EP1312860A4 - Procede et dispositif de traitement par combustion des gaz d'echappement - Google Patents

Procede et dispositif de traitement par combustion des gaz d'echappement

Info

Publication number
EP1312860A4
EP1312860A4 EP01956985A EP01956985A EP1312860A4 EP 1312860 A4 EP1312860 A4 EP 1312860A4 EP 01956985 A EP01956985 A EP 01956985A EP 01956985 A EP01956985 A EP 01956985A EP 1312860 A4 EP1312860 A4 EP 1312860A4
Authority
EP
European Patent Office
Prior art keywords
exhaust gas
combustion flame
gas
combustion
gas treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP01956985A
Other languages
German (de)
English (en)
Other versions
EP1312860A1 (fr
Inventor
Takeshi Tsuji
Kohtaro Kawamura
Masaru Nakaniwa
Kazutaka Okuda
Keiichi Ishikawa
Kazutomo Miyazaki
Rikiya Nakamura
Tetsuo Komai
Tomonori Ohashi
Yoshiro Takemura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2000250940A external-priority patent/JP2002061821A/ja
Priority claimed from JP2000294632A external-priority patent/JP2002106826A/ja
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of EP1312860A1 publication Critical patent/EP1312860A1/fr
Publication of EP1312860A4 publication Critical patent/EP1312860A4/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J15/00—Arrangements of devices for treating smoke or fumes
    • F23J15/02—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/46—Details
    • F23D14/72—Safety devices, e.g. operative in case of failure of gas supply
    • F23D14/74—Preventing flame lift-off
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/46—Details
    • F23D14/72—Safety devices, e.g. operative in case of failure of gas supply
    • F23D14/82—Preventing flashback or blowback
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23M—CASINGS, LININGS, WALLS OR DOORS SPECIALLY ADAPTED FOR COMBUSTION CHAMBERS, e.g. FIREBRIDGES; DEVICES FOR DEFLECTING AIR, FLAMES OR COMBUSTION PRODUCTS IN COMBUSTION CHAMBERS; SAFETY ARRANGEMENTS SPECIALLY ADAPTED FOR COMBUSTION APPARATUS; DETAILS OF COMBUSTION CHAMBERS, NOT OTHERWISE PROVIDED FOR
    • F23M11/00—Safety arrangements
    • F23M11/04—Means for supervising combustion, e.g. windows
    • F23M11/042—Viewing ports of windows
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23N—REGULATING OR CONTROLLING COMBUSTION
    • F23N5/00—Systems for controlling combustion
    • F23N5/02—Systems for controlling combustion using devices responsive to thermal changes or to thermal expansion of a medium
    • F23N5/08—Systems for controlling combustion using devices responsive to thermal changes or to thermal expansion of a medium using light-sensitive elements
    • F23N5/082—Systems for controlling combustion using devices responsive to thermal changes or to thermal expansion of a medium using light-sensitive elements using electronic means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23C—METHODS OR APPARATUS FOR COMBUSTION USING FLUID FUEL OR SOLID FUEL SUSPENDED IN  A CARRIER GAS OR AIR 
    • F23C2900/00—Special features of, or arrangements for combustion apparatus using fluid fuels or solid fuels suspended in air; Combustion processes therefor
    • F23C2900/9901—Combustion process using hydrogen, hydrogen peroxide water or brown gas as fuel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23N—REGULATING OR CONTROLLING COMBUSTION
    • F23N2229/00—Flame sensors

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Environmental & Geological Engineering (AREA)
  • Incineration Of Waste (AREA)

Abstract

L'invention concerne un procédé de traitement par combustion des gaz d'échappement, permettant de décomposer par la chaleur ou par oxydation les composants inflammables présents dans ces gaz d'échappement. Ce procédé consiste à introduire les gaz d'échappement produits lors d'un processus de production industriel dans une flamme de combustion, et comprend les étapes suivantes : on produit de l'hydrogène et de l'oxyde gazeux par électrolyse d'eau, on produit une flamme de combustion alimentée par cet hydrogène et cet oxyde gazeux, et on détecte la flamme de combustion au moyen d'un capteur à UV, à travers un tube ou une ouverture formés dans la paroi du brûleur en amont de la flamme de combustion, de sorte que la flamme peut être observée en direct.
EP01956985A 2000-08-22 2001-08-21 Procede et dispositif de traitement par combustion des gaz d'echappement Withdrawn EP1312860A4 (fr)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2000250940A JP2002061821A (ja) 2000-08-22 2000-08-22 燃焼式排ガス処理方法及び装置
JP2000250940 2000-08-22
JP2000294632 2000-09-27
JP2000294632A JP2002106826A (ja) 2000-09-27 2000-09-27 燃焼式排ガス処理装置
PCT/JP2001/007136 WO2002016830A1 (fr) 2000-08-22 2001-08-21 Procede et dispositif de traitement par combustion des gaz d'echappement

Publications (2)

Publication Number Publication Date
EP1312860A1 EP1312860A1 (fr) 2003-05-21
EP1312860A4 true EP1312860A4 (fr) 2007-02-28

Family

ID=26598228

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01956985A Withdrawn EP1312860A4 (fr) 2000-08-22 2001-08-21 Procede et dispositif de traitement par combustion des gaz d'echappement

Country Status (5)

Country Link
US (1) US20040028590A1 (fr)
EP (1) EP1312860A4 (fr)
KR (1) KR20030024892A (fr)
TW (1) TW542886B (fr)
WO (1) WO2002016830A1 (fr)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9187347B2 (en) * 2002-11-19 2015-11-17 Xogen Technologies Inc. Treatment of a waste stream through production and utilization of oxyhydrogen gas
US9296629B2 (en) 2002-11-19 2016-03-29 Xogen Technologies Inc. Treatment of a waste stream through production and utilization of oxyhydrogen gas
ATE455731T1 (de) * 2002-11-19 2010-02-15 Xogen Technologies Inc Abwässerbehandlung durch erzeugung und verbrauch von h2- und o2- gas
US7569193B2 (en) * 2003-12-19 2009-08-04 Applied Materials, Inc. Apparatus and method for controlled combustion of gaseous pollutants
US7736599B2 (en) * 2004-11-12 2010-06-15 Applied Materials, Inc. Reactor design to reduce particle deposition during process abatement
CN101300411B (zh) 2005-10-31 2012-10-03 应用材料公司 制程减降反应器
WO2009025568A1 (fr) * 2007-07-31 2009-02-26 Shapovalov Viacheslav Dmitriev Dispositif et procédé pour brûler une biomasse à haute teneur en cendres, toxique
ITRE20080123A1 (it) * 2008-12-31 2010-07-01 Orles Ferretti Gestione di un sistema di alimentazione di un forno industriale
GB0902221D0 (en) * 2009-02-11 2009-03-25 Edwards Ltd Pilot
JP5437734B2 (ja) * 2009-08-07 2014-03-12 株式会社荏原製作所 燃焼式排ガス処理装置
CN101975394A (zh) * 2010-11-10 2011-02-16 郑州锅炉股份有限公司 机炉一体列管式燃烧机及其三废余热回收装置
WO2013130467A1 (fr) 2012-02-27 2013-09-06 Deec, Inc. Générateurs de plasma riche en oxygène pour augmenter la puissance de moteurs à combustion interne
KR101435371B1 (ko) 2012-10-16 2014-08-29 주식회사 글로벌스탠다드테크놀로지 CO, NOx 개별 제어 방식을 이용한 저공해 연소방법
JP6151945B2 (ja) * 2013-03-28 2017-06-21 株式会社荏原製作所 除害機能付真空ポンプ
GB2514341B (en) * 2013-05-20 2016-08-24 Edwards Ltd Radiant burner combustion monitoring
JP6166102B2 (ja) 2013-05-30 2017-07-19 株式会社荏原製作所 除害機能付真空ポンプ
GB2516267B (en) * 2013-07-17 2016-08-17 Edwards Ltd Head assembly
KR101532670B1 (ko) * 2013-11-08 2015-06-30 주식회사 포스코 불꽃검출기 및 이를 구비하는 버너장치
CN105090999B (zh) * 2014-05-12 2018-11-20 日本派欧尼株式会社 废气的燃烧式净化装置
WO2016099760A1 (fr) * 2014-12-16 2016-06-23 Applied Materials, Inc. Dépollution par plasma utilisant de la vapeur d'eau conjointement avec de l'hydrogène ou des gaz contenant de l'hydrogène
CN104896487B (zh) * 2015-06-04 2017-02-01 山东晋煤明水化工集团有限公司 吡啶生产过程中废水、废气、废渣的处理方法
NL2015095B1 (nl) * 2015-07-06 2017-01-31 Johannus Theodorus Maria Taris Hermanus Inrichting en werkwijze voor het reinigen van een gas.
AU2017229114B2 (en) 2016-03-07 2023-01-12 HyTech Power, Inc. A method of generating and distributing a second fuel for an internal combustion engine
CN105674338A (zh) * 2016-03-11 2016-06-15 王本富 一种具有氢氧助燃装置的采暖炉
US20190234348A1 (en) * 2018-01-29 2019-08-01 Hytech Power, Llc Ultra Low HHO Injection
WO2019148241A1 (fr) * 2018-02-01 2019-08-08 Hydroflex Technologies Pty Ltd Système et procédé de post-traitement des gaz d'échappement
DE102019117331B4 (de) * 2019-06-27 2024-07-04 Das Environmental Expert Gmbh Brenner zur Erzeugung einer Flamme für die Verbrennung von Prozessgas und Abgasbehandlungsvorrichtung mit einem Brenner
KR102427056B1 (ko) * 2020-06-02 2022-08-01 씨에스케이(주) 스크러버용 버너
GB2608822A (en) * 2021-07-13 2023-01-18 Edwards Ltd Inlet nozzle assembly
KR20230083516A (ko) * 2021-12-03 2023-06-12 삼성전자주식회사 기판 처리 시스템, 및 이를 사용한 반도체 소자의 제조 방법

Citations (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3825913A (en) * 1972-03-31 1974-07-23 Electronics Corp America Fuel burner supervisory system
US3985494A (en) * 1975-06-26 1976-10-12 Howe-Baker Engineers, Inc. Waste gas burner assembly
EP0001437A1 (fr) * 1977-10-10 1979-04-18 Bayer Ag Procédé et appareil pour brûler des gaz explosibles
JPS5759124A (en) * 1980-09-29 1982-04-09 Ngk Insulators Ltd Flame detector
GB2089502A (en) * 1980-12-05 1982-06-23 Cerberus Ag Flame Detector
FR2615596A1 (fr) * 1987-05-18 1988-11-25 Alsace Gaz Ind Sa Dispositif de controle d'une flamme localisee dans une enceinte
WO1989012774A1 (fr) * 1988-06-23 1989-12-28 Allied-Signal Inc. Detecteur de flammes optique a semi-conducteur
US5527984A (en) * 1993-04-29 1996-06-18 The Dow Chemical Company Waste gas incineration
DE19509704A1 (de) * 1995-03-09 1996-09-12 Just Hans Juergen Dr Verfahren und Anordnung zur Überwachung und Regelung von Verbrennungsprozessen
EP0748984A1 (fr) * 1995-06-12 1996-12-18 Kodak-Pathe Procédé et dispositif de destruction par incinération de gaz de réaction
US5705140A (en) * 1995-07-18 1998-01-06 Transformation Technologies, Ltd. Process for the transformation of halogenated refrigerant gases
EP0819887A2 (fr) * 1996-06-19 1998-01-21 Osaka Sanso Kogyo Limited Combustion des fumées
US5828797A (en) * 1996-06-19 1998-10-27 Meggitt Avionics, Inc. Fiber optic linked flame sensor
US5900217A (en) * 1995-01-23 1999-05-04 Centrotherm Elektrische Anlagen Gmbh & Co. Apparatus for purifying waste gases
WO1999027301A1 (fr) * 1997-11-21 1999-06-03 Ebara Corporation Unite de combustion de traitement de gaz d'echappement
US5997283A (en) * 1993-09-06 1999-12-07 Hydrogen Technology Ltd Electrolysis systems
WO2000032990A1 (fr) * 1998-12-01 2000-06-08 Ebara Corporation Dispositif de traitement des gaz d'echappement

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3586446A (en) * 1967-09-14 1971-06-22 Xerox Corp Flame photometer
US4014777A (en) * 1973-07-20 1977-03-29 Yull Brown Welding
GB2238059A (en) * 1989-11-17 1991-05-22 Command International Inc Electrolytic gas generating apparatus for producing a combustible mixture of hydrogen and oxygen by electrolysis of water for particular use in gas welding
JP2735723B2 (ja) * 1992-01-08 1998-04-02 神鋼パンテツク株式会社 高純度酸素及び水素の製造方法
JPH066944U (ja) * 1992-06-25 1994-01-28 株式会社神戸製鋼所 燃焼失火検知装置
JPH07103443A (ja) * 1993-09-30 1995-04-18 Maeda Corp ごみ焼却装置
JP3062019B2 (ja) * 1994-11-18 2000-07-10 東京瓦斯株式会社 燃焼制御装置
JP3310838B2 (ja) * 1995-10-27 2002-08-05 三菱重工業株式会社 炉内監視装置の清掃装置
JP3039292U (ja) * 1996-10-24 1997-07-15 中銀観光株式会社 水素・酸素混合ガスに炭化水素系添加物を使用した焼却・溶融炉
JP3072981B2 (ja) * 1997-11-18 2000-08-07 スガ試験機株式会社 排煙処理方法及びその装置

Patent Citations (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3825913A (en) * 1972-03-31 1974-07-23 Electronics Corp America Fuel burner supervisory system
US3985494A (en) * 1975-06-26 1976-10-12 Howe-Baker Engineers, Inc. Waste gas burner assembly
EP0001437A1 (fr) * 1977-10-10 1979-04-18 Bayer Ag Procédé et appareil pour brûler des gaz explosibles
JPS5759124A (en) * 1980-09-29 1982-04-09 Ngk Insulators Ltd Flame detector
GB2089502A (en) * 1980-12-05 1982-06-23 Cerberus Ag Flame Detector
FR2615596A1 (fr) * 1987-05-18 1988-11-25 Alsace Gaz Ind Sa Dispositif de controle d'une flamme localisee dans une enceinte
WO1989012774A1 (fr) * 1988-06-23 1989-12-28 Allied-Signal Inc. Detecteur de flammes optique a semi-conducteur
US5527984A (en) * 1993-04-29 1996-06-18 The Dow Chemical Company Waste gas incineration
US5997283A (en) * 1993-09-06 1999-12-07 Hydrogen Technology Ltd Electrolysis systems
US5900217A (en) * 1995-01-23 1999-05-04 Centrotherm Elektrische Anlagen Gmbh & Co. Apparatus for purifying waste gases
DE19509704A1 (de) * 1995-03-09 1996-09-12 Just Hans Juergen Dr Verfahren und Anordnung zur Überwachung und Regelung von Verbrennungsprozessen
EP0748984A1 (fr) * 1995-06-12 1996-12-18 Kodak-Pathe Procédé et dispositif de destruction par incinération de gaz de réaction
US5705140A (en) * 1995-07-18 1998-01-06 Transformation Technologies, Ltd. Process for the transformation of halogenated refrigerant gases
EP0819887A2 (fr) * 1996-06-19 1998-01-21 Osaka Sanso Kogyo Limited Combustion des fumées
US5828797A (en) * 1996-06-19 1998-10-27 Meggitt Avionics, Inc. Fiber optic linked flame sensor
WO1999027301A1 (fr) * 1997-11-21 1999-06-03 Ebara Corporation Unite de combustion de traitement de gaz d'echappement
EP1033533A1 (fr) * 1997-11-21 2000-09-06 Ebara Corporation Unite de combustion de traitement de gaz d'echappement
WO2000032990A1 (fr) * 1998-12-01 2000-06-08 Ebara Corporation Dispositif de traitement des gaz d'echappement
EP1143197A1 (fr) * 1998-12-01 2001-10-10 Ebara Corporation Dispositif de traitement des gaz d'echappement

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO0216830A1 *

Also Published As

Publication number Publication date
KR20030024892A (ko) 2003-03-26
TW542886B (en) 2003-07-21
US20040028590A1 (en) 2004-02-12
WO2002016830A1 (fr) 2002-02-28
EP1312860A1 (fr) 2003-05-21

Similar Documents

Publication Publication Date Title
EP1312860A4 (fr) Procede et dispositif de traitement par combustion des gaz d'echappement
AU2003251444A1 (en) Plasma reactor for carrying out gas reactions and method for the plasma-supported reaction of gases
WO2007103718A3 (fr) Brûleur industriel
MXPA02007805A (es) Alimentador de vidrio pperado con combustion de oxi-gas..
TW200706807A (en) Gas combustion apparatus
TW200629389A (en) Method for treating a substrate
WO2010018192A3 (fr) Système de sécurité dans une installation de combustion et procédé de fonctionnement de celle-ci
WO2008065656A3 (fr) Démarrage de moteurs à turbine
GB0417378D0 (en) Gas abatement
WO2008037413A3 (fr) Procédé et dispositif destinés à brûler des combustibles
ZA200100912B (en) System for providing proximate turbulent and coherent gas jets.
TW200743640A (en) Contact methods for formation of Lewis gas/liquid systems and recovery of Lewis gas therefrom
MXPA03010386A (es) Metodo para reducir emisiones de gas de oxido de desecho en procesos industriales.
CA2364223A1 (fr) Chauffe-eau resistant aux vapeurs inflammables produisant de faibles quantites de nox
WO2007036274A8 (fr) Generation d'hydrogene et d'oxygene a partir de l'eau et leur stockage avec des siliciures
TW200637629A (en) Apparatus for inhibiting the propagation of a flame front
MX2007004773A (es) Sistema y metodo de procesamiento de gases de escape de conjunto generador.
WO2002026646A3 (fr) Dessechant et procede ameliore de sechage de preformes de suie
DE60201780D1 (de) Metallfeinungsverfahren, insbesondere zweistufiges Sauerstoffaufblasverfahren
GB2447381A (en) Methods and apparatus for downstream dissociation of gases
MXPA02000620A (es) Ensamble cuadrilateral para limpieza por chorro coherente y postcombustion en un horno de arco electrico.
WO2007001838A3 (fr) Procedes et appareil d'allumage d'un plasma basse pression
WO2005082779A3 (fr) Procede de production d'acide nitrique et usine a cet effet
JO1975B1 (en) Method for preparing hydrogen bromide gas and a device or apparatus for its application
EP1409129A4 (fr) Le magnegas, un nouveau gaz combustible a prix competitif, riche en oxygene, non polluant et tres efficace et procede associe

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20030225

AK Designated contracting states

Designated state(s): DE FR GB

AX Request for extension of the european patent

Extension state: AL LT LV MK RO SI

RIC1 Information provided on ipc code assigned before grant

Ipc: F23G 7/06 20060101AFI20020306BHEP

A4 Supplementary search report drawn up and despatched

Effective date: 20070130

RIC1 Information provided on ipc code assigned before grant

Ipc: F23D 14/74 20060101ALI20070124BHEP

Ipc: F23D 14/82 20060101ALI20070124BHEP

Ipc: F23N 5/08 20060101ALI20070124BHEP

Ipc: F23G 7/06 20060101AFI20020306BHEP

17Q First examination report despatched

Effective date: 20080604

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20130618