EP1443214B1 - Stator einer Turbomolekularpumpe - Google Patents

Stator einer Turbomolekularpumpe Download PDF

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Publication number
EP1443214B1
EP1443214B1 EP04290163A EP04290163A EP1443214B1 EP 1443214 B1 EP1443214 B1 EP 1443214B1 EP 04290163 A EP04290163 A EP 04290163A EP 04290163 A EP04290163 A EP 04290163A EP 1443214 B1 EP1443214 B1 EP 1443214B1
Authority
EP
European Patent Office
Prior art keywords
stator
sectors
turbomolecular pump
sector
blades
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP04290163A
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English (en)
French (fr)
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EP1443214A1 (de
Inventor
Laurent Maniglier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
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Alcatel Lucent SAS
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Filing date
Publication date
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Publication of EP1443214A1 publication Critical patent/EP1443214A1/de
Application granted granted Critical
Publication of EP1443214B1 publication Critical patent/EP1443214B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Definitions

  • the present invention relates to turbomolecular pumps, adapted for pumping gases and creating a high vacuum in a vacuum chamber, as defined in the preamble of claim 1.
  • Such a pump is known from the document DE-A-2,218,615 see the right part of the stator (3) in the single figure of the document.
  • Turbomolecular pumps generally have a multi-stage, finned peripheral stator engaged between fins of a multi-stage central rotor.
  • a multi-stage turbomolecular pump rotor comprises an axial series of rotor stages each consisting of a central ring of which depart, in a substantially radial direction, rotor fins regularly distributed around the periphery of the central ring.
  • the assembly is rotatably mounted along an axis of rotation, and is driven by motor means.
  • the multi-stage stator is composed of an axial series of annular stators each forming a stator stage, each stator stage being formed by an annular rim from which, in a substantially radial direction, inclined fins project.
  • the inclined fins of a stator stage engage between the inclined fins of two successive rotor stages.
  • the turbomolecular pumps comprise means for mounting and disassembling radial elements of the stator around the rotor.
  • the stator is made by progressively assembling around the rotor elements or subassemblies intended to constitute the stator.
  • a first known turbomolecular pump stator structure is illustrated on the figure 1 .
  • a plurality of finned stator sectors are progressively adapted, on the one hand to form annular stator stages, on the other hand to form the plurality of annular stator stages. offset axially to achieve the successive stages of the stator.
  • stator sector 1 If we consider a rotor oriented with its vertical axis of rotation, it is positioned a first sector of stator fins 1 between two successive rotor stages with fins, by radial displacement illustrated by the arrow 2, and is engaged a second stator sector 3 by opposite radial displacement according to the arrow 4 to engage it between the same two finned rotor stages, the two stator sectors 1 and 3 forming an annular stator stage.
  • annular spacer 5 is axially engaged, by movement according to the arrow 6, the spacer 5 bearing on the periphery of the two stator sectors 1 and 3.
  • the spacer 5 has the necessary dimension to separate two successive stator stages. according to the spacing of two successive successive rotor stages.
  • stator sectors 7 and 8 are then similarly positioned, then an annular spacer 9, then two stator sectors 10 and 11 and an annular spacer 12, and so on as a function of the number of stages of the stator.
  • the figure 2 illustrates a second known turbomolecular pump structure, comprising different means for solving the problem of nesting the stator vanes in the rotor blades.
  • the rotor 13 rotatably mounted about its axis of rotation II as illustrated by the arrow 14, and having a series of rotor stages each having inclined fins.
  • the stator 15 is formed of the assembly of two half-stators 15a and 15b, each half-stator 15a and 15b consisting of a half-shell half-shell 16a or 16b and from which radially inward stator fins such as that the fins 17a and 17b, arranged in a series of stators stages interlocking with the fins of the rotor stages 13a-13i.
  • the presence of the two half-stators 15a and 15b monoblocs allows for insertable pumps, intended to be housed directly in a housing or a predefined system of the customer.
  • each half-stator 15a or 15b monobloc is machined in a metal block to form the fins 17a or 17b. Due to the configuration and the convergent radial orientation of the fins protruding from the concave inner face of the peripheral half-shell 16a or 16b, it is not possible to machine fins 17a or 17b whose radial length exceeds a maximum length determined by the possibilities of passage of the milling tools of the fins.
  • this known turbomolecular pump structure limits the maximum flow rate of the turbomolecular pump, the flow limit being determined by the radial length of the fins.
  • the problem proposed by the present invention is to design a new turbomolecular pump structure which can be produced at a lower cost, avoiding the assembly of too many parts or the production of complex parts, and which makes it possible to produce pumps insertable turbomolecules whose flow rate is greater than that obtained by the structure of the figure 2 .
  • Another problem is also to avoid having to make constituent parts whose dimensions are very precise, because it increases the cost of production of the turbomolecular pump.
  • the finned stator sectors constitute individual elements that can easily be manufactured by machining metal parts, and the ease of machining makes it possible to produce stators whose fins have a radial dimension greater than that which can be realized in a structure of the figure 2 .
  • the constituent parts of such a turbomolecular pump structure can be made with less stringent tolerances than the parts of the structure of the figure 1 because the peripheral hull sector by itself, with the retaining means, a multi-stage spacer which individually positions the stator sectors fins, so that there is not a stack of several parts put some after the others.
  • the finned stator sectors comprise a single row of fins, each constituting a single-stage stator sector.
  • finned stator sectors comprising two or more rows of fins, each constituting a multi-stage finned partial stator sector, insofar as the machining of the fins on allows.
  • the finned stator sectors may thus comprise at least one annular row of fins integral with a rim in the shape of a crown sector.
  • the rim can connect the outer ends of the fins, and it is the rim which then forms the peripheral edge of the finned stator sector and which is fixed to the concave inner face of the corresponding peripheral shell sector to form multi-stage stator sector.
  • the rim connects the inner ends of the fins.
  • this structure achieves a better efficiency of empty performance, and the realization is facilitated by the fact that the machining of the fins is from the outside of the rim in crown sector, on fins in divergent radial orientations. It is then the outer ends of the vanes that form the peripheral edge of the vane stator sector and which attach to the concave inner face of the corresponding peripheral shell sector to form the multistage stator sector.
  • the retaining means of the stator fin sectors on the concave inner face of the peripheral shell sector may be of different kinds.
  • the concave inner face of the peripheral shell sector comprises a plurality of annular grooves, and the finned stator sectors each comprise at least one peripheral edge which is radially recessed in force in one of the annular grooves of the peripheral hull area.
  • stator sectors have a rim which connects the inner ends of the fins
  • peripheral edge or edges of the stator fin sectors are constituted by the outer ends of the vanes of said stator sectors which radially fit into force in the corresponding annular grooves of the peripheral shell sector.
  • stator sectors have a rim which connects the outer ends of the fins
  • peripheral edge or edges of the finned stator sectors are constituted by the rims themselves which are embedded in the annular grooves of the Peripheral shell.
  • turbomolecular pumps figures 1 and 2 have been described previously.
  • the turbomolecular pump comprises a multistage rotor 18, comprising a series of stages rotors axially offset with respect to each other and identified by the reference numerals 18a, 18b, 18c, 18d, 18e, 18f, 18g, 18h , 18i and 18j.
  • Each stage of the rotor 18 is formed of an inner ring such as the ring 19 from which inclined fins such as the fin 18a oriented in a substantially radial direction towards the outside.
  • the rotor 18 is rotatably mounted about an axis of rotation I-I as indicated by the arrow 20.
  • the stator is formed by the assembly of two subassemblies 21 and 22 each forming a multistage stator sector, which are reported radially around the rotor 18 as indicated by the respective arrows 23 and 23a.
  • Each subassembly 21 or 22 is formed of the assembly of a respective circumferential hull sector 24 or 25 and an axial row of finned stator sectors 26 or 27.
  • a first axial row of finned stator sectors 26 formed by the stator sectors with fins 26a, 26b, 26c, 26d, 26e, 26f, 26g, 26h, 26i and 26j aligned. parallel to the axis of rotation II.
  • a second axial row of finned stator sectors formed by the finned stator sectors 27a, 27b, 27c, 27d, 27e, 27f, 27g, 27h, 27i and 27j aligned parallel to the axis of rotation.
  • the stator finned sectors are of the inner rim type, as seen better on the figure 5 .
  • the finned stator sector 26a comprises an annular row of fins 126a integral with a rim 226a itself in the shape of a crown sector.
  • the rim 226a connects the inner ends of the fins of the annular row of fins 126a.
  • the peripheral edge 326a of the finned stator sector 26a is then formed by the outer ends of the fins of the annular row of fins 126a.
  • the invention can also be applied to a second embodiment of a stator fin sector illustrated in FIG. figure 6 .
  • a stator fin sector illustrated in FIG. figure 6 .
  • the rim 226a connects the outer ends of the fins of the annular row of fins 126a.
  • the peripheral edge 326a of the stator winged sector 26a is then constituted by the rim 226a itself.
  • each peripheral shell sector 24 or 25 comprises a plurality of annular grooves.
  • the annular grooves 24a, 24b, 24c, 24d, 24e, 24f, 24g, 24h, 24i and 24j can thus be distinguished.
  • Each annular groove 24a-24j is disposed and shaped to receive the peripheral edge of one of the stator sectors 26a-26j, and thus to individually hold said stator sectors 26a-26j in position.
  • peripheral hull sector 25 which receives and retains the finned stator sectors 27a-27j.
  • the finned stator sectors 26a-26j and 27a-27j are first engaged by radially engaging their peripheral edge (such as the peripheral edge 326a of the stator winged sector 26a) in the corresponding annular grooves 24a-24j. respective peripheral shell sectors 24 and 25, as illustrated for example by arrows 28 and 28a.
  • the two multi-stage stator sectors 21 and 22 are thus produced, which can then be assembled radially on the rotor 18 as illustrated by the arrows 23 and 23a of FIG. figure 3 .
  • peripheral shell sectors such as the peripheral shell sector 25 may, if necessary, have holes such as the hole 29, to promote degassing of the space located at the periphery of the peripheral shell sectors 24 and 25.
  • the stator is made by assembling two multi-stage half-stators 21 and 22 each consisting of a sector of 180 °.
  • each peripheral shell area 24 or 25 is a half-cylinder
  • each finned stator sector 26a-26j and 27a-27j is a half-ring.
  • stator made by assembling three multi-stage stator sectors of 120 ° each, or four multistage stator sectors of 90 ° each, or still multi-stage stator sectors from different angles.
  • the illustrated structure minimizes the number of parts to be assembled, which can be advantageous.
  • the stator is a single-stage radial assembly of multi-stage stator sectors 21 and 22.
  • each peripheral shell sector 24 or 25 covers the entire length of the stator of the turbomolecular pump.
  • the stator may be a multi-stage assembly of multistage stator sectors.
  • a first stator stage as illustrated on the figure 3 , to which is axially connected a second coaxial stator stage of similar structure, possibly with different fin structures and diameters.
  • the stator is then an assembly of several floors of multistage stator sectors.
  • the assembly After completing the assembly of the turbomolecular pump as illustrated on the figure 3 , the assembly must be inserted into a housing, to achieve a functionally complete turbomolecular pump. We can then provide a specific housing, with means for attachment to a vacuum chamber.
  • an insertable turbomolecular pump that is to say adapted to be inserted into a housing or a customer system such as a vacuum enclosure.
  • the pump is then installed closer to the application and optimizes pumping performance.
  • the shell sectors 24 and 25 make it possible to enclose the elements of the turbomolecular pump, to constitute an assembly possibly held by temporary assembly means, which can be removed during the introduction of the pump into the system of the turbomolecular pump. customer.
  • the hull sectors 24 and 25 should preferably be inserted with little clearance in the crankcase or the customer's system, to ensure a good contact between the hull sectors 24 and 25 and the crankcase or the customer's system. which favors heat exchange.
  • turbomolecular pump structure allows all the possible fin geometries in terms of inclination, inside diameter, outside diameter, floor height and thickness.
  • This system also makes it possible to simplify the stacking of the spacers and the stators, and to get rid of the chain of dimensions of these different elements.
  • this structure improves the heat exchange between the rotor and the ambient environment, through the shell sectors, by promoting thermal contact between the stator fins and the shell sectors, and between the hull sectors and the hull sectors. the casing or peripheral envelope of the pump, and reducing the number of thermal transmission discontinuities due to the one-piece nature of multi-stage hull sectors.
  • This structure makes it possible to provide an insertable version for higher volume vacuum pumps.
  • the number of precise parts is reduced compared to a conventional assembly.
  • the production cost of the pump is thus greatly reduced.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (11)

  1. Turbomolekularpumpe mit einem mehrstufigen peripheren Stator mit zwischen Flügeln eines mehrstufigen zentralen Rotors eingreifenden Flügeln (18), wobei;
    - Der Stator mehrere Statorflügelbereiche (26a-26j ; 27a-27j) umfasst, welche um den Rotor (18) herum zusammengefügt sind,
    - die Statorflügelbereiche (26a-26j; 27a-27j) in mehreren axialen Reihen von Statorflügelbereichen (26, 27) angeordnet sind,
    - jede axiale Reihe von Statorflügelbereichen (26, 27) fest mit einem Randschalenbereich (24, 25) verbunden ist und somit einen mehrstufigen Statorbereich bildet
    dadurch gekennzeichnet, dass:
    - die Statorflügelbereiche (26a-26j; 27a-27j) jeweils ein Einzelelement bilden,
    - die Statorflügelbereiche einer selben axialen Reihe von Statorflugelbereichen (26, 27) zusammengefügt und an der konkaven Innenseite des entsprechenden Randsdialenbereich (24, 25) miteinander verbunden sind, um den mehrstufigen Statorbereich zu bilden,
    - die konkave Innenseite des Randschalenbereichs (24, 25) Rückhaltemittel (24a-24j) umfasst, um die einzelnen Statorflügelbereiche (26a-26j) individuell in Position zu halten.
  2. Turbomolekularpumpe nach Anspruch 1, dadurch gekennzeichnet, dass Statorflügelbereiche (26a-26j; 27a-27j) eine einzige Reihe von Flügeln umfassen, welche jeweils einen einstufigen Statorbereich bilden.
  3. Turbomolekularpumpe nach einem der Ansprüche 1 oder 2, dadurch gekennzeichnet, dass die Statorflügelbereiche (26a-26j; 27a-27j) mindestens eine mit einer Felge (226a) fest verbundene ringförmige Reihe von Flügeln (126a) umfassen.
  4. Turbomolekularpumpe nach Anspruch 3, dadurch gekennzeichnet, dass die Felge (226a) die inneren Enden der Flügel der ringförmigen Reihe von Flügeln (126a) miteinander verbindet.
  5. Turbomolekularpumpe nach Anspruch 3, dadurch gekennzeichnet, dass die Felge (226a) die äußeren Enden der Flügel der ringförmigen Reihe von Flügeln (126a) miteinander verbindet.
  6. Turbomolekularpumpe nach einem beliebigen der Ansprüche 1 bis 5, dadurch gekennzeichnet dass ;
    - die konkave innenseite des Randschalenbereichs (24, 25) eine Vielzahl von Ringnuten (24a-24j) umfasst,
    - die Statorflügelbereiche (26a-26j) jeweils mindestens einen äußeren Rand (326a) umfassen, welcher fest in eine der Ringnuten (24a-24j) des Randschalenbereichs (24) eingreift.
  7. Turbomolekularpumpe nach Anspruch 6, dadurch gekennzeichnet, dass die außeren Ränder (326a) der Statorflügelbereiche (26a-26j) von den äußeren Enden der Flügel der besagten Statorbereiche (26a-26j) gebildet werden.
  8. Turbomolekularpumpe nach Anspruch 6, dadurch gekennzeichnet, dass die äußeren Ränder (326a) der Statorflügelbereiche (26a-26j) von den Felgen (226a), welche die äußeren Enden der Flügel der besagten Statorflügelbereiche (26a-26j) miteinander verbinden, gebildet werden,
  9. Turbomolekularpumpe nach einem beliebigen der Ansprüche 1 bis 8, dadurch gekennzeichnet, dass der Stator ein radialer Verbund einer einzigen Stufe der mehrstufigen Statorbereiche (21, 22) ist.
  10. Turbomolekularpumpe nach einem beliebigen der Ansprüche 1 bis 8, dadurch gekennzeichnet, dass der Stator ein Verbund von mehreren Stufen dar mehrstufigen Statorbereiche ist.
  11. Turbomolekularpumpe nach einem der Ansprüche 9 oder 10, dadurch gekennzeichnet, dass die mehrstufigen Statorsektoren (21, 22) 180 Grad-Bereiche sind.
EP04290163A 2003-02-03 2004-01-21 Stator einer Turbomolekularpumpe Expired - Lifetime EP1443214B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0301223A FR2850714B1 (fr) 2003-02-03 2003-02-03 Pompe turbomoleculaire a entretoises multietagees de stator
FR0301223 2003-02-03

Publications (2)

Publication Number Publication Date
EP1443214A1 EP1443214A1 (de) 2004-08-04
EP1443214B1 true EP1443214B1 (de) 2010-03-31

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP04290163A Expired - Lifetime EP1443214B1 (de) 2003-02-03 2004-01-21 Stator einer Turbomolekularpumpe

Country Status (5)

Country Link
US (1) US7588417B2 (de)
EP (1) EP1443214B1 (de)
AT (1) ATE462886T1 (de)
DE (1) DE602004026235D1 (de)
FR (1) FR2850714B1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005027097A1 (de) * 2005-06-11 2006-12-14 Pfeiffer Vacuum Gmbh Statorscheibe für Turbomolekularpumpe
US9890795B2 (en) * 2015-05-06 2018-02-13 Asia Vital Components Co., Ltd. Cooling fan structure
GB2552793A (en) 2016-08-08 2018-02-14 Edwards Ltd Vacuum pump
JP2021173257A (ja) * 2020-04-28 2021-11-01 株式会社島津製作所 ターボ分子ポンプおよびターボ分子ポンプのステータ
JP7396209B2 (ja) * 2020-06-03 2023-12-12 株式会社島津製作所 ターボ分子ポンプ、ターボ分子ポンプのロータおよびステータ

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2218615A1 (de) * 1972-04-18 1973-10-31 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe mit rotor und stator
IT1241177B (it) * 1990-02-16 1993-12-29 Varian Spa Statore per pompa turbomolecolare.
US6332752B2 (en) * 1997-06-27 2001-12-25 Ebara Corporation Turbo-molecular pump
DE29717764U1 (de) * 1997-10-06 1997-11-20 Leybold Vakuum GmbH, 50968 Köln Stator für eine Turbomolekularvakuumpumpe
US6412173B1 (en) * 1999-07-26 2002-07-02 Phoenix Analysis And Design Technologies, Inc. Miniature turbomolecular pump
EP1249613B1 (de) * 2001-03-15 2004-01-28 VARIAN S.p.A. Turbinenpumpe mit einer Statorstufe integriert mit einem Distanzring
JP2003269364A (ja) * 2002-03-12 2003-09-25 Boc Edwards Technologies Ltd 真空ポンプ

Also Published As

Publication number Publication date
US7588417B2 (en) 2009-09-15
ATE462886T1 (de) 2010-04-15
FR2850714A1 (fr) 2004-08-06
DE602004026235D1 (de) 2010-05-12
FR2850714B1 (fr) 2005-04-29
US20040156715A1 (en) 2004-08-12
EP1443214A1 (de) 2004-08-04

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