EP1709471A2 - Unite d'eclairage et procede pour la faire fonctionner - Google Patents

Unite d'eclairage et procede pour la faire fonctionner

Info

Publication number
EP1709471A2
EP1709471A2 EP05715201A EP05715201A EP1709471A2 EP 1709471 A2 EP1709471 A2 EP 1709471A2 EP 05715201 A EP05715201 A EP 05715201A EP 05715201 A EP05715201 A EP 05715201A EP 1709471 A2 EP1709471 A2 EP 1709471A2
Authority
EP
European Patent Office
Prior art keywords
light
light source
light guide
lighting unit
unit according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP05715201A
Other languages
German (de)
English (en)
Inventor
Detlef Gerhard
Martin Renner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Icos Vision Systems NV
Original Assignee
Icos Vision Systems NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Icos Vision Systems NV filed Critical Icos Vision Systems NV
Publication of EP1709471A2 publication Critical patent/EP1709471A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
    • G02B6/0005—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being of the fibre type
    • G02B6/0006—Coupling light into the fibre
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4296—Coupling light guides with opto-electronic elements coupling with sources of high radiant energy, e.g. high power lasers, high temperature light sources
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4298—Coupling light guides with opto-electronic elements coupling with non-coherent light sources and/or radiation detectors, e.g. lamps, incandescent bulbs, scintillation chambers

Definitions

  • the invention relates to a lighting unit that is operated with a high-performance light source for inspecting object surfaces.
  • a light source of such a lighting unit generally ages. This means that the lamp becomes darker with the same supply parameters on the input side. An automatic inspection of object surfaces would thus produce images of poorer quality that are difficult to evaluate.
  • the invention has for its object to provide high-performance lighting for inspection tasks on object surfaces, which ensure uniform illumination of objects with high light intensity.
  • An operating method must also be specified 3.
  • the invention is based on the knowledge that the light intensity at the output of a lighting unit can be dimi ⁇ ted in such a way that homogeneous object lighting with a predetermined light intensity can be set by the
  • the light beam path of a high-performance light source is focused by means of a first optical system, the light beam path is coupled into a light guide, the cross-sectional area of the focus being at least twice as large as the cross-sectional area of the light guide, the light via the light guide to a light measuring head and from there is passed on to an object and the light output on the object can be adjusted by axially varying the distance between the light source and the light entry surface of the light guide.
  • the light distribution on the object surface is homogeneous. This is due to the fact that the high-power light source or its light emission or light beam path is aligned approximately coaxially with the initial region of the light guide.
  • the cross-sectional area of the focus is designed such that it substantially covers the entry area of the light guide, ie is at least twice as large.
  • the light falls into the entry surface of the light guide, which corresponds to the core of the light beam path of the high-power light source. This eliminates inhomogeneities in the lighting.
  • the dimensioning of the light intensity results from the fact that, for example, when the distance of the high-performance light source is increased from the entry area of the light source lenleiters the entry surface of the light guide is moved out of the focus of the light beam path. This is synonymous with an increasing spot of illumination at the point of entry for the light guide. 3 in turn results in a correspondingly lower proportion of the total illumination intensity of the high-power light source being coupled into the light guide and the light output being able to be determined accordingly.
  • the lighting unit consists of a housing, a displacement unit for the high-performance light source together with the first focusing optics and a light guide for the transmission of the light to the object.
  • a light-sensitive sensor for example on a decoupled beam path, can be used to regulate the light intensity beyond the mere adjustment of the light intensity.
  • the control is monitored accordingly via an electronic unit.
  • the distance between the light guide inlet and the light source is varied for the di men of the lighting when using a high-performance light source. This is equivalent to an enlargement, because in practice a too small distance between light guide and high-performance light source is not desirable due to high thermal loads.
  • the variation of the distance of the focus area of the light beam path from the entry surface of the light guide directly changes the amount of light coupled into the light guide. If, for example, certain color spectra are desired, appropriate filters can be introduced into the beam path. If a certain additional reduction in the j light output is to take place, a screen diaphragm for dimming is introduced into the beam path.
  • the regulation of the brightness when illuminating an object surface takes place via a feedback signal which uses a photo detector which measures the light intensity at any point behind the light guide exit.
  • the sensor signal is fed to control electronics.
  • the control moves the lamp in such a way that the setpoint and actual value are brought into agreement.
  • the figure shows a lighting unit consisting of a lamp housing with a high-performance light source, a light guide, a light measuring head that illuminates an object and electrical or electronic units for supplying or controlling the system.
  • the figure shows in particular a device for uniformly illuminating an object 3 with simultaneous control possibility.
  • Uniform lighting is understood to mean a homogeneous light distribution, so that there are no brightness fluctuations from the lighting side, for example, across the surface.
  • a major advantage is the negative effects of aging processes of the high-performance light source that can be eliminated by the control.
  • the liquid light guide serves for better cooling, since conventional light guides, for example made of plastic, do not withstand high thermal loads.
  • additional optical elements such as second optics 13 and third optics 14, fine adjustments can be made under different elements of the lighting unit.
  • the high-performance light source 1 is contained in the housing 4 as the main element.
  • This light source can be provided with a reflector 5, for example.
  • the light emitted from the high-power light source 1 is focused by means of a first optic 12, so that a focus area 15 is present.
  • a displacement unit 6 has an L-shaped stand, the longer leg of which is positioned horizontally and which fixes both the input-side end of the light guide 2 or a second optical system 13 and an adjustment device which can be moved via a motor M and which serves for this purpose , the high-performance light source 1 or. to shift the corresponding focus axially relative to the light entry surface of the light guide.
  • a motor controller is also available for the positioning of filters or screens 7.
  • the light coupled into the light guide 2 is coupled into the light measuring head at the other end of the light guide 2 directly or via a third optic 14, via a beam splitter into the illuminating beam, which is directed onto the object 3, and a side branch is split up by a photosensor 10 to be fed.
  • the third optics 14 can be attached to the light measuring head 8 on the input side as well as on the output side.
  • the first control circuit 20 the regulation of the illumination intensity, as it is detected in the figure as an example in the light measuring head, can be carried out on the basis of this opto-electrical signal, which is generated by the photo sensor 10.
  • Another option is to use the second control circuit 21, the light measurement of the actual value taking place via the camera 11, which is used anyway for inspection tasks on the object surface.
  • the use of a computer for image processing is also necessary, the setpoint for the first control loop being derived from the detection signal for the light intensity.
  • the position of the focal point or focal region 15 shown schematically in the figure represents a relative position of the high-power light source 1 in the retracted position.
  • this position means that the focus is not in the plane of the entry surface of the light guide 2, but is shifted axially between the light guide and the light source.
  • only a relatively small proportion of the amount of light enters the optical waveguide 2, since the invariable cross section of the light entry surface is illuminated only by a very small proportion of the total light spot. This is based on the fact that the illumination spot present in the plane of the light entry surface of the optical waveguide 2 is considerably larger than the cross-sectional area of the light entry.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

L'invention concerne une unité d'éclairage qui comprend: une source de lumière haute puissance (1); une première optique (12) servant à la focalisation de la lumière émise par la source de lumière haute puissance (1); une tête photométrique (8) permettant un éclairage prédéterminable d'un objet (3); une fibre optique (2) servant à la transmission vers la tête photométrique (8) de la lumière émise et focalisée; et une unité de décalage (6) servant à faire varier la distance axiale séparant la source de lumière haute puissance (1), avec la première optique (12), de l'entrée de la fibre optique. La superficie de la section du foyer est au moins deux fois plus grande que celle de la fibre optique (2), du côté de l'entrée de celle-ci, et par décalage axial de la source de lumière haute puissance (1), on peut faire varier l'intensité de la lumière entrant dans la fibre optique (2).
EP05715201A 2004-01-16 2005-01-17 Unite d'eclairage et procede pour la faire fonctionner Withdrawn EP1709471A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004002450A DE102004002450A1 (de) 2004-01-16 2004-01-16 Beleuchtungseinheit und Verfahren zu deren Betrieb
PCT/EP2005/000554 WO2005067365A2 (fr) 2004-01-16 2005-01-17 Unite d'eclairage et procede pour la faire fonctionner

Publications (1)

Publication Number Publication Date
EP1709471A2 true EP1709471A2 (fr) 2006-10-11

Family

ID=34778074

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05715201A Withdrawn EP1709471A2 (fr) 2004-01-16 2005-01-17 Unite d'eclairage et procede pour la faire fonctionner

Country Status (4)

Country Link
US (1) US7427731B2 (fr)
EP (1) EP1709471A2 (fr)
DE (1) DE102004002450A1 (fr)
WO (1) WO2005067365A2 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006058079B4 (de) * 2006-12-07 2011-04-28 Schott Ag Beleuchtungsvorrichtung
CA2749832C (fr) * 2010-08-30 2016-04-26 Ushio Denki Kabushiki Kaisha Source lumineuse
US9885671B2 (en) 2014-06-09 2018-02-06 Kla-Tencor Corporation Miniaturized imaging apparatus for wafer edge
US9645097B2 (en) 2014-06-20 2017-05-09 Kla-Tencor Corporation In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning
US9520742B2 (en) 2014-07-03 2016-12-13 Hubbell Incorporated Monitoring system and method
CN116709614B (zh) * 2023-08-02 2023-10-20 深圳爱图仕创新科技股份有限公司 灯光控制方法、装置、计算机设备及计算机可读存储介质

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0685022B2 (ja) * 1984-07-05 1994-10-26 オリンパス光学工業株式会社 内視鏡用照明光学系
CH676786A5 (fr) 1988-10-06 1991-03-15 Lasag Ag
DE69109285T2 (de) * 1991-08-02 1995-11-02 Ibm Apparat und Methode zur Inspektion eines Substrates.
WO1993016326A1 (fr) * 1992-02-14 1993-08-19 Lemke, Rosemarie Dispositif pour eclairer notamment des objets filmes par une camera video
US6626582B2 (en) 2000-02-17 2003-09-30 Cogent Light Technologies, Inc. Snap-on connector system for coupling light from an illuminator to a fiber optic
CA2724743C (fr) * 2001-06-29 2014-11-25 Universite Libre De Bruxelles Procede et dispositif destines a l'obtention par microscopie d'images en trois dimensions d'un echantillon
DE10256365A1 (de) * 2001-12-04 2003-07-17 Ccs Inc Lichtabstrahlungsvorrichtung, Lichtquellenvorrichtung, Beleuchtungseinheit und Lichtverbindungsmechanismus

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2005067365A2 *

Also Published As

Publication number Publication date
WO2005067365A3 (fr) 2006-04-13
WO2005067365A2 (fr) 2005-07-28
DE102004002450A1 (de) 2005-08-25
US20070273891A1 (en) 2007-11-29
US7427731B2 (en) 2008-09-23

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