EP1530806A2 - Actionneur piezoelectrique - Google Patents

Actionneur piezoelectrique

Info

Publication number
EP1530806A2
EP1530806A2 EP03740053A EP03740053A EP1530806A2 EP 1530806 A2 EP1530806 A2 EP 1530806A2 EP 03740053 A EP03740053 A EP 03740053A EP 03740053 A EP03740053 A EP 03740053A EP 1530806 A2 EP1530806 A2 EP 1530806A2
Authority
EP
European Patent Office
Prior art keywords
corners
electrodes
piezo
piezo actuator
rounded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03740053A
Other languages
German (de)
English (en)
Inventor
Friedrich Boecking
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of EP1530806A2 publication Critical patent/EP1530806A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details

Definitions

  • the invention relates to a piezo actuator, for example for actuating a mechanical component such as a valve or the like, according to the generic features of the main claim.
  • a piezo element can be constructed from a material with a suitable crystal structure using the so-called piezo effect.
  • an external electrical voltage is applied, there is a mechanical reaction of the piezo element which, depending on the crystal structure and the contact areas of the electrical voltage, represents a push or pull in a predefinable direction.
  • this piezo actuator as a so-called multilayer actuator can take place here, as described for example in DE 199 28 191 A1, in several layers, the electrodes via which the electrical voltage is applied being arranged between the layers.
  • the piezo actuator make sure that Mechanical stresses in the layer structure do not cause any troublesome cracks.
  • the electrodes are mutually contacted laterally, they cannot always be guided completely to the opposite side, since otherwise voltage flashovers can destroy the piezo actuator.
  • the mutual contacting is constructed in such a way that in the layer structure, two inner electrodes, which include a different-pole inner electrode contacted on the opposite side, are contacted together on one side. Alternately in the layer structure, one of these mutually contacted internal electrodes is now not led to the end of the piezo layers and the other one to the end of the piezo layer, forming a neutral phase.
  • the design of the internal electrodes is generally selected as a function of the necessary external shape of the piezo actuator, with most actuator shapes also resulting from the manufacturing technology or the cutting of the actuator stacks. Since the edges resulting from the cut can easily lead to voltage flashovers, processing of the edges is often necessary, but this can be very complex and expensive, especially if it is carried out subsequently on the actuator.
  • the piezo actuator described at the outset which can be used, for example, to actuate a mechanical component, is advantageously constructed with a multilayer structure of piezo layers and internal electrodes arranged between them.
  • the individual inner electrodes are rounded at the corners formed by the cut edges before assembly to form the multilayer structure.
  • the corners of the chamfers can also be rounded in a simple manner. It is particularly advantageous here if the curves each have a radius of curvature of at least 20 ⁇ m in order not to act as a tip or edge. With the invention, it is then possible in a simple manner to dispense with machining the edge of the piezo actuator, since this would be complex and expensive, in particular in order to subsequently produce roundings.
  • FIG. 1 shows a section through a piezo actuator according to the prior art with a multilayer structure of layers of pizza ceramic and with mutually contacted inner electrodes and well-shaped outer electrodes,
  • FIG. 2 shows a detailed view of the internal electrodes with rounded corners
  • Figure 3 is a detailed view of the internal electrodes with rounded corners that are already chamfered
  • Figure 4 shows another embodiment of an internal electrode design with rounded corners or edges. Description of the embodiments
  • FIG. 1 shows a piezo actuator 1 which is constructed in a manner known per se from piezo foils 2 of a quartz material with a suitable crystal structure, so that using the so-called piezo effect when an external electrical voltage is applied to internal electrodes 3 and 4, which are only shown schematically here Outside electrodes 5 and 6 contacted externally, a mechanical reaction of the piezo actuator 1 takes place.
  • the outer electrodes 5 and 6 are designed as corrugated electrodes which are contacted on contact surfaces 8 with two inner electrodes each having the same polarity.
  • the piezo layers 2 and 2a, 2b are alternately offset inwards at the corners in a predetermined area, as a result of which a groove 9 and 9a, 9b is formed.
  • an inner electrode 10 is provided with a curve 12 at its corners 11 shown in broken lines.
  • the inner electrode 13, which is offset for mutual contacting, is provided with curves 15 at its corners 14.
  • FIG. 3 An embodiment is shown in which chamfers 16 at the corners of the inner electrode 10 have likewise been provided with a rounded portion 17. The same applies to chamfers 16 at the corners of the inner electrode 13 according to FIG. 3.
  • FIG. Men Another exemplary embodiment of a design for the internal electrodes 10 and 13 can be seen from FIG. Men, in which in addition to the curves 12 mutually rounded neutral areas 18 are recessed so that outer electrodes 19 and 20 can be attached.

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Impact Printers (AREA)

Abstract

L'invention concerne un actionneur piézoélectrique permettant, par exemple, d'actionner un composant mécanique. Une structure multicouche de couches piézoélectriques (2) et, intercalées entre ces couches, des électrodes internes (3,4;10,13) permettent d'obtenir un contact latéral mutuel des électrodes internes (3,4;10,13) avec les électrodes externes (9;19,20). Avant l'assemblage en structure multicouche, on arrondit les coins des différentes électrodes internes (10,13). Si les coins (11) présentent respectivement un chanfrein (16), les coins des chanfreins peuvent également être arrondis.
EP03740053A 2002-08-16 2003-06-02 Actionneur piezoelectrique Withdrawn EP1530806A2 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10237588A DE10237588A1 (de) 2002-08-16 2002-08-16 Piezoaktor
DE10237588 2002-08-16
PCT/DE2003/001799 WO2004019424A2 (fr) 2002-08-16 2003-06-02 Actionneur piezoelectrique

Publications (1)

Publication Number Publication Date
EP1530806A2 true EP1530806A2 (fr) 2005-05-18

Family

ID=30775347

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03740053A Withdrawn EP1530806A2 (fr) 2002-08-16 2003-06-02 Actionneur piezoelectrique

Country Status (6)

Country Link
US (1) US20060132002A1 (fr)
EP (1) EP1530806A2 (fr)
JP (1) JP2005536066A (fr)
KR (1) KR20050032116A (fr)
DE (1) DE10237588A1 (fr)
WO (1) WO2004019424A2 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DK1811582T3 (da) * 2006-01-20 2009-04-06 Delphi Tech Inc Piezoelektrisk aktuator
DE102006062076A1 (de) * 2006-12-29 2008-07-10 Siemens Ag Piezokeramischer Vielschichtaktor und Verfahren zu seiner Herstellung
JP5877195B2 (ja) * 2011-03-28 2016-03-02 日本碍子株式会社 圧電デバイス、及び、その焼成前の成形体であるグリーン成形体の製造方法
JP6772728B2 (ja) * 2016-09-29 2020-10-21 Tdk株式会社 圧電素子
JP7396858B2 (ja) * 2019-11-01 2023-12-12 日本電波工業株式会社 圧電デバイス及びその製造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69014954T2 (de) * 1989-04-07 1995-05-24 Mitsui Petrochemical Ind Geschichtete Keramikanordnung und Verfahren zu deren Herstellung.
JPH04340778A (ja) * 1991-01-30 1992-11-27 Nec Corp 積層圧電アクチュエータ素子
DE19626671C1 (de) * 1996-07-03 1997-10-16 Fraunhofer Ges Forschung Piezoelektrischer Leistungsaktor mit Kühlung und Verfahren zu seiner Herstellung
JP3262076B2 (ja) * 1997-10-03 2002-03-04 株式会社村田製作所 圧電共振子、圧電共振子の周波数調整方法および通信機器
DE19946837A1 (de) * 1999-09-30 2001-05-03 Bosch Gmbh Robert Piezoaktor
JP2001339105A (ja) * 2000-05-30 2001-12-07 Tokin Ceramics Corp 積層型圧電セラミックス及びその製造方法
EP1160885B1 (fr) * 2000-05-31 2010-08-18 Denso Corporation Dispositif piézoélectrique pour un injecteur

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2004019424A2 *

Also Published As

Publication number Publication date
WO2004019424A2 (fr) 2004-03-04
KR20050032116A (ko) 2005-04-06
JP2005536066A (ja) 2005-11-24
US20060132002A1 (en) 2006-06-22
DE10237588A1 (de) 2004-02-26
WO2004019424A3 (fr) 2004-07-08

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