EP0919726A1 - Vakuumpumpen - Google Patents

Vakuumpumpen Download PDF

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Publication number
EP0919726A1
EP0919726A1 EP98309555A EP98309555A EP0919726A1 EP 0919726 A1 EP0919726 A1 EP 0919726A1 EP 98309555 A EP98309555 A EP 98309555A EP 98309555 A EP98309555 A EP 98309555A EP 0919726 A1 EP0919726 A1 EP 0919726A1
Authority
EP
European Patent Office
Prior art keywords
pump
stages
interstage
inlet
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP98309555A
Other languages
English (en)
French (fr)
Other versions
EP0919726B1 (de
Inventor
David Rhodri Leyshon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
BOC Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=10822765&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP0919726(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by BOC Group Ltd filed Critical BOC Group Ltd
Publication of EP0919726A1 publication Critical patent/EP0919726A1/de
Application granted granted Critical
Publication of EP0919726B1 publication Critical patent/EP0919726B1/de
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps

Definitions

  • This invention relates to improved vacuum pumps with particular reference to those employing a turbo-molecular mode of operation.
  • a conventional turbo-molecular stage arrangement of a vacuum pump comprises a stack of alternate rotors and stators.
  • Each stage effectively comprises a solid disc with a plurality of blades depending (nominally) radially therefrom; the blades are evenly spaced around the circumference of the disc and angled "about" radial lines out of the plane of the disc in the direction of rotation of the rotor stage.
  • the rotor and stator blades have positive and negative gradients respectively when viewed from the side in a radial line from the disc. This arrangement has the effect in molecular flow conditions of causing the movement of molecules through the pump.
  • the throughput of gas from the different parts of the apparatus will generally vary also.
  • the detector and analyser may be evacuated by separate turbo-molecular vacuum pumps which themselves need to be backed by separate pumps, for example rotary vane pumps.
  • a single backing pump is relatively common for supporting two (or more) turbo-molecular pumps.
  • turbo-molecular pump it has more recently been proposed to employ a single turbo-molecular pump to replace two (or more) individual pumps with the single pump having a normal inlet for gas required to pass through all the stages of the pump and an intermediate inlet, i.e. between the stages, for gas required to pass through only the latter stages of the pump.
  • a vacuum pump comprising a plurality of vacuum stages and having a first pump inlet through which gas can pass through all the pump stages and a second inlet through which gas can enter the pump at an interstage location and pass only through subsequent stages of the pump, wherein the pump stages prior to the interstage are sized differently to those stages subsequent to the interstage such that the pump overall suits the pressure requirement / pumping capacity of the different systems attended to the first and second inlets respectively.
  • the invention has advantageous application to turbo-molecular pumps in particular.
  • the stages prior to the interstage can be of a smaller size than those stages subsequent to the interstage.
  • turbo-molecular pumps in particular, it is preferred that there are three, four, five, six or more stages (rotor/stator pairs) both before and after the pump interstage.
  • one or more Holweck pump stages are employed between the final turbo-molecular stage and the pump outlet.
  • a vacuum pump having a multi-component body 1 within which is mounted a shaft 2. Rotation of the shaft 2 is effected by means of a motor generally indicated at 3 positioned about the shaft 2. The position of the shaft 2 is controlled by bearings at its base generally indicated at 4 and at its top generally indicated at 5, all of design well known in the art.
  • the pump possesses two sets of turbo-molecular stages generally indicated at 6 and 7 before and after an interstage therebetween respectively.
  • the first set of turbo-molecular stages comprises four rotors (impellers) of angled blade construction as described above and of known construction, one of which is indicated at 8 and four corresponding stators again of angled blade construction and again as described above and of known construction, one of which is indicated at 9 in the drawing.
  • the tip diameter D 1 of the rotors is indicated in the drawing.
  • An inlet 10 to the first set of stages allows gas entry through a perforated inlet screen 11 in to the four rotor/stator stages of the first set.
  • a second set of turbo-molecular stages 7 comprises a further six rotors (impellers) of angled blade construction, one of which is indicated at 12 and six corresponding stators again of angled blade construction, one of which is indicated at 13 in the drawing.
  • the tip diameter D 2 of these rotors is also indicated in the drawing.
  • stator bridge 14 of heavily perforated design.
  • Gas exiting from the first set 6 of turbo-molecular stages can pass through the interstage area and into the second set 7 of turbo-molecular stages.
  • a second inlet 16 is formed in the pump body 1 and allows entry of gas directly in to the interstage area via the apertures in the stator bridge 14.
  • Holweck stages comprise two rotating cylinders 17, 18 and corresponding annular stators 19, 20 having helical channels formed therein (on one side for stator 19, on both sides for stator 20) all in a general manner known per se .
  • Gas exiting the Holweck stage is urged into a passageway 21 found in the pump body 1 and thence to a pump outlet 22.
  • the sets of turbo-molecular pump stages are therefore sized to reflect the pressure requirements and pumping capacities of the respective vacuum systems to be attached to the inlet 1 and to the inlet 2 thereby leading to overall pump improvements in terms of lower power consumption and smaller size.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP98309555A 1997-11-27 1998-11-23 Vakuumpumpen Revoked EP0919726B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB9725146.6A GB9725146D0 (en) 1997-11-27 1997-11-27 Improvements in vacuum pumps
GB9725146 1997-11-27

Publications (2)

Publication Number Publication Date
EP0919726A1 true EP0919726A1 (de) 1999-06-02
EP0919726B1 EP0919726B1 (de) 2004-02-04

Family

ID=10822765

Family Applications (1)

Application Number Title Priority Date Filing Date
EP98309555A Revoked EP0919726B1 (de) 1997-11-27 1998-11-23 Vakuumpumpen

Country Status (5)

Country Link
US (1) US6106223A (de)
EP (1) EP0919726B1 (de)
JP (1) JP4395210B2 (de)
DE (1) DE69821453T2 (de)
GB (1) GB9725146D0 (de)

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1085214A2 (de) 1999-09-16 2001-03-21 The BOC Group plc Vakuumpumpen
GB2360066A (en) * 2000-03-06 2001-09-12 Boc Group Plc Vacuum pump
EP1302667A1 (de) * 2001-10-15 2003-04-16 The BOC Group plc Vakuumpumpen
WO2005033521A1 (en) * 2003-09-30 2005-04-14 The Boc Group Plc Vacuum pump
WO2006048603A1 (en) * 2004-11-01 2006-05-11 The Boc Group Plc Vacuum pump
WO2010097384A2 (de) 2009-02-28 2010-09-02 Oerlikon Leybold Vacuum Gmbh Multi-inlet-vakuumpumpe
EP2273128A1 (de) 2004-06-25 2011-01-12 Edwards Limited Vakuumpumpe
WO2019229462A1 (en) * 2018-05-31 2019-12-05 Micromass Uk Limited Bench-top time of flight mass spectrometer
US11355331B2 (en) 2018-05-31 2022-06-07 Micromass Uk Limited Mass spectrometer
US11367607B2 (en) 2018-05-31 2022-06-21 Micromass Uk Limited Mass spectrometer
US11373849B2 (en) 2018-05-31 2022-06-28 Micromass Uk Limited Mass spectrometer having fragmentation region
US11437226B2 (en) 2018-05-31 2022-09-06 Micromass Uk Limited Bench-top time of flight mass spectrometer
US11476103B2 (en) 2018-05-31 2022-10-18 Micromass Uk Limited Bench-top time of flight mass spectrometer
US11538676B2 (en) 2018-05-31 2022-12-27 Micromass Uk Limited Mass spectrometer
US11621154B2 (en) 2018-05-31 2023-04-04 Micromass Uk Limited Bench-top time of flight mass spectrometer
US12009193B2 (en) 2018-05-31 2024-06-11 Micromass Uk Limited Bench-top Time of Flight mass spectrometer
US12027359B2 (en) 2018-05-31 2024-07-02 Micromass Uk Limited Bench-top Time of Flight mass spectrometer

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19821634A1 (de) * 1998-05-14 1999-11-18 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
JP3961155B2 (ja) * 1999-05-28 2007-08-22 Ｂｏｃエドワーズ株式会社 真空ポンプ
DE19951954A1 (de) * 1999-10-28 2001-05-03 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE10008691B4 (de) * 2000-02-24 2017-10-26 Pfeiffer Vacuum Gmbh Gasreibungspumpe
DE10111546A1 (de) * 2000-05-15 2002-01-03 Pfeiffer Vacuum Gmbh Gasreibungspumpe
JP3777498B2 (ja) * 2000-06-23 2006-05-24 株式会社荏原製作所 ターボ分子ポンプ
JP2002138987A (ja) * 2000-10-31 2002-05-17 Seiko Instruments Inc 真空ポンプ
DE10056144A1 (de) * 2000-11-13 2002-05-23 Pfeiffer Vacuum Gmbh Gasreibungspumpe
US6503050B2 (en) * 2000-12-18 2003-01-07 Applied Materials Inc. Turbo-molecular pump having enhanced pumping capacity
DE10142567A1 (de) * 2001-08-30 2003-03-20 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE10150015A1 (de) * 2001-10-11 2003-04-17 Leybold Vakuum Gmbh Mehrkammeranlage zur Behandlung von Gegenständen unter Vakuum, Verfahren zur Evakuierung dieser Anlage und Evakuierungssystem dafür
GB0229352D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement and method of operating same
GB0409139D0 (en) * 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
GB0411426D0 (en) * 2004-05-21 2004-06-23 Boc Group Plc Pumping arrangement
US7140833B2 (en) * 2004-11-04 2006-11-28 The Boc Group, Llc Integrated turbo/drag/regenerative pump with counter-rotating turbo blades
GB0503946D0 (en) * 2005-02-25 2005-04-06 Boc Group Plc Vacuum pump
US7927066B2 (en) * 2005-03-02 2011-04-19 Tokyo Electron Limited Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component
DE102008024764A1 (de) * 2008-05-23 2009-11-26 Oerlikon Leybold Vacuum Gmbh Mehrstufige Vakuumpumpe
GB0901872D0 (en) * 2009-02-06 2009-03-11 Edwards Ltd Multiple inlet vacuum pumps
US9816530B2 (en) * 2010-11-24 2017-11-14 Edwards Japan Limited Splinter shield for vacuum pump, and vacuum pump with the splinter shield
GB2558921B (en) * 2017-01-20 2020-06-17 Edwards Ltd A multiple stage turbomolecular pump with inter-stage inlet
GB2601515B (en) 2020-12-02 2022-12-28 Agilent Technologies Inc Vacuum pump with elastic spacer
EP4293232A1 (de) * 2023-10-17 2023-12-20 Pfeiffer Vacuum Technology AG Pumpe
JP2025123996A (ja) * 2024-02-13 2025-08-25 株式会社島津製作所 真空ポンプ

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2442614A1 (de) * 1974-09-04 1976-03-18 Siemens Ag Turbomolekularpumpe
US4140441A (en) * 1977-04-11 1979-02-20 Patterson Williams G Turbomolecular pump lubrication system
EP0072892A1 (de) * 1981-08-26 1983-03-02 Leybold-Heraeus GmbH Für die Durchführung der Gegenstrom-Lecksuche geeignete Turbomolekularpumpe
EP0603694A1 (de) * 1992-12-24 1994-06-29 BALZERS-PFEIFFER GmbH Vakuumpumpsystem
EP0731278A1 (de) * 1995-03-10 1996-09-11 Balzers-Pfeiffer GmbH Molekularvakuumpumpe mit Kühlgaseinrichtung

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05195957A (ja) * 1992-01-23 1993-08-06 Matsushita Electric Ind Co Ltd 真空ポンプ
US5501583A (en) * 1992-08-19 1996-03-26 Hitachi, Ltd. Turbo vacuum pump

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2442614A1 (de) * 1974-09-04 1976-03-18 Siemens Ag Turbomolekularpumpe
US4140441A (en) * 1977-04-11 1979-02-20 Patterson Williams G Turbomolecular pump lubrication system
EP0072892A1 (de) * 1981-08-26 1983-03-02 Leybold-Heraeus GmbH Für die Durchführung der Gegenstrom-Lecksuche geeignete Turbomolekularpumpe
EP0603694A1 (de) * 1992-12-24 1994-06-29 BALZERS-PFEIFFER GmbH Vakuumpumpsystem
EP0731278A1 (de) * 1995-03-10 1996-09-11 Balzers-Pfeiffer GmbH Molekularvakuumpumpe mit Kühlgaseinrichtung

Cited By (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1085214A3 (de) * 1999-09-16 2002-04-03 The BOC Group plc Vakuumpumpen
EP1085214A2 (de) 1999-09-16 2001-03-21 The BOC Group plc Vakuumpumpen
GB2360066A (en) * 2000-03-06 2001-09-12 Boc Group Plc Vacuum pump
EP1302667A1 (de) * 2001-10-15 2003-04-16 The BOC Group plc Vakuumpumpen
US6709228B2 (en) 2001-10-15 2004-03-23 The Boc Group Plc Vacuum pumps
WO2005033521A1 (en) * 2003-09-30 2005-04-14 The Boc Group Plc Vacuum pump
CN100429405C (zh) * 2003-09-30 2008-10-29 英国爱德华兹有限公司 真空泵
US8393854B2 (en) 2003-09-30 2013-03-12 Edwards Limited Vacuum pump
EP2273128A1 (de) 2004-06-25 2011-01-12 Edwards Limited Vakuumpumpe
WO2006048603A1 (en) * 2004-11-01 2006-05-11 The Boc Group Plc Vacuum pump
US8206081B2 (en) 2004-11-01 2012-06-26 Edwards Limited Vacuum pump
DE102009011082A1 (de) 2009-02-28 2010-09-02 Oerlikon Leybold Vacuum Gmbh Multi-Inlet-Vakuumpumpe
WO2010097384A2 (de) 2009-02-28 2010-09-02 Oerlikon Leybold Vacuum Gmbh Multi-inlet-vakuumpumpe
US8926266B2 (en) 2009-02-28 2015-01-06 Oerlikon Leybold Vacuum Gmbh Multi-inlet vacuum pump
US11367607B2 (en) 2018-05-31 2022-06-21 Micromass Uk Limited Mass spectrometer
US11355331B2 (en) 2018-05-31 2022-06-07 Micromass Uk Limited Mass spectrometer
WO2019229462A1 (en) * 2018-05-31 2019-12-05 Micromass Uk Limited Bench-top time of flight mass spectrometer
US11373849B2 (en) 2018-05-31 2022-06-28 Micromass Uk Limited Mass spectrometer having fragmentation region
US11437226B2 (en) 2018-05-31 2022-09-06 Micromass Uk Limited Bench-top time of flight mass spectrometer
US11476103B2 (en) 2018-05-31 2022-10-18 Micromass Uk Limited Bench-top time of flight mass spectrometer
US11538676B2 (en) 2018-05-31 2022-12-27 Micromass Uk Limited Mass spectrometer
US11621154B2 (en) 2018-05-31 2023-04-04 Micromass Uk Limited Bench-top time of flight mass spectrometer
US11879470B2 (en) 2018-05-31 2024-01-23 Micromass Uk Limited Bench-top time of flight mass spectrometer
US12009193B2 (en) 2018-05-31 2024-06-11 Micromass Uk Limited Bench-top Time of Flight mass spectrometer
US12027359B2 (en) 2018-05-31 2024-07-02 Micromass Uk Limited Bench-top Time of Flight mass spectrometer

Also Published As

Publication number Publication date
US6106223A (en) 2000-08-22
DE69821453D1 (de) 2004-03-11
DE69821453T2 (de) 2004-12-02
JP4395210B2 (ja) 2010-01-06
EP0919726B1 (de) 2004-02-04
GB9725146D0 (en) 1998-01-28
JPH11230085A (ja) 1999-08-24

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