EP0982604A3 - Herstellungsverfahren für optische Filter - Google Patents

Herstellungsverfahren für optische Filter Download PDF

Info

Publication number
EP0982604A3
EP0982604A3 EP99116720A EP99116720A EP0982604A3 EP 0982604 A3 EP0982604 A3 EP 0982604A3 EP 99116720 A EP99116720 A EP 99116720A EP 99116720 A EP99116720 A EP 99116720A EP 0982604 A3 EP0982604 A3 EP 0982604A3
Authority
EP
European Patent Office
Prior art keywords
substrate
optical filter
angle
mask
respect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP99116720A
Other languages
English (en)
French (fr)
Other versions
EP0982604B1 (de
EP0982604A2 (de
Inventor
Kunihiko Mori
Yoshitada Katagiri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Publication of EP0982604A2 publication Critical patent/EP0982604A2/de
Publication of EP0982604A3 publication Critical patent/EP0982604A3/de
Application granted granted Critical
Publication of EP0982604B1 publication Critical patent/EP0982604B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C23C14/044—Coating on selected surface areas, e.g. using masks using masks using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00634—Production of filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/22—Absorbing filters

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Ophthalmology & Optometry (AREA)
  • Physical Vapour Deposition (AREA)
  • Optical Filters (AREA)
EP99116720A 1998-08-26 1999-08-26 Herstellungsverfahren für optische Filter Expired - Lifetime EP0982604B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP24013098 1998-08-26
JP24013098 1998-08-26

Publications (3)

Publication Number Publication Date
EP0982604A2 EP0982604A2 (de) 2000-03-01
EP0982604A3 true EP0982604A3 (de) 2001-01-03
EP0982604B1 EP0982604B1 (de) 2003-04-23

Family

ID=17054954

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99116720A Expired - Lifetime EP0982604B1 (de) 1998-08-26 1999-08-26 Herstellungsverfahren für optische Filter

Country Status (3)

Country Link
US (1) US6475557B1 (de)
EP (1) EP0982604B1 (de)
DE (1) DE69907095T2 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6419803B1 (en) * 2001-03-16 2002-07-16 4Wave, Inc. System and method for making thin-film structures using a stepped profile mask
TW574592B (en) * 2003-01-29 2004-02-01 Asia Optical Co Inc Multi-color film-plating process of a single piece type filter and color rotation wheel set equipped with the filter
US7901870B1 (en) 2004-05-12 2011-03-08 Cirrex Systems Llc Adjusting optical properties of optical thin films
US7565084B1 (en) 2004-09-15 2009-07-21 Wach Michael L Robustly stabilizing laser systems
US20060281310A1 (en) * 2005-06-08 2006-12-14 Applied Materials, Inc. Rotating substrate support and methods of use
EP1796400A1 (de) * 2005-12-06 2007-06-13 JDS Uniphase Corporation Optische Dünnfilm-Verzögerer
US20080285165A1 (en) * 2007-05-14 2008-11-20 Wu Kuohua Angus Thin film filter system and method
US8647437B2 (en) * 2010-05-31 2014-02-11 Ci Systems (Israel) Ltd. Apparatus, tool and methods for depositing annular or circular wedge coatings
JP6319985B2 (ja) * 2013-10-11 2018-05-09 インターナショナル・ビジネス・マシーンズ・コーポレーションＩｎｔｅｒｎａｔｉｏｎａｌ Ｂｕｓｉｎｅｓｓ Ｍａｃｈｉｎｅｓ Ｃｏｒｐｏｒａｔｉｏｎ 光モジュール及び光モジュール製造方法。
CN104264110B (zh) * 2014-08-29 2017-09-22 宁波英飞迈材料科技有限公司 一种制备二维组合材料芯片的方法
KR102758126B1 (ko) * 2015-01-23 2025-01-21 마테리온 코포레이션 개선된 투과를 갖는 근적외선 광학 간섭 필터
US9804310B2 (en) * 2015-02-17 2017-10-31 Materion Corporation Method of fabricating anisotropic optical interference filter
CN105911624B (zh) * 2016-06-20 2017-05-10 三明福特科光电有限公司 一种生产矩形线性渐变滤光片的方法及其生产装置
GB201702478D0 (en) * 2017-02-15 2017-03-29 Univ Of The West Of Scotland Apparatus and methods for depositing variable interference filters
CN107523789B (zh) * 2017-09-18 2019-04-19 江门市卡色光学有限公司 一种渐变灰滤镜镀制装置及其镀制方法
DE102018133062A1 (de) * 2018-12-20 2020-06-25 Optics Balzers Ag Verfahren zur Herstellung eines linear variablen optischen Filters
TWI730862B (zh) * 2020-08-03 2021-06-11 國立陽明交通大學 製造具厚度變化的薄膜的方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3530824A (en) * 1964-08-25 1970-09-29 Optical Coating Laboratory Inc Deposition apparatus including rotatable and orbital masking assembly
US4543910A (en) * 1983-10-17 1985-10-01 Canadian Patents And Development Limited Vapor deposition regulating apparatus

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3859131A (en) * 1970-11-27 1975-01-07 Baird Atomic Inc Process involving optical thin film filters protected against deterioration from humidity
US4022928A (en) * 1975-05-22 1977-05-10 Piwcyzk Bernhard P Vacuum deposition methods and masking structure
JPS5214426A (en) 1975-07-23 1977-02-03 Matsushita Electric Ind Co Ltd Tehrmal record printing head
US5032461A (en) * 1983-12-19 1991-07-16 Spectrum Control, Inc. Method of making a multi-layered article
JPH032802A (ja) 1989-05-31 1991-01-09 Minolta Camera Co Ltd 連続干渉フィルターの製造方法
US5872655A (en) * 1991-07-10 1999-02-16 Optical Coating Laboratory, Inc. Monolithic linear variable filter and method of manufacture
JP3002802B2 (ja) 1993-09-06 2000-01-24 大島農機株式会社 二段式立体駐車装置
DE69525092T2 (de) * 1994-04-12 2002-09-05 Jax Holdings, Inc. Optische Filteranordnung
JPH0886914A (ja) 1994-09-19 1996-04-02 Matsushita Electric Ind Co Ltd ダイクロイック膜の形成方法及び形成装置
JPH09243822A (ja) * 1996-03-06 1997-09-19 Yokogawa Electric Corp 多波長選択光学フィルタの製造装置及び多波長選択光学フィルタ
JPH09324267A (ja) 1996-06-06 1997-12-16 Nippon Telegr & Teleph Corp <Ntt> 積層薄膜の製造装置とそれを用いた積層薄膜の作製方法
US5866204A (en) * 1996-07-23 1999-02-02 The Governors Of The University Of Alberta Method of depositing shadow sculpted thin films
JP4058122B2 (ja) 1996-10-07 2008-03-05 昭和オプトロニクス株式会社 光学素子用誘電体多層膜の成膜装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3530824A (en) * 1964-08-25 1970-09-29 Optical Coating Laboratory Inc Deposition apparatus including rotatable and orbital masking assembly
US4543910A (en) * 1983-10-17 1985-10-01 Canadian Patents And Development Limited Vapor deposition regulating apparatus

Also Published As

Publication number Publication date
EP0982604B1 (de) 2003-04-23
DE69907095D1 (de) 2003-05-28
US6475557B1 (en) 2002-11-05
DE69907095T2 (de) 2003-12-11
EP0982604A2 (de) 2000-03-01

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