EP0930166A3 - Herstellungsverfahren und Struktur eines Tintenstrahldruckkopfes - Google Patents

Herstellungsverfahren und Struktur eines Tintenstrahldruckkopfes Download PDF

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Publication number
EP0930166A3
EP0930166A3 EP98250372A EP98250372A EP0930166A3 EP 0930166 A3 EP0930166 A3 EP 0930166A3 EP 98250372 A EP98250372 A EP 98250372A EP 98250372 A EP98250372 A EP 98250372A EP 0930166 A3 EP0930166 A3 EP 0930166A3
Authority
EP
European Patent Office
Prior art keywords
forming
over
manufacturing process
ink jet
jet printhead
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP98250372A
Other languages
English (en)
French (fr)
Other versions
EP0930166A2 (de
EP0930166B1 (de
Inventor
Tse-Chi Mou
Yee-Shyi Chang
Arnold Chang-Mou Yang
Chin-Yi Chou
Kou-Yow Tseng
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Microjet Technology Co Ltd
Original Assignee
Microjet Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CN97121345A external-priority patent/CN1080646C/zh
Priority claimed from CN97121346A external-priority patent/CN1074358C/zh
Priority claimed from CN97121341A external-priority patent/CN1072117C/zh
Application filed by Microjet Technology Co Ltd filed Critical Microjet Technology Co Ltd
Publication of EP0930166A2 publication Critical patent/EP0930166A2/de
Publication of EP0930166A3 publication Critical patent/EP0930166A3/de
Application granted granted Critical
Publication of EP0930166B1 publication Critical patent/EP0930166B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
EP98250372A 1997-10-21 1998-10-21 Herstellungsverfahren und Struktur eines Tintenstrahldruckkopfes Expired - Lifetime EP0930166B1 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
CN97121345A CN1080646C (zh) 1997-10-21 1997-10-21 形成喷墨头电阻层的方法
CN97121346A CN1074358C (zh) 1997-10-21 1997-10-21 喷墨头的制程与结构
CN97121341A CN1072117C (zh) 1997-10-21 1997-10-21 喷墨头电阻层的制程
CN97121345 1997-10-21
CN97121341 1997-10-21
CN97121346 1997-10-21

Publications (3)

Publication Number Publication Date
EP0930166A2 EP0930166A2 (de) 1999-07-21
EP0930166A3 true EP0930166A3 (de) 2000-04-12
EP0930166B1 EP0930166B1 (de) 2005-02-23

Family

ID=27179142

Family Applications (1)

Application Number Title Priority Date Filing Date
EP98250372A Expired - Lifetime EP0930166B1 (de) 1997-10-21 1998-10-21 Herstellungsverfahren und Struktur eines Tintenstrahldruckkopfes

Country Status (2)

Country Link
EP (1) EP0930166B1 (de)
CA (1) CA2250788C (de)

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3562022A (en) * 1967-12-26 1971-02-09 Hughes Aircraft Co Method of doping semiconductor bodies by indirection implantation
US4459739A (en) * 1981-05-26 1984-07-17 Northern Telecom Limited Thin film transistors
US4535343A (en) * 1983-10-31 1985-08-13 Hewlett-Packard Company Thermal ink jet printhead with self-passivating elements
JPH0486267A (ja) * 1990-07-31 1992-03-18 Tdk Corp サーマルヘッド用発熱体の製造方法
US5281485A (en) * 1990-10-26 1994-01-25 International Business Machines Corporation Structure and method of making Alpha-Ta in thin films
EP0594340A2 (de) * 1992-10-23 1994-04-27 AT&T GLOBAL INFORMATION SOLUTIONS INTERNATIONAL INC. Verfahren zur Herstellung eines bipolaren Transistors
US5348909A (en) * 1993-03-26 1994-09-20 Lexmark International, Inc. Manufacture of printhead with diamond resistors
EP0750990A2 (de) * 1995-06-28 1997-01-02 Canon Kabushiki Kaisha Flüssigkeit ausstossender Druckkopf, sein Herstellungsverfahren und Herstellungsverfahren eines Grundkörpers für einen solchen Druckkopf
US5635986A (en) * 1996-04-09 1997-06-03 Daewoo Electronics Co., Ltd Method for encoding a contour of an object in a video signal by using a contour motion estimation technique

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3344072B2 (ja) * 1994-03-31 2002-11-11 ソニー株式会社 薄膜トランジスタの製造方法

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3562022A (en) * 1967-12-26 1971-02-09 Hughes Aircraft Co Method of doping semiconductor bodies by indirection implantation
US4459739A (en) * 1981-05-26 1984-07-17 Northern Telecom Limited Thin film transistors
US4535343A (en) * 1983-10-31 1985-08-13 Hewlett-Packard Company Thermal ink jet printhead with self-passivating elements
JPH0486267A (ja) * 1990-07-31 1992-03-18 Tdk Corp サーマルヘッド用発熱体の製造方法
US5281485A (en) * 1990-10-26 1994-01-25 International Business Machines Corporation Structure and method of making Alpha-Ta in thin films
EP0594340A2 (de) * 1992-10-23 1994-04-27 AT&T GLOBAL INFORMATION SOLUTIONS INTERNATIONAL INC. Verfahren zur Herstellung eines bipolaren Transistors
US5348909A (en) * 1993-03-26 1994-09-20 Lexmark International, Inc. Manufacture of printhead with diamond resistors
EP0750990A2 (de) * 1995-06-28 1997-01-02 Canon Kabushiki Kaisha Flüssigkeit ausstossender Druckkopf, sein Herstellungsverfahren und Herstellungsverfahren eines Grundkörpers für einen solchen Druckkopf
US5635986A (en) * 1996-04-09 1997-06-03 Daewoo Electronics Co., Ltd Method for encoding a contour of an object in a video signal by using a contour motion estimation technique

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 016, no. 306 (M - 1276) 6 July 1992 (1992-07-06) *

Also Published As

Publication number Publication date
CA2250788A1 (en) 1999-04-21
EP0930166A2 (de) 1999-07-21
EP0930166B1 (de) 2005-02-23
CA2250788C (en) 2003-05-20

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