EP0921004A3 - Flüssigkeitsausstosskopf , Aufzeichnungsgerät und Flüssigkeitsausstosskopfenherstellungsverfahren - Google Patents

Flüssigkeitsausstosskopf , Aufzeichnungsgerät und Flüssigkeitsausstosskopfenherstellungsverfahren Download PDF

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Publication number
EP0921004A3
EP0921004A3 EP98123168A EP98123168A EP0921004A3 EP 0921004 A3 EP0921004 A3 EP 0921004A3 EP 98123168 A EP98123168 A EP 98123168A EP 98123168 A EP98123168 A EP 98123168A EP 0921004 A3 EP0921004 A3 EP 0921004A3
Authority
EP
European Patent Office
Prior art keywords
liquid
flow paths
liquid flow
members
liquid discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP98123168A
Other languages
English (en)
French (fr)
Other versions
EP0921004A2 (de
Inventor
Tomoyuki Hiroki
Masahiko Ogawa
Masami Ikeda
Ichiro Saito
Hiroyuki Ishinaga
Yoshiyuki Imanaka
Teruo Ozaki
Masahiko Kubota
Takayuki Yagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority claimed from JP10346076A external-priority patent/JP2000198199A/ja
Publication of EP0921004A2 publication Critical patent/EP0921004A2/de
Publication of EP0921004A3 publication Critical patent/EP0921004A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14032—Structure of the pressure chamber
    • B41J2/14048—Movable member in the chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14032—Structure of the pressure chamber
    • B41J2/14056—Plural heating elements per ink chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14072—Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/13—Heads having an integrated circuit
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/20—Modules

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
EP98123168A 1997-12-05 1998-12-04 Flüssigkeitsausstosskopf , Aufzeichnungsgerät und Flüssigkeitsausstosskopfenherstellungsverfahren Withdrawn EP0921004A3 (de)

Applications Claiming Priority (14)

Application Number Priority Date Filing Date Title
JP33605597 1997-12-05
JP33605897 1997-12-05
JP33605797 1997-12-05
JP33610397 1997-12-05
JP33605897 1997-12-05
JP33610397 1997-12-05
JP33605797 1997-12-05
JP33605597 1997-12-05
JP6299798 1998-04-16
JP62999798 1998-04-16
JP30451098 1998-10-26
JP30451098 1998-10-26
JP10346076A JP2000198199A (ja) 1997-12-05 1998-12-04 液体吐出ヘッドおよびヘッドカートリッジおよび液体吐出装置および液体吐出ヘッドの製造方法
JP34607698 1998-12-04

Publications (2)

Publication Number Publication Date
EP0921004A2 EP0921004A2 (de) 1999-06-09
EP0921004A3 true EP0921004A3 (de) 2000-04-26

Family

ID=27565036

Family Applications (1)

Application Number Title Priority Date Filing Date
EP98123168A Withdrawn EP0921004A3 (de) 1997-12-05 1998-12-04 Flüssigkeitsausstosskopf , Aufzeichnungsgerät und Flüssigkeitsausstosskopfenherstellungsverfahren

Country Status (1)

Country Link
EP (1) EP0921004A3 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1065059B1 (de) 1999-07-02 2007-01-31 Canon Kabushiki Kaisha Verfahren zur Herstellung eines Flüssigkeitsausstosskopfes, damit hergestellter Flüssigkeitsausstosskopf, Kopfkassette, Flüssigkeitsausstossvorrichtung, Verfahren zur Herstellung einer Siliziumplatte und damit hergestellte Siliziumplatte

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4251824A (en) * 1978-11-14 1981-02-17 Canon Kabushiki Kaisha Liquid jet recording method with variable thermal viscosity modulation
EP0178596A2 (de) * 1984-10-15 1986-04-23 AT & T Teletype Corporation Siliziumdüsenstruktur und Herstellungsverfahren
JPS62261453A (ja) * 1986-05-09 1987-11-13 Canon Inc 多値化記録方式
US4890126A (en) * 1988-01-29 1989-12-26 Minolta Camera Kabushiki Kaisha Printing head for ink jet printer
US4990939A (en) * 1988-09-01 1991-02-05 Ricoh Company, Ltd. Bubble jet printer head with improved operational speed
EP0500110A1 (de) * 1991-02-21 1992-08-26 Hewlett-Packard Company Photoabtrageverfahren von wenigstens einer gestuften Öffnung, die ein polymeres Material durchdringt und eine Düsenplatte, die eine gestufte Öffnung aufweist
US5172139A (en) * 1989-05-09 1992-12-15 Ricoh Company, Ltd. Liquid jet head for gradation recording
US5278585A (en) * 1992-05-28 1994-01-11 Xerox Corporation Ink jet printhead with ink flow directing valves
EP0674995A2 (de) * 1994-03-29 1995-10-04 Canon Kabushiki Kaisha Substrat für Tintenstrahlkopf, Tintenstrahlkopf, Tintenstrahlschreiber und Tintenstrahlgerät
EP0737582A2 (de) * 1995-04-14 1996-10-16 Canon Kabushiki Kaisha Verfahren zum Herstellen eines Flüssigkeitsausstosskopfes und nach diesem Verfahren hergestellter Flüssigkeitsausstosskopf
EP0778133A2 (de) * 1995-12-05 1997-06-11 Canon Kabushiki Kaisha Verfahren zum Ausstossen von Flüssigkeit, Flüssigkeitsausstosskopf und Vorrichtung zum Ausstossen von Flüssigkeit

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1127227A (en) 1977-10-03 1982-07-06 Ichiro Endo Liquid jet recording process and apparatus therefor

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4251824A (en) * 1978-11-14 1981-02-17 Canon Kabushiki Kaisha Liquid jet recording method with variable thermal viscosity modulation
EP0178596A2 (de) * 1984-10-15 1986-04-23 AT & T Teletype Corporation Siliziumdüsenstruktur und Herstellungsverfahren
JPS62261453A (ja) * 1986-05-09 1987-11-13 Canon Inc 多値化記録方式
US4890126A (en) * 1988-01-29 1989-12-26 Minolta Camera Kabushiki Kaisha Printing head for ink jet printer
US4990939A (en) * 1988-09-01 1991-02-05 Ricoh Company, Ltd. Bubble jet printer head with improved operational speed
US5172139A (en) * 1989-05-09 1992-12-15 Ricoh Company, Ltd. Liquid jet head for gradation recording
EP0500110A1 (de) * 1991-02-21 1992-08-26 Hewlett-Packard Company Photoabtrageverfahren von wenigstens einer gestuften Öffnung, die ein polymeres Material durchdringt und eine Düsenplatte, die eine gestufte Öffnung aufweist
US5278585A (en) * 1992-05-28 1994-01-11 Xerox Corporation Ink jet printhead with ink flow directing valves
EP0674995A2 (de) * 1994-03-29 1995-10-04 Canon Kabushiki Kaisha Substrat für Tintenstrahlkopf, Tintenstrahlkopf, Tintenstrahlschreiber und Tintenstrahlgerät
EP0737582A2 (de) * 1995-04-14 1996-10-16 Canon Kabushiki Kaisha Verfahren zum Herstellen eines Flüssigkeitsausstosskopfes und nach diesem Verfahren hergestellter Flüssigkeitsausstosskopf
EP0778133A2 (de) * 1995-12-05 1997-06-11 Canon Kabushiki Kaisha Verfahren zum Ausstossen von Flüssigkeit, Flüssigkeitsausstosskopf und Vorrichtung zum Ausstossen von Flüssigkeit

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 012, no. 141 (M - 691) 28 April 1988 (1988-04-28) *

Also Published As

Publication number Publication date
EP0921004A2 (de) 1999-06-09

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