EP0962720A3 - Structure de ventilation pour une chambre de planarisation - Google Patents

Structure de ventilation pour une chambre de planarisation Download PDF

Info

Publication number: EP0962720A3
Authority: EP; European Patent Office
Prior art keywords: chamber; planarization; air; particles; planarization chamber
Prior art date: 1998-06-05
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Withdrawn

Application number

EP99107384A

Other languages

German (de)

English (en)

Other versions

EP0962720A2 (fr

Inventor

Kazuhiko Hirata

Hisato Matsubara

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

SpeedFam Co Ltd

Original Assignee

SpeedFam Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1998-06-05

Filing date

1999-04-23

Publication date

2000-07-12

1999-04-23 Application filed by SpeedFam Co Ltd filed Critical SpeedFam Co Ltd

1999-12-08 Publication of EP0962720A2 publication Critical patent/EP0962720A2/fr

2000-07-12 Publication of EP0962720A3 publication Critical patent/EP0962720A3/fr

Status Withdrawn legal-status Critical Current

Links

238000009423 ventilation Methods 0.000 title abstract 2
239000002245 particle Substances 0.000 abstract 3
230000000630 rising effect Effects 0.000 abstract 1
238000006748 scratching Methods 0.000 abstract 1
230000002393 scratching effect Effects 0.000 abstract 1

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
- F24F13/02—Ducting arrangements
- F24F13/06—Outlets for directing or distributing air into rooms or spaces, e.g. ceiling air diffuser
- F24F13/068—Outlets for directing or distributing air into rooms or spaces, e.g. ceiling air diffuser formed as perforated walls, ceilings or floors
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/06—Dust extraction equipment on grinding or polishing machines
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
- F24F13/08—Air-flow control members, e.g. louvres, grilles, flaps or guide plates
- F24F13/082—Grilles, registers or guards
- F24F2013/088—Air-flow straightener

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
Chemical & Material Sciences (AREA)
Combustion & Propulsion (AREA)
General Engineering & Computer Science (AREA)
Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
Treatment Of Fiber Materials (AREA)
Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

EP99107384A 1998-06-05 1999-04-23 Structure de ventilation pour une chambre de planarisation Withdrawn EP0962720A3 (fr)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
JP10174106A JPH11347937A (ja)	1998-06-05	1998-06-05	研磨加工室の換気構造
JP17410698		1998-06-05

Publications (2)

Publication Number	Publication Date
EP0962720A2 EP0962720A2 (fr)	1999-12-08
EP0962720A3 true EP0962720A3 (fr)	2000-07-12

Family

ID=15972762

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP99107384A Withdrawn EP0962720A3 (fr)	1998-06-05	1999-04-23	Structure de ventilation pour une chambre de planarisation

Country Status (3)

Country	Link
EP (1)	EP0962720A3 (fr)
JP (1)	JPH11347937A (fr)
KR (1)	KR20000005667A (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP4448297B2 (ja)	2002-12-27	2010-04-07	株式会社荏原製作所	基板研磨装置及び基板研磨方法
CH695326A5 (de) *	2004-11-26	2006-03-31	Lk Luftqualitaet Ag	Flaechenelement zur Temperierung von Raumluft.
JP4708966B2 (ja) *	2005-11-11	2011-06-22	株式会社ディスコ	切削装置
NL2004886C2 (nl) *	2010-06-14	2011-12-15	Jong Air B V	Luchtverversingsysteem en werkwijze.
CN102155771B (zh) *	2011-03-30	2013-02-27	四川电力设计咨询有限责任公司	汽机房降温通风系统及方法
JP5850788B2 (ja) *	2012-04-10	2016-02-03	株式会社ディスコ	切削装置
JP6927814B2 (ja) *	2017-09-08	2021-09-01	株式会社ディスコ	ドライ研磨装置
CN107457705A (zh) *	2017-09-22	2017-12-12	彭欣莉	一种自动化多角度打磨装置
CN108581846A (zh) *	2018-04-25	2018-09-28	安徽天顺环保设备股份有限公司	一种车间用打磨除尘工作台
JP7555774B2 (ja) *	2020-09-29	2024-09-25	芝浦メカトロニクス株式会社	送風器及び電子部品の実装装置
CN116652225A (zh) *	2023-05-09	2023-08-29	河南科创铝基新材料有限公司	一种普通车床密封防护负压收尘装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB1318364A (en) *	1969-09-15	1973-05-31	Nesher Ag	Apparatus for controlling delivery of clean gas to a clean environment
FR2485698A1 (fr) *	1980-06-24	1981-12-31	Aurore Sa	Poste de travail a ecoulements laminaires
GB2106240A (en) *	1981-09-22	1983-04-07	Howorth Air Eng Ltd	Air-conditioned workstation
EP0710803A1 (fr) *	1994-10-22	1996-05-08	Howorth Airtech Limited	Système d'air propre
US5679059A (en) *	1994-11-29	1997-10-21	Ebara Corporation	Polishing aparatus and method

1998
- 1998-06-05 JP JP10174106A patent/JPH11347937A/ja active Pending
1999
- 1999-04-23 EP EP99107384A patent/EP0962720A3/fr not_active Withdrawn
- 1999-05-17 KR KR1019990017545A patent/KR20000005667A/ko not_active Ceased

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB1318364A (en) *	1969-09-15	1973-05-31	Nesher Ag	Apparatus for controlling delivery of clean gas to a clean environment
FR2485698A1 (fr) *	1980-06-24	1981-12-31	Aurore Sa	Poste de travail a ecoulements laminaires
GB2106240A (en) *	1981-09-22	1983-04-07	Howorth Air Eng Ltd	Air-conditioned workstation
EP0710803A1 (fr) *	1994-10-22	1996-05-08	Howorth Airtech Limited	Système d'air propre
US5679059A (en) *	1994-11-29	1997-10-21	Ebara Corporation	Polishing aparatus and method

Also Published As

Publication number	Publication date
KR20000005667A (ko)	2000-01-25
EP0962720A2 (fr)	1999-12-08
JPH11347937A (ja)	1999-12-21

Legal Events

Date	Code	Title	Description
1999-10-22	PUAI	Public reference made under article 153(3) epc to a published international application that has entered the european phase	Free format text: ORIGINAL CODE: 0009012
1999-12-08	AK	Designated contracting states	Kind code of ref document: A2 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
1999-12-08	AX	Request for extension of the european patent	Free format text: AL;LT;LV;MK;RO;SI
2000-05-26	PUAL	Search report despatched	Free format text: ORIGINAL CODE: 0009013
2000-07-12	AK	Designated contracting states	Kind code of ref document: A3 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
2000-07-12	AX	Request for extension of the european patent	Free format text: AL;LT;LV;MK;RO;SI
2000-07-12	RIC1	Information provided on ipc code assigned before grant	Free format text: 7F 24F 13/068 A, 7F 24F 3/16 B
2001-03-21	AKX	Designation fees paid
2001-09-14	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN
2001-10-31	18D	Application deemed to be withdrawn	Effective date: 20010115

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JPS6427611A (en)	1989-01-30	Air cleaner
JPH07127889A (ja)	1995-05-16	クリーンブース装置
JP2002174441A (ja)	2002-06-21	空気清浄システム及び空気清浄ハウジング
JP3058645U (ja)	1999-06-22	エアーシャワー用フィルタ及びエアーシャワー装置
FI84233B (fi)	1991-07-31	Punktventilationsfoerfarande och punktventilationsanordning.
JPH0732538Y2 (ja)	1995-07-26	クリ−ンル−ム用エレベ−タ
WO1990004744A1 (fr)	1990-05-03	Procede et appareil permettant d'aerer des zones de travail d'une usine
JPS5774532A (en)	1982-05-10	Ventilating system
JP2003083573A (ja)	2003-03-19	分煙装置
JPH06281215A (ja)	1994-10-07	空気浄化システム