EP1314890A3 - Système de contrôle d'une pompe à vide - Google Patents

Système de contrôle d'une pompe à vide Download PDF

Info

Publication number
EP1314890A3
EP1314890A3 EP02025927A EP02025927A EP1314890A3 EP 1314890 A3 EP1314890 A3 EP 1314890A3 EP 02025927 A EP02025927 A EP 02025927A EP 02025927 A EP02025927 A EP 02025927A EP 1314890 A3 EP1314890 A3 EP 1314890A3
Authority
EP
European Patent Office
Prior art keywords
alternating current
rotational speed
vacuum pump
current motor
predetermined
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP02025927A
Other languages
German (de)
English (en)
Other versions
EP1314890A2 (fr
Inventor
Shinya Yamamoto
Masahiro Kawaguchi
Osamu Uchiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Industries Corp
Original Assignee
Toyota Industries Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Industries Corp filed Critical Toyota Industries Corp
Publication of EP1314890A2 publication Critical patent/EP1314890A2/fr
Publication of EP1314890A3 publication Critical patent/EP1314890A3/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F04C2240/403—Electric motor with inverter for speed control
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/07—Electric current
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/07—Electric current
    • F04C2270/075—Controlled or regulated

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP02025927A 2001-11-21 2002-11-20 Système de contrôle d'une pompe à vide Withdrawn EP1314890A3 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001356469A JP2003155981A (ja) 2001-11-21 2001-11-21 真空ポンプにおける運転制御方法及び運転制御装置
JP2001356469 2001-11-21

Publications (2)

Publication Number Publication Date
EP1314890A2 EP1314890A2 (fr) 2003-05-28
EP1314890A3 true EP1314890A3 (fr) 2003-08-20

Family

ID=19167980

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02025927A Withdrawn EP1314890A3 (fr) 2001-11-21 2002-11-20 Système de contrôle d'une pompe à vide

Country Status (3)

Country Link
US (1) US20030123990A1 (fr)
EP (1) EP1314890A3 (fr)
JP (1) JP2003155981A (fr)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2679293A1 (fr) * 2004-03-24 2014-01-01 Donaldson Company, Inc. Purificateur d'air
WO2006006906A1 (fr) * 2004-07-13 2006-01-19 Delaval Holding Ab Source de vide reglable
FR2883934B1 (fr) * 2005-04-05 2010-08-20 Cit Alcatel Pompage rapide d'enceinte avec limitation d'energie
JP4737770B2 (ja) * 2006-09-12 2011-08-03 アネスト岩田株式会社 真空ポンプの運転制御装置および方法
US8261564B2 (en) * 2007-05-10 2012-09-11 Spx Corporation Refrigerant recovery apparatus with variable vacuum time and method
KR100775772B1 (ko) 2007-05-23 2007-11-12 주식회사 부강스틸 회전속도제어수단이 겸비된 회전식 강선인발장치
GB0809976D0 (en) * 2008-06-02 2008-07-09 Edwards Ltd Vacuum pumping systems
DE102008062054B4 (de) 2008-12-12 2019-05-29 Pfeiffer Vacuum Gmbh Anordnung mit Vakuumpumpe und Verfahren zum Betrieb einer Vakuumpumpe
TW201139853A (en) * 2009-10-29 2011-11-16 Ulvac Inc Pump unit, evacuation apparatus used for load-lock chamber, and vacuum apparatus
US9080576B2 (en) 2011-02-13 2015-07-14 Applied Materials, Inc. Method and apparatus for controlling a processing system
GB2502134B (en) * 2012-05-18 2015-09-09 Edwards Ltd Method and apparatus for adjusting operating parameters of a vacuum pump arrangement
DE102013108090A1 (de) * 2013-07-29 2015-01-29 Hella Kgaa Hueck & Co. Pumpenanordnung
DE102016223782A1 (de) * 2016-11-30 2018-05-30 Leybold Gmbh Verfahren zum Betreiben eines Vakuumpumpensystems
JP7430035B2 (ja) * 2019-05-09 2024-02-09 株式会社アルバック 真空排気装置及びその運転方法
WO2021259466A1 (fr) * 2020-06-24 2021-12-30 Pierburg Pump Technology Gmbh Pompe à vide de véhicule automobile
EP4172012B1 (fr) * 2020-06-24 2024-02-28 Pierburg Pump Technology GmbH Pompe à vide de véhicule automobile
GB2604188A (en) * 2021-02-22 2022-08-31 Edwards Tech Vacuum Engineering Qingdao Co Ltd Control of liquid ring pump
GB2643159A (en) * 2024-08-01 2026-02-11 Edwards Korea Ltd Controller, vacuum pump and method for pumping hydrogen gas
KR102822877B1 (ko) * 2024-12-06 2025-06-24 주식회사 콤프케어 공기압축기 소비전력 최적화 제어장치 및 이를 이용한 소비전력 최적화 제어방법

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB986915A (en) * 1962-03-01 1965-03-24 Micafil Ag Improvements in and relating to evacuating arrangements employing a roots pump
US4604036A (en) * 1983-09-09 1986-08-05 Hitachi, Ltd. Torque control apparatus for enclosed compressors
US4664601A (en) * 1984-07-25 1987-05-12 Hitachi, Ltd. Operation control system of rotary displacement type vacuum pump
JPH05231381A (ja) * 1992-02-26 1993-09-07 Hitachi Ltd ドライ真空ポンプの真空排気容量制御方法とその装置並びにドライ真空ポンプおよび半導体製造用真空処理装置
JPH10220372A (ja) * 1996-08-05 1998-08-18 Boc Group Plc:The 真空ポンプ状態評価システム

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3569924B2 (ja) * 1992-03-19 2004-09-29 松下電器産業株式会社 流体回転装置
US5447414A (en) * 1994-05-27 1995-09-05 Emerson Electric Co. Constant air flow control apparatus and method
JP3847357B2 (ja) * 1994-06-28 2006-11-22 株式会社荏原製作所 真空系の排気装置
US5624394A (en) * 1994-10-28 1997-04-29 Iolab Corporation Vacuum system and a method of operating a vacuum system
US5944049A (en) * 1997-07-15 1999-08-31 Applied Materials, Inc. Apparatus and method for regulating a pressure in a chamber
US6045331A (en) * 1998-08-10 2000-04-04 Gehm; William Fluid pump speed controller
TW470815B (en) * 1999-04-30 2002-01-01 Arumo Technos Kk Method and apparatus for controlling a vacuum pump

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB986915A (en) * 1962-03-01 1965-03-24 Micafil Ag Improvements in and relating to evacuating arrangements employing a roots pump
US4604036A (en) * 1983-09-09 1986-08-05 Hitachi, Ltd. Torque control apparatus for enclosed compressors
US4664601A (en) * 1984-07-25 1987-05-12 Hitachi, Ltd. Operation control system of rotary displacement type vacuum pump
JPH05231381A (ja) * 1992-02-26 1993-09-07 Hitachi Ltd ドライ真空ポンプの真空排気容量制御方法とその装置並びにドライ真空ポンプおよび半導体製造用真空処理装置
JPH10220372A (ja) * 1996-08-05 1998-08-18 Boc Group Plc:The 真空ポンプ状態評価システム

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 017, no. 686 (M - 1529) 15 December 1993 (1993-12-15) *
PATENT ABSTRACTS OF JAPAN vol. 1998, no. 13 30 November 1998 (1998-11-30) *

Also Published As

Publication number Publication date
US20030123990A1 (en) 2003-07-03
EP1314890A2 (fr) 2003-05-28
JP2003155981A (ja) 2003-05-30

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