EP1553579A4 - Method of delivering substrate to film forming device for disk-like substrate, mechanism for delivering substrate used for the method, substrate holder, and method of manufacturing disk-like recording medium using the method - Google Patents

Method of delivering substrate to film forming device for disk-like substrate, mechanism for delivering substrate used for the method, substrate holder, and method of manufacturing disk-like recording medium using the method

Info

Publication number
EP1553579A4
EP1553579A4 EP03733431A EP03733431A EP1553579A4 EP 1553579 A4 EP1553579 A4 EP 1553579A4 EP 03733431 A EP03733431 A EP 03733431A EP 03733431 A EP03733431 A EP 03733431A EP 1553579 A4 EP1553579 A4 EP 1553579A4
Authority
EP
European Patent Office
Prior art keywords
substrate
disk
delivering
recording medium
film forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03733431A
Other languages
German (de)
French (fr)
Other versions
EP1553579A1 (en
Inventor
Masato Koshikawa
Hideaki Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Publication of EP1553579A1 publication Critical patent/EP1553579A1/en
Publication of EP1553579A4 publication Critical patent/EP1553579A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/266—Sputtering or spin-coating layers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/265—Apparatus for the mass production of optical record carriers, e.g. complete production stations, transport systems

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Optical Record Carriers (AREA)
EP03733431A 2002-06-20 2003-06-16 Method of delivering substrate to film forming device for disk-like substrate, mechanism for delivering substrate used for the method, substrate holder, and method of manufacturing disk-like recording medium using the method Withdrawn EP1553579A4 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002180042A JP3983113B2 (en) 2002-06-20 2002-06-20 Substrate delivery method, substrate delivery system, and disc-shaped recording medium manufacturing method using the method
JP2002180042 2002-06-20
PCT/JP2003/007602 WO2004001738A1 (en) 2002-06-20 2003-06-16 Method of delivering substrate to film forming device for disk-like substrate, mechanism for delivering substrate used for the method, substrate holder, and method of manufacturing disk-like recording medium using the method

Publications (2)

Publication Number Publication Date
EP1553579A1 EP1553579A1 (en) 2005-07-13
EP1553579A4 true EP1553579A4 (en) 2008-05-21

Family

ID=29996586

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03733431A Withdrawn EP1553579A4 (en) 2002-06-20 2003-06-16 Method of delivering substrate to film forming device for disk-like substrate, mechanism for delivering substrate used for the method, substrate holder, and method of manufacturing disk-like recording medium using the method

Country Status (5)

Country Link
EP (1) EP1553579A4 (en)
JP (1) JP3983113B2 (en)
CN (1) CN1662978A (en)
TW (1) TWI236014B (en)
WO (1) WO2004001738A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3957173B2 (en) * 2002-06-20 2007-08-15 Ｔｄｋ株式会社 Substrate delivery method to disk-shaped substrate deposition apparatus, substrate delivery mechanism and substrate holder used in the method, and disc-shaped recording medium manufacturing method using the method
CN104685095B (en) * 2012-04-19 2017-12-29 因特瓦克公司 For manufacturing the dual masks device of solar cell
KR102072872B1 (en) 2012-04-26 2020-02-03 인테벡, 인코포레이티드 System architecture for vacuum processing
US10062600B2 (en) 2012-04-26 2018-08-28 Intevac, Inc. System and method for bi-facial processing of substrates
JP6607923B2 (en) 2014-08-05 2019-11-20 インテヴァック インコーポレイテッド Implant mask and alignment
CN106544638B (en) * 2016-12-09 2018-12-18 中国科学院半导体研究所 A kind of mask panel assembly of assembling-type
CN111471965B (en) * 2020-04-30 2024-08-23 苏州迈正科技有限公司 Conveying carrier plate, vacuum coating equipment and vacuum coating method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5882171A (en) * 1996-10-01 1999-03-16 Balzers Aktiengesellschaft Transport and transfer apparatus
EP1553578A1 (en) * 2002-06-20 2005-07-13 TDK Corporation Method for delivery of substrate to film forming device for disk-like substrate, substrate delivery mechanism and substrate holder used for the method, and method of manufacturing disk-like recording medium using the method

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03101206A (en) * 1989-09-14 1991-04-26 Fuji Photo Film Co Ltd Sputtering device
JP3282181B2 (en) * 1990-08-29 2002-05-13 ソニー株式会社 Film forming equipment
JPH05303782A (en) * 1992-04-24 1993-11-16 Shin Etsu Chem Co Ltd Mask for magneto-optical disk deposition
JP3411326B2 (en) * 1993-04-08 2003-05-26 芝浦メカトロニクス株式会社 Sputtering equipment
JP3380934B2 (en) * 1994-04-28 2003-02-24 ソニー株式会社 Handling device for disk-shaped recording media
JPH1040584A (en) * 1996-07-22 1998-02-13 Matsushita Electric Ind Co Ltd Method of manufacturing disk body such as optical disk
JP2000222785A (en) * 1999-01-29 2000-08-11 Ricoh Co Ltd Method and apparatus for manufacturing optical information recording medium
JP2001134932A (en) * 1999-11-04 2001-05-18 Sony Corp Disk board and injection molding device
JP2001246643A (en) * 2000-03-03 2001-09-11 Hitachi Maxell Ltd Recording medium, injection mold, injection molding machine and molding method
JP2002269852A (en) * 2001-03-13 2002-09-20 Ricoh Co Ltd Optical information recording medium manufacturing equipment

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5882171A (en) * 1996-10-01 1999-03-16 Balzers Aktiengesellschaft Transport and transfer apparatus
EP1553578A1 (en) * 2002-06-20 2005-07-13 TDK Corporation Method for delivery of substrate to film forming device for disk-like substrate, substrate delivery mechanism and substrate holder used for the method, and method of manufacturing disk-like recording medium using the method

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2004001738A1 *

Also Published As

Publication number Publication date
JP2004022153A (en) 2004-01-22
WO2004001738A1 (en) 2003-12-31
TW200402718A (en) 2004-02-16
TWI236014B (en) 2005-07-11
EP1553579A1 (en) 2005-07-13
CN1662978A (en) 2005-08-31
JP3983113B2 (en) 2007-09-26

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Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

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17P Request for examination filed

Effective date: 20050117

AK Designated contracting states

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Designated state(s): CH DE LI NL

A4 Supplementary search report drawn up and despatched

Effective date: 20080417

STAA Information on the status of an ep patent application or granted ep patent

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18D Application deemed to be withdrawn

Effective date: 20081105