EP0836719A4 - System and method for on-site mixing of ultra-high-purity chemicals for semiconductor processing - Google Patents

System and method for on-site mixing of ultra-high-purity chemicals for semiconductor processing

Info

Publication number: EP0836719A4
Authority: EP; European Patent Office
Prior art keywords: ultra; semiconductor processing; purity chemicals; site mixing; site
Prior art date: 1995-06-05
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Ceased

Application number

EP96919439A

Other languages

German (de)

French (fr)

Other versions

EP0836719A1 (en

Inventor

Joe G Hoffman

R Scot Clark

Allen H Jones Jr

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Air Liquide America Corp

Original Assignee

Startec Ventures Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1995-06-05

Filing date

1996-06-05

Publication date

1999-08-18

1995-06-05 Priority claimed from PCT/US1995/007649 external-priority patent/WO1996039358A1/en

1996-06-05 Application filed by Startec Ventures Inc filed Critical Startec Ventures Inc

1996-06-05 Priority claimed from PCT/US1996/010389 external-priority patent/WO1996039651A1/en

1998-04-22 Publication of EP0836719A1 publication Critical patent/EP0836719A1/en

1999-08-18 Publication of EP0836719A4 publication Critical patent/EP0836719A4/en

Status Ceased legal-status Critical Current

Links

238000000034 method Methods 0.000 title 1
239000004065 semiconductor Substances 0.000 title 1
239000000126 substance Substances 0.000 title 1

EP96919439A 1995-06-05 1996-06-05 System and method for on-site mixing of ultra-high-purity chemicals for semiconductor processing Ceased EP0836719A4 (en)

Applications Claiming Priority (9)

Application Number	Priority Date	Filing Date	Title
PCT/US1995/007649 WO1996039358A1 (en)	1995-06-05	1995-06-05	Point-of-use ammonia purification for electronic component manufacture
WOPCT/US95/07649		1995-06-06
US49956295A	1995-07-07	1995-07-07
US1810495P	1995-07-07	1995-07-07
US499562		1995-07-07
US1782896P	1996-03-08	1996-03-08
US61272996A	1996-03-08	1996-03-08
PCT/US1996/010389 WO1996039651A1 (en)	1995-06-05	1996-06-05	System and method for on-site mixing of ultra-high-purity chemicals for semiconductor processing
US612729		2003-07-02

Publications (2)

Publication Number	Publication Date
EP0836719A1 EP0836719A1 (en)	1998-04-22
EP0836719A4 true EP0836719A4 (en)	1999-08-18

Family

ID=27486686

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP96919439A Ceased EP0836719A4 (en)	1995-06-05	1996-06-05	System and method for on-site mixing of ultra-high-purity chemicals for semiconductor processing

Country Status (1)

Country	Link
EP (1)	EP0836719A4 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4091834A (en) *	1975-11-14	1978-05-30	Sandoz Ltd.	Apparatus for automatically preparing solution of controlled concentration
WO1992016306A2 (en) *	1991-03-19	1992-10-01	Startec Ventures, Inc.	Manufacture of high precision electronic components with ultra-high purity liquids

1996
- 1996-06-05 EP EP96919439A patent/EP0836719A4/en not_active Ceased

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4091834A (en) *	1975-11-14	1978-05-30	Sandoz Ltd.	Apparatus for automatically preparing solution of controlled concentration
WO1992016306A2 (en) *	1991-03-19	1992-10-01	Startec Ventures, Inc.	Manufacture of high precision electronic components with ultra-high purity liquids

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO9639651A1 *

Also Published As

Publication number	Publication date
EP0836719A1 (en)	1998-04-22

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Legal Events

Date	Code	Title	Description
1998-03-06	PUAI	Public reference made under article 153(3) epc to a published international application that has entered the european phase	Free format text: ORIGINAL CODE: 0009012
1998-04-22	17P	Request for examination filed	Effective date: 19980102
1998-04-22	AK	Designated contracting states	Kind code of ref document: A1 Designated state(s): DE FR GB IT NL
1999-06-09	RAP1	Party data changed (applicant data changed or rights of an application transferred)	Owner name: AIR LIQUIDE AMERICA CORPORATION
1999-08-18	A4	Supplementary search report drawn up and despatched	Effective date: 19990702
1999-08-18	AK	Designated contracting states	Kind code of ref document: A4 Designated state(s): DE FR GB IT NL
1999-08-18	RIC1	Information provided on ipc code assigned before grant	Free format text: 6G 05D 11/13 A, 6B 01F 15/04 B, 6H 01L 21/00 B, 6C 01C 1/02 B, 6C 01B 7/19 B, 6C 01B 21/38 B
2000-07-05	17Q	First examination report despatched	Effective date: 20000517
2002-06-19	GRAG	Despatch of communication of intention to grant	Free format text: ORIGINAL CODE: EPIDOS AGRA
2003-03-21	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: THE APPLICATION HAS BEEN REFUSED
2003-05-07	18R	Application refused	Effective date: 20021216