EP1276588A1 - Dispositif et procede de soudage au laser - Google Patents

Dispositif et procede de soudage au laser

Info

Publication number
EP1276588A1
EP1276588A1 EP01921300A EP01921300A EP1276588A1 EP 1276588 A1 EP1276588 A1 EP 1276588A1 EP 01921300 A EP01921300 A EP 01921300A EP 01921300 A EP01921300 A EP 01921300A EP 1276588 A1 EP1276588 A1 EP 1276588A1
Authority
EP
European Patent Office
Prior art keywords
laser beam
pressing
components
pressing element
welding device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP01921300A
Other languages
German (de)
English (en)
Inventor
Stefan Hierl
Peter Hluchy
Kai Lenfert
Gunter Küchler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Airbus DS GmbH
Original Assignee
Astrium GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Astrium GmbH filed Critical Astrium GmbH
Publication of EP1276588A1 publication Critical patent/EP1276588A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03Observing, e.g. monitoring, the workpiece
    • B23K26/034Observing the temperature of the workpiece
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/009Working by laser beam, e.g. welding, cutting or boring using a non-absorbing, e.g. transparent, reflective or refractive, layer on the workpiece
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/18Working by laser beam, e.g. welding, cutting or boring using absorbing layers on the workpiece, e.g. for marking or protecting purposes

Definitions

  • the present invention relates to a laser beam welding device with a pressing device for fixing the components to be welded, the pressing device including a pressing element that can be moved from a rest position into a pressing position.
  • the invention relates to a method for laser beam welding of components, wherein a pressing element, a pressing device for fixing the components to be welded, is moved from a rest position to a pressing position.
  • a laser beam welding device with a pressing device for fixing the components to be welded including a pressing element which can be moved from a rest position into a pressing position, the pressing element being designed to be elastically deformable and the pressing device is designed such that in the pressing position the components to be welded are fixed by a force resulting from a deformation of the pressing element.
  • the object of the present invention is therefore to provide an improved arrangement and an improved method for laser beam welding, which can be used in particular for components with a low degree of absorption of the corresponding laser radiation.
  • the pressing element is designed to be elastically deformable and the pressing device is designed in such a way that the components to be welded are fixed in the pressing position by a force resulting from a deformation of the pressing element.
  • a rigid, solid pressure element is therefore no longer provided, as in the prior art, which is the main cause of damage to the components.
  • the flexibility of the pressing element which results from its elastic deformability, enables the components to be fixed as gently as possible. According to the invention, it is now provided that at least one means for increasing the thermal energy absorbed by the components is provided due to an at least partial absorption of the laser beam.
  • the at least one means therefore ensures that additional radiation is absorbed from the laser beam and the corresponding, directly or indirectly generated thermal energy is supplied to the components in order to achieve a welding of the components by the resultant heating.
  • the at least one agent can either absorb additional portions of the radiation of the laser beam as a replacement for the components, or it can
  • BESTATIGUNGSKOPIE produce certain portions of the radiation-absorbing components in blocks for the components.
  • the agent can also increase the absorption of the radiation of the laser beam in the components themselves, for example by suitably influencing the radiation of the laser beam.
  • the degree of absorption achieved by the agent does not have to extend to complete absorption of the laser radiation. It is basically sufficient that the means supply the components with sufficient additional thermal energy, which results from the absorption of radiation components of the laser radiation, so that welding of the components is possible.
  • the at least one means contributes to the radiation absorption as a substitute for the components
  • the at least one means protrudes at least partially into the beam path of the laser beam at least in the pressing position and is designed such that an at least partial absorption of the laser beam through which at least one agent or secondary products of the at least one agent takes place.
  • the agent can therefore either remain unchanged under the influence of the laser radiation and can contribute to increasing the radiation absorption through the higher degree of absorption given by the agent itself.
  • an at least partial chemical or physical conversion of the agent can also take place, either the conversion being initiated by the absorption of radiation components of the laser radiation and the conversion itself providing additional thermal energy, or the subsequent products resulting from the conversion contributing to the absorption of the laser radiation and thereby additional thermal energy can be supplied.
  • an absorbent material for the sake of simplicity, reference is generally made to an absorbent material, but this basically means that either the material itself, its conversion or its secondary products contribute to absorption.
  • the at least one means can be formed, for example, by a partial area of the pressing element.
  • the pressing element in particular can consist of a material that absorbs the laser beam, that is to say it can have an absorbing effect over its entire extent in this partial area.
  • the pressing element has a coating that absorbs the laser beam in the partial area.
  • the pressure element in its remaining extent does not have to show the absorbing effect in this partial area.
  • the at least one means can also be formed by a component that is independent of the pressing element, in particular by an absorbent made of a material that absorbs the laser beam and is arranged at least in the pressing position between the pressing element and the components.
  • a temperature-stable material in particular a metallic or ceramic material
  • a material can be provided as the material which undergoes a chemical or physical conversion, such as an oxidation when it is irradiated by the laser beam, which releases thermal energy.
  • a material can be provided as the material which undergoes a chemical or physical conversion when irradiated by the laser beam (e.g. oxidation, evaporation or the like), the degree of absorption being increased due to the conversion, in particular by the resulting products being designed in such a way that they absorb the laser beam.
  • the at least one means can at least partially act at least in the pressing position as a beam trap for the laser beam and can be designed such that an at least partial back-reflection of the laser radiation of the laser beam reflected by the components onto the components is carried out by the at least one means.
  • the radiation that is just reflected by weakly absorbing components is thus directed onto the components again and the efficiency is increased without, for example, a stronger radiation source being necessary.
  • the beam trap can be formed, for example, by a suitable geometric design of the pressing element, but separate devices can also be provided on the pressing element, which form a beam trap.
  • the pressing element can in principle be arranged on the pressing device in any possible way in order to guarantee that the components to be welded are fixed relative to the laser beam welding device.
  • the pressing element is preferably arranged as close as possible to the beam path of the laser beam, ideally directly in the beam path of the laser beam.
  • the pressing element has an opening which is designed such that at least partial passage of the laser beam through the pressing element in the direction of the components to be welded is possible at least in the pressing position. Because of the flexibility of the pressing element, the opening does not have to be arranged in every position, that is to say, for example, not necessarily also in the rest position in the beam path of the laser beam.
  • the opening is only necessary for the opening to be arranged in the beam path of the laser beam after the components have been pressed on, that is to say after the pressing element has been deformed.
  • An arrangement of the pressing element in the beam path of the laser beam is particularly advantageous since it allows the components to be welded to be fixed directly in the area of the welding point.
  • the elastically deformable pressing element can be formed from any suitable material that has sufficient flexibility. Corresponding plastic materials are conceivable, for example. However, the boundary conditions given during the welding process, in particular regarding the temperature resistance of the pressing element, must be observed. Is preferred thus the pressing element is designed as a spring element made of metal, for example as a shaped metal strip. Such a metal strip is to be connected to the pressing device at least at one end. In order to have sufficient elastic deformability or spring action, the metal strip can be bent, preformed or bent by mounting on the pressing device. For example, the metal strip can either be pre-bent in a semicircular shape or a straight metal strip can be attached to the pressing device by bending at both ends.
  • a material should be selected for the pressure element that does not adhere to the components to be welded. If the pressing element is designed, for example, as a spring element made of metal, tungsten Cr-Ni steel or spring band steel is preferably chosen as the material for the pressing element.
  • a pyrometer In order to monitor the welding process as precisely as possible, a pyrometer can be provided, which is used to record the heat radiation emitted by the welding point.
  • the pyrometer must therefore be arranged so that the heat radiation emitted by the welding point reaches the pyrometer directly or through appropriate deflection devices.
  • a dichroic beam splitter is arranged in the beam path of the laser beam, which is designed such that the heat radiation emitted by the welding point is directed through the beam splitter to the pyrometer.
  • the existing optics for focusing the laser beam can also be used for the detection of heat radiation and the pyrometer does not have to be arranged in a direct line of sight to the welding point, but can be attached to the laser beam welding device at a suitable point.
  • an elastically deformable pressing element is connected to the pressing device in such a way that it is arranged in the beam path of the laser beam,
  • the pressing element is brought into the pressing position and is held in the pressing position under a defined contact pressure
  • At least one means for increasing the thermal energy absorbed by the components due to an at least partial absorption of the laser beam is arranged adjacent to the components and
  • the pressing element is held in the pressing position with the same defined contact pressure for fixing the components.
  • a laser beam welding device with a flexible pressing element is provided in a particularly simple manner and laser beam welding of components is carried out, damage to the components being avoided on the one hand by the elastic deformability of the pressing element and, on the other hand, damage being caused by introducing the opening with the aid of the laser beam elaborate adjustment of the device is dispensed with in that the opening in the pressing element is self-adjusted under the conditions given in the pressing position.
  • the provision of the at least one means for increasing the thermal energy absorbed by the components adjacent to the components to be welded ensures that the components themselves, even with only slight absorption of the laser radiation, sufficient thermal energy is supplied.
  • the agent is to be arranged adjacent to the components in such a way that there is sufficient thermal coupling between the agent and the components to reach the welding temperature of the components.
  • the power of the laser beam is regulated.
  • Such detection of the thermal radiation can take place, for example, with the aid of a pyrometer, as has already been explained above.
  • the thermal radiation can be detected particularly advantageously coaxially with the beam path of the laser beam.
  • the optics used to focus the laser beam can be used accordingly.
  • FIGS. 1 to 4. Show it:
  • Fig. 1 Schematic structure of the laser beam welding device with pressing device.
  • FIG. 6 shows a detail of a means for increasing the thermal energy absorbed by the components as a design of the pressing element as a beam trap
  • Laser beam heat conduction welding is used for laser beam welding in an overlap joint, for example for welding thin metal foils 3 with a thickness in the ⁇ m range, in particular with a thickness of less than 50 ⁇ m, onto a further metal foil 4 or onto a substrate 4 with a metallization 5.
  • an Nd: YAG laser (which can also be frequency-converted) or a CO2 laser can be used, for example.
  • the hold-down 2 essentially consists of an elastically deformable metal strip which is part of a pressing device 1. This can be attached directly to the focusing optics 8 or the housing 7 of the diode laser 13.
  • the metal strip 2 is bent in a semicircular shape or is already formed in a semicircular shape and, as shown in FIG. 1, is laterally fixed to a pressing device 1 located on the focusing optics 8. The hold-down device 2 is thus in the beam path of the laser beam 10.
  • this is moved, as shown in FIG. 2, from a rest position a) into a pressing position b) and thereby placed on a flat plate 14 until the hold-down device 2 assumes the same shape by elastic deformation how it is achieved during the actual welding process.
  • the hold-down device 2 is thus brought from an idle form 15 into an elastically deformed form 16.
  • the bore 6 is then made in the hold-down device by the laser beam 10.
  • the bore 6 thus produced has e.g. a diameter in the range of tenths of a millimeter.
  • a metal is used as the material for the hold-down device 2, in which the components to be welded, such as the metal foil 3, do not adhere to the Hold-down 2 occurs.
  • Suitable materials are, for example, tungsten, Cr-Ni steel or spring band steel.
  • the components 3, 4 are brought into their final position before welding, as shown in FIG. 3. They can be arranged on a carrier 9. The entire arrangement and thus the diode laser 13 and the pressing device 1 with the holding-down device 2 are lowered from a rest position a) into a pressing position b) onto the components 3, 4 until the holding-down device 2 touches the metal foil 3 lying on top and by further lowering Arrangement with the pressing device 1 is elastically deformed.
  • Typical travel speeds when lowering the arrangement are in the range from a few mm / s to a few hundred mm / s.
  • the contact pressure required for the welding process is applied.
  • the choice of the radius and the width and thickness of the metal strip for the hold-down device 2 determine the desired contact pressure at the desired distance of the focusing optics 8 from the surface of the metal foil 3. For example, metal strips with a thickness of a few tenths of a millimeter and a width of a few millimeters to a few centimeters are used.
  • the radius of the hold-down device 2 that is assembled is then preferably in the range of a few centimeters.
  • the metal foil 3 After the metal foil 3 has been pressed onto the underlying component 4, it is welded by a laser pulse.
  • the laser beam 10 hits the upper component 3 through the bore 6 in the holding-down device 2 and melts it.
  • the component underneath for example a metal foil 4 or a metallization 5 of a substrate 4, is likewise made by heat conduction melted.
  • the melts mix and there is permanent welding.
  • the process parameters laser power, focus position and pulse duration are set in such a way that damage to the components is avoided when welding is optimal.
  • Typical process times for welding silver foil with a thickness in the ⁇ m range on Si substrate with a metallization thickness also in the ⁇ m range are in the range from tenths of a millisecond to seconds, in particular from 10 to 500 milliseconds with a laser power in the range from 10 to 500 W.
  • a temperature control is necessary.
  • This temperature control is implemented in that the thermal radiation emitted by the welding point is detected by means of a pyrometer 11 (FIG. 4).
  • the pyrometer signal is used during the welding process to regulate the laser power so that a desired temperature profile is achieved over the duration of the process.
  • the pyrometer 11 used preferably works in a spectral range of wavelengths in the ⁇ m range and preferably has a measuring range up to approximately 2000 ° C., in particular from approximately 700 ° C. to 2000 ° C. Since the bore 6 in the hold-down device 2 through which the If heat radiation is emitted upwards from the welding point and has a very small diameter, heat radiation can only be directly measured from the welding point in a small solid angle. The heat radiation is therefore taken up coaxially with the laser radiation 10.
  • a dichroic beam splitter 12 is integrated into the beam path of the diode laser 13, which deflects the thermal radiation emitted by the welding point and collimated by the focusing optics 8 of the diode laser 13 by 90 ° into the pyrometer 11. If components 3, 4 are to be welded with the arrangement described, which have only a low degree of absorption for the laser radiation 10, additional means 17, 18, 19 can be provided to increase the thermal energy absorbed by the components 3, 4 Increase is based on an at least partial absorption of the laser beam. For this purpose, reference is made to the examples in FIGS. 5 to 7.
  • a partial region 17 of the pressing element 2 projects into the beam path of the laser beam 10 in the pressing position.
  • an absorption means 19 separate from the pressing means 2 the pressing position protrudes into the beam path of the laser beam 10, in which case the absorption means 19 is then ideally arranged in the pressing position between the pressing element 2 and the components 3, 4, so that the individual elements can be appropriately fixed to one another under the pressing pressure of the pressing element 2.
  • the elements 17, 19 projecting into the beam path of the laser beam 10 now make an additional contribution to the absorption of the radiation of the laser beam 10.
  • the elements 17, 19 in the areas which project into the beam path can either be made of a temperature-stable, for example metallic or ceramic material such as CrNi steel, which guarantees sufficient absorption of the laser radiation or the elements can have a corresponding coating such as graphite in these areas.
  • the material of the elements 17, 19 or their coating can also undergo chemical or physical conversion under the laser radiation 10.
  • additional thermal energy is generated either by the conversion itself, for example by oxidation or other combustion, for example of carbon, initiated by absorption of the laser radiation 10, or the conversion increases the degree of absorption of the agent 17, 19 or the components 3, 4 and thereby contributes to an improved total absorption.
  • the secondary products resulting from the conversion such as oxides, plasmas, melts or deposits of combustion products, can be on the components 3, 4 contribute to an increase in the absorption of the laser radiation 10 and thus the thermal energy supplied to the components 3, 4.
  • the laser radiation 10 itself can also be influenced in order to achieve increased absorption in the components 3, 4.
  • the laser radiation reflected by the components 3, 4 can be reflected back onto the components 3, 4, here with the aid of a beam trap 18.
  • FIG. 6 shows a possibility in which the beam trap 18 is formed by a suitable geometric configuration of the pressing element 2 or the area around the opening 6 in the pressing element 2. In Fig. 6 this area acts like a concave mirror, which reflects the reflected radiation back onto the components 3, 4.
  • the beam trap can also be formed by other suitable means in or on the pressing element 2 or independently of the pressing element 2.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

L'invention concerne un dispositif de soudage au laser comportant un dispositif de serrage (1) pour fixer les pièces à souder (3, 4). Ce dispositif de serrage (1) comprend un élément de serrage (2) mobile d'une position de repos en une position de serrage et de conception élastiquement déformable. Le dispositif de serrage (1) est conçu de manière telle qu'en position de serrage, la fixation des pièces à souder (3, 4) est assurée par la force résultant de la déformation de l'élément de serrage (2). L'invention est caractérisée en ce qu'elle comprend au moins un moyen (17, 18, 19) pour augmenter l'énergie thermique absorbée par les pièces (3, 4) du fait d'une absorption au moins partielle du rayon laser (10).
EP01921300A 2000-04-28 2001-03-02 Dispositif et procede de soudage au laser Withdrawn EP1276588A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10020820A DE10020820C2 (de) 2000-04-28 2000-04-28 Laserstrahl-Schweißvorrichtung und Verfahren zum Laserstrahlschweißen
DE10020820 2000-04-28
PCT/EP2001/002350 WO2001083156A1 (fr) 2000-04-28 2001-03-02 Dispositif et procede de soudage au laser

Publications (1)

Publication Number Publication Date
EP1276588A1 true EP1276588A1 (fr) 2003-01-22

Family

ID=7640193

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01921300A Withdrawn EP1276588A1 (fr) 2000-04-28 2001-03-02 Dispositif et procede de soudage au laser

Country Status (6)

Country Link
US (1) US20040016727A1 (fr)
EP (1) EP1276588A1 (fr)
JP (1) JP2003531730A (fr)
AU (1) AU2001248326A1 (fr)
DE (1) DE10020820C2 (fr)
WO (1) WO2001083156A1 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004010483A1 (de) * 2004-01-16 2005-08-11 Daimlerchrysler Ag Vorrichtung zum Bearbeiten von Werkstücken mit Höhenversatz
DE102004015250B4 (de) * 2004-03-29 2007-03-15 Daimlerchrysler Ag Spannvorrichtung zum Bearbeiten von Werkstücken
WO2008076006A1 (fr) * 2006-12-18 2008-06-26 Volvo Aero Corporation Procédé de raccordement de parties métalliques et dispositif de soudage
JP2008173657A (ja) * 2007-01-17 2008-07-31 Asmo Co Ltd 金属の接合方法、及び電機子の製造方法
DE102008041774B4 (de) 2008-09-03 2026-02-26 Robert Bosch Gmbh Vorrichtung und Verfahren zum Laserverschweißen
CN102240849B (zh) * 2010-05-13 2015-07-01 松下电器产业株式会社 接合方法以及电池
JP5602050B2 (ja) * 2010-05-13 2014-10-08 パナソニック株式会社 接合方法ならびに電池
CN111805154A (zh) * 2020-08-21 2020-10-23 中山汉通激光设备有限公司 一种激光水壶焊接工装夹具

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4461946A (en) * 1982-03-11 1984-07-24 Hull Corporation Apparatus for clamping an assembly of parts for laser welding
US4847467A (en) * 1988-08-19 1989-07-11 Colt 7 Inc. Laser welding clamp
US4978835A (en) * 1989-08-21 1990-12-18 Microelectronics And Computer Technology Corporation Method of clamping electrical contacts for laser bonding
GB2246733A (en) * 1990-08-09 1992-02-12 Cmb Foodcan Plc Apparatus and method for monitoring laser material processing
JP3087373B2 (ja) * 1991-09-18 2000-09-11 株式会社デンソー 金属箔の接合方法および接合装置
DE4234342C2 (de) * 1992-10-12 1998-05-14 Fraunhofer Ges Forschung Verfahren zur Materialbearbeitung mit Laserstrahlung
DE4308176A1 (de) * 1993-03-15 1994-09-22 Martinswerk Gmbh Kristallines Aluminiumhydroxid
EP0687519B1 (fr) * 1994-06-15 1998-12-16 Inpro Innovationsgesellschaft Für Fortgeschrittene Produktionssysteme In Der Fahrzeugindustrie Mbh Procédé et dispositif de soudage de tÔles en acier zingué au moyen de faisceaux laser
DE19516726A1 (de) * 1995-05-06 1996-11-07 Rovema Gmbh Verfahren zum Formen und Verschließen einer Faltschachtel
DE10007711C1 (de) * 2000-02-19 2001-08-16 Daimler Chrysler Ag Vorrichtung und Verfahren zum Sintern eines Pulvers mit einem Laserstrahl
ITTO20010185A1 (it) * 2001-03-02 2002-09-02 Comau Systems Spa Procedimento e sistema per la saldatura laser di due o piu' lamiere metalliche fra loro sovrappost, e dispositivo di bloccaggio delle lamier

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO0183156A1 *

Also Published As

Publication number Publication date
DE10020820A1 (de) 2001-11-29
JP2003531730A (ja) 2003-10-28
US20040016727A1 (en) 2004-01-29
DE10020820C2 (de) 2002-03-28
AU2001248326A1 (en) 2001-11-12
WO2001083156A1 (fr) 2001-11-08

Similar Documents

Publication Publication Date Title
DE3926859C2 (fr)
DE60111863T2 (de) Laserschweissverfahren
DE102014213775B4 (de) Verfahren und Vorrichtung zum laserbasierten Bearbeiten von flächigen, kristallinen Substraten, insbesondere von Halbleitersubstraten
DE4434409C1 (de) Verfahren und Vorrichtung zum Materialbearbeiten mit Plasma induzierender Laserstrahlung
EP2448689B1 (fr) Procédé et dispositif de pliage d'une pièce
EP3525975B1 (fr) Procédé et dispositif pour la détermination et la régulation d'une position focale d'un faisceau d'usinage
EP3528992A2 (fr) Procédé et dispositif pour usiner une pièce par enlèvement de copeaux
EP4017674B1 (fr) Procédé d'oxycoupage au moyen d'un faisceau laser
EP0993345A1 (fr) Procede de pliage assiste par laser
EP0252268A2 (fr) Procédé pour la surveillance de source d'énergie d'usinage, en particulier d'un laser, et optique d'usinage pour la réalisation de celui-ci
EP1276588A1 (fr) Dispositif et procede de soudage au laser
DE69721378T2 (de) Laserfokussierungssteuerung in Verarbeitungsoperationen von Materialien
DE4446289A1 (de) Verfahren und Vorrichtung zur Mikroverbindung von Kontaktelementen
WO2009156505A1 (fr) Procédé et dispositif pour connecter des composants au moyen d'un rayonnement laser
EP1750891A1 (fr) Procede de determination de la position focale d'un faisceau laser
WO1991012923A1 (fr) Dispositif de surveillance de pieces usinees par faisceau laser
EP0999729B1 (fr) Procédé pour le soudage au laser et pour la surveillance de chips semi-conducteurs, ainsi que les cartes à chips fabriquées selon ce procédé
EP0674965B1 (fr) Procédé de surveillance de la profondeur de soudage dans les pièces étant soudées au faisceau laser
EP1194260A2 (fr) Dispositif de determination de la position de domaines d'emission d'un processus thermique avec apport d'energie localement limite
DE102016218938A1 (de) Fügeeinrichtung und Fügeverfahren
DE4017286A1 (de) Verfahren und vorrichtung zum loeten und entloeten
DE3390451C2 (de) Verfahren zum Laser-L¦ten
DE10140533A1 (de) Verfahren und Vorrichtung zur Mikrobearbeitung eines Werkstücks mit Laserstrahlung
WO2019185528A1 (fr) Procédé de coupe au laser avec augmentation de la distance de buse de coupe à l'extrémité de coupe et une machine de coupe au laser et produit programme informatique
DE10243147B4 (de) Verfahren zum Einbringen einer Lochkontur in ein Werkstück

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20020830

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

AX Request for extension of the european patent

Free format text: AL;LT;LV;MK;RO;SI

RBV Designated contracting states (corrected)

Designated state(s): DE FR IT

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20041001