EP0979947A3 - Pompe turbomoléculair - Google Patents

Pompe turbomoléculair Download PDF

Info

Publication number
EP0979947A3
EP0979947A3 EP99306359A EP99306359A EP0979947A3 EP 0979947 A3 EP0979947 A3 EP 0979947A3 EP 99306359 A EP99306359 A EP 99306359A EP 99306359 A EP99306359 A EP 99306359A EP 0979947 A3 EP0979947 A3 EP 0979947A3
Authority
EP
European Patent Office
Prior art keywords
turbomolecular pump
pump
stator blade
stator
blades
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP99306359A
Other languages
German (de)
English (en)
Other versions
EP0979947A2 (fr
Inventor
Akira Yamauchi
Manabu Nonaka
Takashi Okada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
Seiko Seiki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Seiki KK filed Critical Seiko Seiki KK
Publication of EP0979947A2 publication Critical patent/EP0979947A2/fr
Publication of EP0979947A3 publication Critical patent/EP0979947A3/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP99306359A 1998-08-12 1999-08-11 Pompe turbomoléculair Withdrawn EP0979947A3 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP22792298 1998-08-12
JP10227922A JP2000064986A (ja) 1998-08-12 1998-08-12 ターボ分子ポンプ

Publications (2)

Publication Number Publication Date
EP0979947A2 EP0979947A2 (fr) 2000-02-16
EP0979947A3 true EP0979947A3 (fr) 2001-03-28

Family

ID=16868408

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99306359A Withdrawn EP0979947A3 (fr) 1998-08-12 1999-08-11 Pompe turbomoléculair

Country Status (3)

Country Link
EP (1) EP0979947A3 (fr)
JP (1) JP2000064986A (fr)
KR (1) KR20000017282A (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4661378B2 (ja) * 2005-06-13 2011-03-30 株式会社島津製作所 ターボ分子ポンプ
DE102005041500A1 (de) * 2005-09-01 2007-03-08 Leybold Vacuum Gmbh Vakuumpumpe
US9759233B2 (en) 2011-10-31 2017-09-12 Edwards Japan Limited Stator member and vacuum pump
JP6353257B2 (ja) 2014-03-31 2018-07-04 エドワーズ株式会社 排気口部品、および真空ポンプ
JP6586275B2 (ja) * 2015-01-30 2019-10-02 エドワーズ株式会社 真空ポンプ
CN112983835B (zh) * 2021-03-09 2022-10-21 苏州冠裕机电科技有限公司 一种具有冷却机构的高温磁力泵及其冷却方法
JP7712252B2 (ja) * 2022-12-19 2025-07-23 エドワーズ株式会社 真空ポンプ
EP4443007A1 (fr) * 2024-08-09 2024-10-09 Pfeiffer Vacuum Technology AG Pompe turbomoléculaire

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4695223A (en) * 1985-04-04 1987-09-22 Leybold-Heraeus Gmbh Turbomolecular vacuum pump with a rotor and at least one antifriction bearing
JPS63109299A (ja) * 1986-10-27 1988-05-13 Hitachi Ltd タ−ボ真空ポンプ
JPH04330397A (ja) * 1991-04-30 1992-11-18 Fujitsu Ltd ターボ分子ポンプ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6077795U (ja) * 1983-10-31 1985-05-30 株式会社島津製作所 タ−ボ分子ポンプ
JPS60134893U (ja) * 1984-02-20 1985-09-07 セイコー精機株式会社 タ−ボ分子ポンプにおけるステ−タ翼の固定構造
JPS63128287U (fr) * 1987-02-16 1988-08-22
JPH0427196U (fr) * 1990-06-29 1992-03-04
JP2597671Y2 (ja) * 1993-11-10 1999-07-12 セイコー精機株式会社 ターボ分子ポンプ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4695223A (en) * 1985-04-04 1987-09-22 Leybold-Heraeus Gmbh Turbomolecular vacuum pump with a rotor and at least one antifriction bearing
JPS63109299A (ja) * 1986-10-27 1988-05-13 Hitachi Ltd タ−ボ真空ポンプ
JPH04330397A (ja) * 1991-04-30 1992-11-18 Fujitsu Ltd ターボ分子ポンプ

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 012, no. 347 (M - 743) 19 September 1988 (1988-09-19) *
PATENT ABSTRACTS OF JAPAN vol. 017, no. 168 (M - 1391) 31 March 1993 (1993-03-31) *

Also Published As

Publication number Publication date
EP0979947A2 (fr) 2000-02-16
JP2000064986A (ja) 2000-03-03
KR20000017282A (ko) 2000-03-25

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