EP1725836A1 - Ensemble capteur magnetique - Google Patents

Ensemble capteur magnetique

Info

Publication number
EP1725836A1
EP1725836A1 EP05707752A EP05707752A EP1725836A1 EP 1725836 A1 EP1725836 A1 EP 1725836A1 EP 05707752 A EP05707752 A EP 05707752A EP 05707752 A EP05707752 A EP 05707752A EP 1725836 A1 EP1725836 A1 EP 1725836A1
Authority
EP
European Patent Office
Prior art keywords
magnetic
sensor
magnetic sensor
sensor elements
sensor arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP05707752A
Other languages
German (de)
English (en)
Inventor
Ingo Herrmann
Paul Farber
Ulrich May
Christian Bauer
Birgit Vogelgesang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of EP1725836A1 publication Critical patent/EP1725836A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/022—Measuring gradient
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
    • G01D5/147—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the movement of a third element, the position of Hall device and the source of magnetic field being fixed in respect to each other
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/42—Devices characterised by the use of electric or magnetic means
    • G01P3/44—Devices characterised by the use of electric or magnetic means for measuring angular speed
    • G01P3/48—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage
    • G01P3/481—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage of pulse signals
    • G01P3/487—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage of pulse signals delivered by rotating magnets

Definitions

  • the invention relates to a magnetic sensor arrangement, in particular for sensing the movement of linearly or rotationally moved elements, according to the generic features of the main claim.
  • magnetic field-sensitive sensors are used in many areas in which contactless detection of a movement is desired. This can be both a rotational movement and a linear movement.
  • the movement can be determined directly by the time-changing magnetic field at the sensor location.
  • passive transmitter elements which consist of a soft magnetic material
  • the magnetic field is generated by a working magnet which is firmly connected to the sensor. The sensor measures the change in the magnetic field of the working magnet, which is caused by the movement of the encoder elements.
  • XMR sensors In addition to the Hall technology for magnetic field measurement which is known per se, so-called XMR technologies, ie magnetoresistive measuring principles, are also increasingly being used in the case of passive sensor elements in the motor vehicle sector. It should be noted that XMR sensors, in contrast to Hall sensors, detect the so-called "in-plane" component of the magnetic field in the sensor element. XMR sensors previously used use a working magnet for this purpose, the field of which must be adjusted so that the offset at the location of the sensitive element is zero, or a so-called back bias field is generated that defines the working point of the sensor.
  • DE 101 28 135 AI describes a concept in which a hard magnetic layer nearby, i.e. is deposited in particular on and / or under a magnetoresistive layer stack.
  • This hard magnetic layer then couples mainly to the magnetosensitive layers through its stray field and generates a so-called bias magnetic field, which acts as a magnetic field offset, so that even with only a slight variation of an external magnetic field superimposed on the internal magnetic field, a well measurable and a relatively large change in the actual measured value, which is detected as a change in resistance in the layer arrangement, can be achieved.
  • the sensors described above are often designed in a manner known per se for speed detection, for example in motor vehicle technology, in a so-called gradiometer arrangement.
  • the sensor thus only measures the signal of a magnetic pole wheel whose pole pair spacing corresponds approximately to the predefined gradiometer spacing.
  • the gradiometer principle in contrast to the absolutely measuring XMR elements, the sensitivity of the sensors to homogeneous interference fields can be reduced. A comparison of the magnets previously used so that the offset can be eliminated at both locations of the sensor elements of the gradiometer arrangement can no longer be carried out here; An electronic adjustment is possible in principle, but here there is a relatively small signal with a large offset.
  • the magnetic sensor arrangement according to the invention has two sensor elements in a gradiometer arrangement, each of which is assigned to one of two permanent magnets arranged at a predetermined distance.
  • the permanent magnets are advantageously arranged with respect to their dimensions, their distance and their positions from the sensor elements in such a way that the offset of the output signal of the sensor elements in the gradiometer arrangement is minimized.
  • the design of a magnetic circuit which has a working field for one on the gradiometer principle, ie with a detection of the Field gradient working sensor is generated, optimized and thus enables offset-free operation of the sensor with variation of the magnetic field by moving encoder elements, in particular gears.
  • the magnetic circuit was composed of two individual magnets, the fields of which overlap so that the so-called "in-plane" components of the resulting magnetic field at the gradiometer positions are reduced to such an extent that they vary around the zero position due to the influence of the passive transmitter elements. This means that very small signals can be detected without offset.
  • homogenizing plates are arranged between the sensor elements and the permanent magnets. This homogenizes the field in the plane of the sensor elements and reduces the necessary positioning accuracy of the sensor elements compared to the magnet pair for offset-free operation.
  • the magnetization of the permanent magnets is rotated by a predetermined angle ⁇ , deviating from its longitudinal direction facing the sensor elements.
  • This premagnetization which is caused by the oblique position of the field, ensures that the sensor elements are located in a magnetic field in which the sensitivity is maximum due to a so-called bias field.
  • an arrangement of the aforementioned homogenizing plates is advantageously possible.
  • the invention can be used particularly advantageously in a magnetic sensor arrangement for detecting the angle of rotation of a wheel as a transmitter element, the wheel, for example as a steel wheel, being provided with teeth on its periphery for influencing the magnetic field in the region of the magnetic sensor arrangement.
  • FIG. 1 shows a basic view of a magnetic sensor arrangement with two permanent magnets, each of which is opposite a magnetoresistive sensor element in a gradiometer arrangement
  • FIG. 2 shows an arrangement with homogenization plates that is expanded compared to FIG. 1,
  • FIG. 3 shows an exemplary embodiment of a magnetic sensor arrangement with two permanent magnets which, as a modification to FIG. 1, have an angled magnetic field
  • FIG. 4 shows an embodiment according to FIG. 3 with homogenizing plates corresponding to FIG. 2
  • Figure 5 is a view of a magnetic sensor arrangement for a sensor wheel provided with steel teeth
  • FIG. 6 shows a diagram of the course of the magnetic field as a function of the position of a tooth or a tooth gap of the sensor wheel according to FIG. 5.
  • FIG. 1 shows a basic view of a magnetic sensor arrangement 1 which has two permanent magnets 2 and 3, the respective magnetic field B of which is aligned with the field lines indicated here in the direction of a sensor 4.
  • the sensor 4 is designed here as an XMR sensor and has two magnetoresistive sensor elements 5 and 6.
  • the sensor elements 5 and 6 are shown in a gradiometer arrangement with the gradiometer distance GM and detect the changes in the respective field gradients, e.g. by a metallic donor element, e.g. a gear wheel shown in FIG. 5, which is guided past the magnetic sensor arrangement 1, is caused.
  • the optimal working point of the sensor 4 is set via the distance a between the magnets 2 and 3 and can be adapted to the gradiometer distance GM of the sensor elements 5 and 6. Furthermore, the field line profiles depend on the dimensions h, b and t of the permanent magnets 2 and 3. For a fixed gradiometer distance GM, for example 2.5 mm, the size, material and arrangement of the permanent magnets 2 and 3 can be determined here in such a way that the sensor 4 works without offset and can thus detect signals as small as possible again to achieve the greatest possible distance from a transmitter element.
  • the magnetic field lines of the magnetic sensor arrangement 1 run such that a small so-called “in-plane” component exists at the location of the sensor elements 5 and 6.
  • an external sensor element e.g. a gear wheel
  • the magnetic field lines of the magnetic sensor arrangement 1 run such that a small so-called “in-plane” component exists at the location of the sensor elements 5 and 6.
  • a moving gear wheel causes a variation of the magnetic field, the "in-plane" components being modulated around the zero position and thus generating an offset-free signal of the gradiometer arrangement.
  • FIG. 2 An exemplary embodiment can be seen in FIG. 2, in which, in a modification of the exemplary embodiment according to FIG. 1, an additional homogenizing plate 7 is attached between the surfaces of the permanent magnets 2 and 3 and the sensor 4.
  • the field in the plane of the sensor 4 is homogenized with the homogenizing plate 7, and the necessary positioning accuracy of the sensor 4 is reduced compared to the magnet pair 2, 3 for offset-free operation.
  • the sensor elements require constant bias. This premagnetization ensures that the sensor elements 5 and 6 are in a magnetic field in which the sensitivity is at a maximum. This so-called bias field is realized in each case with an embodiment shown in FIGS. 3 and 4.
  • this is realized by rotating the magnetization B in the permanent magnets 2 and 3 by the angle ⁇ . It can also here, as previously described, again implement two construction variants without ⁇ FIG. 3) and with an adjustment improvement by means of a homogenizing plate 7 (FIG. 4).
  • FIG. 5 shows a section of a model in which the magnetic sensor arrangement 1 according to the invention, for example according to FIG. 1, is used in connection with a sensor wheel 8 which is provided with teeth 9.
  • a measurement result is shown in a diagram according to FIG.
  • the so-called "in-plane" component of the magnetic field Bx is plotted here above the gradiometer position relative to the center of the sensor 4, in each case for a tooth 9 (course 10) and for a tooth gap (course 11).

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

L'invention concerne un ensemble capteur magnétique (1) dans lequel des éléments de capteur (5, 6) sensibles au champ magnétique et dont les propriétés électriques peuvent être modifiées en fonction d'un champ magnétique sont soumis à l'action d'un élément générateur passif mobile. L'ensemble capteur magnétique (1) selon l'invention comprend deux éléments capteurs (5, 6) dans un ensemble gradiomètre, ces éléments capteurs étant respectivement associés à un de deux aimants permanents (2, 3) disposés à une distance prédéterminée. Les dimensions, la distance et la position de ces aimants permanents (2, 3) par rapport aux éléments capteurs (5, 6) sont déterminées de manière à réduire au maximum le décalage du signal de sortie des éléments capteurs (5, 6) dans l'ensemble gradiomètre.
EP05707752A 2004-03-11 2005-01-07 Ensemble capteur magnetique Withdrawn EP1725836A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004011809A DE102004011809A1 (de) 2004-03-11 2004-03-11 Magnetsensoranordnung
PCT/EP2005/050063 WO2005088258A1 (fr) 2004-03-11 2005-01-07 Ensemble capteur magnetique

Publications (1)

Publication Number Publication Date
EP1725836A1 true EP1725836A1 (fr) 2006-11-29

Family

ID=34895181

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05707752A Withdrawn EP1725836A1 (fr) 2004-03-11 2005-01-07 Ensemble capteur magnetique

Country Status (5)

Country Link
US (1) US7548060B2 (fr)
EP (1) EP1725836A1 (fr)
CN (1) CN100485320C (fr)
DE (1) DE102004011809A1 (fr)
WO (1) WO2005088258A1 (fr)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8587297B2 (en) * 2007-12-04 2013-11-19 Infineon Technologies Ag Integrated circuit including sensor having injection molded magnetic material
US8174256B2 (en) * 2008-05-30 2012-05-08 Infineon Technologies Ag Methods and systems for magnetic field sensing
US20110187359A1 (en) * 2008-05-30 2011-08-04 Tobias Werth Bias field generation for a magneto sensor
US8610430B2 (en) 2008-05-30 2013-12-17 Infineon Technologies Ag Bias field generation for a magneto sensor
US8058870B2 (en) * 2008-05-30 2011-11-15 Infineon Technologies Ag Methods and systems for magnetic sensing
DE102009055104A1 (de) * 2009-12-21 2011-06-22 Robert Bosch GmbH, 70469 Magnetfeldsensoranordnung zur Wegerfassung an beweglichen Bauteilen
US11506732B2 (en) * 2010-10-20 2022-11-22 Infineon Technologies Ag XMR sensors with serial segment strip configurations
DE102013000016A1 (de) 2013-01-02 2014-07-03 Meas Deutschland Gmbh Messvorrichtung zum Messen magnetischer Eigenschaften der Umgebung der Messvorrichtung
CN103226865B (zh) * 2013-04-16 2016-05-25 无锡乐尔科技有限公司 一种基于磁电阻技术检测磁性图形表面磁场的磁头
DE102014008676B4 (de) 2014-06-13 2019-07-11 Audi Ag Vorrichtung zur berührungslosen Erfassung einer Phasenlage
DE102014109693A1 (de) * 2014-07-10 2016-01-14 Micronas Gmbh Vorrichtung und Verfahren zur berührungslosen Messung eines Winkels
US9759578B2 (en) 2015-03-12 2017-09-12 International Business Machines Corporation Sensor arrangement for position sensing
DE102015013022A1 (de) 2015-10-09 2017-04-13 Micronas Gmbh Magnetfeldmessvorrichtung
DE102017222677A1 (de) * 2016-12-29 2018-07-05 Robert Bosch Gmbh Sensoreinrichtung
US11332480B2 (en) 2017-04-27 2022-05-17 Pharma Mar, S.A. Antitumoral compounds
US11614501B2 (en) 2021-03-11 2023-03-28 Trustees Of Boston University Single point gradiomeier
JP7444143B2 (ja) * 2021-07-20 2024-03-06 Tdk株式会社 磁気センサ装置
DE102022200055A1 (de) 2022-01-05 2023-07-06 Robert Bosch Gesellschaft mit beschränkter Haftung Magnetsensoreinheit und Magnetsensoranordnung
EP4700333A1 (fr) * 2024-08-21 2026-02-25 Melexis Technologies SA Système, procédé et ensemble de capteur magnétique

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DE4038674A1 (de) 1990-12-04 1992-06-11 Automata Gmbh Ind & Robotic Co Vorrichtung zum bestimmen der absoluten ist-position eines entlang einer vorbestimmten wegstrecke bewegbaren bauteils
JP3514511B2 (ja) 1993-05-27 2004-03-31 ハネウェル・インターナショナル・インコーポレーテッド 磁気センサー
JPH09329462A (ja) 1996-06-10 1997-12-22 Mitsubishi Electric Corp 検出装置
JPH10239338A (ja) * 1997-02-26 1998-09-11 Mitsubishi Electric Corp 検出装置
EP0916074B1 (fr) * 1997-05-29 2003-07-30 AMS International AG Capteur de rotation magnetique
DE10009173A1 (de) * 2000-02-26 2001-09-06 Bosch Gmbh Robert Messvorrichtung zur berührungslosen Erfassung eines ferromagnetischen Gegenstandes
DE10128135A1 (de) 2001-06-09 2002-12-19 Bosch Gmbh Robert Magnetoresistive Schichtanordnung und Gradiometer mit einer derartigen Schichtanordnung
JP4293037B2 (ja) * 2004-04-13 2009-07-08 株式会社デンソー 回転検出装置

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Also Published As

Publication number Publication date
US7548060B2 (en) 2009-06-16
CN1930450A (zh) 2007-03-14
DE102004011809A1 (de) 2005-09-29
WO2005088258A1 (fr) 2005-09-22
US20070290678A1 (en) 2007-12-20
CN100485320C (zh) 2009-05-06

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