EP0965816A2 - Dispositif pour mesurer le contour géometrique d'un objet - Google Patents

Dispositif pour mesurer le contour géometrique d'un objet Download PDF

Info

Publication number
EP0965816A2
EP0965816A2 EP99111646A EP99111646A EP0965816A2 EP 0965816 A2 EP0965816 A2 EP 0965816A2 EP 99111646 A EP99111646 A EP 99111646A EP 99111646 A EP99111646 A EP 99111646A EP 0965816 A2 EP0965816 A2 EP 0965816A2
Authority
EP
European Patent Office
Prior art keywords
shaft
probe
button
detection device
fiber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP99111646A
Other languages
German (de)
English (en)
Other versions
EP0965816A3 (fr
Inventor
Mario Schroeder
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mycrona Gesellschaft fuer Innovative Messtechnik mbH
Original Assignee
Mycrona Gesellschaft fuer Innovative Messtechnik mbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE1998126641 external-priority patent/DE19826641B4/de
Priority claimed from DE1998128701 external-priority patent/DE19828701C1/de
Application filed by Mycrona Gesellschaft fuer Innovative Messtechnik mbH filed Critical Mycrona Gesellschaft fuer Innovative Messtechnik mbH
Publication of EP0965816A2 publication Critical patent/EP0965816A2/fr
Publication of EP0965816A3 publication Critical patent/EP0965816A3/fr
Ceased legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
    • G01B5/012—Contact-making feeler heads therefor

Definitions

  • the invention relates to a device for measuring the geometric structure of an object with an optical detection device and a button that has a shaft and a probe element connected thereto, on the Basis of an opto-tactile measuring method, according to the generic term of Claim 1.
  • Coordinate measuring devices are used to record the geometric structure of a measurement object known with which the surface of the measurement object mechanically is scanned.
  • These tactile coordinate measuring machines have one as a button essentially rigid shaft which is connected to a contact element, e.g. one Ball or a cross, is connected. The button and object become relative moved to each other.
  • a contact element e.g. one Ball or a cross
  • the button and object become relative moved to each other.
  • a force is transmitted via the essentially rigid shaft, thereby creating a Operated switch and a switching signal is generated. This signal will recorded and serves together with the information about the relative location of probe or probing element and measurement object to build a two or three-dimensional image of the surface of the object.
  • buttons are not arbitrary miniaturize and thus the trend towards miniaturization of workpieces are unable to follow.
  • Fine surface structures can be With such tactile measuring devices, it can only be recorded inaccurately. they are therefore only conditionally for measuring an increasing number of workpieces suitable. Because the shaft must always be so rigid that it touches the Object is able to transmit a force, whereby the shaft and Probe dimensions cannot be reduced arbitrarily. Farther the tactile accuracy decreases with decreasing shaft diameter because of the increasingly elastic deformability of the shaft.
  • the optical fiber is mounted on the camera so that the probe element is located in the focal plane near the optical axis and therefore is sharply imaged.
  • the probe element When touching the probe element with the Workpiece surface is shifted relative to the camera, so that the shown light spot changes its position on the sensor. This change of position can be detected and evaluated.
  • the advantage of this technique is that the detection of the probing no power transmission between the probe and Sensor technology is required. This eliminates all influences from elastic or plastic deformation of the stylus excluded.
  • the shaft, here the Glass fiber can therefore be made extremely thin, creating a high Scanning accuracy is achievable.
  • the miniaturization of the button also leads to problems with practical use of such an opto-tactile measuring system.
  • the mechanical sensitivity of the button its frequent replacement necessary, because a stylus designed as a fiber comes along careless handling, e.g. when changing the test object, easily to break.
  • the probe ball that is on the End of the shaft manually adjusted in the focal plane of the camera become. This is usually done by manually adjusting the shaft length and is because of the very small dimensions of the button and because of the large Enlargement of the optical system cumbersome and time consuming.
  • the miniaturization leads to the fact that the probing element of adhesive forces or electrostatic charge on the test object stays in the starting position and not just because of its own weight returns. This can lead to measurement inaccuracies. There is still none here found a satisfactory solution.
  • the invention is therefore based on the object of a coordinate measuring system to develop opto-tactile basis in such a way that maintenance and Repair, especially after changing the button and the Adjustment of the system is simple and time-saving.
  • the problem is solved with a device for measuring the Geometric structure of an object with an optical detection device and a button that has a shaft and a contact element connected to it has, the probe element deflectable by contact with the object and the change in position of the probe element and / or the shaft and / or target marks connected to the shaft with the optical detection device is detectable in that the button and the optical detection device are movable independently of one another.
  • Advantageous further training such a multi-coordinate measuring machine with a fiber probe smallest design are characterized in the subclaims.
  • the optical, movable, preferably movable, relative to the button Detection device is adjusting the device before or during the Measurement of an object considerably simplified. Because now the optical Detection device and the button moved relative to each other as long or be moved automatically or remotely until the image of the Probe element and / or a target at a defined point within the Detection area of the optical detection device or of it recorded image. It is essential that the Probe element and / or the target mark in the focal plane of the optical Detection device is brought. According to the invention, it may therefore be sufficient if the button and detection device are in the axial direction, i.e. in Direction of observation, are movable relative to each other. Then it can Probing element moved into the focal plane of the optical detection device become. To enable better adjustment, e.g. after one It is preferable to replace the button and its holder mobility in all three spatial directions is provided.
  • a positioning device for at least one of the components provided, preferably for both.
  • the component is with this coupled and can thus be positioned with high accuracy.
  • the positioning units are preferably equipped with an electric motor for Example stepper motor, operated and can be controlled remotely, so that System is easy to operate from a control panel or control computer.
  • a positioning unit is preferably assigned to the button, which is used for Moving or moving the button when scanning the measurement object is used.
  • the optical detection device is when scanning the Object so moved with the button that the button or Probe element always in a defined spatial position relative to the detection device located.
  • the detection device is or the positioning device assigned to it, preferably with that of the button associated positioning device coupled.
  • the Shaft preferably made of a wire or an optical fiber and is so thin that the probing element from his even with a slight touch of the object Rest position is deflected.
  • the shaft is preferably flexible to a easy deflectability and thus to ensure high probing accuracy.
  • an essentially rigid shaft can be provided, which with a joint is attached to the bracket of the button that he at Touching the object is deflected.
  • a flexible or articulated suspended design of the shaft is possible because of the optical Detection of the position of the contact element does not transmit any force via the shaft must become. Since even light touches to deflect the Lead probing element, which is detected via the imaging optics Measuring accuracies in the range of a few micrometers and less achievable.
  • the shaft preferably has a diameter of at most 200 ⁇ m, preferably between 25 ⁇ m and 50 ⁇ m.
  • the contact element is preferred a ball with a maximum diameter of 500 microns, preferably between 30 ⁇ m and 100 ⁇ m.
  • This probing element is either on the creative end glued on or created by melting the creative end. Under Under certain circumstances, the shaft end itself can act as a contact element, without that an additional thickening is required.
  • the measuring principle is based on the optical detection of the position of the probe element or the barrel or a target attached to the barrel.
  • a CCD sensor also serves as the optical detection device a corresponding imaging optics, the button or the probing element or maps the target on the sensor.
  • the CCD sensor is a line or Area sensor.
  • the image signals of the detection device become one Evaluation unit supplied and can be evaluated there, e.g. based on an optical Playback of the image recorded by the sensor. On this picture you can Image processing techniques are used to capture changes the position of the probing element or the target or the shaft.
  • a control signal can be obtained from the probing element from a desired position in the image which is used to automatically adjust the actual position of the Target mark or the probing element by means of the associated positioning unit serves, in particular by a control loop. In this way, the adjustment of the probing element can be advantageously automated.
  • an optical detection device is the use a point detector with imaging optics. which is the probing element or a target in the rest position of the shaft directly on the Maps point detector.
  • the point detector emits an output signal which is a measure of the amount of light detected and therefore carries no image information.
  • the point detector is, for example, a photo detector in connection with a perforated diaphragm arranged in front of it, the opening of which is at the location of the image of the Scanning element or the target is located and about the size of or something is smaller than its image size.
  • the target mark or the contact element can be self-illuminating, the light emitted therefrom at rest by the imaging optics is mapped onto the point detector. If the shaft is deflected, it will light emitted by the target or the probe element from the point detector not detected at all or only partially, e.g. B. in the case of the pinhole hidden by this. In this way, discriminability of the Position of the target mark or the probing element perpendicular to the optical axis, but also reached in the direction of the optical axis. From the amplitude of the Output signal of the point detector can be read directly whether a Displacement of the shaft by touching the measurement object has taken place.
  • a touch is diagnosed when the amplitude of the Output signal falls below a certain threshold. Because the detection device in this case no complicated image information is determined, is none Image processing necessary.
  • the point detector can also pass through a detection field a CCD sensor are formed, the signal of which is evaluated separately.
  • the Probe element to be detected or the target mark is lit up.
  • Target and Probe element can also be identical.
  • For Illumination of the target or the probing element is preferably in the shaft carried an optical fiber. This can also form the shaft itself.
  • the surface of the probing element or the target preferably slightly roughened or matted.
  • the optical one Contrast between target or probing element and the environment Detection of the position of the target mark or the probing element used.
  • the target mark or the probing element can be used be illuminated from below or from the side. Again, it is an advantage if the surface of the probe element or the target is slightly roughened or is matted.
  • the probe ball or at least the shaft end of the probe element made of glass and is matted and can be illuminated from the inside for the better Light emission and for better recognition by a camera.
  • the solution to the problem further consists in a multi-coordinate measuring machine, which have a fiber probe of the smallest design and a camera has its optical detection, the measuring machine having a device which produces blowing air, which in air blasts over at least one Part of the probe strokes to move it in the event of sticking Detection of a test object by means of a gas or air blast again from the To be able to detach the place of detention.
  • the button preferably has an extension arm; the one with his shaft is connected and with which the shaft can be brought to the measuring point.
  • the boom is at least partially hollow and a gas flow for Able to conduct probing element, preferably an air stream.
  • a gas or a gas mixture or air mixture which is preferably in one Pressure vessel is contained, is briefly pressurized by the boom blown, especially after the presence of the Object was detected.
  • the probe element is Object or detention, if attached to it, and returns to its rest position in the button reference system.
  • the gas flow should be preferred run in the vertical direction to the greatest extent possible to wrap evenly and not to vibrate. Nevertheless the gas pressure should be so high that the adhesive forces that the probing element if necessary, adhere to the object, be overcome.
  • the gas is preferably air, which is located in a compressed air container. This is to the Cantilever at its end facing away from the probing element. The Connection between compressed air tank and boom can preferably be released remotely.
  • the rigid boom also serves to attach the shaft and the contact element to keep the location of the measurement. It is preferably bow-shaped, e.g. in the form of a tube, and by means of a positioning unit for scanning the Object movable.
  • the boom is preferably largely horizontal, to bend in the area above the measuring point. The ends in this area Boom and releases the shaft so that it is free in the area of the measuring point is mobile.
  • the inner wall of the boom is mirrored so that light can pass through the cantilever can be guided onto the probe element and / or onto a target.
  • the probing element and / or the target can thus be targeted by the cantilever be illuminated.
  • the device can thus be made more compact since no space has to be provided for a separate light source.
  • the light source can also be attached to the boom in the area above the measuring point be attached.
  • two channels can be inside the boom be provided, one of which is hollow for directing the gas flow and the another is, for example, an optical fiber.
  • the lighting of the probe element and / or the target can also be done from the inside if the shaft is a Contains optical fiber or is formed from an optical fiber.
  • the contact area is preferably reduced, i. H. the area of the Probe element that touches the object. This also allows higher ones Achieve measurement accuracy, because a closer scanning is possible.
  • the probe element is a ball with an attached tip
  • the Tip is preferably conical and horizontal in the rest position of the shaft is aligned.
  • the contact element can also be a disk or a ring, wherein it is preferably oriented horizontally in the rest position of the shaft.
  • a cleaning bath is provided, in which the probe element and Shaft is completely or partially immersed.
  • the cleaning bath can be more integral Be part of the measuring device. It is preferably an ultrasonic bath.
  • a light source is used in a multi-coordinate measuring machine Illumination of the probe element and / or a target mark and and a Camera for optical detection of the probing element and / or the target provided, which is preferably an annularly arranged light source smallest design or a ring-shaped light source is and itself preferably located in the holder that also holds the fiber probe.
  • the smallest one fiber probe Design made of glass and a camera that can be moved along an axis has optical detection, a device is provided with which broken fiber of the fiber probe and pushed with the help of Device by heating the front end a new measuring ball is melted.
  • FIG. 1 schematically shows a device according to the invention with a button 1 and an optical detection device 5.
  • the device is used for Detection of the geometric structure of an object 4, which is on a Measuring table 12 is located by scanning or probing its surface.
  • the button 1 consists of a rigid bow-shaped bracket 14, on which a flexible shaft 2 is movable, preferably pendulum, is suspended.
  • the Boom 14 can also be made hollow in the form of a cladding tube the cavity of the shaft 2, for example as a wire or optical fiber is led.
  • the cavity can be used in one embodiment of the invention Gas flow can be passed to the shaft or in the event of sticking connected probe element 3 to detach from the test object.
  • the button 1 is over a Bracket 13 with a positioning device 9 and above with another Bracket 15 connected.
  • the bracket 15 is used to hold the optical System and the button and is usually rigid with the measuring table 12 connected.
  • this positioning device 9 the push button in three Spatial directions, expediently perpendicular and parallel to the measuring table plane, be moved so that a scanning or probing the entire surface of the Object 4 is possible.
  • the probe has a probe element 3 at the measuring-table end of the shaft 2 on which is a ball here.
  • the proportions shown are pure schematically. If the button with the positioning device 9 is on the object 4 moved up, the probing element 3 touches the test object 4 and is off deflected to its rest position. This change in position of the probing element 3 is detected with the detection device 5.
  • This consists of a Imaging optics 7 - here indicated schematically by a lens - and one CCD line or area sensor 6. With the imaging optics 7, the plane in which the probe element is in the idle state, on the CCD sensor 6 pictured. Therefore button 1 and detection device 5 are in the adjustment of Systems so to position relative to each other that the probing element 3 in the focal plane 11 of the detection device 5. Furthermore, should the probing element 3 in the region of the optical axis of the imaging optics 7 so that it appears approximately in the middle of the recorded image and its change in position can be easily detected.
  • this adjustment of the positions of the detection device 5 and button 1 especially after replacing the shaft 2 can cause problems
  • another Positioning unit 8 is provided.
  • this is the detection device 5 assigned and makes it possible, at least in the axial (z-) Move direction relative to button 1. That of the detection device assigned (adjustment) positioning device 8 is on the (scanning) positioning device 9 attached, which is assigned to button 1.
  • the detection device 5 follows all the arrangement during the measurement Movements of the button, the spatial position of the button and detection device remains unchanged relative to each other. Only for the adjustment the system is adapted by the positioning device 8.
  • the positioning device 8 When a Boom 14 of defined length and fixed alignment is used for example, is firmly connected to the bracket 13, it can be readjusted of the system are sufficient if the positioning device 8, the Detection device 5 is assigned, only in the direction of the optical axis or is displaceable perpendicular to the measuring table. Because when you replace the Shafts will usually only change their length. However, it is advantageous if the positioning device 8 also has a lateral displaceability of the Detection device 5 enables.
  • the button 1 may be equipped with an independent positioning device 8 '. This is shown in Figure 2. Finally, both elements can be independent be positionable from each other, but when scanning the measurement object have to be moved synchronously.
  • the probing element 3, which serves as the target, is preferably self-illuminating.
  • the lighting is advantageous via an optical fiber made by the bracket 13 and the boom 14 of a Coming light source is guided and forms the shaft 2.
  • the measuring point by an external Light source 10 is illuminated.
  • the invention enables the maintenance and repair of opto-tactile Simplify coordinate measuring machines and thereby their to facilitate practical usability and manageability.
  • the invention leaves are therefore advantageously used commercially in the field of micromechanics.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
EP99111646A 1998-06-17 1999-06-16 Dispositif pour mesurer le contour géometrique d'un objet Ceased EP0965816A3 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE1998126641 DE19826641B4 (de) 1998-06-17 1998-06-17 Vorrichtungen und Verfahren im Zusammenhang mit Faser-Meßtastern
DE19826641 1998-06-19
DE1998128701 DE19828701C1 (de) 1998-06-26 1998-06-26 Faser-Meßtaster für Koordinaten-Meßmaschinen
DE19828701 1998-06-26

Publications (2)

Publication Number Publication Date
EP0965816A2 true EP0965816A2 (fr) 1999-12-22
EP0965816A3 EP0965816A3 (fr) 2002-06-19

Family

ID=26046827

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99111646A Ceased EP0965816A3 (fr) 1998-06-17 1999-06-16 Dispositif pour mesurer le contour géometrique d'un objet

Country Status (1)

Country Link
EP (1) EP0965816A3 (fr)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1528354A3 (fr) * 2003-10-29 2005-12-28 Werth Messtechnik GmbH Procédé et dispositif pour la mesure d'un objet à l'aide d'une machine de mesure de coordonnées
WO2006094641A1 (fr) * 2005-03-11 2006-09-14 Forschungszentrum Karlsruhe Gmbh Procede et dispositif pour mesurer les structures d'un objet
WO2007082582A1 (fr) * 2006-01-19 2007-07-26 Forschungszentrum Karlsruhe Gmbh Dispositif pour mesurer des structures d'un objet
CN100368769C (zh) * 2005-12-20 2008-02-13 西安工业学院 基于数据图像处理的虚拟坐标测量机及其测量方法
EP1953497A1 (fr) * 2007-01-31 2008-08-06 Mitutoyo Corporation Tête de palpage avec fonction de nettoyage
DE102010060833A1 (de) 2009-11-26 2011-06-01 Werth Messtechnik Gmbh Verfahren und Anordnung zur taktil-optischen Bestimmung der Geometrie eines Messobjektes
DE102010018819A1 (de) * 2010-04-29 2011-11-03 Hommel-Etamic Gmbh Oberflächenmeßgerät
EP3147627A1 (fr) * 2015-09-22 2017-03-29 Mikron Agie Charmilles AG Étalonnage de palpeur optique

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3596883A (en) 1968-11-08 1971-08-03 Branson Instr Ultrasonic apparatus
DE2519237A1 (de) 1975-04-30 1976-11-18 Pahl Wolfram Pneumatischer mehrkoordinaten-wegaufnehmer
JPS6064205A (ja) 1983-09-20 1985-04-12 Niigata Eng Co Ltd 接触検出装置
US4536661A (en) 1982-10-15 1985-08-20 Renishaw Plc Position-sensing apparatus
EP0236777A1 (fr) 1986-02-18 1987-09-16 ELGEMA Elektronik-Gerätebau-Mainburg GmbH Appareil de mesure et de positionnement
DE4327250A1 (de) 1992-09-25 1994-03-31 Zeiss Carl Fa Verfahren zur Koordinatenmessung an Werkstücken
EP0645611A1 (fr) 1993-09-25 1995-03-29 GRUNDIG E.M.V. Elektro-Mechanische Versuchsanstalt Max Grundig GmbH & Co. KG Dispositif pour la détermination des interfaces visibles dans des fluides
US5628922A (en) 1995-07-14 1997-05-13 Motorola, Inc. Electrical flame-off wand
DE29710242U1 (de) 1997-06-12 1997-08-07 Trapet, Eugen, Dr., 38176 Wendeburg Taster zur Messung geometrischer Strukturen

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3596883A (en) 1968-11-08 1971-08-03 Branson Instr Ultrasonic apparatus
DE2519237A1 (de) 1975-04-30 1976-11-18 Pahl Wolfram Pneumatischer mehrkoordinaten-wegaufnehmer
US4536661A (en) 1982-10-15 1985-08-20 Renishaw Plc Position-sensing apparatus
JPS6064205A (ja) 1983-09-20 1985-04-12 Niigata Eng Co Ltd 接触検出装置
EP0236777A1 (fr) 1986-02-18 1987-09-16 ELGEMA Elektronik-Gerätebau-Mainburg GmbH Appareil de mesure et de positionnement
DE4327250A1 (de) 1992-09-25 1994-03-31 Zeiss Carl Fa Verfahren zur Koordinatenmessung an Werkstücken
EP0645611A1 (fr) 1993-09-25 1995-03-29 GRUNDIG E.M.V. Elektro-Mechanische Versuchsanstalt Max Grundig GmbH & Co. KG Dispositif pour la détermination des interfaces visibles dans des fluides
US5628922A (en) 1995-07-14 1997-05-13 Motorola, Inc. Electrical flame-off wand
DE29710242U1 (de) 1997-06-12 1997-08-07 Trapet, Eugen, Dr., 38176 Wendeburg Taster zur Messung geometrischer Strukturen

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
G. JI; H. SCHWENKE; E. TRAPET, OPTO-TAKTILER TASTER, QUALITY-ENGINEERING, July 1998 (1998-07-01), pages 40 - 43

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1528354A3 (fr) * 2003-10-29 2005-12-28 Werth Messtechnik GmbH Procédé et dispositif pour la mesure d'un objet à l'aide d'une machine de mesure de coordonnées
WO2006094641A1 (fr) * 2005-03-11 2006-09-14 Forschungszentrum Karlsruhe Gmbh Procede et dispositif pour mesurer les structures d'un objet
CN100368769C (zh) * 2005-12-20 2008-02-13 西安工业学院 基于数据图像处理的虚拟坐标测量机及其测量方法
WO2007082582A1 (fr) * 2006-01-19 2007-07-26 Forschungszentrum Karlsruhe Gmbh Dispositif pour mesurer des structures d'un objet
EP1953497A1 (fr) * 2007-01-31 2008-08-06 Mitutoyo Corporation Tête de palpage avec fonction de nettoyage
DE102010060833A1 (de) 2009-11-26 2011-06-01 Werth Messtechnik Gmbh Verfahren und Anordnung zur taktil-optischen Bestimmung der Geometrie eines Messobjektes
WO2011064339A2 (fr) 2009-11-26 2011-06-03 Werth Messtechnik Gmbh Procédé et système de détermination tactile-optique de la géométrie d'un objet à mesurer
DE102010018819A1 (de) * 2010-04-29 2011-11-03 Hommel-Etamic Gmbh Oberflächenmeßgerät
DE102010018819B4 (de) * 2010-04-29 2012-01-19 Hommel-Etamic Gmbh Oberflächenmeßgerät
EP3147627A1 (fr) * 2015-09-22 2017-03-29 Mikron Agie Charmilles AG Étalonnage de palpeur optique
US10030960B2 (en) 2015-09-22 2018-07-24 Mikron Agie Charmilles Ag Optical measuring probe calibration

Also Published As

Publication number Publication date
EP0965816A3 (fr) 2002-06-19

Similar Documents

Publication Publication Date Title
EP0614517B1 (fr) Procede et appareil pour la mesure des coordonnees sur des pieces a usiner
EP0362625B1 (fr) Appareil pour mesurer des coordonnées avec tête de palpage optique
EP1071922B1 (fr) Procede et dispositif permettant de detecter la geometrie d'objets a l'aide d'appareils de mesure de coordonnees
DE102010060833A1 (de) Verfahren und Anordnung zur taktil-optischen Bestimmung der Geometrie eines Messobjektes
WO2015082683A2 (fr) Dispositif et procédé pour la mesure de pièces
EP1320720A2 (fr) Dispositif et procede de mesure opto-tactile de structures
WO1998057121A1 (fr) Appareil de mesure de coordonnees comportant un palpeur et detecteur optique mesurant la position de ce dernier
DE102018217285A1 (de) Tastsystem zur optischen und taktilen Vermessung mindestens eines Messobjekts
EP1082581B1 (fr) Dispositif pour la mesure de structures d'un objet
EP1071921A1 (fr) Procede et dispositif de mesure de la structure d'un objet
EP1762328A1 (fr) Optique d'usinage laser guidé de manière tactile
EP0908709A2 (fr) Dispositif de mesure sans contact de vibrations
DE19805892A1 (de) Verfahren und Anordnung zur Messung von Strukturen eines Objekts
EP1080339A1 (fr) Procede de palpage et dispositif pour la determination de caracteristiques d'une surface d'une eprouvette selon ledit procede
DE19642293C2 (de) Koordinatenmeßgerät
EP3303990A1 (fr) Commande d'éclairage lors de l'utilisation d'appareils de mesure optiques
WO2005108916A1 (fr) Instrument de mesure a coordonnees et procede de mesure de structures a l'aide de cet instrument de mesure a coordonnees
EP1974180B1 (fr) Dispositif pour mesurer des structures d'un objet
DE19826641B4 (de) Vorrichtungen und Verfahren im Zusammenhang mit Faser-Meßtastern
DE19847711B4 (de) Anordnung zur Messung von Strukturen eines Objektes
DE202006012840U1 (de) Taktil geführte Laserbearbeitungsoptik
DE102016125480A1 (de) Messeinrichtung, Messanordnung und Verfahren zur Bestimmung der räumlichen Position und räumlichen Orientierung eines Sensors
DE102006002618B3 (de) Vorrichtung zur Messung von Strukturen eines Objekts

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

AX Request for extension of the european patent

Free format text: AL;LT;LV;MK;RO;SI

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

AX Request for extension of the european patent

Free format text: AL;LT;LV;MK;RO;SI

17P Request for examination filed

Effective date: 20020715

AKX Designation fees paid

Designated state(s): AT BE CH CY DE DK ES LI

RBV Designated contracting states (corrected)

Designated state(s): CH DE ES FR GB IT LI SE

17Q First examination report despatched

Effective date: 20071011

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN REFUSED

18R Application refused

Effective date: 20120726