EP1096152A3 - Pompe turbo-moléculaire - Google Patents

Pompe turbo-moléculaire Download PDF

Info

Publication number: EP1096152A3
Authority: EP; European Patent Office
Prior art keywords: discs; stator; turbo molecular; molecular pump; pump
Prior art date: 1999-10-28
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

EP00122662A

Other languages

German (de)

English (en)

Other versions

EP1096152A2 (fr

EP1096152B1 (fr

Inventor

Heinrich Lotz

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Pfeiffer Vacuum GmbH

Original Assignee

Pfeiffer Vacuum GmbH

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1999-10-28

Filing date

2000-10-18

Publication date

2001-10-17

2000-10-18 Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH

2001-05-02 Publication of EP1096152A2 publication Critical patent/EP1096152A2/fr

2001-10-17 Publication of EP1096152A3 publication Critical patent/EP1096152A3/fr

2008-04-23 Application granted granted Critical

2008-04-23 Publication of EP1096152B1 publication Critical patent/EP1096152B1/fr

2020-10-18 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Links

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/08—Sealings
- F04D29/083—Sealings especially adapted for elastic fluid pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/60—Mounting; Assembling; Disassembling
- F04D29/64—Mounting; Assembling; Disassembling of axial pumps
- F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Non-Positive Displacement Air Blowers (AREA)
Structures Of Non-Positive Displacement Pumps (AREA)
Steroid Compounds (AREA)

EP00122662A 1999-10-28 2000-10-18 Pompe turbo-moléculaire Expired - Lifetime EP1096152B1 (fr)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
DE19951954A DE19951954A1 (de)	1999-10-28	1999-10-28	Turbomolekularpumpe
DE19951954		1999-10-28

Publications (3)

Publication Number	Publication Date
EP1096152A2 EP1096152A2 (fr)	2001-05-02
EP1096152A3 true EP1096152A3 (fr)	2001-10-17
EP1096152B1 EP1096152B1 (fr)	2008-04-23

Family

ID=7927176

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP00122662A Expired - Lifetime EP1096152B1 (fr)	1999-10-28	2000-10-18	Pompe turbo-moléculaire

Country Status (5)

Country	Link
US (1)	US6461123B1 (fr)
EP (1)	EP1096152B1 (fr)
JP (1)	JP2001153087A (fr)
AT (1)	ATE393314T1 (fr)
DE (2)	DE19951954A1 (fr)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE10142567A1 (de) *	2001-08-30	2003-03-20	Pfeiffer Vacuum Gmbh	Turbomolekularpumpe
DE10331932B4 (de) *	2003-07-15	2017-08-24	Pfeiffer Vacuum Gmbh	Turbomolekularpumpe
GB0618745D0 (en) *	2006-09-22	2006-11-01	Boc Group Plc	Molecular drag pumping mechanism
DE202008011489U1 (de) *	2008-08-28	2010-01-07	Oerlikon Leybold Vacuum Gmbh	Stator-Rotor-Anordnung für eine Vakuumpumpe sowie Vakuumpumpe
DE102008058149A1 (de) *	2008-11-20	2010-05-27	Oerlikon Leybold Vacuum Gmbh	Turbomolekularpumpe
US8221098B2 (en) *	2009-03-09	2012-07-17	Honeywell International Inc.	Radial turbomolecular pump with electrostatically levitated rotor
TWI424121B (zh) *	2010-12-10	2014-01-21	Prosol Corp	渦輪分子泵浦之葉片結構改良
WO2012165105A1 (fr) *	2011-06-03	2012-12-06	エドワーズ株式会社	Pompe à vide
US11274671B2 (en)	2011-09-14	2022-03-15	Roger L. Bottomfield	Turbine cap for turbo-molecular pump
US9512853B2 (en) *	2013-03-14	2016-12-06	Texas Capital Semiconductor, Inc.	Turbine cap for turbo-molecular pump
US9512848B2 (en) *	2011-09-14	2016-12-06	Texas Capital Semiconductor, Inc.	Turbine cap for turbo-molecular pump
GB2498816A (en)	2012-01-27	2013-07-31	Edwards Ltd	Vacuum pump
US9083212B2 (en) *	2012-09-11	2015-07-14	Concepts Eti, Inc.	Overhung turbine and generator system with turbine cartridge
DE102014100622A1 (de) *	2014-01-21	2015-07-23	Pfeiffer Vacuum Gmbh	Verfahren zur Herstellung einer Rotoranordnung für eine Vakuumpumpe und Rotoranordnung für eine Vakuumpumpe
CN114593075B (zh) *	2022-03-15	2023-03-24	北京中科科仪股份有限公司	一种分子泵

Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3168978A (en) *	1961-08-04	1965-02-09	Snecma	Turbomolecular vacuum pump

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CH618893A5 (fr) *	1977-04-29	1980-08-29	Buehler Ag Geb
US4562368A (en) *	1982-05-26	1985-12-31	Board Of Regents	Brush mechanism for a homopolar generator
US4732529A (en) *	1984-02-29	1988-03-22	Shimadzu Corporation	Turbomolecular pump
JPS61275594A (ja) *	1985-05-29	1986-12-05	Nippon Soken Inc	タ−ボ分子ポンプ
JPS61283794A (ja) *	1985-06-10	1986-12-13	Nippon Soken Inc	タ−ボ分子ポンプ
JPS62173594U (fr) *	1986-03-22	1987-11-04
JPS63227991A (ja) *	1987-03-13	1988-09-22	Mitsubishi Electric Corp	タ−ボ分子ポンプ
JPS6412123A (en) *	1987-07-03	1989-01-17	Ebara Corp	Rotary machine
JPH04330397A (ja) *	1991-04-30	1992-11-18	Fujitsu Ltd	ターボ分子ポンプ
JPH05141389A (ja) *	1991-11-15	1993-06-08	Vacuum Prod Kk	真空ポンプ
US5358373A (en) *	1992-04-29	1994-10-25	Varian Associates, Inc.	High performance turbomolecular vacuum pumps
FR2736103B1 (fr) *	1995-06-30	1997-08-08	Cit Alcatel	Pompe turbomoleculaire
DE29516599U1 (de) *	1995-10-20	1995-12-07	Leybold AG, 50968 Köln	Reibungsvakuumpumpe mit Zwischeneinlaß
IT1288737B1 (it) *	1996-10-08	1998-09-24	Varian Spa	Dispositivo di pompaggio da vuoto.
JP3400924B2 (ja) *	1997-03-05	2003-04-28	東芝テック株式会社	電動ポンプ
JP3452468B2 (ja) *	1997-08-15	2003-09-29	株式会社荏原製作所	ターボ分子ポンプ
GB9725146D0 (en) *	1997-11-27	1998-01-28	Boc Group Plc	Improvements in vacuum pumps
US6071092A (en) *	1998-03-10	2000-06-06	Varian, Inc.	Vacuum pump with improved back-up bearing assembly
FR2776029B1 (fr) *	1998-03-16	2000-06-23	Alsthom Cge Alcatel	Pompe turbomoleculaire
JP4104098B2 (ja) *	1999-03-31	2008-06-18	エドワーズ株式会社	真空ポンプ

1999
- 1999-10-28 DE DE19951954A patent/DE19951954A1/de not_active Withdrawn
2000
- 2000-10-18 AT AT00122662T patent/ATE393314T1/de not_active IP Right Cessation
- 2000-10-18 DE DE50015120T patent/DE50015120D1/de not_active Expired - Lifetime
- 2000-10-18 EP EP00122662A patent/EP1096152B1/fr not_active Expired - Lifetime
- 2000-10-20 JP JP2000320537A patent/JP2001153087A/ja active Pending
- 2000-10-24 US US09/694,923 patent/US6461123B1/en not_active Expired - Fee Related

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3168978A (en) *	1961-08-04	1965-02-09	Snecma	Turbomolecular vacuum pump

Also Published As

Publication number	Publication date
JP2001153087A (ja)	2001-06-05
US6461123B1 (en)	2002-10-08
DE50015120D1 (de)	2008-06-05
EP1096152A2 (fr)	2001-05-02
ATE393314T1 (de)	2008-05-15
EP1096152B1 (fr)	2008-04-23
DE19951954A1 (de)	2001-05-03

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2001-10-17	RIC1	Information provided on ipc code assigned before grant	Free format text: 7F 04D 19/04 A, 7F 04D 29/52 B, 7F 04D 29/08 B
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Publication	Publication Date	Title
EP1096152A3 (fr)	2001-10-17	Pompe turbo-moléculaire
CA2218342A1 (fr)	1997-08-21	Pompe cardiaque rotative
AU7081596A (en)	1997-04-28	Rotary seal and/or bearing
EP1942280A3 (fr)	2017-04-19	Unité de compresseur comprenant un compresseur centrifuge et un moteur électrique
CA2334574A1 (fr)	1999-12-16	Boite de vitesses
ES2194316T3 (es)	2003-11-16	Un motor.
AU7544000A (en)	2001-04-23	An external rotor brushless dc motor
EP1039137A3 (fr)	2002-03-13	Pompe turbo-moléculair
WO2001056140A3 (fr)	2002-03-14	Moteur electrique
EP1320478B8 (fr)	2004-10-27	Entrainement direct d'un essieu monte
BR0007561A (pt)	2001-10-23	Gerador hidráulico de turbinas
AU2002235524A1 (en)	2002-08-19	Design for frameless cartridge motors
EP1318308A3 (fr)	2003-12-03	Pompe à vide
ATE316209T1 (de)	2006-02-15	Vakuumpumpe mit gaslagerung
CA2092438A1 (fr)	1992-04-05	Ensemble moteur et pompe centrifuge
CA2365145A1 (fr)	2003-02-08	Raffineur
EP1081387A3 (fr)	2002-04-17	Pompe à vide
EP0931939A3 (fr)	2000-08-30	Pompe à vide
WO2001048381A3 (fr)	2002-03-21	Pompe a vide
EP1288502A3 (fr)	2003-10-29	Pompe à vide turbo-moléculaire
DE59901585D1 (de)	2002-07-11	Kreiselpumpe
CA2338362A1 (fr)	2000-02-03	Ensemble broche porte-meule a entrainement magnetique
EP0806571A3 (fr)	1998-09-23	Assemblage rotatif pour supporter le rotor d'une pompe à vide
DE69915076D1 (de)	2004-04-01	Rotationsanlage mit antriebsmotor
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