EP0931240A1 - Instrument de mesure des coordonnees - Google Patents

Instrument de mesure des coordonnees

Info

Publication number
EP0931240A1
EP0931240A1 EP97910407A EP97910407A EP0931240A1 EP 0931240 A1 EP0931240 A1 EP 0931240A1 EP 97910407 A EP97910407 A EP 97910407A EP 97910407 A EP97910407 A EP 97910407A EP 0931240 A1 EP0931240 A1 EP 0931240A1
Authority
EP
European Patent Office
Prior art keywords
coordinate measuring
ccd
lens
measuring device
signals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP97910407A
Other languages
German (de)
English (en)
Inventor
Nico Correns
Klaus Spring
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Carl Zeiss Jena GmbH
Original Assignee
VEB Carl Zeiss Jena GmbH
Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VEB Carl Zeiss Jena GmbH, Carl Zeiss Jena GmbH filed Critical VEB Carl Zeiss Jena GmbH
Publication of EP0931240A1 publication Critical patent/EP0931240A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/028—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring lateral position of a boundary of the object

Definitions

  • the invention relates to a coordinate measuring machine with an optical probe system for contactless probing of edges and surface structures of measuring objects.
  • the field of application is optical coordinate measuring technology.
  • it is the measurements on measuring objects by means of single or multi-coordinate measuring devices.
  • a sensor array is provided, onto which the structures of the Object to be mapped.
  • the image of the measurement object on the sensor arrangement is analyzed by sequential scanning of the individual sensors of the array. The moment the structure reaches a predetermined sensor of the sensor arrangement, a trigger signal is generated and sent to a control system of the coordinate measuring device for determining the position of the movable arm relative to the structure.
  • a disadvantage of this device is the high level of technical complexity involved in evaluating the signals for obtaining measured values.
  • DE 40 18 333 A1 describes a method and a device for automatically detecting edges of hardness impressions, the hardness impression being recorded by a TV camera and the video signal obtained being fed to a comparator which has an adjustable level.
  • the output signal of the comparator is differentiated and the contour signals obtained are loaded into a memory.
  • the geometric data of the measurement impressions are calculated from these contour signals. From publication no.
  • This crosshair composed of two lines is generated by a so-called “line or crosshair generator”, whereby a quartz-controlled time base is provided, and therefore there is no exact relationship to the pixels.
  • this object is achieved in a coordinate measuring machine with an optical probe system for contactless probing of edges and structures of measurement objects by the features set out in the first claim, the probe system being displaceable in at least one coordinate and being part of the coordinate measuring machine.
  • the touch probe comprises a CCD camera with a lens and a CCD matrix in its image plane, the distance between the lens and the image plane being varied to adjust the magnification.
  • a pin is arranged on the housing of the objective, which is brought into operative connection with a pin receptacle arranged on the coordinate measuring machine or on a slide of the coordinate measuring machine.
  • the entire touch probe is moved in a direction perpendicular to the object plane with the drive of the coordinate measuring machine.
  • the displacement of the touch probe relative to the object is then also carried out with the drive of the coordinate measuring machine for the assigned coordinate.
  • an actuating element is provided on the lens and a driving element dimensioned as a function of the magnification to be realized, which can be brought into operative connection with one another for the purpose of the enlargement position and are adjustable with the help of the drive of the coordinate measuring machine.
  • the actuator can in the case of a pin z. B. a pin or in the case of a rotating element, a toothed or friction wheel.
  • the matching counterpart on the coordinate measuring machine is then z. B. a fork-shaped pin receptacle or a rack or friction rail.
  • actuating elements can, for example, be known rotary or sliding elements, such as rotary or slide switches, which can be coupled to corresponding driving elements.
  • the touch probe further comprises a crosshair generator and a circuit arrangement for additively mixing the crosshair signals generated in line generators with the signals of the CCD elements, the time base for the crosshair signals being formed being the readout clock of the CCD elements (pixels) of the CCD matrix.
  • a logic circuit for linking the CCD elements representing the vertical and horizontal lines is also provided, this circuit being connected on the output side to a first input of a flip-flop circuit.
  • the second input of this flip-flop circuit is connected to an output of a comparator.
  • the output of the comparator is connected to a second comparator input via a feedback resistor, which is also connected to a threshold value adjuster.
  • a pulse logic is present at the output of the flip-flop circuit, which delivers switching pulses for the coordinate measuring machine.
  • a video transmitter on the touch probe is provided for the display device and for displaying the measured values.
  • the horizontal and the vertical line of the line generator are linked in such a way that a selective signal is generated with which the state of the comparator can be displayed in the flip-flop circuit as a function of the video signal and which is used to set or control the switching threshold of the comparator can be used.
  • the switching signal generated by the edge detector can be routed via the signal line of the touch probe of the coordinate measuring machine.
  • the edge detector itself is a point flashing in the switching signal cycle in the crossover area of the lines of the crosshair detector. It can be created from a logical link between the lines.
  • the optical touch probe Due to the compact design of the optical touch probe with integration of the edge detector in the touch probe and the CNC-compatible design of the control elements on the touch probe, the CNC-compatible zoom lens and the LED lighting, a device has been created that can be exchanged for a tactile touch probe on tactile coordinate measuring machines is or can be applied in parallel.
  • This compactness is also achieved in that no separate drives are provided for the operating elements and for the zoom adjustment, but rather the existing drives of the coordinate measuring machines are used for highly precise positioning.
  • the coordinate measuring machine positions the appropriate controls, e.g. B. the pin of the lens against a frame-fixed recording, for. B. against the pin receptacle.
  • the compact structure also offers advantages in terms of the transmission of high frequencies.
  • Fig. 2 is a block diagram for the objectified position determination.
  • the optical probe system 1 shown in simplified form in FIG. 1 is arranged on the slide that can be moved perpendicularly to the table 2 or on a quill of the coordinate measuring machine that can be moved in this direction and comprises an objective 3 that places the test object 4 arranged on the table 2 on CCD elements of a CCD - Matrix 5 of a CCD camera.
  • the touch probe 1 further comprises a unit that includes a crosshair generator 6 and an edge detector 7.
  • a video transmitter 8 is also part of the touch probe 1 for the wireless transmission of signals to a receiver of an evaluation device 9. This connection is made via antennas 8.1 and 9.1, which are assigned to the transmitter and the receiver.
  • the evaluation device 9 can comprise a display unit 10 or one can be arranged after it.
  • the coordinate measuring machine is electrically connected to the touch probe 1 by a signal line 11.
  • the test object 4 can be illuminated by an illumination source 1 2 arranged at the end of the touch probe 1 facing the test object 4.
  • an Illumination source (not shown) arranged below the table 2 in the coordinate measuring machine KMG
  • an actuating element 13 is attached, which can be brought into operative connection with a driving element 14 which is dimensioned as a function of the magnification to be set and which is preferably fixedly arranged on the table 2 of the coordinate measuring machine CCD-Mat ⁇ x in a direction running perpendicular to the object plane for the purpose of focusing on the measurement object 4
  • the actuating element 13 can be designed as a pin (FIG. 1) or also as a rotating element, for example as a lever.
  • the driving element 14 is, for example, a fork-shaped pin receptacle (Ftg 1) or a Rack or friction rail In any case, these two components that are assigned to one another must be able to be easily coupled in and out of one another. Further driving and actuating elements can also be provided for performing further switching functions, which comprise rotary and / or slide switches known per se
  • the optical touch system 1 is compact, in that no separate drives are provided for the operating elements (actuating element 13 and driving element 14) and for adjusting the magnification (zoom adjustment). These adjustments are made by the adjusting drives of the coordinate measuring machine , which are used for high-precision positioning, for example, of the table 2.
  • This compactness also has an advantageous effect on the crosshair generation in the crosshair generator 6 and for the edge detector 7
  • the objectified determination of the position of a structure or edge on the object under test 4 is carried out with the aid of a circuit shown in FIG. 2 Linking arrangement 1 5 is generated, which is connected to one of the inputs of a downstream flip-flop circuit 19. Circuit 19 stored. This flip-flop circuit 19 is connected with a second input 20 to the output of the associated comparator 21, the comparator 21 having one input 22 via a feedback resistor 23 to the output of the flip-flop circuit 19 connected is. With its second input 24, the comparator 21 is connected to the output of the
  • Video receiver 25 connected.
  • this feedback resistor 23 stabilizes the switching behavior of the comparator 21.
  • an adjusting resistor 27 which is connected to the input 22 of the comparator 21, the switching threshold of the comparator 21 is changed.
  • Each edge change at the output of the flip-flop circuit 19 generates in a downstream pulse logic 28 a switching pulse 29, which is equivalent to a tactile touch probe, for the coordinate measuring machine.
  • the output 31 is also displayed by means of a provided LED 30, because this signal simultaneously represents a light-dark signal for a current detector position in relation to a light-dark structure (crossing point of the lines of the line cross) and also as an adjustment aid for the threshold value setting the adjusting resistor 27 is used.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

La présente invention concerne un appareil de mesure des coordonnées doté d'un système opto-palpeur pour sonder sans contact les structures et arêtes des objets à mesurer (4). Cet appareil comprend une caméra à dispositif de couplage de charge (CCD) avec un objectif (3) et une matrice CCD (5) sur laquelle l'objet à mesurer (4) est reproduit, la distance entre l'objectif (3) et le plan de la matrice (5) étant réglable aux fins du réglage de l'agrandissement. Pour le réglage de l'agrandissement, un organe de commande (13) est prévu sur le système palpeur (1), qui peut être mis en liaison avec un élément d'entraînement (14) monté sur l'appareil de mesure des coordonnées. Le mouvement de réglage de l'agrandissement est effectué à l'aide de l'organe d'entraînement de l'appareil qui correspond à la coordonnée concernée. En outre, un dispositif de commutation est prévue pour mixer les signaux à fils croisés produits par génie électronique et les signaux de la matrice CCD (5). Un commutateur logique (15) est prévu pour relier les éléments CCD représentant les fils verticaux et horizontaux. Les signaux du système palpeur sont transmis par câble ou sans câble, par l'intermédiaire d'un émetteur vidéo (8), à un récepteur vidéo d'un système d'évaluation ou d'affichage (9).
EP97910407A 1996-10-14 1997-10-01 Instrument de mesure des coordonnees Withdrawn EP0931240A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19642293A DE19642293C2 (de) 1996-10-14 1996-10-14 Koordinatenmeßgerät
DE19642293 1996-10-14
PCT/EP1997/005410 WO1998016797A1 (fr) 1996-10-14 1997-10-01 Instrument de mesure des coordonnees

Publications (1)

Publication Number Publication Date
EP0931240A1 true EP0931240A1 (fr) 1999-07-28

Family

ID=7808675

Family Applications (1)

Application Number Title Priority Date Filing Date
EP97910407A Withdrawn EP0931240A1 (fr) 1996-10-14 1997-10-01 Instrument de mesure des coordonnees

Country Status (5)

Country Link
US (1) US6141884A (fr)
EP (1) EP0931240A1 (fr)
JP (1) JP2001502061A (fr)
DE (1) DE19642293C2 (fr)
WO (1) WO1998016797A1 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19825829C2 (de) * 1998-06-10 2000-07-27 Leica Microsystems Verfahren zur Bestimmung des Abstandes P einer Kante eines Strukturelementes auf einem Substrat
DE19902401C2 (de) * 1999-01-22 2001-02-01 Wohlenberg Schneidesysteme Gmb Verfahren und Vorrichtung zur Bestimmung der Geometrie von blattförmigem Gut oder Stapeln davon
GB2349949B (en) * 1999-05-14 2003-03-05 Taylor Hobson Ltd Metrological instrument
RU2252395C1 (ru) * 2003-12-29 2005-05-20 Федеральное государственное унитарное предприятие Научно-исследовательский институт комплексных испытаний оптико-электронных приборов и систем (ФГУП НИИКИ ОЭП) Способ измерения линейного смещения объекта и устройство для его осуществления
US8755114B1 (en) 2013-06-14 2014-06-17 Computer Power Supply, Inc. Apparatus for aiding manual, mechanical alignment of optical equipment
DE102014113051A1 (de) * 2013-09-10 2015-03-12 Cognex Corp. Drahtlose Bildverarbeitungssysteme und Verfahren zur Verwendung unter rauen Umgebungsbedingungen
DE102020109520A1 (de) * 2020-04-06 2021-10-07 Wente/Thiedig GmbH Optische Messeinrichtung und Verfahren zur Ermittlung der dreidimensionalen Form eines Objektes
US11721571B2 (en) * 2020-10-14 2023-08-08 Emage Vision Pte. Ltd. Loop height measurement of overlapping bond wires

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Publication number Priority date Publication date Assignee Title
US4092669A (en) * 1975-05-31 1978-05-30 Rolls-Royce (1971) Limited Apparatus for measuring spatial data from recorded images
US4113389A (en) * 1976-04-19 1978-09-12 Morton Kaye Optical measurement system
GB1597842A (en) * 1977-02-07 1981-09-09 Rolls Royce Indexing mechanism
GB8512727D0 (en) * 1985-05-20 1985-06-26 Vickers Plc Optical metrology
US4879664A (en) * 1985-05-23 1989-11-07 Kabushiki Kaisha Toshiba Three-dimensional position sensor and three-dimensional position setting system
DD263603A1 (de) * 1987-09-02 1989-01-04 Zeiss Jena Veb Carl Verfahren und einrichtung zum automatischen fokussieren an koordinatenmessgeraeten mit optoelektronischer strukturorterkennung
GB9117974D0 (en) * 1991-08-20 1991-10-09 Renishaw Metrology Ltd Non-contact trigger probe
JP2864993B2 (ja) * 1994-07-06 1999-03-08 信越半導体株式会社 表面形状測定装置
US5825666A (en) * 1995-06-07 1998-10-20 Freifeld; Daniel Optical coordinate measuring machines and optical touch probes
DE19618140A1 (de) * 1996-05-06 1997-11-13 Fraunhofer Ges Forschung 3D-Meßanordnung zur Ganzkörpererfassung und Einmessung einer entsprechenden Meßanordnung
US5969820A (en) * 1996-06-13 1999-10-19 Canon Kabushiki Kaisha Surface position detecting system and exposure apparatus using the same

Non-Patent Citations (1)

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Title
See references of WO9816797A1 *

Also Published As

Publication number Publication date
JP2001502061A (ja) 2001-02-13
US6141884A (en) 2000-11-07
DE19642293A1 (de) 1998-04-16
DE19642293C2 (de) 1998-07-16
WO1998016797A1 (fr) 1998-04-23

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