EP1582294A3 - Verfahren und Vorrichtung zum Absaugen von Wasser - Google Patents

Verfahren und Vorrichtung zum Absaugen von Wasser Download PDF

Info

Publication number
EP1582294A3
EP1582294A3 EP05252050A EP05252050A EP1582294A3 EP 1582294 A3 EP1582294 A3 EP 1582294A3 EP 05252050 A EP05252050 A EP 05252050A EP 05252050 A EP05252050 A EP 05252050A EP 1582294 A3 EP1582294 A3 EP 1582294A3
Authority
EP
European Patent Office
Prior art keywords
water
sucking
backing member
excess water
adhered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP05252050A
Other languages
English (en)
French (fr)
Other versions
EP1582294B1 (de
EP1582294A2 (de
Inventor
Yoshio Fujikoshi Machinery Corp. Nakamura
Kenji Fujikoshi Machinery Corp. Hashizume
Mitsue Fujikoshi Machinery Corp. Ogawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikoshi Machinery Corp
Original Assignee
Fujikoshi Machinery Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikoshi Machinery Corp filed Critical Fujikoshi Machinery Corp
Publication of EP1582294A2 publication Critical patent/EP1582294A2/de
Publication of EP1582294A3 publication Critical patent/EP1582294A3/de
Application granted granted Critical
Publication of EP1582294B1 publication Critical patent/EP1582294B1/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B24B37/30—Work carriers for single side lapping of plane surfaces
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
EP05252050A 2004-03-31 2005-03-31 Verfahren zum Polieren von Halbleitern Ceased EP1582294B1 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2004104535 2004-03-31
JP2004104535 2004-03-31
JP2005053148 2005-02-28
JP2005053148A JP4520327B2 (ja) 2004-03-31 2005-02-28 吸水方法及び吸水装置

Publications (3)

Publication Number Publication Date
EP1582294A2 EP1582294A2 (de) 2005-10-05
EP1582294A3 true EP1582294A3 (de) 2006-04-12
EP1582294B1 EP1582294B1 (de) 2012-03-21

Family

ID=34889458

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05252050A Ceased EP1582294B1 (de) 2004-03-31 2005-03-31 Verfahren zum Polieren von Halbleitern

Country Status (5)

Country Link
US (1) US7201640B2 (de)
EP (1) EP1582294B1 (de)
JP (1) JP4520327B2 (de)
KR (1) KR101114200B1 (de)
TW (1) TWI347245B (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD559066S1 (en) * 2004-10-26 2008-01-08 Jsr Corporation Polishing pad
NL2001642C2 (nl) * 2008-05-30 2009-12-01 Fico Bv Inrichting en werkwijze voor het drogen van gesepareerde elektronische componenten.
DE102008045534B4 (de) * 2008-09-03 2011-12-01 Siltronic Ag Verfahren zum Polieren einer Halbleiterscheibe
JP5648954B2 (ja) * 2010-08-31 2015-01-07 不二越機械工業株式会社 研磨装置
CN106057711B (zh) * 2016-08-04 2018-10-02 中山德华芯片技术有限公司 一种应用于晶圆片涂胶清洗设备的除水雾装置
CN108527070A (zh) * 2018-05-25 2018-09-14 哈尔滨奥瑞德光电技术有限公司 一种用于陶瓷手机背板抛光加工的工装
KR102712571B1 (ko) 2018-08-06 2024-10-04 가부시키가이샤 에바라 세이사꾸쇼 기판 보유 지지 장치 및 기판 연마 장치
CN117140236B (zh) * 2023-10-25 2024-01-26 苏州博宏源机械制造有限公司 一种晶圆厚度在线测量装置及方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56164549A (en) * 1980-05-23 1981-12-17 Disco Abrasive Sys Ltd Mounting method by positioning
US4521995A (en) * 1980-05-23 1985-06-11 Disco Co., Ltd. Wafer attracting and fixing device
US6193586B1 (en) * 1998-02-11 2001-02-27 Samsung Electronics Co., Ltd. Method and apparatus for grinding wafers using a grind chuck having high elastic modulus
JP2003011056A (ja) * 2001-06-27 2003-01-15 Shin Etsu Handotai Co Ltd ワークの研磨方法及び研磨装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4193226A (en) * 1977-09-21 1980-03-18 Kayex Corporation Polishing apparatus
JPS6114854A (ja) * 1984-06-28 1986-01-23 Toshiba Corp 研磨治具
US5558111A (en) * 1995-02-02 1996-09-24 International Business Machines Corporation Apparatus and method for carrier backing film reconditioning
JPH09262763A (ja) * 1996-03-28 1997-10-07 Shin Etsu Handotai Co Ltd バッキングパッドの製造方法および装置
JP3696690B2 (ja) * 1996-04-23 2005-09-21 不二越機械工業株式会社 ウェーハの研磨装置システム
JPH11188617A (ja) * 1997-12-26 1999-07-13 Nippon Daasu Bondo Kk 被研磨体の保持部材及びこの保持部材を用いた被研磨体の研磨方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56164549A (en) * 1980-05-23 1981-12-17 Disco Abrasive Sys Ltd Mounting method by positioning
US4521995A (en) * 1980-05-23 1985-06-11 Disco Co., Ltd. Wafer attracting and fixing device
US6193586B1 (en) * 1998-02-11 2001-02-27 Samsung Electronics Co., Ltd. Method and apparatus for grinding wafers using a grind chuck having high elastic modulus
JP2003011056A (ja) * 2001-06-27 2003-01-15 Shin Etsu Handotai Co Ltd ワークの研磨方法及び研磨装置

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 006, no. 052 (E - 100) 7 April 1982 (1982-04-07) *
PATENT ABSTRACTS OF JAPAN vol. 2003, no. 05 12 May 2003 (2003-05-12) *

Also Published As

Publication number Publication date
JP2005313312A (ja) 2005-11-10
US20050221725A1 (en) 2005-10-06
KR20060012246A (ko) 2006-02-07
EP1582294B1 (de) 2012-03-21
EP1582294A2 (de) 2005-10-05
TW200531789A (en) 2005-10-01
JP4520327B2 (ja) 2010-08-04
TWI347245B (en) 2011-08-21
KR101114200B1 (ko) 2012-02-22
US7201640B2 (en) 2007-04-10

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