JPH05303782A - Mask for magneto-optical disk deposition - Google Patents

Abstract

(57) [Summary] (Modified) [Objective] The present invention is light, easy to mold and has elasticity, so that it can be easily attached to and detached from a substrate and is inexpensive for forming a magnetic disk. The purpose is to provide a mask material. [Structure] The mask material for forming a magnetic disk of the present invention comprises:
It is characterized in that the disk substrate and the film forming mask are fixed by using the elastic force of the mask material.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magneto-optical disk film forming mask, and more particularly to a magneto-optical disk film forming mask used for manufacturing a magneto-optical disk which is one of information recording media in the field of electronic information equipment. It is a thing.

[0002]

2. Description of the Related Art In the process of manufacturing a magneto-optical disk, there is a step of forming a recording film made of a dielectric film, a magnetic film, a reflective film, etc. on a substrate by a sputtering method or the like. Because it is thin and thin, it is easily damaged,
Further, since these are very easily oxidized, the film-forming surface is usually coated with a resin by spin coating for the purpose of surface protection. However, this causes problems due to the adhesion of the recording film at the outer peripheral part where the resin liquid cannot be well applied by spin coating and at the central part where the hub is attached in a later process.Therefore, in this film forming process, metal parts such as magnetic stainless steel are used. A method of masking this portion is performed.

For masking by this metallic part, for example, as shown in FIGS. 9 to 10, a magnet fixed inner peripheral mask 6 is provided at the center of the substrate 1, a magnet fixed outer peripheral mask 7 is provided at the outer peripheral portion of the substrate 1, and On the outer periphery of the substrate 1, a magnet-supported substrate support base 10,
A mask fixing magnet 11 is installed in the central part of the substrate, or a target 8 and a cathode 9 are installed on the upper part of the substrate 1 as shown in FIG. Then, a device built-in type outer peripheral mask is installed on the outer peripheral portion of the substrate 1.

[0004]

However, as described above, since the metal shield plate and the disk substrate are often fixed and held by using a magnet in order to shorten the mounting time as described above, the manufacturing cost is low. However, in this case, the shield plate is also used a plurality of times in succession, and the dust generation rate during film formation increases as the number of times of use increases, but the disk substrate during film formation increases. Adhesion of dust to the recording medium causes pitting of the recording film and increases the error rate of the recording medium.

Therefore, by using this metal shield plate,
In order to maintain a high acceptance rate for products, maintenance such as cleaning the shielding plate is required on a regular basis, but this cleaning involves dipping the shielding plate in an acidic liquid or surface treatment with sandblasting, etc. If this is done, moisture or foreign matter will adhere to the shield plate, which will significantly increase the air arrival time and cause a change in the composition of the material forming the recording film, which will reduce the disk manufacturing efficiency. There are also mechanical problems such as gradual changes in dimensions, which has the disadvantage of affecting the quality control of products.

[0006]

SUMMARY OF THE INVENTION The present invention relates to a magneto-optical disk film-forming mask capable of solving such disadvantages and drawbacks, which is elastic for fixing a disk substrate and a film-forming mask. It is characterized by using force.

That is, as a result of various investigations by the present inventors to develop a mask for forming a magneto-optical disk capable of solving the conventionally known disadvantages, it is assumed that the mask is made of a synthetic resin material. This is lighter than the conventional metallic mask, and even complicated shapes can be molded relatively easily. This is because fixing to the substrate can be secured by the elastic force of the resin, so it has no effect on the substrate. It is possible to simplify the structure for holding on the substrate, and further, because the product cost is low, it is possible to dispose it once without using it repeatedly, so it has the advantage of producing less dust,
The present invention was completed by examining the practicality and the like. This will be described in more detail below.

[0008]

The magnetic disk film-forming mask of the present invention uses the elastic force of the mask material for fixing the disk substrate and the film-forming mask. According to this, the mask material is made of metal such as stainless steel. Since it is changed to a synthetic resin having elasticity, the selectivity of the mask manufacturing method is widened. For example, injection molding can be mass-produced and the cost can be reduced, resulting in mass production. Since it can be made disposable, and maintenance for mask recovery and reuse is not required, the magnetic disk can be efficiently manufactured.

The mask for forming a magnetic disk according to the present invention is made of a synthetic resin material having elasticity as described above. The synthetic resin material is a polycarbonate resin, an amorphous polyolefin resin, a polymethacrylic acid methyl resin, or the like. A material that can be molded and has low hygroscopicity may be used.
Since this product can be molded into any shape by injection molding, it is easy to use masking materials of various shapes.
It can be obtained at low cost, and since the molded product made in this way has elasticity, it also provides the advantage that when it is mounted on the substrate, it is fixed to the container by the elasticity. Since it is also inexpensive, it may be used a plurality of times, but since it may be disposable once, there is no need to worry about dusting.

A magnetic disk manufacturing method using the magnetic disk deposition mask of the present invention is performed by the method shown in FIGS. FIG. 1 is a plan view of a substrate on which a magnetic disk film forming mask of the present invention is mounted, FIG. 2 is a longitudinal sectional view thereof, and FIGS. 3 to 6 show a method of mounting the magnetic disk film forming mask of the present invention on a substrate. FIGS. 7 to 8 are vertical sectional views showing a method for removing the magnetic disk film-forming mask of the present invention from the substrate.

As shown in FIGS. 1 and 2, the substrate 1 on which the magnetic disk film forming mask of the present invention is mounted has an inner peripheral mask made of synthetic resin at the center of the substrate 1 and a synthetic resin at the outer peripheral portion thereof. The outer peripheral mask 3 made of is attached. To mount the magnetic disk deposition mask of the present invention on the substrate 1, as shown in FIG. 3, an inner peripheral mask made of synthetic resin is press-inserted into the central portion of the substrate 1, and the synthetic resin is mounted on the outer peripheral support base 4. It may be performed by mounting the outer peripheral mask 3 made of
As shown in FIG. 4, the outer peripheral mask 3 made of synthetic resin is attached to the outer peripheral support 4 by pressing the substrate setting push bar 5 from below the substrate 1 as shown in FIG. The outer peripheral support 4 is pressed against and the outer peripheral mask 3 is pressed against the outer peripheral support 4 to be mounted. According to this, as shown in FIG. 6, a device having the inner peripheral mask 2 and the outer peripheral mask 3 can be obtained.

The magnetic disk film-forming mask of the present invention is mounted on the substrate 1 by the method shown in FIGS. 1 to 6, and then a dielectric film such as a SiN film or a recording film such as a TbFeCo film is attached to the substrate 1. After forming a recording film made of a second dielectric film such as a SiN film and a reflective film such as an Al film, the recording film may be removed from the substrate to form a magnetic disk.

The removal of the film forming mask is carried out, for example, in the seventh step.
As shown in the figure, when the outer peripheral mask 3 is evenly pressed from the upper surface to the entire circumference, the lower part is slightly opened (due to the cross-sectional shape), so if the inner peripheral mask 2 is pressed downward in this state, the disc substrate 1 The inner peripheral mask 2 and the outer peripheral mask 3 can be removed by removing the inner peripheral mask 3 from the outer peripheral mask 3 and lifting the mask 2 upward while the protrusions of the inner peripheral mask 2 are closed inward. Peripheral mask 3 as shown in
This can be easily done by removing the inner peripheral mask 2 and then pulling up the inner peripheral mask 2 to remove them from the substrate 1.

[0014]

EXAMPLES Examples of the present invention will be described below. Example: A polycarbonate resin substrate 1 having a diameter of 86 mm, a thickness of 1.2 mm and a cavity of 15 mm in the center formed in the center cavity of a polycarbonate resin substrate 1 having a diameter of 31 mm, a diameter of 16 mm at the center, and a length of 5 mm. An inner peripheral mask 2 made of a polycarbonate resin having a shape as shown in FIG. 2 having a claw was mounted, and a ring-shaped outer peripheral mask 3 having an inner diameter of 84 mm was mounted on the outer peripheral portion of this substrate.

Next, on the substrate on which the inner and outer peripheral masks 3 are mounted, the first dielectric film made of SiN film has a thickness of 1,000 Å and the recording film made of TbFeCo film has a thickness of 250 Å.
And a second dielectric film consisting of SiN film with a thickness of 250-350Å
Then, a reflective film made of an Al film was further formed to a thickness of 600 Å by a sputtering method, respectively, and then the inner peripheral mask and the outer peripheral mask were removed to prepare a magneto-optical recording medium.

In this case, since the inner peripheral mask 2 and the outer peripheral mask 3 are manufactured by injection molding of polycarbonate resin, they are easy to mold, and they are easy to mount on a substrate. Since it has elasticity, the mounted one does not come off the substrate, the recording film can be formed without any trouble, and the removal is easy, so that the intended magnetic disk can be manufactured. Could be done easily.

[0017]

The present invention relates to a mask for forming a magnetic disk, which is characterized in that the elasticity of the mask material is used for fixing the disk substrate and the film forming mask as described above. However, according to this, since it is made of a synthetic resin material having elastic force compared with the conventionally known metal mask, it is easy to mold a light and complicated shape, and it is elastic. Since it has, it can be easily and surely fixed to the substrate and removed, and it can also be disposable after only one use, so no cleaning maintenance is required. Therefore, the advantage that the target magnetic disk can be obtained easily and inexpensively is provided.

[Brief description of drawings]

FIG. 1 is a plan view of a disk substrate on which a mask material for forming a magnetic disk of the present invention is mounted.

FIG. 2 is a vertical sectional view of a disk substrate on which a mask material for forming a magnetic disk of the present invention is mounted.

FIG. 3 is a vertical sectional view showing an example of a method for mounting a mask material for forming a magnetic disk of the present invention on a substrate.

FIG. 4 is a vertical cross-sectional view of another example of the method of mounting the mask material for forming a magnetic disk on a substrate according to the present invention.

FIG. 5 is a vertical sectional view showing still another example of the method for mounting the mask material for forming a magnetic disk on a substrate according to the present invention.

FIG. 6 is a vertical sectional view showing an example of a method for removing the mask material for forming a magnetic disk from the substrate of the present invention.

FIG. 7 is a longitudinal sectional view showing another example of the method for removing the mask material for forming a magnetic disk of the present invention from the substrate.

FIG. 8 is a vertical sectional view showing still another example of the method for removing the mask material for forming a magnetic disk from the substrate of the present invention.

FIG. 9 is a vertical sectional view showing an example of mounting a conventionally known metal mask material for forming a magnetic disk onto a substrate.

FIG. 10 is a longitudinal sectional view showing another example of mounting a conventionally known metal mask material for forming a magnetic disk onto a substrate.

FIG. 11 is a longitudinal sectional view showing still another example of mounting a conventionally known metal mask material for forming a magnetic disk onto a substrate.

[Explanation of symbols]

1 ··· Disk substrate 2 ··· Synthetic resin inner peripheral mask 3 ··· Synthetic resin outer peripheral mask 4 ·· Outer peripheral mask support 5 ·· ································································································・ Cathode, 10 ・ ・ ・ ・ Built-in magnet type substrate support 11 ・ ・ ・ ・ ・ ・ Magnet for mask fixing, 12 ・ ・ ・ ・ ・ ・ Internal device inner mask 13 ・ ・ Incorporated device Formula peripheral mask

 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Shin Sakaguchi 32-1 Sakado, Takatsu-ku, Kawasaki-shi, Kanagawa Shin-Etsu Chemical Co., Ltd. Corporate Research Center (72) Yoshio Tawara Sakado, Takatsu-ku, Kawasaki-shi, Kanagawa 3-2-1, Shin-Etsu Chemical Co., Ltd. Corporate Research Center

Claims (2)

[Claims] 1. A magneto-optical disk film-forming mask, characterized in that the elastic force of a mask material is used to fix the disk substrate and the film-forming mask. 2. The magneto-optical disk film-forming mask according to claim 1, which has a spring property by using a resin material.