EP1506567A2 - Lampe a decharge a barriere dielectrique comprenant un socle - Google Patents

Lampe a decharge a barriere dielectrique comprenant un socle

Info

Publication number
EP1506567A2
EP1506567A2 EP03752699A EP03752699A EP1506567A2 EP 1506567 A2 EP1506567 A2 EP 1506567A2 EP 03752699 A EP03752699 A EP 03752699A EP 03752699 A EP03752699 A EP 03752699A EP 1506567 A2 EP1506567 A2 EP 1506567A2
Authority
EP
European Patent Office
Prior art keywords
dielectric barrier
lamp
discharge lamp
barrier discharge
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP03752699A
Other languages
German (de)
English (en)
Other versions
EP1506567B1 (fr
Inventor
Rainer Kling
Reinhold Wittkötter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Osram GmbH
Original Assignee
Patent Treuhand Gesellschaft fuer Elektrische Gluehlampen mbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Patent Treuhand Gesellschaft fuer Elektrische Gluehlampen mbH filed Critical Patent Treuhand Gesellschaft fuer Elektrische Gluehlampen mbH
Publication of EP1506567A2 publication Critical patent/EP1506567A2/fr
Application granted granted Critical
Publication of EP1506567B1 publication Critical patent/EP1506567B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/50—Means forming part of the tube or lamps for the purpose of providing electrical connection to it
    • H01J5/54—Means forming part of the tube or lamps for the purpose of providing electrical connection to it supported by a separate part, e.g. base
    • H01J5/56—Shape of the separate part
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel

Definitions

  • the invention is based on a dielectric barrier discharge lamp.
  • dielectric barrier discharge lamp encompasses sources of electromagnetic radiation based on dielectrically impeded gas discharges.
  • the spectrum of the radiation can cover the visible range as well as the UV (ultraviolet) / VUV (vacuum ultraviolet) range and the IR
  • a phosphor layer can also be provided for converting VUV radiation into radiation with longer wavelengths, for example UVA or visible radiation (light).
  • a dielectric barrier discharge lamp requires at least one so-called dielectric barrier electrode.
  • a dielectric barrier electrode is separated from the inside of the discharge vessel or the discharge gas by means of a dielectric.
  • This dielectric - the dielectric barrier - can be designed, for example, as a dielectric layer covering the electrode, or it is formed by the discharge vessel of the lamp itself, namely if the electrode is arranged on the outside of the wall of the discharge vessel. The latter is abbreviated as "outer electrode” below.
  • the present invention relates to a dielectric barrier discharge lamp which has at least one essentially strip-shaped outer electrode of the aforementioned type.
  • the lamp also includes an elongated or tubular discharge vessel, closed on both sides, which encloses an ionizable filling.
  • the ionizable filling usually consists of an inert gas, for example xenon or a gas mixture. So-called excimers are formed during the gas discharge, which is preferably operated by means of a pulsed operating method described in US Pat. No. 5,604,410. Excimers are excited molecules, such as Xe 2 *, which emit electromagnetic radiation when they return to the normally unbound basic state. In the case of Xe 2 *, the maximum of the molecular band radiation is approximately 172 nm.
  • such lamps are suitable as UV ⁇ / UV lamps in process technology, for example surface cleaning, photolytics, ozone generation, metallization, and UV curing.
  • process technology for example surface cleaning, photolytics, ozone generation, metallization, and UV curing.
  • FIGS. 5a to 5c such a lamp with an Edison screw base for general lighting is already known.
  • This lamp has a helical electrode inside the discharge vessel.
  • four strip-shaped electrodes are arranged on the outer wall of the discharge vessel.
  • EP-A 1 088 335 discloses a dielectric barrier discharge lamp which is suitable for UV radiation and has a base.
  • the base does indeed have a flange which is connected to the pinch base of the lamp by means of potting compound and is suitable for vacuum applications.
  • this concept is less suitable for high vacuum.
  • Another disadvantage is that a relatively large amount of potting compound is required if it covers the entire space between the pinch foot and the circular cylindrical inner wall of the base sleeve.
  • gaps are left open, a vacuum is also present in the area between the end of the pinch foot and the subsequent seal in vacuum applications. Then there is a risk of parasitic gas discharges between the power supplies.
  • the object of the present invention is to provide an improved dielectric barrier discharge lamp. Another aspect is that the dielectric barrier discharge lamp should be able to be used in a negative pressure environment.
  • a dielectric barrier discharge lamp with a base having the following: an elongate discharge vessel which is closed on both sides and whose wall encloses an ionizable filling, electrodes, at least one of the electrodes being an inner electrode, i.e. is arranged inside the discharge vessel and at least one of the electrodes is an outer electrode, i.e.
  • the basic idea of the invention is to attach a tube to the lamp base end of the discharge vessel of the dielectric barrier discharge lamp which surrounds the lamp base. This makes it gas-tight
  • the tube comprises a cylindrical and a conical section, the conical section connecting the discharge vessel to the cylindrical section.
  • the tube expediently additionally has a means for sealing.
  • this means for sealing is realized by a small flange seal which is placed over the pipe.
  • a small flange seal which is placed over the pipe.
  • the power supply for the outer electrodes like the outer electrodes themselves, is designed as a structure similar to a conductor track. The thickness of these structures is typically only a few micrometers. This enables a gas-tight passage of the current supply of the outer electrodes arranged on the outside of the tube through the O-ring usually used as a seal in vacuum small flanges.
  • a connector e.g. BNC - HT type, which is connected to the two power supplies. Further details can be found in the exemplary embodiment.
  • either a metallic vacuum flange can be connected to the free end of the tube by means of transition glasses or a glass flange by direct melting.
  • the power supply for the outer electrode does not necessarily have to be arranged on the outside of the tube in a manner similar to a conductor track. Since the outer electrodes are preferably connected to ground potential, it can also be advantageous to connect the outer electrodes directly to the metallic process chamber, for example by means of a suitable contact spring.
  • the attached tube separates the current supply of the inner electrode surrounded by air pressure from that part of the current supply connected to the outer electrodes which is exposed to the process gas atmosphere or vacuum.
  • a plan view of a dielectric barrier discharge lamp according to the invention with a base including base adapter (sectional view).
  • a dielectric barrier discharge lamp 1 with a base according to the invention is shown schematically in the figure.
  • This is a UV / VUV lamp, e.g. for surface cleaning, photolytics, ozone generation, metallization or UV curing.
  • This spotlight is designed for an electrical power consumption of approx. 20 W.
  • the discharge lamp 1 has a circular-cylindrical discharge vessel 2 made of 0.7 mm to 1.5 mm thick quartz glass.
  • the discharge vessel 2 has a outer diameter of approx. 40 mm and a length of approx. 120 mm.
  • the inside of the discharge vessel 2 is filled with xenon at a pressure of 20 kPa.
  • the discharge vessel 2 is closed like a dome and has a pump tip 3 in the middle of the dome.
  • a quartz tube 4 is melted onto the discharge vessel 2.
  • this quartz tube can also be attached using glass solder.
  • the quartz tube 4 has a conical section 5 and a circular cylindrical section 6.
  • the conical section 5 connects the tubular discharge vessel 2 to the circular-cylindrical section 6, the outer diameter of which is approximately 25 mm.
  • a connector plug 7 of the BNC-HT type is arranged on the end of the quartz tube 4 facing away from the lamp.
  • outer electrodes 8a-8f On the outside of the discharge vessel 2 there are six outer electrodes 8a-8f (the outer electrodes 8d-8f cannot be seen in FIG. 1) in the form of 12 cm long, approximately 1 to 1.5 mm wide, thin platinum strips - Quidistant and attached parallel to the lamp's longitudinal axis.
  • the ends of the electrode strips 8a-8f are each connected to one another by a peripheral platinum strip 9, 10.
  • the one platinum strip 9, which is attached in the immediate vicinity of the connection between the discharge vessel 2 and the quartz tube 4, is connected to a further platinum strip 11.
  • This further platinum strip 11 runs on the outside of the quartz tube 4 and ends at the connector 7, with the first pole of which it is connected. In this way, this platinum strip 11 functions as a power supply for the outer electrodes 8a-8f.
  • a modified base adapter 12 of the type ISO KF 40 is arranged on the circular cylindrical section 6 of the quartz tube 4 (sectional view). It comprises a small vacuum flange 13 and an inner sleeve 14 screwed to it.
  • the inner sleeve 14 presses an O-ring 16 against a bevel 17 of the small flange 13 via a metal ring 15.
  • ser O-ring 16 against the outside of the quartz tube 4.
  • Another O-ring 18 is inserted in an inner groove 19 at the thread-free end of the inner sleeve 14.
  • An annular groove 20 on the sealing side of the small flange 13 serves to receive a known centering ring with an O-ring (not shown) for installation in a process chamber (not shown).
  • the discharge vessel 3 tapers and merges into a pinch seal 21.
  • the pinch seal 21 ensures a gas-tight connection of the inner electrode 23 to an external power supply 24.
  • This power supply 24 is connected to the second pole of the connector 7 (not shown).
  • the inner electrode 23 is a coiled metal wire arranged centrally within the discharge vessel 2.
  • the end of the spiral electrode 23 opposite the pinch seal 21 is fixed in the pump tip 3.
  • the respective diameters of the metal wire and the helix are 1 mm and 8 mm, respectively.
  • the pitch - i.e. the distance within which the helix makes a complete revolution - is 12 mm.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)

Abstract

La présente invention concerne une lampe à décharge à barrière diélectrique allongée comprenant des électrodes externes et internes. Cette lampe présente un tube qui est appliqué à l'extrémité côté pied de lampe de l'enceinte de décharge et entoure le pied de la lampe. Ce tube sert à recevoir un joint permettant d'installer la lampe dans une chambre de processus de manière étanche aux gaz. L'alimentation en courant de l'électrode externe traversant ledit tube est distincte de l'alimentation en courant de l'électrode interne, conduisant hors du pied de la lampe. Cette invention permet ainsi d'éviter efficacement, même dans des chambres de processus à dépression, l'apparition de décharges parasites entre les alimentations en courant se trouvant à des potentiels différents lorsqu'elles sont en service.
EP03752699A 2002-05-17 2003-05-14 Lampe a decharge a barriere dielectrique comprenant un socle Expired - Lifetime EP1506567B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10222100 2002-05-17
DE10222100A DE10222100A1 (de) 2002-05-17 2002-05-17 Dielektrische Barriere-Entladungslampe mit Sockel
PCT/DE2003/001554 WO2003098653A2 (fr) 2002-05-17 2003-05-14 Lampe a decharge a barriere dielectrique comprenant un socle

Publications (2)

Publication Number Publication Date
EP1506567A2 true EP1506567A2 (fr) 2005-02-16
EP1506567B1 EP1506567B1 (fr) 2007-07-18

Family

ID=29285538

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03752699A Expired - Lifetime EP1506567B1 (fr) 2002-05-17 2003-05-14 Lampe a decharge a barriere dielectrique comprenant un socle

Country Status (8)

Country Link
US (1) US7224111B2 (fr)
EP (1) EP1506567B1 (fr)
JP (1) JP4330527B2 (fr)
KR (1) KR100697452B1 (fr)
CA (1) CA2486200A1 (fr)
DE (2) DE10222100A1 (fr)
TW (1) TWI287820B (fr)
WO (1) WO2003098653A2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8441189B2 (en) 2009-06-24 2013-05-14 Osram Gesellschaft Mit Beschrankter Haftung Dielectric barrier discharge lamp with discharge spaces

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004006439A1 (de) * 2004-02-09 2005-08-25 Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH Fahrzeugschweinwerferlampe
CN1893202A (zh) * 2005-07-05 2007-01-10 电灯专利信托有限公司 荧光灯的管座结构
JP4396752B2 (ja) * 2007-09-28 2010-01-13 ウシオ電機株式会社 放電ランプ装置
WO2009146744A1 (fr) * 2008-06-05 2009-12-10 Osram Gesellschaft mit beschränkter Haftung Procédé pour traiter des surfaces, émetteur de rayonnement pour ce procédé ainsi que système d'irradiation avec cet émetteur de rayonnement
JP5564880B2 (ja) * 2009-10-02 2014-08-06 ウシオ電機株式会社 紫外線照射装置
JP2013516730A (ja) * 2010-01-04 2013-05-13 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 誘電体バリア放電ランプ
JP5218877B6 (ja) * 2010-03-18 2018-06-27 株式会社Ｇｓユアサ 誘電体バリア放電ランプおよびランプユニット
DE102010043208A1 (de) 2010-11-02 2012-05-03 Osram Ag Vorrichtung zum Bestrahlen von Oberflächen
DE102010043215A1 (de) 2010-11-02 2012-05-03 Osram Ag Strahler mit Sockel für die Bestrahlung von Oberflächen
TWI483285B (zh) 2012-11-05 2015-05-01 Ind Tech Res Inst 介電質屏障放電燈及其製作方法
DE102015013050A1 (de) 2015-10-08 2016-05-25 Daimler Ag Befestigungsschiene zum Befestigen eines Abgaskrümmers an einer Verbrennungskraftmaschine
JP7139808B2 (ja) * 2018-09-13 2022-09-21 東芝ライテック株式会社 バリア放電ランプ
JP2021051936A (ja) * 2019-09-25 2021-04-01 東芝ライテック株式会社 バリア放電ランプおよび紫外線照射ユニット

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US3684908A (en) * 1970-09-25 1972-08-15 Itt Sealed beam high intensity xenon lamp with cooling structure
US4310772A (en) * 1979-11-26 1982-01-12 General Motors Corporation Sealed beam lamp and method of manufacture
DE4311197A1 (de) 1993-04-05 1994-10-06 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Verfahren zum Betreiben einer inkohärent strahlenden Lichtquelle
GB9326123D0 (en) 1993-12-22 1994-02-23 Ge Lighting Ltd Electrodeless fluorescent lamp
CA2139051A1 (fr) * 1994-12-23 1996-06-24 George Pantev Mecanisme de connexion destine a des elements d'ossature tubulaires
DE19636965B4 (de) 1996-09-11 2004-07-01 Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH Elektrische Strahlungsquelle und Bestrahlungssystem mit dieser Strahlungsquelle
DE19916877A1 (de) 1999-04-14 2000-10-19 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Entladungslampe mit Sockel
DE19953531A1 (de) * 1999-11-05 2001-05-10 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Entladungslampe mit Elektrodenhalterung
DE19953533A1 (de) 1999-11-05 2001-05-10 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Entladungslampe mit Elektrodenhalterung
US6346767B1 (en) * 1999-12-08 2002-02-12 Osram Sylvania Inc. Lamp with formed, cemented clip to secure base to lamp
DE10048986A1 (de) 2000-09-27 2002-04-11 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Dielektrische Barrieren-Entladungslampe
US6561841B2 (en) * 2001-08-27 2003-05-13 Trompeter Electronics, Inc. Connector assembly having visual indicator

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8441189B2 (en) 2009-06-24 2013-05-14 Osram Gesellschaft Mit Beschrankter Haftung Dielectric barrier discharge lamp with discharge spaces

Also Published As

Publication number Publication date
US20050218775A1 (en) 2005-10-06
DE10222100A1 (de) 2003-11-27
US7224111B2 (en) 2007-05-29
CA2486200A1 (fr) 2003-11-27
EP1506567B1 (fr) 2007-07-18
DE50307709D1 (de) 2007-08-30
TW200307309A (en) 2003-12-01
KR100697452B1 (ko) 2007-03-20
WO2003098653A2 (fr) 2003-11-27
TWI287820B (en) 2007-10-01
WO2003098653A3 (fr) 2004-12-23
JP2005526361A (ja) 2005-09-02
JP4330527B2 (ja) 2009-09-16
KR20050000547A (ko) 2005-01-05

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