un tel clapet.
DE29603364U1 (de) * 1996-02-27 1996-04-18 Forschungszentrum Karlsruhe GmbH, 76133 Karlsruhe Mikroventil

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4585209A (en) * 1983-10-27 1986-04-29 Harry E. Aine Miniature valve and method of making same
US5050838A (en) * 1990-07-31 1991-09-24 Hewlett-Packard Company Control valve utilizing mechanical beam buckling

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4231287A (en) * 1978-05-01 1980-11-04 Physics International Company Spring diaphragm
CH684209A5 (fr) * 1990-11-20 1994-07-29 Westonbridge Int Ltd Clapet intégré et micropompe comprenant un tel clapet.
WO1992022763A1 (fr) * 1991-06-18 1992-12-23 Danfoss A/S Dispositif d'actionnement miniature
US5176358A (en) * 1991-08-08 1993-01-05 Honeywell Inc. Microstructure gas valve control
DE29603364U1 (de) * 1996-02-27 1996-04-18 Forschungszentrum Karlsruhe GmbH, 76133 Karlsruhe Mikroventil

Also Published As

Publication number Publication date
DE19637878C2 (de) 1998-08-06
EP0829649A2 (fr) 1998-03-18
DE59708427D1 (de) 2002-11-14
EP0829649B1 (fr) 2002-10-09
DE19637878A1 (de) 1998-04-02

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