EP0837751A1 - Installation pour la fermeture automatisee et hermetique de boitiers - Google Patents

Installation pour la fermeture automatisee et hermetique de boitiers

Info

Publication number
EP0837751A1
EP0837751A1 EP96921811A EP96921811A EP0837751A1 EP 0837751 A1 EP0837751 A1 EP 0837751A1 EP 96921811 A EP96921811 A EP 96921811A EP 96921811 A EP96921811 A EP 96921811A EP 0837751 A1 EP0837751 A1 EP 0837751A1
Authority
EP
European Patent Office
Prior art keywords
welding
chamber
welding chamber
plant according
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP96921811A
Other languages
German (de)
English (en)
Inventor
Gerhard Zeindl
Frowald Angerer
Karl Schweitzer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Datacon Semiconductor Equipment GmbH
Original Assignee
Datacon Schweitzer and Zeindl GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Datacon Schweitzer and Zeindl GmbH filed Critical Datacon Schweitzer and Zeindl GmbH
Publication of EP0837751A1 publication Critical patent/EP0837751A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K11/00—Resistance welding; Severing by resistance heating
    • B23K11/002—Resistance welding; Severing by resistance heating specially adapted for particular articles or work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/36—Electric or electronic devices
    • B23K2101/40—Semiconductor devices

Definitions

  • the invention relates to a system for the automated, hermetic sealing of housings, preferably metal housings, in which electronic components, in particular in an oxygen and steam-free atmosphere, are arranged, optionally with a welding chamber operated with nitrogen overpressure or underpressure, which has at least one with two to one another Movable electrodes trained welding head and corresponding feed and discharge devices for the housing to and from the welding head.
  • Such systems are mainly used in the manufacture of electronic components.
  • each of these drives also has disadvantages.
  • the pneumatic drive is flexible in the opening travel and pressure setting, the opening and closing times are extremely long.
  • the eccentric drive has a high closing speed, but is extremely inflexible in its movement.
  • the object of the invention is to provide a system which avoids the disadvantages mentioned above and which also ensures a higher quality in production.
  • a quality standard for such systems is that a hermetic sealing of the housing is possible, the interior of the housing should be absolutely free of oxygen and water vapor.
  • the system according to the invention cited at the beginning is characterized in that the welding chamber can be evacuated and the welding head has at least one electrode which can be moved via a servo drive.
  • the servo drive allows a high cycle frequency in the production line.
  • the welding chamber is sealed and evacuated, with this evacuation being carried out in an average of 15 minutes. All atmospheric gases are extracted and then the welding chamber is filled with inert gas. The system is ready for operation again in no time.
  • the welding chamber is connected to a gas drying circuit.
  • This gas drying circuit essentially consists of two drying cartridges which contain a gas drying agent and each drying cartridge is connected separately to the welding chamber. A cartridge dries the inert gas from the welding chamber in operation. In the other cartridge, the moisture absorbed is extracted from the drying agent via vacuum and temperature. Through this alternating procedure, the operability of the system is always guaranteed.
  • the welding space located in the welding head which surrounds the housing provided for welding, can be evacuated when the electrodes are closed. In order to obtain an even higher freedom from gas in the interior of the housing to be closed, evacuation is carried out shortly before welding in the welding head with the electrodes closed. Vacuum values of the order of 10 torr can be achieved.
  • At least one electrode of the welding head has a channel for evacuation and a sealing ring for sealing off the second electrode.
  • the procedure in the welding head is as follows: After inserting the housing into an electrode, the second electrode is closed until the O-ring seals. After a few seconds of evacuation, the electrodes are closed on the welding position. After the welding process, the electrodes are opened and the housing is removed using the ejector.
  • the simple evacuation facility has resulted in a significant improvement in quality.
  • the drying chamber is preceded by a drying oven and optionally a subsequent prechamber for the intermediate storage of the housing to be closed, the
  • Entry opening into the welding chamber can be closed by a lock flap.
  • the lock flap ensures that the welding chamber operates properly.
  • the housings coming out of the drying oven must no longer come into contact with the environmental atmosphere. This means that housings that are delivered from the drying oven can also be used for service work in the
  • Welding chamber are upstream. In addition, only the welding chamber has to be evacuated through the lock flap after the service work.
  • an outlet lock chamber which can be both evacuated and flushed with inert gas, and the inlet and outlet openings of which each have a lock flap are reproduced in the welding chamber is lockable.
  • the exit lock chamber 8 with its two lock flaps is of particular advantage.
  • helium gas is added to the nitrogen for operating the welding chamber.
  • This added helium gas is an indicator of the welding quality. If a housing leaks after the welding process, the gas flows out and is detected by a sensor.
  • a quick method for quality control is preferably provided for random samples.
  • the servo drive consists of an electronically controlled electric motor that drives a spindle, preferably a ball screw. This simple drive for closing and opening the electrode has proven its worth. Above all through the adjustability of the
  • the electrode is preferably supported vertically by a spring assembly. This resilient
  • the purpose of the support is that during the actual welding process, the flanging of the housing becomes practically zero, and the electrode has to be moved to a minimum in order to enable an optimal closure.
  • the sealing necessary for the evacuation takes place on the rotating spindle part.
  • Such a seal is to be carried out with conventional machine components, a high level of operational safety being guaranteed.
  • FIG. 1 shows the schematic structure of the Complete system
  • FIG. 2 the welding head with the servo drive
  • FIG. 3 an evacuable electrode
  • FIG. 4 the movement sequence during welding.
  • the system for closing the metal housing consists of several chambers.
  • the core of this system is the welding chamber 1, in which the welding head 2 is also arranged
  • the welding chamber 1 Since electronic components are provided in the metal housings, these metal housings must be sealed in an atmosphere free of oxygen and water vapor. In order for this atmosphere to exist, the welding chamber 1 is operated in operation with a nitrogen overpressure, possibly also with a negative pressure.
  • the welding head 2, which will be described later consists of electrodes that can be moved towards each other. Since these electrodes have to be serviced at regular intervals, the welding chamber 1 must be opened forcibly. In order to achieve a clean atmosphere in the welding chamber 1 for the welding after this maintenance work, the welding chamber 1 can be evacuated. The welding chamber is sealed tightly after the service or maintenance work and evacuated The atmospheric gases are extracted and then the welding chamber 1 is optionally filled with inert gas so that it is ready for operation again in the shortest possible time
  • a drying oven 3 and a pre-chamber 4 are pre-built for the welding chamber 1.
  • the welding chamber 1 also has an exit lock chamber 5. It is certainly extremely important with this system. that at least the openings of the welding chamber 1, i.e. the inlet opening from the pre-chamber 4 into the welding chamber 1 and also the opening from the welding chamber 1 into the outlet lock chamber 5, can be closed by means of lock flaps 6, 7.
  • the connection opening from drying oven 3 to prechamber 4 is provided with a connecting lock 9
  • the metal housings provided with the electronic components are dried in the drying oven 3, temporarily stored in the antechamber 4, sealed in the welding chamber 1 and discharged via the exit lock chamber 5.
  • the welding chamber 1 is connected to a gas drying circuit.
  • the welding head 2 has a servo drive 11 for moving the electrode 10.
  • a servo drive 11 for moving the electrode 10.
  • the housing 12 of the welding head 2 is a servo drive 11 for moving the electrode 10.
  • the spindle 14 is provided with a spindle nut 16, which in turn moves the electrode 10 via at least two bolts 17.
  • the bolts 17 have a suspension 19.
  • the suspension 18 can also be a spring assembly
  • the welding head 2 is closed shortly before the welding
  • the metal housing 20 to be welded lies in a corresponding recess in the lower electrodes.
  • the upper electrode 10a has a sealing ring 21 for sealing off the second electrode 10b. After the electrodes 10a, 10b have been closed and before welding, evacuation is carried out; this additional evacuation has brought about a clear improvement in quality.
  • Diagram 4 the sequence of movements in the course of the welding process is shown over time.
  • Diagram a shows the build-up of force during the welding process
  • diagram b the spring travel of the suspension 18
  • diagram c the movement of the electrode 10a
  • diagram d the movement sequence of the servo drive
  • diagram me the summation of the movement sequences or the speed of the overall system.
  • the servo drive is started at maximum speed up to the first point of contact with the element to be welded. Shortly before reaching the touchdown point
  • the electrode is returned to the starting position at maximum speed (diagram e position 34).

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Resistance Welding (AREA)

Abstract

L'objectif de l'invention est la création d'une installation garantissant une qualité supérieure de fabrication. Selon un des critères de qualité relatifs à de telles installations, on doit pouvoir fermer les boîtiers de façon hermétique, l'intérieur desdits boîtiers devant être absolument exempt d'oxygène et de vapeur d'eau. L'installation selon l'invention se caractérise en ce qu'il est possible de faire de vide dans la chambre de soudage (1) et en ce que la tête de soudage (2) est pourvue d'au moins une électrode pouvant être déplacée au moyen d'un dispositif d'entraînement assisté. Grâce à l'invention, il est pour la première fois possible d'exécuter des travaux d'entretien, tels que le remplacement régulier des électrodes, en un temps le plus court possible. En outre, le dispositif d'entraînement assisté permet, de part ses temps de fermeture courts, l'obtention d'une fréquence élémentaire élevée dans la ligne de production. Ainsi, après les travaux d'entretien ou de maintenance, on ferme la chambre de soudage (1) hermétiquement et on y fait le vide, cette dernière opération prenant en moyenne 15 minutes. Tous les gaz atmosphériques sont aspirés, puis la chambre de soudage (1) est remplie avec un gaz inerte. L'installation est remise à l'état opérationnel en un temps le plus court possible.
EP96921811A 1995-07-11 1996-07-11 Installation pour la fermeture automatisee et hermetique de boitiers Withdrawn EP0837751A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
AT1170/95 1995-07-11
AT0117095A AT402617B (de) 1995-07-11 1995-07-11 Anlage zum automatisierten, hermetischen anlage zum automatisierten, hermetischen verschliessen von gehäusen verschliessen von gehäusen
PCT/AT1996/000121 WO1997002920A1 (fr) 1995-07-11 1996-07-11 Installation pour la fermeture automatisee et hermetique de boitiers

Publications (1)

Publication Number Publication Date
EP0837751A1 true EP0837751A1 (fr) 1998-04-29

Family

ID=3508128

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96921811A Withdrawn EP0837751A1 (fr) 1995-07-11 1996-07-11 Installation pour la fermeture automatisee et hermetique de boitiers

Country Status (4)

Country Link
EP (1) EP0837751A1 (fr)
AT (1) AT402617B (fr)
AU (1) AU6293096A (fr)
WO (1) WO1997002920A1 (fr)

Families Citing this family (45)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2382814T3 (es) 2005-05-17 2012-06-13 Merck Sharp & Dohme Ltd. Ácido cis-4-[(4-clorofenil)sulfonil]-4-(2,5-difluorofenil)ciclohexanopropanoico para el tratamiento del cáncer
TWI387592B (zh) 2005-08-30 2013-03-01 Novartis Ag 經取代之苯并咪唑及其作為與腫瘤形成相關激酶之抑制劑之方法
GB0603041D0 (en) 2006-02-15 2006-03-29 Angeletti P Ist Richerche Bio Therapeutic compounds
CA2649288C (fr) 2006-04-19 2015-11-24 Novartis Ag Composes a base de benzoxazole et de benzothiazole 6-0 substitues et procedes d'inhibition de signalisation csf-1r
US8173629B2 (en) 2006-09-22 2012-05-08 Merck Sharp & Dohme Corp. Method of treatment using fatty acid synthesis inhibitors
JP4611444B2 (ja) 2007-01-10 2011-01-12 イステイチユート・デイ・リチエルケ・デイ・ビオロジア・モレコラーレ・ピ・アンジエレツテイ・エツセ・ピー・アー ポリ（ａｄｐ−リボース）ポリメラーゼ（ｐａｒｐ）阻害剤としてのアミド置換インダゾール
CA2679659C (fr) 2007-03-01 2016-01-19 Novartis Ag Inhibiteurs de pim kinase et procedes de leur utilisation
AU2008254425A1 (en) 2007-05-21 2008-11-27 Novartis Ag CSF-1R inhibitors, compositions, and methods of use
AU2008269154B2 (en) 2007-06-27 2014-06-12 Merck Sharp & Dohme Llc 4-carboxybenzylamino derivatives as histone deacetylase inhibitors
WO2010114780A1 (fr) 2009-04-01 2010-10-07 Merck Sharp & Dohme Corp. Inhibiteurs de l'activité akt
US8765747B2 (en) 2009-06-12 2014-07-01 Dana-Farber Cancer Institute, Inc. Fused 2-aminothiazole compounds
PE20121172A1 (es) 2009-10-14 2012-09-05 Merck Sharp & Dohme Piperidinas sustituidas con actividad en la hdm2
US8987275B2 (en) 2010-03-16 2015-03-24 Dana-Farber Cancer Institute, Inc. Indazole compounds and their uses
WO2011163330A1 (fr) 2010-06-24 2011-12-29 Merck Sharp & Dohme Corp. Nouveaux composés hétérocycliques utilisés comme inhibiteurs de erk
EP3330377A1 (fr) 2010-08-02 2018-06-06 Sirna Therapeutics, Inc. Inhibition à médiation par interférence arn de caténine (protéine associée à cadhérine), expression du gène bêta 1 (ctnnb1) à l'aide de petit acide nucléique interférent (sian)
US9029341B2 (en) 2010-08-17 2015-05-12 Sirna Therapeutics, Inc. RNA interference mediated inhibition of hepatitis B virus (HBV) gene expression using short interfering nucleic acid (siNA)
US8883801B2 (en) 2010-08-23 2014-11-11 Merck Sharp & Dohme Corp. Substituted pyrazolo[1,5-a]pyrimidines as mTOR inhibitors
EP2613782B1 (fr) 2010-09-01 2016-11-02 Merck Sharp & Dohme Corp. Dérivés d'indazole utilisables en tant qu'inhibiteurs de la voie erk
US9242981B2 (en) 2010-09-16 2016-01-26 Merck Sharp & Dohme Corp. Fused pyrazole derivatives as novel ERK inhibitors
WO2012058210A1 (fr) 2010-10-29 2012-05-03 Merck Sharp & Dohme Corp. INHIBITION FACILITÉE PAR L'INTERFÉRENCE D'ARN DE L'EXPRESSION D'UN GÈNE AU MOYEN D'ACIDES NUCLÉIQUES INTERFÉRENTS COURTS (siNA)
WO2012087772A1 (fr) 2010-12-21 2012-06-28 Schering Corporation Dérivés d'indazole utiles en tant qu'inhibiteurs de erk
AU2012245971A1 (en) 2011-04-21 2013-10-17 Piramal Enterprises Limited A crystalline form of a salt of a morpholino sulfonyl indole derivative and a process for its preparation
EP2770987B1 (fr) 2011-10-27 2018-04-04 Merck Sharp & Dohme Corp. Nouveaux composés qui sont des inhibiteurs d'erk
US20150299696A1 (en) 2012-05-02 2015-10-22 Sirna Therapeutics, Inc. SHORT INTERFERING NUCLEIC ACID (siNA) COMPOSITIONS
RU2660429C2 (ru) 2012-09-28 2018-07-06 Мерк Шарп И Доум Корп. Новые соединения, которые являются ингибиторами erk
USRE48175E1 (en) 2012-10-19 2020-08-25 Dana-Farber Cancer Institute, Inc. Hydrophobically tagged small molecules as inducers of protein degradation
RS56680B1 (sr) 2012-11-28 2018-03-30 Merck Sharp & Dohme Kompozicije i postupci za lečenje kancera
KR102196882B1 (ko) 2012-12-20 2020-12-30 머크 샤프 앤드 돔 코포레이션 Hdm2 억제제로서의 치환된 이미다조피리딘
WO2014120748A1 (fr) 2013-01-30 2014-08-07 Merck Sharp & Dohme Corp. Purines 2,6,7,8-substituées utilisées en tant qu'inhibiteurs de hdm2
WO2015034925A1 (fr) 2013-09-03 2015-03-12 Moderna Therapeutics, Inc. Polynucléotides circulaires
JO3589B1 (ar) 2014-08-06 2020-07-05 Novartis Ag مثبطات كيناز البروتين c وطرق استخداماتها
USRE50776E1 (en) 2015-03-27 2026-02-03 Dana-Farber Cancer Institute, Inc. Inhibitors of cyclin-dependent kinases
JOP20190055A1 (ar) 2016-09-26 2019-03-24 Merck Sharp & Dohme أجسام مضادة ضد cd27
EP3525785B1 (fr) 2016-10-12 2025-08-27 Merck Sharp & Dohme LLC Inhibiteurs de kdm5
KR102702926B1 (ko) 2017-04-13 2024-09-06 사이로파 비.브이. 항-sirp 알파 항체
EP3706747B1 (fr) 2017-11-08 2025-09-03 Merck Sharp & Dohme LLC Inhibiteurs de prmt5
US10947234B2 (en) 2017-11-08 2021-03-16 Merck Sharp & Dohme Corp. PRMT5 inhibitors
WO2019148412A1 (fr) 2018-02-01 2019-08-08 Merck Sharp & Dohme Corp. Anticorps bispécifiques anti-pd-1/lag3
US12173026B2 (en) 2018-08-07 2024-12-24 Merck Sharp & Dohme Llc PRMT5 inhibitors
US11981701B2 (en) 2018-08-07 2024-05-14 Merck Sharp & Dohme Llc PRMT5 inhibitors
US12552826B2 (en) 2018-08-07 2026-02-17 Merck Sharp & Dohme Llc PRMT5 inhibitors
EP3833668B1 (fr) 2018-08-07 2025-03-19 Merck Sharp & Dohme LLC Inhibiteurs de prmt5
BR112022012015A2 (pt) 2019-12-17 2022-08-30 Merck Sharp & Dohme Llc Inibidores de prmt5
US12441730B2 (en) 2019-12-17 2025-10-14 Merck Sharp & Dohme Llc PRMT5 inhibitors
EP4673747A1 (fr) 2023-03-02 2026-01-07 CARCIMUN BIOTECH GmbH Moyens et procédés de diagnostic du cancer et/ou d'une maladie inflammatoire aiguë

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3190952A (en) * 1963-02-21 1965-06-22 Bitko Sheldon Welded hermetic seal
JPS59147785A (ja) * 1983-02-09 1984-08-24 Origin Electric Co Ltd 抵抗溶接方法
FI76220C (fi) * 1984-09-17 1988-09-09 Elkotrade Ag Foerfarande foer inkapsling av pao ett baerarband anordnade halvledarkomponenter.

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO9702920A1 *

Also Published As

Publication number Publication date
AT402617B (de) 1997-07-25
WO1997002920A1 (fr) 1997-01-30
AU6293096A (en) 1997-02-10
ATA117095A (de) 1996-11-15

Similar Documents

Publication Publication Date Title
AT402617B (de) Anlage zum automatisierten, hermetischen anlage zum automatisierten, hermetischen verschliessen von gehäusen verschliessen von gehäusen
DE2609115C2 (de) Vakuum-Zerstäubungsvorrichtung
DE2624156C1 (de) Einrichtung zur Behandlung von flachen Werkstücken mit Strömungsitteln
DE3105831C2 (de) Vorrichtung zur Elektronenstrahl-Bearbeitung von Metallwerkstücken
DE3508004A1 (de) Verfahren und vorrichtung zum reinigen von formen
DE2703659A1 (de) Vorrichtung zum aetzen eines werkstuecks unter verwendung eines plasmas
EP4358286A1 (fr) Tête de remplissage
DE2552783B2 (de) Verfahren und anordnung zur erzeugung von ionen
DE19626861B4 (de) Vakuumbehandlungsanlage zum Aufbringen dünner Schichten auf Substrate, beispielsweise auf Scheinwerferreflektoren
EP0492114A1 (fr) Appareillage de pulvérisation
DE202019105406U1 (de) Reinigungsvorrichtung
DE2628819A1 (de) Herstellung von gasentladungsbildschirmen
DE4408947A1 (de) Vakuumbehandlungsanlage und Ventilanordnung
DE3343193A1 (de) Gas-wolfram-bogenschweissvorrichtung
DE10048210B4 (de) Vorrichtung und Verfahren zum Einschleusen eines Werkstücks über eine Vorvakuumkammer in eine Hochvakuumkammer und deren Verwendung
DE2263738A1 (de) Zerstaeubungsvorrichtung
DE3333004C2 (de) Vorrichtung zum Verdichten von körnigen Formstoffen
EP1006211A1 (fr) Procédé et appareil de traitement de substrats par plasma
DE102008059741B4 (de) Vorrichtung zur Bearbeitung von Werkstücken unter Vakuum
DE2816687A1 (de) Verfahren und vorrichtung zur integralen lecksuche
EP0639441B1 (fr) Procédé et dispositif de remplissage des cuves de mousse polyuréthane sans CFC
DE3415012A1 (de) Verfahren und vorrichtung zum kontinuierlichen bearbeiten von substraten mit niederdruck-plasma
DE3529813C2 (fr)
DE3017138C2 (de) Verfahren zum Herstellen eines füllstutzenlosen Balgelements o.dgl. und Vorrichtung zur Durchführung dieses Verfahrens
DE102014226038A1 (de) Druckreduzierungseinrichtung, Vorrichtung zur massenspektrometrischen Analyse eines Gases und Reinigungsverfahren

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 19971229

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): BE CH DE FI FR GB IT LI NL SE

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: DATACON SEMICONDUCTOR EQUIPMENT GMBH

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

17Q First examination report despatched

Effective date: 19991018

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20000530