EP0979947A2 - Turbomolekularpumpe - Google Patents

Turbomolekularpumpe Download PDF

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Publication number
EP0979947A2
EP0979947A2 EP99306359A EP99306359A EP0979947A2 EP 0979947 A2 EP0979947 A2 EP 0979947A2 EP 99306359 A EP99306359 A EP 99306359A EP 99306359 A EP99306359 A EP 99306359A EP 0979947 A2 EP0979947 A2 EP 0979947A2
Authority
EP
European Patent Office
Prior art keywords
blades
stator
stator blade
outer casing
turbomolecular pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP99306359A
Other languages
English (en)
French (fr)
Other versions
EP0979947A3 (de
Inventor
Akira Yamauchi
Manabu Nonaka
Takashi Okada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
Seiko Seiki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Seiki KK filed Critical Seiko Seiki KK
Publication of EP0979947A2 publication Critical patent/EP0979947A2/de
Publication of EP0979947A3 publication Critical patent/EP0979947A3/de
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Definitions

  • Fig. 5A is a longitudinal sectional view schematically showing a part of the turbomolecular pump equipped with the heater 8 and the water-cooling pipe 12; and Fig. 5B is a sectional view taken along the line A-A of Fig. 5A.
  • the present invention has been made in view of these conventional problems, and therefore has an object of the present invention to provide an improved turbomolecular pump in which an improvement of the thermal conduction efficiency within the pump allows heat generated at the rotor blades to effectively escape, thereby improving pressure-allowance at the intake port and the exhaust port.
  • a gap 23 formed between the stator spacer 22 and an outer casing 24 is dimensioned based on a difference in thermal expansion in a radial direction at a predetermined temperature (calculated by an inverse operation from an allowable temperature of the blades of the rotor blade 2).
  • (1) - (2) 0.36 (mm) can be found. Accordingly, when the gap 23 is 0.18 (mm) or less (the gap 23 is a dimension at one side, and is thus 0.36/2), the stator blade spacers 22 and the outer casing 24 are brought into contact with each other.
  • Fig. 3B shows a state the stator blade spacers 22 and the outer casing 24 are brought into contact with each other. This contact may improve a thermal conductive effect, and increases even more the heat radiation through the outer casing 24 than the conventional one.
  • an annular member may be arranged at the respective gaps formed between the stator blades and the stator blade spacers.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP99306359A 1998-08-12 1999-08-11 Turbomolekularpumpe Withdrawn EP0979947A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP10227922A JP2000064986A (ja) 1998-08-12 1998-08-12 ターボ分子ポンプ
JP22792298 1998-08-12

Publications (2)

Publication Number Publication Date
EP0979947A2 true EP0979947A2 (de) 2000-02-16
EP0979947A3 EP0979947A3 (de) 2001-03-28

Family

ID=16868408

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99306359A Withdrawn EP0979947A3 (de) 1998-08-12 1999-08-11 Turbomolekularpumpe

Country Status (3)

Country Link
EP (1) EP0979947A3 (de)
JP (1) JP2000064986A (de)
KR (1) KR20000017282A (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007025854A1 (de) * 2005-09-01 2007-03-08 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
CN107208649A (zh) * 2015-01-30 2017-09-26 埃地沃兹日本有限公司 真空泵
CN112983835A (zh) * 2021-03-09 2021-06-18 苏州冠裕机电科技有限公司 一种具有冷却机构的高温磁力泵及其冷却方法

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4661378B2 (ja) * 2005-06-13 2011-03-30 株式会社島津製作所 ターボ分子ポンプ
WO2013065440A1 (ja) * 2011-10-31 2013-05-10 エドワーズ株式会社 固定部材及び真空ポンプ
JP6353257B2 (ja) 2014-03-31 2018-07-04 エドワーズ株式会社 排気口部品、および真空ポンプ
JP7712252B2 (ja) * 2022-12-19 2025-07-23 エドワーズ株式会社 真空ポンプ

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6077795U (ja) * 1983-10-31 1985-05-30 株式会社島津製作所 タ−ボ分子ポンプ
JPS60134893U (ja) * 1984-02-20 1985-09-07 セイコー精機株式会社 タ−ボ分子ポンプにおけるステ−タ翼の固定構造
EP0196352A1 (de) * 1985-04-04 1986-10-08 Leybold Aktiengesellschaft Turbomolekular-Vakuumpumpe mit einem Rotor und mindestens einem Wälzlager
JPS63109299A (ja) * 1986-10-27 1988-05-13 Hitachi Ltd タ−ボ真空ポンプ
JPS63128287U (de) * 1987-02-16 1988-08-22
JPH0427196U (de) * 1990-06-29 1992-03-04
JPH04330397A (ja) * 1991-04-30 1992-11-18 Fujitsu Ltd ターボ分子ポンプ
JP2597671Y2 (ja) * 1993-11-10 1999-07-12 セイコー精機株式会社 ターボ分子ポンプ

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007025854A1 (de) * 2005-09-01 2007-03-08 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
CN100585188C (zh) * 2005-09-01 2010-01-27 厄利孔莱博尔德真空技术有限责任公司 真空泵
CN107208649A (zh) * 2015-01-30 2017-09-26 埃地沃兹日本有限公司 真空泵
US20170363101A1 (en) * 2015-01-30 2017-12-21 Edwards Japan Limited Vacuum pump
EP3252314A4 (de) * 2015-01-30 2018-08-22 Edwards Japan Limited Vakuumpumpe
US10480523B2 (en) 2015-01-30 2019-11-19 Edwards Japan Limited Vacuum pump
CN112983835A (zh) * 2021-03-09 2021-06-18 苏州冠裕机电科技有限公司 一种具有冷却机构的高温磁力泵及其冷却方法

Also Published As

Publication number Publication date
KR20000017282A (ko) 2000-03-25
JP2000064986A (ja) 2000-03-03
EP0979947A3 (de) 2001-03-28

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