EP1082182A4 - Gerät und verfahren zur verteilung gepulster fluide - Google Patents

Gerät und verfahren zur verteilung gepulster fluide

Info

Publication number
EP1082182A4
EP1082182A4 EP99917306A EP99917306A EP1082182A4 EP 1082182 A4 EP1082182 A4 EP 1082182A4 EP 99917306 A EP99917306 A EP 99917306A EP 99917306 A EP99917306 A EP 99917306A EP 1082182 A4 EP1082182 A4 EP 1082182A4
Authority
EP
European Patent Office
Prior art keywords
dispensing
pulsed
fluids
pulsed fluids
dispensing pulsed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP99917306A
Other languages
English (en)
French (fr)
Other versions
EP1082182A1 (de
Inventor
Jerome C Barton
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of California Berkeley
University of California San Diego UCSD
Original Assignee
University of California Berkeley
University of California San Diego UCSD
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/243,191 external-priority patent/US6085762A/en
Application filed by University of California Berkeley, University of California San Diego UCSD filed Critical University of California Berkeley
Publication of EP1082182A1 publication Critical patent/EP1082182A1/de
Publication of EP1082182A4 publication Critical patent/EP1082182A4/de
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/102—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration with means for agitating the liquid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/50—Solvents
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/42—Stripping or agents therefor
    • G03F7/422—Stripping or agents therefor using liquids only
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
    • C11D2111/10—Objects to be cleaned
    • C11D2111/14—Hard surfaces
    • C11D2111/22—Electronic devices, e.g. PCBs or semiconductors
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/26—Organic compounds containing oxygen
    • C11D7/266—Esters or carbonates
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/26—Organic compounds containing oxygen
    • C11D7/267—Heterocyclic compounds

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Wood Science & Technology (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)
EP99917306A 1998-03-30 1999-03-22 Gerät und verfahren zur verteilung gepulster fluide Withdrawn EP1082182A4 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US7991998P 1998-03-30 1998-03-30
US79919P 1998-03-30
US09/243,191 US6085762A (en) 1998-03-30 1999-02-02 Apparatus and method for providing pulsed fluids
US243191 1999-02-02
PCT/US1999/006258 WO1999049996A1 (en) 1998-03-30 1999-03-22 Apparatus and method for providing pulsed fluids

Publications (2)

Publication Number Publication Date
EP1082182A1 EP1082182A1 (de) 2001-03-14
EP1082182A4 true EP1082182A4 (de) 2005-04-27

Family

ID=26762567

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99917306A Withdrawn EP1082182A4 (de) 1998-03-30 1999-03-22 Gerät und verfahren zur verteilung gepulster fluide

Country Status (7)

Country Link
EP (1) EP1082182A4 (de)
JP (1) JP2002509800A (de)
KR (1) KR100557247B1 (de)
CN (1) CN1127381C (de)
AU (1) AU3545899A (de)
CA (1) CA2326810A1 (de)
WO (1) WO1999049996A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6294194B1 (en) 1997-10-14 2001-09-25 Boehringer Ingelheim Pharmaceuticals, Inc. Method for extraction and reaction using supercritical fluids
US6612317B2 (en) 2000-04-18 2003-09-02 S.C. Fluids, Inc Supercritical fluid delivery and recovery system for semiconductor wafer processing
US6602349B2 (en) 1999-08-05 2003-08-05 S.C. Fluids, Inc. Supercritical fluid cleaning process for precision surfaces
TWI270626B (en) * 2002-04-23 2007-01-11 Display Mfg Service Co Ltd Wet processing bath and fluid supplying system for liquid crystal display manufacturing equipment
US7267727B2 (en) 2002-09-24 2007-09-11 Air Products And Chemicals, Inc. Processing of semiconductor components with dense processing fluids and ultrasonic energy
US20050029492A1 (en) 2003-08-05 2005-02-10 Hoshang Subawalla Processing of semiconductor substrates with dense fluids comprising acetylenic diols and/or alcohols
US7195676B2 (en) 2004-07-13 2007-03-27 Air Products And Chemicals, Inc. Method for removal of flux and other residue in dense fluid systems
KR100831402B1 (ko) * 2006-05-08 2008-05-22 주식회사 지에스하이텍 기판 세정용 고압의 세정액 공급장치
US8224481B2 (en) * 2009-01-19 2012-07-17 Access Business Group International Llc Method and apparatus for dispensing fluid compositions

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3175569A (en) * 1961-12-28 1965-03-30 Sperry Rand Corp Pure fluid pulse generator
US3302398A (en) * 1963-06-25 1967-02-07 Bendix Corp Fluid pulse control
US3437099A (en) * 1965-10-22 1969-04-08 Sperry Rand Corp Pulse generator
US3799205A (en) * 1966-07-18 1974-03-26 Us Army Fluid oscillators
US3576294A (en) * 1969-02-26 1971-04-27 Bendix Corp Fluidic cleansing device
US3568702A (en) * 1969-03-07 1971-03-09 Nasa Pneumatic oscillator
US3885591A (en) * 1973-06-14 1975-05-27 Automatic Switch Co Tunable fluidic oscillator
US4570675A (en) * 1982-11-22 1986-02-18 General Electric Company Pneumatic signal multiplexer
US4622996A (en) * 1985-03-14 1986-11-18 Donaldson Company, Inc. Aspirator for pulse-jet air cleaner
US4915119A (en) * 1986-04-21 1990-04-10 Dober Chemical Corporation Cleaning apparatus and method
SE457822B (sv) * 1986-11-28 1989-01-30 Svenska Rotor Maskiner Ab Foerfarande foer aastadkommande av selektivt styrda tryckpulser i en gasmassa samt anordning foer genomfoerande av foerfarandet
US4921662A (en) * 1988-04-19 1990-05-01 Westinghouse Electric Corp. Pressure pulse cleaning method
US5082502A (en) * 1988-09-08 1992-01-21 Cabot Corporation Cleaning apparatus and process
US4874016A (en) * 1989-02-28 1989-10-17 Allied-Signal Inc. Method for improving signal-to-noise ratios in fluidic circuits and apparatus adapted for use therewith
US5273590A (en) * 1991-12-18 1993-12-28 The Babcock & Wilcox Company Pressure pulse cleaning for adsorption tower distributors
US5195560A (en) * 1992-04-27 1993-03-23 Muchlis Achmad Adjustable low frequency hydrofluidic oscillator
US5514220A (en) * 1992-12-09 1996-05-07 Wetmore; Paula M. Pressure pulse cleaning
US5882589A (en) * 1994-06-03 1999-03-16 Leon Shipper Sealed endoscope decontamination, disinfection and drying device
US5647386A (en) * 1994-10-04 1997-07-15 Entropic Systems, Inc. Automatic precision cleaning apparatus with continuous on-line monitoring and feedback
US5595201A (en) * 1994-12-05 1997-01-21 Dober Chemical Co. Apparatus and methods for automatically cleaning multiple pieces of equipment
EP0780580B1 (de) * 1995-12-22 2003-02-12 FESTO AG & Co Vorrichtung zur Erzeugung von periodischen Impulsänderungen in einer Fluid-Strömung, Verfahren zum Betrieb der Vorrichtung und deren Verwendung

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
No further relevant documents disclosed *

Also Published As

Publication number Publication date
WO1999049996A1 (en) 1999-10-07
CN1295503A (zh) 2001-05-16
CN1127381C (zh) 2003-11-12
EP1082182A1 (de) 2001-03-14
KR20010074464A (ko) 2001-08-04
CA2326810A1 (en) 1999-10-07
AU3545899A (en) 1999-10-18
KR100557247B1 (ko) 2006-03-07
JP2002509800A (ja) 2002-04-02

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Legal Events

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PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

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Effective date: 20000928

AK Designated contracting states

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Effective date: 20050311

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Effective date: 20070222

STAA Information on the status of an ep patent application or granted ep patent

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18D Application deemed to be withdrawn

Effective date: 20070705