EP1507026A1 - Methode pour l'inertisation selective ou complète des pièces à travailler et des parties d'installation par dépôt non-reactif - Google Patents

Methode pour l'inertisation selective ou complète des pièces à travailler et des parties d'installation par dépôt non-reactif Download PDF

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Publication number
EP1507026A1
EP1507026A1 EP03018449A EP03018449A EP1507026A1 EP 1507026 A1 EP1507026 A1 EP 1507026A1 EP 03018449 A EP03018449 A EP 03018449A EP 03018449 A EP03018449 A EP 03018449A EP 1507026 A1 EP1507026 A1 EP 1507026A1
Authority
EP
European Patent Office
Prior art keywords
reactive layer
reactive
workpieces
metal
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03018449A
Other languages
German (de)
English (en)
Inventor
Helmut Hosrsthemke
Andreas Prof.Dr. Möbius
Marlies Dr. Kleinfeld
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MacDermid Enthone Inc
Original Assignee
Enthone Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Enthone Inc filed Critical Enthone Inc
Priority to EP03018449A priority Critical patent/EP1507026A1/fr
Priority to JP2004236473A priority patent/JP3987514B2/ja
Priority to CNA2004100577392A priority patent/CN1598051A/zh
Priority to US10/919,034 priority patent/US20050034996A1/en
Publication of EP1507026A1 publication Critical patent/EP1507026A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/38Chromatising
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601Process or apparatus
    • C23C18/1603Process or apparatus coating on selected surface areas
    • C23C18/1605Process or apparatus coating on selected surface areas by masking
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31Coating with metals

Definitions

  • This invention relates to a process for selective or complete Inertizing of substrates, workpieces and plant components by means of non-reactive Coatings in the chemical deposition process of metals.
  • electroless plating processes for a long time known.
  • electroless or even chemical metallization is a chemical surface finishing of almost all metals and many To understand non-conductors. It differs in its chemical and mechanical features substantially of galvanic applied Metal coatings.
  • the electroless coating based on metals on one autocatalytic process. In such a coating process finds a Reaction takes place on catalytically active surfaces.
  • the in the Depositing bath electrolytes
  • the invention is therefore based on the object , a process for the selective or complete formation of an inert coating on substrates, materials or equipment parts on which a chemical Metallabscheideprozeß can not start to provide in the process of electroless deposition of metals, wherein an undesirable coating certain areas of the Workpieces or plant parts without considerable cost and time consuming effort is avoided.
  • the object is achieved by a method for selective or complete inerting of substrates, workpieces or plant parts in the Separation process of metals solved that the treatment of a substrate, Workpiece or plant part, with an activation solution and the electrolytic Deposition of an adherent inertizing layer on non-metallizing Areas.
  • a selective or complete inert coating according to the invention can advantageously carried out on a variety of substrates.
  • one is Coating of workpieces or plant components made of metal and / or Metal compounds or plastics possible, the plastics before metallized by other methods. This metallization can already be done partially or selectively.
  • Another advantage of the method is that the Separation process of metals by a passivation of the invention used plant components can be made more economical in addition. So is advantageously by the inerting of the electrolyte to the electroless Metallization containing the average life of the container Electrolyte bath considerably extended and the implementation of the metallization simplifies, among other things, the application of an anodic potential for Maintaining the passive state is eliminated. In addition, the Limited security measures and minimized costs accordingly become.
  • plant components consisting of Metal and / or metal compounds, preferably steel, particularly preferred Stainless steel, such as the containers for the Abscheidebäder or Racks for the workpieces to be coated with a non-reactive surface rendered inert.
  • Such inertization allows the use of far and wide less expensive materials like conventional steels instead of the very expensive ones Stainless steels.
  • the substrates are activated prior to inerting. This is special necessary for non-conductive substrates. Activation of the substrates may occur conventionally done. Advantageously, the activation takes place simultaneously with the inertization step. In this context, it has proved to be proven advantageous with the provided for inerting electrolyte Fluorides and / or fluorine-containing compounds to give a adequate activation of the material surface, in particular of To reach Angelober perennial and thus a sticky assignment with the Inertmaschines slaughter to ensure.
  • the process of inerting is carried out by electrolytic deposition of a non-reactive coating of a suitable electrolyte, which preferably has chromium, under application of a cathode current.
  • a cathode current typically, for the deposition of chromium-containing layers (especially in so-called chromium baths) at temperatures in the range of 40 to 70 ° C current densities in the range of 10 to 50 A / dm 2 is required.
  • chromium-containing layers especially in so-called chromium baths
  • current densities in the range of 10 to 50 A / dm 2 is required.
  • this results in a considerable total current which does not represent an appropriate expense in every case or for each inertization process, it has proved to be advantageous to deposit the inerting layer in a low current density range.
  • an electrolyte which at low temperatures, preferably in the range of 15 to 40 ° C, a sticky assignment with a non-reactive coating according to the invention below a current density of 10 A / dm 2 , preferably below 5 A / dm 2 allows ,
  • chromium wheels based on chromium (III) compounds of a different construction can also be used, for example baths from the company Enthone named Trichrolyte.
  • a subsequent electroless metallization of the non - rendered areas of the Substrate can be made in a conventional manner.
  • an electrolyte is used, which is usually in the electroless Metallization application finds.
  • the selectively applied inerting layer can follow the electroless metallization in a simple manner without manual effort be removed. This can be done by immersion in a dilute acid, or if such acid poses a danger to the substrate by immersion in an alkaline solution using an anodic current up to complete removal of the passivation layer.
  • the electrolyte according to the invention for producing a selective non-reactive Coating on a substrate in the deposition process of metals continues in the Basically made of a fluoride and / or fluoride compound Activation solution and one or more chromium salts, preferably Chromic acid or dreskyrtige chromium compounds together.
  • Another application example is the inside tinning of Badarmaturen after an outside chrome plating this in process according to the invention or with the electrolytes according to the invention.
  • Ball valves by selective inerting in the places the aggressive media are exposed to nickel plating, while the surfaces are the abrasive wear can be chrome plated.
  • heat exchanger elements made of copper or Copper alloys for gas heaters selectively with an inert chrome layer be coated while cavities for corrosion protection reasons with a be provided chemical nickel coating.
  • the chrome outdoor areas are Resistant to hot combustion gases while the water-bearing Interior against corrosion by water or other heat transfer media is stable.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Electrochemistry (AREA)
  • Chemically Coating (AREA)
  • Electroplating Methods And Accessories (AREA)
EP03018449A 2003-08-14 2003-08-14 Methode pour l'inertisation selective ou complète des pièces à travailler et des parties d'installation par dépôt non-reactif Withdrawn EP1507026A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP03018449A EP1507026A1 (fr) 2003-08-14 2003-08-14 Methode pour l'inertisation selective ou complète des pièces à travailler et des parties d'installation par dépôt non-reactif
JP2004236473A JP3987514B2 (ja) 2003-08-14 2004-08-16 工作部材および装置部品を非反応性被覆により選択的にまたは完全に不活性化する方法
CNA2004100577392A CN1598051A (zh) 2003-08-14 2004-08-16 借助不反应涂层选择性或完全钝化工件和设备部件的方法
US10/919,034 US20050034996A1 (en) 2003-08-14 2004-08-16 Non-reactive coatings for inertization

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP03018449A EP1507026A1 (fr) 2003-08-14 2003-08-14 Methode pour l'inertisation selective ou complète des pièces à travailler et des parties d'installation par dépôt non-reactif

Publications (1)

Publication Number Publication Date
EP1507026A1 true EP1507026A1 (fr) 2005-02-16

Family

ID=33560801

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03018449A Withdrawn EP1507026A1 (fr) 2003-08-14 2003-08-14 Methode pour l'inertisation selective ou complète des pièces à travailler et des parties d'installation par dépôt non-reactif

Country Status (4)

Country Link
US (1) US20050034996A1 (fr)
EP (1) EP1507026A1 (fr)
JP (1) JP3987514B2 (fr)
CN (1) CN1598051A (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019125747A (ja) 2018-01-18 2019-07-25 株式会社東芝 半導体装置およびその製造方法
US10668511B2 (en) * 2018-03-20 2020-06-02 Taiwan Semiconductor Manufacturing Co., Ltd. Method of cleaning process chamber

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3443988A (en) * 1965-05-06 1969-05-13 Photocircuits Corp Printed circuits,work holders and method of preventing electroless metal deposition
US3592744A (en) * 1968-12-02 1971-07-13 Macdermid Inc Method of preventing rack plating in continuous plating cycle for nonconductive articles
GB1459569A (en) * 1973-08-30 1976-12-22 M & T Chemicals Inc Chromium electro plating
US4139942A (en) * 1977-12-16 1979-02-20 The Gillette Company Process for producing corrosion resistant carbon steel razor blades and products made thereby
US4699811A (en) * 1986-09-16 1987-10-13 Macdermid, Incorporated Chromium mask for electroless nickel or copper plating

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2587651A (en) * 1945-12-22 1952-03-04 Floricel A Rojas Method and means for the electro-deposition of chromium
US2570174A (en) * 1947-11-12 1951-10-02 Gen Electric Metal cleaning and plating process
US3041257A (en) * 1960-08-25 1962-06-26 Westinghouse Electric Corp Chromium electroplating
ATE405694T1 (de) * 2000-11-11 2008-09-15 Enthone Verfahren zur elektrolytischen abscheidung aus einer chromhaltigen lösung

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3443988A (en) * 1965-05-06 1969-05-13 Photocircuits Corp Printed circuits,work holders and method of preventing electroless metal deposition
US3592744A (en) * 1968-12-02 1971-07-13 Macdermid Inc Method of preventing rack plating in continuous plating cycle for nonconductive articles
GB1459569A (en) * 1973-08-30 1976-12-22 M & T Chemicals Inc Chromium electro plating
US4139942A (en) * 1977-12-16 1979-02-20 The Gillette Company Process for producing corrosion resistant carbon steel razor blades and products made thereby
US4699811A (en) * 1986-09-16 1987-10-13 Macdermid, Incorporated Chromium mask for electroless nickel or copper plating

Also Published As

Publication number Publication date
CN1598051A (zh) 2005-03-23
JP3987514B2 (ja) 2007-10-10
US20050034996A1 (en) 2005-02-17
JP2005060843A (ja) 2005-03-10

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