EP1485762A2 - Dispositif permettant de modifier la position angulaire d'un objet par rapport a une structure fixe - Google Patents

Dispositif permettant de modifier la position angulaire d'un objet par rapport a une structure fixe

Info

Publication number
EP1485762A2
EP1485762A2 EP03744806A EP03744806A EP1485762A2 EP 1485762 A2 EP1485762 A2 EP 1485762A2 EP 03744806 A EP03744806 A EP 03744806A EP 03744806 A EP03744806 A EP 03744806A EP 1485762 A2 EP1485762 A2 EP 1485762A2
Authority
EP
European Patent Office
Prior art keywords
connecting members
adjusting
fixed structure
axes
support frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03744806A
Other languages
German (de)
English (en)
Inventor
Ulrich Weber
Hubert Holderer
Hartmut Muenker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Original Assignee
Carl Zeiss SMT GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH filed Critical Carl Zeiss SMT GmbH
Publication of EP1485762A2 publication Critical patent/EP1485762A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70258—Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports

Definitions

  • the invention relates to a device for manipulating the angular position of an object relative to a fixed structure, around three tilting axes intersecting at one point.
  • it may be also in the article is an optical element that is arranged in a projection objective for microlithography graphi 'e, act.
  • the sub-transmissions are often also designed as spring joints. This can lead to the object stored by means of the cardanic bearing being able to spring or vibrate in relation to the outside world.
  • the present invention is therefore based on the object of creating a device for tilting an object around three intersecting tilting axes which has a very small footprint and which a very stiff design and thus enables a very high natural frequency of the stored object.
  • the object is connected to the fixed structure by three connecting elements, each with at least two rotational mobility and one translational mobility, the angular position of the object being adjustable by one of the connecting elements about one of the three tilting axes.
  • the object is achieved in that the optical element is connected to the fixed structure by three connecting members, each with at least two rotational mobilities and one translational mobility, the angular position of the optical element being adjustable by one of the connecting members about one of the three tilting axes ,
  • the object can be tilted in a simple and advantageous manner about three tilting axes intersecting at one point.
  • the device according to the invention can be designed to be very space-saving, since it is possible to dispense with several support frames. Furthermore, the device according to the invention provides better rigidity. This avoids unwanted vibrations and at the same time maintains the natural frequency of the object, which is essential in microlithography. An additional, very important advantage is the good accessibility of the item.
  • Figure 1 is a perspective view of the device according to the invention.
  • FIG. 2 shows a perspective view of an embodiment of a connecting member with ball joints, rods and a sliding block
  • FIG. 3 shows a perspective view of a monolithic embodiment of a connecting member with solid-state joints or leaf springs
  • Figure 4a is a perspective view of a second embodiment of the device according to the invention with a prism mounted in a support frame and a connecting member shown in more detail in Figure 5;
  • FIG. 4b shows a further perspective view of the device shown in FIG. 4a;
  • FIG. 5 shows a perspective view of a further alternative embodiment of a connecting member with solid-state joints or leaf springs
  • Figure 6 is a side view of a third embodiment of the device according to the invention with one in one
  • FIG. 7 shows a perspective view of a fourth embodiment of the device according to the invention with a prism mounted in a support frame and an in
  • FIG. 8 connecting link shown in more detail
  • Figure 8 is a perspective view of a further alternative embodiment of a connecting member with solid joints or leaf springs. Exemplary embodiments are described below, as can be used, for example, in a projection lens of microlithography for the production of semiconductor elements. A projection exposure system with a projection lens is described, for example, in EP 1022617 A2.
  • an object 1 is contained in a support frame 2, which is connected to three connecting members 3a, 3b, 3c each with a fixed structure 4, the connecting members 3a, 3b, 3c each having three rotations and one translation as mobilities have and thus the angular position of the support frame 2 with the object 1 is adjustable by one of the connecting members 3a, 3b, 3c about a tilt axis x, y or z.
  • the fixed structure 4 is connected to a housing of a projection objective 4a (only indicated by dashed lines in FIG. 1).
  • Item 1 can e.g. be a mirror or a prism used for beam deflection, with a correspondingly precise adjustment being important.
  • the vectors of the respective translational mobilities of the three connecting members 3a, 3b, 3c are linearly independent of one another.
  • the x-tilt angle is adjusted by shifting the connecting element 3a, the y-tilting angle by shifting the connecting element 3b and the z-tilting angle by moving the connecting element 3c. This enables the angular position of the object 1 contained in the support frame 2 to be manipulated in a simple manner by three tilting axes x, y and z intersecting at one point.
  • the direction of movement of the adjusting devices 5 of the respective connecting members 3a, 3b, 3c is perpendicular to their translational mobility.
  • Each of the connecting members 3a, 3b, 3c has two sub-elements 6a, 6b. These are connected to one another via a hinge 7.
  • the sub-element 6b is connected to the support frame 2 via a ball joint 8.
  • the sub-element 6a facing away from the support frame 2 is connected to the fixed structure 4 and can be moved in a translatory manner therein via the adjusting devices 5.
  • the actuating devices 5 have dovetail-shaped sliding blocks 9 which can be moved in a translatory manner by means of actuating means.
  • the setting means 10 can be moved, for example, by hand, by motor, hydraulically, electromagnetically, piezoelectrically or magnetostrictively.
  • the adjusting means are designed as adjusting screws 10. The translational mobility of the set screws 10 is indicated in FIG. 1 with the aid of arrows 11.
  • the center points of the ball joints 8 and the axes of the hinges 7 each span planes, the translational mobility of the respective connecting members 3a, 3b, 3c being directed perpendicular to the respective planes.
  • the sliding blocks 9 are provided with contact surfaces 12 for transmitting the displacement from the set screws 10 to the sliding blocks 9.
  • the fixed structure 4 has cutouts 13 adapted to the sliding blocks 9 in shape and dimensions for receiving the sliding blocks 9.
  • the sliding blocks 9 can now be introduced into the recesses 13 of the fixed structure 4 in such a way that that they are translationally adjustable by means of the adjusting screws 10 acting on the contact surfaces 12 of the sliding blocks 9.
  • each of the connecting members 3a, 3b, 3c is each arranged at least approximately parallel to the respective translatory direction of movement of the adjusting devices 5.
  • the connecting member 3a is arranged so that the point of contact between the connecting member 3a and the support frame 2 lies in the plane spanned by the y-tilt axis and the z-tilt axis.
  • the translational mobility of the link 3a is oriented perpendicular to the plane spanned by the y and z tilt axes.
  • the x-tilt angle is adjusted by shifting the contact point between the connecting element 3a and the fixed structure 4, the direction of displacement having a component parallel to the plane spanned by the y- and z-tilt axes and the x-tilt axis does not cut.
  • the displacement is set by the set screws 10.
  • the connecting member 3b is arranged so that the contact point between the connecting member 3b and the support frame 2 lies in the plane which is spanned by the z-tilt axis and the x-tilt axis.
  • the translational mobility of the connecting member 3b is oriented perpendicular to the plane spanned by the z and x tilt axes.
  • the y-tilt angle is adjusted by moving the contact point between the connecting member 3b and the fixed structure 4, the direction of displacement having a component parallel to the plane spanned by the z- and x-tilt axes, and the y- Tilt axis does not intersect.
  • the displacement is in turn determined by the set screws 10 set.
  • the connecting member 3c is arranged so that the contact point between the connecting member 3c and the support frame 2 lies in the plane spanned by the x-tilt axis and the y-tilt axis.
  • the translational mobility of the connecting member 3c is oriented perpendicular to the plane spanned by the x and y tilt axes.
  • the z-tilt angle is adjusted by shifting the contact point between the connecting member 3c and the fixed structure 4, the direction of displacement having a component parallel to the plane spanned by the x- and y-tilt axes and not the z-tilt axis cuts.
  • the displacement is also set here by the set screws 10.
  • the connecting members 3a, 3b, 3c can be designed very differently, but always have three rotational mobility and one translational mobility in common.
  • the rotational mobility does not necessarily have to be related to the contact point between connecting element 3a, 3b, 3c and support frame 2. In such a rotary movement of the point of contact between connection element 3a, 3b would perform 3c and the supporting frame 2, a swing movement, since the turning point of this rotation movement would not be more in the contact 'point.
  • FIG. 2 shows such a connecting element 3d, which has two sub-elements 6c and 6d, which are connected to one another via two ball joints 8.
  • the elongated partial element 6c is connected to the fixed structure 4 via a dovetail-shaped sliding block 9 - as already shown in FIG. 1.
  • the sub-element 6e has two rods 14 which are fastened to the support frame 2 by means of two ball joints 8 with a contact plate 15.
  • a direct connection to the support frame 2 without contact plate 15 is of course also conceivable. In this In this case, the contact area of the support frame 2 between the ball joint contact points can be regarded as part of the connecting member 3d.
  • the vertical axis of rotation 16a passes through the centers of the two ball joints 8 on the contact plate 15.
  • the horizontal axis of rotation 16b lies in the plane spanned by the two rods 14 on the bisector between the rods 14.
  • the horizontal axis of rotation 16c passes through the intersection of the extensions ( indicated by dashed lines) of the bars 14 perpendicular to the plane spanned by the two bars 14.
  • the connecting members 3d must be installed in such a way that their contact points with the support frame 2 (here the ball joints 8 on the contact plate 15) each lie in the plane that is in each case from the two tilting axes x, y, z (see FIG. 1) is stretched, which are not adjusted by the respective connecting element 3d.
  • Figure 3 shows a connecting member 3e, which is designed with solid joints or spring joints 17.
  • this connecting member 3e can be produced monolithically.
  • a leaf spring 17a connects a partial element 6f of the connecting member 3e to the supporting frame 2 and allows translation on the supporting frame 2 in the direction of an axis 18 and rotations about the axes 16a, 16b and 16c with respect to the partial element 6f. While a leaf spring 17b connects the partial element 6f to the fixed structure 4, a leaf spring 17c connects the partial element 6f to an actuator 19 which is fixedly mounted in the fixed structure 4.
  • the actuator 19 stops the leaf spring 17c in the rest position their end and brings a displacement in the indicated direction of arrow 11 to a partial element 6e of the connecting member 3e, which is connected to the leaf spring 17c, to adjust a tilt angle.
  • the sub-element 6e has a contact surface 20 for transmitting the displacement of the actuator 19 to the sub-element 6e.
  • the axis of rotation 16c passes through the instantaneous rotation pole, which results from the intersection of the center lines of the leaf springs 17b and 17c.
  • FIGS. 4a and 4b show a further constructive embodiment of the invention, in which an optical element - in this case a prism 1 - can be tilted around three tilting axes x, y, z intersecting at a point PO.
  • an optical element - in this case a prism 1 - can be tilted around three tilting axes x, y, z intersecting at a point PO.
  • the prism 1 is contained in the support frame 2, which is connected to the fixed structure 4 via three connecting members 3f 3g and 3h.
  • the fixed structure 4 can be connected to a housing of a projection objective 4a (only indicated by dashed lines, for example in FIG. 1).
  • An actuating device 5 is integrated in each connecting member 3f, 3g, 3h, which permits the tilting by an angle in each case.
  • the prism 1 can be tilted about the tilt axis x by adjusting the connecting member 3f, about the tilt axis y with the connecting member 3g and about the tilt axis z with the connecting member 3h.
  • each connecting member 3f, 3g, 3h must have a translational mobility and three rotational mobility in contact with the support frame 2, whereby in the contact with the support frame 2 a rotational mobility can alternatively be replaced by a.
  • the contact point of the connecting member 3f with the support frame 2 lies in the plane that is spanned by the two tilting axes that are adjusted via the connecting links 3g and 3h.
  • the translational mobility of the connecting member 3f is perpendicular to this plane.
  • the point of contact of the connecting member 3g with the support frame 2 lies in the plane which is spanned by the two tilting axes which are adjusted via the connecting members 3h and 3f.
  • the translational mobility of the link 3g is perpendicular to this plane.
  • the contact point of the connecting member 3h with the support frame 2 lies in the plane which is spanned by the two tilting axes which are adjusted via the connecting members 3f and 3g.
  • the translational mobility of the connecting member 3h is perpendicular to this plane.
  • Figure 5 shows the link 3h enlarged.
  • the translation along an axis 18c and the rotations about the axis of rotation 16a and about the axis of rotation 16b are made possible by a leaf spring 17d which is flexible in these directions.
  • Leaf springs are arranged as a "leaf spring four-joint" 17e so that there is a rotational mobility about the axis of rotation 16c in the instantaneous center of rotation of this "leaf spring four-joint" and thus a corresponding pivoting movement in contact with the support frame 2.
  • the translational mobility along the axes 18a and 18b should be held by the connecting element 3h in order to support the supporting frame 2 together with the prism 1 in a statically determined manner in conjunction with the other two connecting elements 3f, 3g.
  • Each of the connecting links 3f, 3g, 3h has two parts te or connecting blocks 6g and 6h.
  • the movable connection block 6h is supported by leaf springs 17g in relation to the fixed connection block 6g in such a way that it can move along the axis 18a or rotate about an axis parallel to the axis of rotation 16c.
  • the tilting movement of the supporting frame 2 together with the prism 1 is initiated by moving the movable connecting block 6h relative to the fixed connecting block 6g.
  • An actuating lever 21 is supported by leaf springs 17h in the fixed connection block 6g in such a way that it rotates around the intersection of the center lines of the leaf springs 17h in a manner similar to the instantaneous center of rotation of a four-bar linkage.
  • the adjusting lever 21 can be rotated with the adjusting screws 10, the movement being transmitted to the movable connecting block 6h with leaf springs 17f, which results in a tilting movement of the supporting frame 2 together with the prism 1.
  • connecting members 3i, 3j and 3k have a translational mobility in contact with the support frame 2 and only two rotational or pivoting movements.
  • the connecting member 3k has, for example, when its actuating device 5 is not actuated, a translational mobility along an axis 18c in contact with the supporting frame 2 and a rotational mobility in each case about the axis of rotation 16a and about the axis of rotation 16b.
  • the movable connection block 6h is supported by the leaf springs 17g in the fixed connection block 6g so that the instantaneous center of rotation of the movable connection block 6h lies on the desired tilt axis.
  • center lines 19 (indicated by dashed lines in FIG. 6) of the leaf springs 17g must intersect at point PO or on the desired axis of rotation.
  • the susceptibility to undesired vibrations of the prism 1 can be reduced by saving the swivel or swivel joint about the axis of rotation 16c, which brings about an additional stiffening of the system.
  • FIG. 7 A further design according to the connecting member 3e already shown in FIG. 3 is shown in FIG. 7 with connecting members 31, 3m and 3n.
  • a leaf spring joint 17j in combination with a leaf spring joint 17k, connects a movable connection block 6j to a fixed connection block 6i such that the movable connection block 6j is actuated when the actuating device 5 is actuated can translationally move along the axis 18a and rotate about the axis of rotation 16c.
  • This combination of the displacement and the rotation is then used to tilt the prism 1 about the tilt axis z through the point PO.
  • the displacement is transmitted to the movable connecting block 6j by means of the adjusting screws 10 via an adjusting lever 22 which is rotatably fastened to the fixed connection block 6i by means of a leaf spring joint 171 and the leaf spring joint 17k.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)

Abstract

L'invention concerne un dispositif permettant de modifier la position angulaire d'un objet (1) par rapport à une structure fixe (4) autour de trois axes d'inclinaison (x, y, z) se croisant en un point, structure dans laquelle est placé ledit objet (1), en particulier un élément optique d'un objectif pour microlithographie. Cet objet (1) peut également être monté sur un cadre support (2). Ce cadre support (2) avec l'objet (1) est relié à la structure fixe (4) par le biais de trois éléments de fixation (3a, b, c, , n) présentant chacun trois degrés de liberté de rotation et un degré de liberté de translation. La position angulaire du cadre support (2) peut être réglée autour d'un des trois axes d'inclinaison (x, y, z) par l'intermédiaire d'un des éléments de fixation (3a, b, c, , n).
EP03744806A 2002-03-21 2003-03-18 Dispositif permettant de modifier la position angulaire d'un objet par rapport a une structure fixe Withdrawn EP1485762A2 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE2002112547 DE10212547A1 (de) 2002-03-21 2002-03-21 Vorrichtung zur Manipulation der Winkellage eines Gegenstands gegenüber einer festen Struktur
DE10212547 2002-03-21
PCT/EP2003/002778 WO2003081337A2 (fr) 2002-03-21 2003-03-18 Dispositif permettant de modifier la position angulaire d'un objet par rapport a une structure fixe

Publications (1)

Publication Number Publication Date
EP1485762A2 true EP1485762A2 (fr) 2004-12-15

Family

ID=27798007

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03744806A Withdrawn EP1485762A2 (fr) 2002-03-21 2003-03-18 Dispositif permettant de modifier la position angulaire d'un objet par rapport a une structure fixe

Country Status (5)

Country Link
EP (1) EP1485762A2 (fr)
JP (1) JP4465194B2 (fr)
AU (1) AU2003209739A1 (fr)
DE (1) DE10212547A1 (fr)
WO (1) WO2003081337A2 (fr)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10216114A1 (de) 2002-04-12 2003-10-23 Zeiss Carl Smt Ag Vorrichtung zur deformationsarmen Lagerung eines nicht rotationssymmetrischen optischen Elementes
TWI262363B (en) 2003-10-21 2006-09-21 Asml Netherlands Bv An assembly, a lithographic apparatus, and a device manufacturing method
US7515359B2 (en) 2004-04-14 2009-04-07 Carl Zeiss Smt Ag Support device for positioning an optical element
US7738193B2 (en) * 2004-06-29 2010-06-15 Carl Zeiss Smt Ag Positioning unit and alignment device for an optical element
DE102005057860A1 (de) * 2005-12-03 2007-06-06 Carl Zeiss Smt Ag Objektiv, insbesondere Projektionsobjektiv für die Halbleiterlithographie
DE102008036574A1 (de) * 2008-07-31 2010-02-04 Carl Zeiss Laser Optics Gmbh Vorrichtung zum Lagern eines optischen Elements
DE102009025309B4 (de) * 2009-06-15 2016-12-22 Toptica Photonics Ag Kinematischer Halter
DE102009037135B4 (de) 2009-07-31 2013-07-04 Carl Zeiss Laser Optics Gmbh Haltevorrichtung für ein optisches Element
RU2439629C1 (ru) * 2010-09-02 2012-01-10 Открытое акционерное общество "Научно-производственная корпорация "Системы прецизионного приборостроения" (ОАО "НПК "СПП") Устройство для крепления и юстировочных перемещений оптической детали
CN102789144B (zh) * 2011-05-18 2014-09-17 上海微电子装备有限公司 光刻对准系统参考板的调整机构及调整方法
DE102014224993A1 (de) * 2014-12-05 2016-06-09 Carl Zeiss Smt Gmbh Verstellsystem-Bauelement, Spiegelanordnung und Projektionsbelichtungsanlage für die Mikrolithographie
CN109771853B (zh) * 2019-03-13 2021-01-01 上海联影医疗科技股份有限公司 一种偏转磁铁调节装置及直线加速器

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Publication number Priority date Publication date Assignee Title
IL34025A (en) * 1970-03-08 1971-04-28 Peret Co Collapsible reticular structures
NL7901956A (nl) * 1979-03-12 1980-09-16 Leuven Res & Dev Vzw Verplaatsingsbesturingsinrichting.
US6047610A (en) * 1997-04-18 2000-04-11 Stocco; Leo J Hybrid serial/parallel manipulator
US5901936A (en) * 1997-08-25 1999-05-11 Sandia Corporation Six-degree-of-freedom multi-axes positioning apparatus
JPH11274031A (ja) * 1998-03-20 1999-10-08 Canon Inc 露光装置およびデバイス製造方法ならびに位置決め装置
FR2835579B1 (fr) * 2002-02-04 2004-05-21 Commissariat Energie Atomique Dispositif de deplacement spherique d'element

Non-Patent Citations (1)

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Title
See references of WO03081337A3 *

Also Published As

Publication number Publication date
DE10212547A1 (de) 2003-10-02
WO2003081337A3 (fr) 2004-02-05
WO2003081337A2 (fr) 2003-10-02
JP2005521104A (ja) 2005-07-14
AU2003209739A8 (en) 2003-10-08
JP4465194B2 (ja) 2010-05-19
AU2003209739A1 (en) 2003-10-08

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