EP1698434A4 - Schleifmaschine - Google Patents

Schleifmaschine

Info

Publication number: EP1698434A4
Authority: EP; European Patent Office
Prior art keywords: geinder
Prior art date: 2003-12-25
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Withdrawn

Application number

EP03782894A

Other languages

English (en)

French (fr)

Other versions

EP1698434A1 (de

Inventor

Jun Ujike

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

UJIKE CO Ltd

Original Assignee

UJIKE CO Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2003-12-25

Filing date

2003-12-25

Publication date

2008-10-15

2003-12-25 Application filed by UJIKE CO Ltd filed Critical UJIKE CO Ltd

2006-09-06 Publication of EP1698434A1 publication Critical patent/EP1698434A1/de

2008-10-15 Publication of EP1698434A4 publication Critical patent/EP1698434A4/de

Status Withdrawn legal-status Critical Current

Links

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D9/00—Wheels or drums supporting in exchangeable arrangement a layer of flexible abrasive material, e.g. sandpaper
- B24D9/08—Circular back-plates for carrying flexible material

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
Polishing Bodies And Polishing Tools (AREA)
Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

EP03782894A 2003-12-25 2003-12-25 Schleifmaschine Withdrawn EP1698434A4 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
PCT/JP2003/016719 WO2005063444A1 (ja)	2003-12-25	2003-12-25	研磨盤

Publications (2)

Publication Number	Publication Date
EP1698434A1 EP1698434A1 (de)	2006-09-06
EP1698434A4 true EP1698434A4 (de)	2008-10-15

Family

ID=34717657

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP03782894A Withdrawn EP1698434A4 (de)	2003-12-25	2003-12-25	Schleifmaschine

Country Status (4)

Country	Link
EP (1)	EP1698434A4 (de)
CN (1)	CN1886233A (de)
AU (1)	AU2003292618A1 (de)
WO (1)	WO2005063444A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2017042848A (ja) *	2015-08-24	2017-03-02	アイシン・エーアイ株式会社	ギヤ研磨用工具及びそれに用いる研磨シート
CN107127674B (zh) *	2017-07-08	2021-01-08	上海致领半导体科技发展有限公司	一种用于半导体晶片抛光的陶瓷载盘

Citations (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
WO1998052717A1 (en) *	1997-05-19	1998-11-26	Lake Country Manufacturing, Inc.	Foam buffing pad and method of manufacture thereof
US5888121A (en) *	1997-09-23	1999-03-30	Lsi Logic Corporation	Controlling groove dimensions for enhanced slurry flow
US20030224706A1 (en) *	2002-05-31	2003-12-04	Sabo Gary L.	Foam buffing/polishing pad

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH08216029A (ja) *	1995-02-07	1996-08-27	Daiki:Kk	精密研磨シート
JP4586201B2 (ja) *	2001-02-09	2010-11-24	株式会社ウジケ	回転研磨機用研磨盤

2003
- 2003-12-25 EP EP03782894A patent/EP1698434A4/de not_active Withdrawn
- 2003-12-25 WO PCT/JP2003/016719 patent/WO2005063444A1/ja not_active Ceased
- 2003-12-25 AU AU2003292618A patent/AU2003292618A1/en not_active Abandoned
- 2003-12-25 CN CNA2003801109088A patent/CN1886233A/zh active Pending

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
WO1998052717A1 (en) *	1997-05-19	1998-11-26	Lake Country Manufacturing, Inc.	Foam buffing pad and method of manufacture thereof
US5888121A (en) *	1997-09-23	1999-03-30	Lsi Logic Corporation	Controlling groove dimensions for enhanced slurry flow
US20030224706A1 (en) *	2002-05-31	2003-12-04	Sabo Gary L.	Foam buffing/polishing pad

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2005063444A1 *

Also Published As

Publication number	Publication date
CN1886233A (zh)	2006-12-27
WO2005063444A1 (ja)	2005-07-14
AU2003292618A1 (en)	2005-07-21
EP1698434A1 (de)	2006-09-06

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Legal Events

Date	Code	Title	Description
2006-08-04	PUAI	Public reference made under article 153(3) epc to a published international application that has entered the european phase	Free format text: ORIGINAL CODE: 0009012
2006-09-06	17P	Request for examination filed	Effective date: 20060620
2006-09-06	AK	Designated contracting states	Kind code of ref document: A1 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
2007-04-04	DAX	Request for extension of the european patent (deleted)
2008-10-15	A4	Supplementary search report drawn up and despatched	Effective date: 20080915
2009-05-01	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN
2009-06-03	18D	Application deemed to be withdrawn	Effective date: 20081213