EP1667489A2 - Element chauffant par rayonnement en carbone renforcé par des fibres de carbone - Google Patents

Element chauffant par rayonnement en carbone renforcé par des fibres de carbone Download PDF

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Publication number
EP1667489A2
EP1667489A2 EP05025398A EP05025398A EP1667489A2 EP 1667489 A2 EP1667489 A2 EP 1667489A2 EP 05025398 A EP05025398 A EP 05025398A EP 05025398 A EP05025398 A EP 05025398A EP 1667489 A2 EP1667489 A2 EP 1667489A2
Authority
EP
European Patent Office
Prior art keywords
cfc
quartz glass
transparent
radiant heater
carbon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP05025398A
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German (de)
English (en)
Other versions
EP1667489A3 (fr
EP1667489B1 (fr
Inventor
Sven Dr. Linow
Stefan Fuchs
Siegfried Grob
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Excelitas Noblelight GmbH
Original Assignee
Heraeus Noblelight GmbH
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Filing date
Publication date
Application filed by Heraeus Noblelight GmbH filed Critical Heraeus Noblelight GmbH
Publication of EP1667489A2 publication Critical patent/EP1667489A2/fr
Publication of EP1667489A3 publication Critical patent/EP1667489A3/fr
Application granted granted Critical
Publication of EP1667489B1 publication Critical patent/EP1667489B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
    • H05B3/145—Carbon only, e.g. carbon black, graphite
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/032—Heaters specially adapted for heating by radiation heating

Definitions

  • the present invention relates to an IR radiant heater with at least one flat filament made of carbon, in a transparent or at least partially transparent housing for IR radiation.
  • Such an IR radiator is realized according to EP 0 881 858 with a single filament arranged in a round tube and in DE 44 38 871 and DE 44 19 285 with a plurality of filaments of carbon arranged next to one another.
  • the carbon materials used here consist of parallel carbon fibers, which are connected by means of resin. These structures are graphitized prior to installation in the radiator.
  • EP 0 881 858 is unsuitable for uniform planar irradiation.
  • DE 44 38 871 and DE 44 19 285 relate to the use of comparable filaments, but with the aim of achieving a two-dimensional (2D) radiation.
  • the carbon filaments disclosed there can not be combined to any planar heating elements, since the material can only be stretched and arranged with the same width. Although this makes it possible to realize the arrangements shown in DE 44 38 871, they do not give uniform emission intensities nor can curved or round shapes be realized, or even structures shaped in 3D.
  • Fig. 5a is in the marginal bands due to the different length of the different fibers a considerable Show variation of the temperature and thus the radiated power per unit length.
  • the present invention also relates to the use of CFC material for radiant heaters.
  • JP 7-161725 describes cutting a heating pattern of planar material using silicon carbide (SiC).
  • SiC heating element is located in an open housing made of quartz glass, on which on the side used for heat treatment a graphite disc (see Figure 1, No. (8)) is placed.
  • the graphite disc is heated by the SiC heater and then warms the material secondarily.
  • Such heating elements made of SiC or graphite are brittle and rigid, so that they react very fragile.
  • the heating element is also electrically contacted rigidly by means of screws, so that an additional risk of breakage arises here due to the thermal expansion. To ensure adequate mechanical strength of such heating elements, they must be made massive. Due to the then low electrical resistance very high currents will flow during operation at low voltages. This requires complex power supplies and the electrical leads are very difficult to lead in a vacuum-tight quartz body. For this reason, the quartz glass housing is designed here open.
  • EP 0 899 777 B1 describes a carbon heater having a heater member of longitudinally stretched interwoven carbon fiber bundles, such as a ribbon or wire form. These woven carbon fiber bundles are expressly not converted by means of graphite into a CFC. These bundles remain so flexible and the risk of brittle fracture is avoided.
  • the described wire or ribbon-shaped heater elements have a high electrical resistance, so that the heater can be designed for operation at common voltages. Due to the very small number of fibers in the band, however, only a very small amount of current flows at maximum power of a few amps, so that overall the performance of such a unit with 30 kW m 2 tends to be low.
  • the heater link is placed in channels that have been milled into a first quartz plate. Subsequently, the heating device is closed by means of a second quartz part that is placed on the first and connected thereto. The connection is made by applying a weight of 10 kg and a hot process in which the entire device is heated to 1450 ° C for 3 h.
  • the resulting connection of the two quartz parts is not a continuous weld and can gap apart due to mechanical and thermal loads after prolonged operation.
  • CFC carbon fiber reinforced carbon
  • the aim of the invention is to develop an IR radiator, which can be operated at normal mains voltages, at the same time has high power and lifetime and allows high flexibility in the design options with respect to the required forms of the process.
  • Such webs remain flexible and tear-resistant even after impregnation and conversion into a CFC. Even filaments of complex shape cut from CFC sheets remain flexible and tear-resistant.
  • the thickness of the material is low, preferably ⁇ 1 mm, and more preferably ⁇ 0.3 mm, it also achieves an electrical resistance of the filaments, which allows operation at normal operating voltages (208 V, 230 V, 400 V, 480 V) , Usual current feedthroughs for IR emitters allow about 25 A, so that considerable power per filament can be realized.
  • This provides a heating technique that is the highest standard for clean applications, as required in the semiconductor industry.
  • flat quartz glass elements of the housing are welded together to form a housing.
  • the housing may be made of a high purity material, such as e.g. Quartz glass.
  • the CFC heating filament can be arranged in the housing on brackets, wherein the shape of the brackets is preferably chosen so that the support surface is kept low, ideally limited to one line.
  • Suitable supports are, for example, rods made of quartz glass, aluminum oxide or another non-conductive material of high melting point, which are ideally equipped as a body with a sharp edge on which rests the filament.
  • the power of the radiant heater is preferably more than 30 kW / m 2 , in particular 50 to 250 kW / m 2 for radiant heaters with a service life of 5,000 to 10,000 hours.
  • a further preferred embodiment consists in radiant heaters with a power of over 200 kW / m 2 , in particular more than 250 kW / m 2 for shorter-lived spotlights.
  • the particularly preferred field of application are long-lasting radiant heaters with a power of between 100 and 200 kW / m 2 .
  • two spatial dimensions are many times larger, preferably one order of magnitude larger, than the third dimension. It has been proven to evacuate the housing or to fill it with inert gas.
  • the electrical contacting of the filament is preferably carried out via brackets made of molybdenum, with additional layers of suitable carbon materials between the filament and the bracket for an ideal electrical and mechanical contact.
  • Preferred CFC patterns are disc-shaped, meander-shaped, helical, have the shape of an omega, or a folded-in omega or are circular with a recess.
  • the CFC pattern can be cut out of a CFC sheet with the required accuracy and with gentle treatment of the material of special purity with a laser or water jet.
  • FIG. 1 a shows a plan view of a heating element 1.
  • FIG. 1b shows a perspective view of a heating element 1.
  • FIG. 2 a shows a plan view of a base plate 2.
  • FIG. 2b shows a perspective view of the base plate 2.
  • FIG. 3 a shows a plan view of a cover plate 3.
  • FIG. 3b shows a side view of the cover plate 3.
  • Figure 4 shows a perspective view of the bottom plate 2 with the mounted feeds of the electrical contacts 26 and the mounted pump supports 27th
  • Figure 5 shows an overall perspective view of the device from below.
  • a heating element according to FIG. 1a or 1b is cut out of a sheet of CFC material.
  • the bottom plate 2 according to Figure 2a or 2b is made of opaque quartz glass. In its surface are support webs 22 for the heating tape 1, spacers 23, which are welded to the cover plate and retaining pins 21 for fixing the heating tape 1. Outside, an edge 24 is provided for welding to the cover plate. Further, two holes 25 are provided for the electrical contacts.
  • Figures 3a and 3b show a cover plate 3 made of quartz glass with recessed openings 31 for welding the cover plate with the spacers 23 of the bottom plate. 2
  • the bottom plate 2 is equipped with mounted feeds of the electrical contacts 26 and the mounted pump nozzle 27.
  • the radiant heater according to FIG. 5 has a CFC heating element 1 (FIGS. 1 a and 1 b), which meandering fills the entire surface to be heated.
  • a CFC heating element 1 (FIGS. 1 a and 1 b), which meandering fills the entire surface to be heated.
  • the front side 3 is a clear quartz glass pane 3.
  • the panes 2 and 3 are closed to a dense space, which is evacuated via the pipes for the power supply lines.
  • the carbon belt 1 can be heated at a power of 200 kW / m 2 to about 1300 ° C.
  • the opaque disk is designed as a base plate 2, on which spacers 23 are arranged.
  • the bottom plate 2 is of an inner and outer ring 24 limited.
  • the CFC pattern 1 lies loosely on the support webs 22 and a clear quartz glass plate 3 terminates with the rings.
  • the carbon belt 1 can be heated at a power of 200 kW / m 2 to about 1300 ° C.
  • the CFC pattern 1 is cut out of a CFC surface with a laser, the spacers 23 and the rings and the quartz glass plates 2, 3 of highly pure quartz glass, so that in addition to the metallic power supply and the web ends with the Only high-purity quartz glass as a radiator housing and high-purity carbon as the radiation source 1 are used for connecting current feedthrough molybdenum retaining clips.
  • An opaque quartz glass plate 2 of sufficient thickness is cut into a required shape for the bottom 2, then the depressions are milled and ground. In this case, the edge 24 and the spacers 23 remain at their original height and the support webs 22 for the filament are at a lower level. Finally, the openings at which the pipes for electrical contacting and the current feedthrough are drilled are drilled. Edges may be smoothed or fire polished.
  • quartz glass tubes are attached to the holes, in each of which a current feedthrough is arranged.
  • pipes 27 for applying vacuum and for introducing purge gas are located on these pipes.
  • the cover plate 3 for the top is cut from pure quartz glass and ground. In particular, recesses 31 are introduced for later welding of the plate to the spacers 23 of the opaque plate 2.
  • the heating element 1 is cut from a CFC sheet material by means of a water jet and then coated in a reactor with pyrocarbon.
  • Power feedthroughs are made in the form of bruises.
  • a molybdenum pin At the inner end of the current feedthrough is a molybdenum pin.
  • the terminal for receiving the heating element 1 is attached.
  • the current feedthrough is welded to the tube of the current feedthrough, so that the clamps for receiving the filament are already in the later level of the filament. Subsequently, the tape is inserted into the bottom and the tape ends are connected by clamping the sheet of molybdenum retaining clip with the current feedthrough.
  • graphite platelets are added for mechanical protection and to improve the electrical contact.
  • the cover plate 3 is placed and the resulting interior is purged with argon, so that during the welding process no water vapor or oxygen can oxidize the carbon or molybdenum.
  • the two quartz elements 2, 3 are welded together.
  • the weld is joined by applying additional quartz glass along the edge and at the recesses 31 in the cover plate, which are opposite the spacers 23 for the cover plate.
  • the recesses in the cover plate are completely filled and also the edges between the upper and lower plate are filled to the extent that no recesses are present.
  • the body is annealed under vacuum or under inert gas.
  • the protective gas is passed directly into the body and rinsed during the entire tempering process.
  • the interior of the radiator is either evacuated or filled with a protective gas and the radiator deducted.
  • the electrical contacts are attached externally.

Landscapes

  • Resistance Heating (AREA)
  • Electrodes For Cathode-Ray Tubes (AREA)
  • Lubricants (AREA)
  • Developing Agents For Electrophotography (AREA)
  • Surface Heating Bodies (AREA)
EP05025398A 2004-12-01 2005-11-22 Element chauffant par rayonnement en carbone renforcé par des fibres de carbone Expired - Lifetime EP1667489B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102004058077A DE102004058077A1 (de) 2004-12-01 2004-12-01 CFC-Heizstrahler

Publications (3)

Publication Number Publication Date
EP1667489A2 true EP1667489A2 (fr) 2006-06-07
EP1667489A3 EP1667489A3 (fr) 2006-07-19
EP1667489B1 EP1667489B1 (fr) 2008-03-19

Family

ID=35825325

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05025398A Expired - Lifetime EP1667489B1 (fr) 2004-12-01 2005-11-22 Element chauffant par rayonnement en carbone renforcé par des fibres de carbone

Country Status (7)

Country Link
US (1) US8655160B2 (fr)
EP (1) EP1667489B1 (fr)
JP (1) JP2006164974A (fr)
KR (1) KR20060061242A (fr)
CN (1) CN1784086B (fr)
AT (1) ATE390030T1 (fr)
DE (2) DE102004058077A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3182794B1 (fr) * 2015-12-18 2020-12-09 E.G.O. Elektro-Gerätebau GmbH Dispositif de chauffage comprenant un support et son procédé de fabrication

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200836578A (en) * 2006-11-27 2008-09-01 Momentive Performance Mat Inc Quartz encapsulated heater and heater assembly thereof
KR100918918B1 (ko) 2009-01-16 2009-09-23 (주)리트젠 적외선램프의 필라멘트 및 그 제조방법
WO2014118792A1 (fr) * 2013-01-31 2014-08-07 Hewlett-Packard Development Company, L.P. Attribution de ressources physiques
US10737290B2 (en) 2015-09-15 2020-08-11 Heraeus Noblelight Gmbh Efficient infrared absorption system for edge sealing medium density fiberboard (MDF) and other engineered wood laminates using powder and liquid coatings
US10857566B2 (en) * 2015-09-15 2020-12-08 Heraeus Noblelight Gmbh Efficient infrared absorption system for edge sealing medium density fiberboard (MDF) and other engineered wood laminates using powder and liquid coatings
DE102016118137A1 (de) * 2016-09-26 2018-03-29 Heraeus Noblelight Gmbh Infrarotflächenstrahler
DE102018003531A1 (de) * 2018-04-30 2019-10-31 Aytac Görüken Elektrischer Kopf zum Rauchen einer Wasspfeife mit Tabak
KR102432994B1 (ko) * 2020-10-16 2022-08-16 최환혁 기판 예열 장치

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07161725A (ja) 1993-12-06 1995-06-23 Sumitomo Osaka Cement Co Ltd ウエハー加熱装置および加熱装置用電極部材
DE4419285A1 (de) 1994-06-01 1995-12-07 Heraeus Noblelight Gmbh Strahlungsanordnung
DE4438871A1 (de) 1994-11-03 1996-05-09 Heraeus Noblelight Gmbh Infrarotstrahler mit einem flächenhaft ausgebildeten Widerstandskörper als Strahlungsquelle
EP0881858A2 (fr) 1993-05-21 1998-12-02 Ea Technology Limited Améliorations relatives à des sources de rayonnement infrarouge
US6584279B2 (en) 2000-05-25 2003-06-24 Toshiba Ceramics Co., Ltd. Heater sealed with carbon wire heating element
EP0899777B1 (fr) 1997-07-31 2004-09-29 Toshiba Ceramics Co., Ltd. Elément chauffant en carbone

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JP2620270B2 (ja) * 1987-12-28 1997-06-11 株式会社ナガノ 加熱装置
JP2854864B2 (ja) * 1988-02-19 1999-02-10 株式会社ナガノ 炭素繊維／炭素コンポジット製面発熱体
JP2939279B2 (ja) * 1989-12-28 1999-08-25 株式会社ナガノ 面状加熱装置
JPH06260430A (ja) 1993-03-08 1994-09-16 Eiko:Kk プレートヒータ及びその製法
JPH08315965A (ja) * 1994-09-29 1996-11-29 Tokyo Electron Ltd 加熱装置及びその製造方法、並びに処理装置
US6013903A (en) * 1996-09-24 2000-01-11 Mifune; Hideo Flame reaction material carrier and method of manufacturing flame reaction member
US6611659B2 (en) * 1999-04-24 2003-08-26 Airbus Deutschland Gmbh Electrically heated aircraft composite floor panel
CN100340135C (zh) * 2001-08-31 2007-09-26 徐国长 碳分子重组碳纤维导电发热网状带及其制备方法
KR100547189B1 (ko) * 2003-04-23 2006-01-31 스타전자(주) 그라파이트 펠트를 이용하는 탄소 발열 장치의 제조 방법
CN1458810A (zh) * 2003-05-30 2003-11-26 北京东方慧辰碳纤维科技有限公司 一种碳材料的高温远红外辐射电热体及其制备方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0881858A2 (fr) 1993-05-21 1998-12-02 Ea Technology Limited Améliorations relatives à des sources de rayonnement infrarouge
JPH07161725A (ja) 1993-12-06 1995-06-23 Sumitomo Osaka Cement Co Ltd ウエハー加熱装置および加熱装置用電極部材
DE4419285A1 (de) 1994-06-01 1995-12-07 Heraeus Noblelight Gmbh Strahlungsanordnung
DE4438871A1 (de) 1994-11-03 1996-05-09 Heraeus Noblelight Gmbh Infrarotstrahler mit einem flächenhaft ausgebildeten Widerstandskörper als Strahlungsquelle
EP0899777B1 (fr) 1997-07-31 2004-09-29 Toshiba Ceramics Co., Ltd. Elément chauffant en carbone
US6584279B2 (en) 2000-05-25 2003-06-24 Toshiba Ceramics Co., Ltd. Heater sealed with carbon wire heating element

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3182794B1 (fr) * 2015-12-18 2020-12-09 E.G.O. Elektro-Gerätebau GmbH Dispositif de chauffage comprenant un support et son procédé de fabrication

Also Published As

Publication number Publication date
DE102004058077A1 (de) 2006-06-08
JP2006164974A (ja) 2006-06-22
EP1667489A3 (fr) 2006-07-19
CN1784086B (zh) 2010-05-05
CN1784086A (zh) 2006-06-07
EP1667489B1 (fr) 2008-03-19
DE502005003294D1 (de) 2008-04-30
US8655160B2 (en) 2014-02-18
KR20060061242A (ko) 2006-06-07
ATE390030T1 (de) 2008-04-15
US20060115244A1 (en) 2006-06-01

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