EP1559678A3 - Strucures nano et leurs méthode de fabrication. - Google Patents

Strucures nano et leurs méthode de fabrication. Download PDF

Info

Publication number
EP1559678A3
EP1559678A3 EP04019808A EP04019808A EP1559678A3 EP 1559678 A3 EP1559678 A3 EP 1559678A3 EP 04019808 A EP04019808 A EP 04019808A EP 04019808 A EP04019808 A EP 04019808A EP 1559678 A3 EP1559678 A3 EP 1559678A3
Authority
EP
European Patent Office
Prior art keywords
nanostructures
making
methods
same
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP04019808A
Other languages
German (de)
English (en)
Other versions
EP1559678A2 (fr
Inventor
Nicolas J. Moll
Daniel B. Roitman
Jennifer Q. Lu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of EP1559678A2 publication Critical patent/EP1559678A2/fr
Publication of EP1559678A3 publication Critical patent/EP1559678A3/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/158—Carbon nanotubes
    • C01B32/16—Preparation
    • C01B32/162—Preparation characterised by catalysts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/20—Carbon compounds, e.g. carbon nanotubes or fullerenes
    • H10K85/221—Carbon nanotubes
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2202/00—Structure or properties of carbon nanotubes
    • C01B2202/02—Single-walled nanotubes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/70—Nanostructure
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/70—Nanostructure
    • Y10S977/773—Nanoparticle, i.e. structure having three dimensions of 100 nm or less

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Composite Materials (AREA)
  • Theoretical Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Materials For Photolithography (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Laminated Bodies (AREA)
EP04019808A 2004-01-28 2004-08-20 Strucures nano et leurs méthode de fabrication. Withdrawn EP1559678A3 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US766639 1996-12-13
US10/766,639 US7052618B2 (en) 2004-01-28 2004-01-28 Nanostructures and methods of making the same

Publications (2)

Publication Number Publication Date
EP1559678A2 EP1559678A2 (fr) 2005-08-03
EP1559678A3 true EP1559678A3 (fr) 2007-01-24

Family

ID=34654336

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04019808A Withdrawn EP1559678A3 (fr) 2004-01-28 2004-08-20 Strucures nano et leurs méthode de fabrication.

Country Status (3)

Country Link
US (1) US7052618B2 (fr)
EP (1) EP1559678A3 (fr)
JP (1) JP2005212093A (fr)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9040090B2 (en) * 2003-12-19 2015-05-26 The University Of North Carolina At Chapel Hill Isolated and fixed micro and nano structures and methods thereof
US8263129B2 (en) 2003-12-19 2012-09-11 The University Of North Carolina At Chapel Hill Methods for fabricating isolated micro-and nano-structures using soft or imprint lithography
US20080032238A1 (en) * 2004-11-23 2008-02-07 Lu Jennifer Q System and method for controlling the size and/or distribution of catalyst nanoparticles for nanostructure growth
WO2006064640A1 (fr) * 2004-12-14 2006-06-22 Matsushita Electric Industrial Co., Ltd. Procede d’arrangement selectif de la ferritine
US8264137B2 (en) * 2006-01-03 2012-09-11 Samsung Electronics Co., Ltd. Curing binder material for carbon nanotube electron emission cathodes
WO2007116434A1 (fr) * 2006-03-30 2007-10-18 Fujitsu Limited Procede de production de nanotube de carbone
JP5414011B2 (ja) * 2006-05-23 2014-02-12 国立大学法人京都大学 微細構造体、パターン媒体、及びそれらの製造方法
US20080181958A1 (en) * 2006-06-19 2008-07-31 Rothrock Ginger D Nanoparticle fabrication methods, systems, and materials
US20100151031A1 (en) * 2007-03-23 2010-06-17 Desimone Joseph M Discrete size and shape specific organic nanoparticles designed to elicit an immune response
JP5194514B2 (ja) * 2007-03-29 2013-05-08 富士通セミコンダクター株式会社 基板構造及びその製造方法
US20100132771A1 (en) * 2008-10-06 2010-06-03 The Regents Of The University Of California 3D Carbon Nanotubes Membrane as a Solar Energy Absorbing Layer
US20100254914A1 (en) * 2009-02-25 2010-10-07 The Regents Of The University Of California Nanoworms for in vivo tumor targeting
US20110223343A1 (en) * 2010-03-01 2011-09-15 Auburn University, Office Of Technology Transfer Novel nanocomposite for sustainability of infrastructure
WO2012009070A2 (fr) * 2010-06-28 2012-01-19 William Marsh Rice University Nanoparticules ultrapetites d'oxyde métallique
US10155361B2 (en) 2011-11-09 2018-12-18 Corning Incorporated Method of binding nanoparticles to glass
TWI441940B (zh) * 2011-06-09 2014-06-21 識驊科技股份有限公司 圖案化導電元件的製備方法
CN102332375B (zh) * 2011-08-09 2014-03-19 上海交通大学 一种基于碳纳米管的介质阻挡微放电结构的制备方法
JP5741518B2 (ja) * 2012-04-24 2015-07-01 信越化学工業株式会社 レジスト下層膜材料及びパターン形成方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0838865A2 (fr) * 1996-10-28 1998-04-29 Sony Corporation Fils quantiques formés sur un substrat, méthode de fabrication et dispositif contenant des fils quantiques sur un substrat
WO2001021863A1 (fr) * 1999-09-23 2001-03-29 Commonwealth Scientific And Industrial Research Organisation Nanotubes de carbone a motifs
EP1102299A1 (fr) * 1999-11-05 2001-05-23 Iljin Nanotech Co., Ltd. Ecran d'affichage à amission avec nanotubes de carbone aignés verticalement et procédé de fabrication de cet écran
WO2003026796A2 (fr) * 2001-08-29 2003-04-03 Motorola, Inc. Catalyseur spongieux a nano-support pour croissance de nanotubes
US20030185741A1 (en) * 2001-04-06 2003-10-02 Krzysztof Matyjaszewski Process for the preparation of nanostructured materials
US20030185985A1 (en) * 2002-02-01 2003-10-02 Bronikowski Michael J. Method of producing regular arrays of nano-scale objects using nano-structured block-copolymeric materials

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5782954A (en) * 1995-06-07 1998-07-21 Hoeganaes Corporation Iron-based metallurgical compositions containing flow agents and methods for using same
US6683783B1 (en) 1997-03-07 2004-01-27 William Marsh Rice University Carbon fibers formed from single-wall carbon nanotubes
US6346189B1 (en) * 1998-08-14 2002-02-12 The Board Of Trustees Of The Leland Stanford Junior University Carbon nanotube structures made using catalyst islands
KR100480772B1 (ko) * 2000-01-05 2005-04-06 삼성에스디아이 주식회사 나노 스케일의 표면 거칠기를 가지는 마이크로 구조물의형성방법
US6878361B2 (en) 2001-07-10 2005-04-12 Battelle Memorial Institute Production of stable aqueous dispersions of carbon nanotubes
US7166266B2 (en) 2001-07-10 2007-01-23 Gb Tech, Inc. Isolation and purification of single walled carbon nanotube structures
WO2003050332A1 (fr) 2001-12-12 2003-06-19 Ashland Inc. Preparation de dispersions de nanotubes de carbone stables dans les liquides
US7045851B2 (en) * 2003-06-20 2006-05-16 International Business Machines Corporation Nonvolatile memory device using semiconductor nanocrystals and method of forming same
EP1660240A2 (fr) * 2003-08-19 2006-05-31 Nanoopto Corporation Procede et dispositif d'impression submicronique

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0838865A2 (fr) * 1996-10-28 1998-04-29 Sony Corporation Fils quantiques formés sur un substrat, méthode de fabrication et dispositif contenant des fils quantiques sur un substrat
WO2001021863A1 (fr) * 1999-09-23 2001-03-29 Commonwealth Scientific And Industrial Research Organisation Nanotubes de carbone a motifs
EP1102299A1 (fr) * 1999-11-05 2001-05-23 Iljin Nanotech Co., Ltd. Ecran d'affichage à amission avec nanotubes de carbone aignés verticalement et procédé de fabrication de cet écran
US20030185741A1 (en) * 2001-04-06 2003-10-02 Krzysztof Matyjaszewski Process for the preparation of nanostructured materials
WO2003026796A2 (fr) * 2001-08-29 2003-04-03 Motorola, Inc. Catalyseur spongieux a nano-support pour croissance de nanotubes
US20030185985A1 (en) * 2002-02-01 2003-10-02 Bronikowski Michael J. Method of producing regular arrays of nano-scale objects using nano-structured block-copolymeric materials

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
CHEN QIDAO ET AL: "Plasma patterning of carbon nanotubes", APPLIED PHYSICS LETTERS, AIP, AMERICAN INSTITUTE OF PHYSICS, MELVILLE, NY, US, vol. 76, no. 19, 8 May 2000 (2000-05-08), pages 2719 - 2721, XP012025228, ISSN: 0003-6951 *

Also Published As

Publication number Publication date
US7052618B2 (en) 2006-05-30
EP1559678A2 (fr) 2005-08-03
US20050164132A1 (en) 2005-07-28
JP2005212093A (ja) 2005-08-11

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