EP0973149A3 - Ultrasonic transducers - Google Patents

Ultrasonic transducers Download PDF

Info

Publication number
EP0973149A3
EP0973149A3 EP99305633A EP99305633A EP0973149A3 EP 0973149 A3 EP0973149 A3 EP 0973149A3 EP 99305633 A EP99305633 A EP 99305633A EP 99305633 A EP99305633 A EP 99305633A EP 0973149 A3 EP0973149 A3 EP 0973149A3
Authority
EP
European Patent Office
Prior art keywords
conductive membrane
depressions
transducers
resonant
approach
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP99305633A
Other languages
German (de)
French (fr)
Other versions
EP0973149A2 (en
Inventor
Frank Joseph Pompei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Massachusetts Institute of Technology
Original Assignee
Massachusetts Institute of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/300,200 external-priority patent/US6775388B1/en
Application filed by Massachusetts Institute of Technology filed Critical Massachusetts Institute of Technology
Publication of EP0973149A2 publication Critical patent/EP0973149A2/en
Publication of EP0973149A3 publication Critical patent/EP0973149A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0688—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0611—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile
    • B06B1/0614—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile for generating several frequencies

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)

Abstract

Sonic transducers utilize resonant cavities of varying depths to achieve wide operational bandwidth. The transducers (29) may include a conductive membrane (38) spaced apart from one or more backplate electrodes (32a,32b). In one approach, spacing is achieved using a dielectric spacer (34) having a series of depressions (36) arranged in a pattern, the depressions forming cavities each resonant at a predetermined frequency. In another approach, the conductive membrane (62) is piezoelectrically active, and the transducer is simultaneously driven in both piezoelectric and electrostatic modes.
EP99305633A 1998-07-16 1999-07-15 Ultrasonic transducers Withdrawn EP0973149A3 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US11627198A 1998-07-16 1998-07-16
US116271 1998-07-16
US09/300,200 US6775388B1 (en) 1998-07-16 1999-04-27 Ultrasonic transducers
US300200 1999-04-27

Publications (2)

Publication Number Publication Date
EP0973149A2 EP0973149A2 (en) 2000-01-19
EP0973149A3 true EP0973149A3 (en) 2000-12-27

Family

ID=26814068

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99305633A Withdrawn EP0973149A3 (en) 1998-07-16 1999-07-15 Ultrasonic transducers

Country Status (2)

Country Link
EP (1) EP0973149A3 (en)
JP (1) JP4294798B2 (en)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000050387A (en) 1998-07-16 2000-02-18 Massachusetts Inst Of Technol <Mit> Parametric audio system
US7391872B2 (en) * 1999-04-27 2008-06-24 Frank Joseph Pompei Parametric audio system
US7319763B2 (en) 2001-07-11 2008-01-15 American Technology Corporation Power amplification for parametric loudspeakers
WO2003032678A2 (en) 2001-10-09 2003-04-17 Frank Joseph Pompei Ultrasonic transducer for parametric array
KR100512960B1 (en) * 2002-09-26 2005-09-07 삼성전자주식회사 Flexible MEMS transducer and its manufacturing method, and flexible MEMS wireless microphone
JP4123192B2 (en) 2004-06-03 2008-07-23 セイコーエプソン株式会社 Ultrasonic transducer and method of manufacturing ultrasonic transducer
EP1779784B1 (en) * 2004-06-07 2015-10-14 Olympus Corporation Electrostatic capacity type ultrasonic transducer
JP3873990B2 (en) 2004-06-11 2007-01-31 セイコーエプソン株式会社 Ultrasonic transducer and ultrasonic speaker using the same
JP4706578B2 (en) 2005-09-27 2011-06-22 セイコーエプソン株式会社 Electrostatic ultrasonic transducer, electrostatic ultrasonic transducer design method, electrostatic ultrasonic transducer design apparatus, electrostatic ultrasonic transducer design program, manufacturing method, and display device
JP4682927B2 (en) 2005-08-03 2011-05-11 セイコーエプソン株式会社 Electrostatic ultrasonic transducer, ultrasonic speaker, audio signal reproduction method, ultrasonic transducer electrode manufacturing method, ultrasonic transducer manufacturing method, superdirective acoustic system, and display device
US20080247572A1 (en) * 2005-09-09 2008-10-09 Nxp B.V. Micro-Electro-Mechanical System (Mems) Capacitor Microphone and Method of Manufacturing Thereof
JP5103873B2 (en) 2005-12-07 2012-12-19 セイコーエプソン株式会社 Electrostatic ultrasonic transducer drive control method, electrostatic ultrasonic transducer, ultrasonic speaker using the same, audio signal reproduction method, superdirective acoustic system, and display device
JP4802998B2 (en) 2005-12-19 2011-10-26 セイコーエプソン株式会社 Electrostatic ultrasonic transducer drive control method, electrostatic ultrasonic transducer, ultrasonic speaker using the same, audio signal reproduction method, superdirective acoustic system, and display device
JP4844411B2 (en) 2006-02-21 2011-12-28 セイコーエプソン株式会社 Electrostatic ultrasonic transducer, method for manufacturing electrostatic ultrasonic transducer, ultrasonic speaker, audio signal reproduction method, superdirective acoustic system, and display device
KR100781467B1 (en) * 2006-07-13 2007-12-03 학교법인 포항공과대학교 MEMS-based multi-cavity ultrasonic transducer for superdirectional ultrasonic distance measurement using parametric transmissive arrays in air
EP2114085A1 (en) 2008-04-28 2009-11-04 Nederlandse Centrale Organisatie Voor Toegepast Natuurwetenschappelijk Onderzoek TNO Composite microphone, microphone assembly and method of manufacturing those
US20130278111A1 (en) * 2012-04-19 2013-10-24 Masdar Institute Of Science And Technology Piezoelectric micromachined ultrasound transducer with patterned electrodes
JP6315616B2 (en) * 2012-06-12 2018-04-25 ジョセフ ポンペイ フランク Ultrasonic transducer
DE202012010508U1 (en) * 2012-10-25 2012-11-12 BANDELIN patent GmbH & Co. KG Device for applying liquid media with ultrasound through a membrane and ultrasound system
DE102013211612A1 (en) * 2013-06-20 2014-12-24 Robert Bosch Gmbh Ultrasonic transducer assembly and motor vehicle with an ultrasonic transducer assembly
KR102077741B1 (en) 2013-10-23 2020-02-14 삼성전자주식회사 Ultrasonic transducer and ultrasonic diagnostic equipment including the same
KR102163729B1 (en) 2013-11-20 2020-10-08 삼성전자주식회사 Electro acoustic transducer
KR101529814B1 (en) * 2014-01-09 2015-06-17 성균관대학교산학협력단 Hybrid electric generating elements
KR102250185B1 (en) 2014-01-29 2021-05-10 삼성전자주식회사 Electro acoustic transducer
KR102075790B1 (en) * 2018-06-29 2020-02-10 한국기계연구원 Non-contact ultrasonic transducer
CN110460941B (en) * 2019-07-23 2020-12-18 武汉理工大学 Transceiver integrated graphene acoustic sensor
KR102267073B1 (en) * 2019-11-11 2021-06-21 재단법인 파동에너지 극한제어 연구단 Active ultrasonic delivery structure
KR102267074B1 (en) * 2019-11-11 2021-06-21 재단법인 파동에너지 극한제어 연구단 Cover unit of ultrasonic transducer in acoustic extraordinary transmission type
KR102267072B1 (en) 2019-11-11 2021-06-21 재단법인 파동에너지 극한제어 연구단 Ultrasonic delivery structure
CN112073884A (en) * 2020-08-27 2020-12-11 西北工业大学 PVDF-based clamping type transmitting transducer

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1234767A (en) * 1967-09-18 1971-06-09 Decca Ltd Improvements in or relating to electro-acoustic transducers
US3816671A (en) * 1972-04-06 1974-06-11 Thermo Electron Corp Electret transducer cartridge and case
JPS59171300A (en) * 1983-03-17 1984-09-27 Matsushita Electric Ind Co Ltd Condenser microphone

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1234767A (en) * 1967-09-18 1971-06-09 Decca Ltd Improvements in or relating to electro-acoustic transducers
US3816671A (en) * 1972-04-06 1974-06-11 Thermo Electron Corp Electret transducer cartridge and case
JPS59171300A (en) * 1983-03-17 1984-09-27 Matsushita Electric Ind Co Ltd Condenser microphone

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 009, no. 027 (E - 294) 6 February 1985 (1985-02-06) *

Also Published As

Publication number Publication date
JP4294798B2 (en) 2009-07-15
JP2000050392A (en) 2000-02-18
EP0973149A2 (en) 2000-01-19

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