EP0931939A3 - Vakuumpumpe - Google Patents

Vakuumpumpe Download PDF

Info

Publication number
EP0931939A3
EP0931939A3 EP98111113A EP98111113A EP0931939A3 EP 0931939 A3 EP0931939 A3 EP 0931939A3 EP 98111113 A EP98111113 A EP 98111113A EP 98111113 A EP98111113 A EP 98111113A EP 0931939 A3 EP0931939 A3 EP 0931939A3
Authority
EP
European Patent Office
Prior art keywords
stages
diaphragm
pumping
molecular
pump casing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP98111113A
Other languages
English (en)
French (fr)
Other versions
EP0931939B1 (de
EP0931939A2 (de
Inventor
Mauro De Simon
Vincenzo Spaziani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian SpA
Original Assignee
Varian SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian SpA filed Critical Varian SpA
Publication of EP0931939A2 publication Critical patent/EP0931939A2/de
Publication of EP0931939A3 publication Critical patent/EP0931939A3/de
Application granted granted Critical
Publication of EP0931939B1 publication Critical patent/EP0931939B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B27/00—Multi-cylinder pumps specially adapted for elastic fluids and characterised by number or arrangement of cylinders
    • F04B27/04—Multi-cylinder pumps specially adapted for elastic fluids and characterised by number or arrangement of cylinders having cylinders in star- or fan-arrangement
    • F04B27/053—Multi-cylinder pumps specially adapted for elastic fluids and characterised by number or arrangement of cylinders having cylinders in star- or fan-arrangement with an actuating element at the inner ends of the cylinders
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP98111113A 1997-12-24 1998-06-17 Vakuumpumpe Expired - Lifetime EP0931939B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT97TO001139A IT1297347B1 (it) 1997-12-24 1997-12-24 Pompa da vuoto.
ITTO971139 1997-12-24

Publications (3)

Publication Number Publication Date
EP0931939A2 EP0931939A2 (de) 1999-07-28
EP0931939A3 true EP0931939A3 (de) 2000-08-30
EP0931939B1 EP0931939B1 (de) 2003-06-25

Family

ID=11416233

Family Applications (1)

Application Number Title Priority Date Filing Date
EP98111113A Expired - Lifetime EP0931939B1 (de) 1997-12-24 1998-06-17 Vakuumpumpe

Country Status (3)

Country Link
EP (1) EP0931939B1 (de)
DE (1) DE69815806T2 (de)
IT (1) IT1297347B1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6248157B1 (en) * 1999-08-20 2001-06-19 Systec Inc. Vacuum degassing
FR2822200B1 (fr) * 2001-03-19 2003-09-26 Cit Alcatel Systeme de pompage pour gaz a faible conductivite thermique
JP4250353B2 (ja) * 2001-06-22 2009-04-08 エドワーズ株式会社 真空ポンプ
CN101852199B (zh) * 2009-03-31 2011-11-09 储继国 复合真空泵
JP6009193B2 (ja) * 2012-03-30 2016-10-19 株式会社荏原製作所 真空排気装置
DE102013213257B4 (de) * 2013-07-05 2024-09-19 Pfeiffer Vacuum Gmbh Membranvakuumpumpe mit Gasballastventil und Pumpenanordnung
EP3267040B1 (de) 2016-07-04 2023-12-20 Pfeiffer Vacuum Gmbh Turbomolekularpumpe

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4797068A (en) * 1986-06-12 1989-01-10 Hitachi, Ltd. Vacuum evacuation system
DE3826710A1 (de) * 1987-08-07 1989-02-16 Japan Atomic Energy Res Inst Vakuumpumpe
EP0340685A2 (de) * 1988-04-30 1989-11-08 Nippon Ferrofluidics Corporation Zusammengestellte Vakuumpumpe
EP0344345A1 (de) * 1988-06-01 1989-12-06 Leybold Aktiengesellschaft Pumpsystem für ein Lecksuchgerät
EP0435291A1 (de) * 1989-12-28 1991-07-03 Alcatel Cit Kombinierte Turbomolekularpumpe mit zwei Wellen und atmosphärischem Auslass
US5039280A (en) * 1988-12-16 1991-08-13 Alcatel Cit Pump assembly for obtaining a high vacuum
EP0445855A1 (de) * 1990-03-09 1991-09-11 VARIAN S.p.A. Verbesserte Turbomolekularpumpe
DE4320963A1 (de) * 1993-04-15 1994-10-20 Knf Neuberger Gmbh Zweifach-Verdrängerpumpe

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4797068A (en) * 1986-06-12 1989-01-10 Hitachi, Ltd. Vacuum evacuation system
DE3826710A1 (de) * 1987-08-07 1989-02-16 Japan Atomic Energy Res Inst Vakuumpumpe
EP0340685A2 (de) * 1988-04-30 1989-11-08 Nippon Ferrofluidics Corporation Zusammengestellte Vakuumpumpe
EP0344345A1 (de) * 1988-06-01 1989-12-06 Leybold Aktiengesellschaft Pumpsystem für ein Lecksuchgerät
US5039280A (en) * 1988-12-16 1991-08-13 Alcatel Cit Pump assembly for obtaining a high vacuum
EP0435291A1 (de) * 1989-12-28 1991-07-03 Alcatel Cit Kombinierte Turbomolekularpumpe mit zwei Wellen und atmosphärischem Auslass
EP0445855A1 (de) * 1990-03-09 1991-09-11 VARIAN S.p.A. Verbesserte Turbomolekularpumpe
DE4320963A1 (de) * 1993-04-15 1994-10-20 Knf Neuberger Gmbh Zweifach-Verdrängerpumpe

Also Published As

Publication number Publication date
EP0931939B1 (de) 2003-06-25
DE69815806D1 (de) 2003-07-31
EP0931939A2 (de) 1999-07-28
HK1021401A1 (en) 2000-06-09
ITTO971139A1 (it) 1999-06-24
IT1297347B1 (it) 1999-09-01
DE69815806T2 (de) 2004-05-19

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