EP1783809A3 - Tube à rayons X aux foyer nanometrique - Google Patents

Tube à rayons X aux foyer nanometrique Download PDF

Info

Publication number: EP1783809A3
Authority: EP; European Patent Office
Prior art keywords: target; ray tube; nanofocus; electron beam; carrier
Prior art date: 2005-11-07
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Withdrawn

Application number

EP06022475A

Other languages

German (de)

English (en)

Other versions

EP1783809A2 (fr

Inventor

Alfred Reinhold

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Comet GmbH

Original Assignee

Comet GmbH

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2005-11-07

Filing date

2006-10-27

Publication date

2008-06-18

2006-10-27 Application filed by Comet GmbH filed Critical Comet GmbH

2007-05-09 Publication of EP1783809A2 publication Critical patent/EP1783809A2/fr

2008-06-18 Publication of EP1783809A3 publication Critical patent/EP1783809A3/fr

Status Withdrawn legal-status Critical Current

Links

238000010894 electron beam technology Methods 0.000 abstract 3
239000012876 carrier material Substances 0.000 abstract 2
229910003460 diamond Inorganic materials 0.000 abstract 1
239000010432 diamond Substances 0.000 abstract 1
238000000034 method Methods 0.000 abstract 1
239000002086 nanomaterial Substances 0.000 abstract 1
239000013077 target material Substances 0.000 abstract 1

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/12—Cooling non-rotary anodes
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/112—Non-rotating anodes
- H01J35/116—Transmissive anodes
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/08—Targets (anodes) and X-ray converters
- H01J2235/081—Target material
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/08—Targets (anodes) and X-ray converters
- H01J2235/083—Bonding or fixing with the support or substrate

Landscapes

X-Ray Techniques (AREA)

EP06022475A 2005-11-07 2006-10-27 Tube à rayons X aux foyer nanometrique Withdrawn EP1783809A3 (fr)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
DE102005053386A DE102005053386A1 (de)	2005-11-07	2005-11-07	Nanofocus-Röntgenröhre

Publications (2)

Publication Number	Publication Date
EP1783809A2 EP1783809A2 (fr)	2007-05-09
EP1783809A3 true EP1783809A3 (fr)	2008-06-18

Family

ID=37670694

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP06022475A Withdrawn EP1783809A3 (fr)	2005-11-07	2006-10-27	Tube à rayons X aux foyer nanometrique

Country Status (6)

Country	Link
US (1)	US20080089484A1 (fr)
EP (1)	EP1783809A3 (fr)
JP (1)	JP2007134325A (fr)
KR (1)	KR20070049071A (fr)
CN (1)	CN1971834A (fr)
DE (1)	DE102005053386A1 (fr)

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* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP5687001B2 (ja) *	2009-08-31	2015-03-18	浜松ホトニクス株式会社	Ｘ線発生装置
JP5455880B2 (ja) *	2010-12-10	2014-03-26	キヤノン株式会社	放射線発生管、放射線発生装置ならびに放射線撮影装置
EP2649634B1 (fr) *	2010-12-10	2018-07-04	Canon Kabushiki Kaisha	Appareil de génération de rayonnement et appareil d'imagerie à rayonnement
US8831179B2 (en)	2011-04-21	2014-09-09	Carl Zeiss X-ray Microscopy, Inc.	X-ray source with selective beam repositioning
JP5871529B2 (ja)	2011-08-31	2016-03-01	キヤノン株式会社	透過型ｘ線発生装置及びそれを用いたｘ線撮影装置
JP5901180B2 (ja) *	2011-08-31	2016-04-06	キヤノン株式会社	透過型ｘ線発生装置及びそれを用いたｘ線撮影装置
US20150117599A1 (en)	2013-10-31	2015-04-30	Sigray, Inc.	X-ray interferometric imaging system
CN102610474B (zh) *	2012-03-23	2015-02-25	邓敏	用于x射线管的聚焦型阴极及其x射线源和制备方法
JP6224580B2 (ja) *	2012-05-11	2017-11-01	浜松ホトニクス株式会社	Ｘ線発生装置及びｘ線発生方法
JP6076474B2 (ja)	2012-06-14	2017-02-08	シーメンスアクチエンゲゼルシヤフトＳｉｅｍｅｎｓＡｋｔｉｅｎｇｅｓｅｌｌｓｃｈａｆｔ	Ｘ線源、ｘ線を発生させる方法ならびに単色のｘ線を放射するｘ線源の使用
WO2014050931A1 (fr) *	2012-09-26	2014-04-03	株式会社ニコン	Dispositif à rayons x et procédé de fabrication de structure
CN103413744B (zh) *	2013-07-22	2016-03-09	西北核技术研究所	一种串级式电子束二极管
US9448190B2 (en)	2014-06-06	2016-09-20	Sigray, Inc.	High brightness X-ray absorption spectroscopy system
US9449781B2 (en)	2013-12-05	2016-09-20	Sigray, Inc.	X-ray illuminators with high flux and high flux density
US10297359B2 (en)	2013-09-19	2019-05-21	Sigray, Inc.	X-ray illumination system with multiple target microstructures
US10416099B2 (en)	2013-09-19	2019-09-17	Sigray, Inc.	Method of performing X-ray spectroscopy and X-ray absorption spectrometer system
US9570265B1 (en)	2013-12-05	2017-02-14	Sigray, Inc.	X-ray fluorescence system with high flux and high flux density
US10269528B2 (en)	2013-09-19	2019-04-23	Sigray, Inc.	Diverging X-ray sources using linear accumulation
US10295485B2 (en)	2013-12-05	2019-05-21	Sigray, Inc.	X-ray transmission spectrometer system
US10304580B2 (en)	2013-10-31	2019-05-28	Sigray, Inc.	Talbot X-ray microscope
USRE48612E1 (en)	2013-10-31	2021-06-29	Sigray, Inc.	X-ray interferometric imaging system
US9594036B2 (en)	2014-02-28	2017-03-14	Sigray, Inc.	X-ray surface analysis and measurement apparatus
US9823203B2 (en)	2014-02-28	2017-11-21	Sigray, Inc.	X-ray surface analysis and measurement apparatus
US10401309B2 (en)	2014-05-15	2019-09-03	Sigray, Inc.	X-ray techniques using structured illumination
CN104409304B (zh) *	2014-11-17	2017-01-11	中国科学院电工研究所	一种工业ct机x射线管用透射靶及其制备方法
US10352880B2 (en)	2015-04-29	2019-07-16	Sigray, Inc.	Method and apparatus for x-ray microscopy
US10295486B2 (en)	2015-08-18	2019-05-21	Sigray, Inc.	Detector for X-rays with high spatial and high spectral resolution
US10247683B2 (en)	2016-12-03	2019-04-02	Sigray, Inc.	Material measurement techniques using multiple X-ray micro-beams
EP3428928A1 (fr) *	2017-07-11	2019-01-16	FEI Company	Cibles en forme de lamelle pour la génération de rayons x
US10578566B2 (en)	2018-04-03	2020-03-03	Sigray, Inc.	X-ray emission spectrometer system
US10845491B2 (en)	2018-06-04	2020-11-24	Sigray, Inc.	Energy-resolving x-ray detection system
GB2591630B (en)	2018-07-26	2023-05-24	Sigray Inc	High brightness x-ray reflection source
US10656105B2 (en)	2018-08-06	2020-05-19	Sigray, Inc.	Talbot-lau x-ray source and interferometric system
WO2020051061A1 (fr)	2018-09-04	2020-03-12	Sigray, Inc.	Système et procédé pour fluorescence à rayon x avec filtration
WO2020051221A2 (fr)	2018-09-07	2020-03-12	Sigray, Inc.	Système et procédé d'analyse de rayons x sélectionnable en profondeur
CN109585244B (zh) *	2018-10-23	2021-09-14	中国科学院电工研究所	高功率密度的电子束聚焦装置
WO2020122257A1 (fr) *	2018-12-14	2020-06-18	株式会社堀場製作所	Tube à rayons x et détecteur de rayons x
WO2021011209A1 (fr)	2019-07-15	2021-01-21	Sigray, Inc.	Source de rayons x avec anode tournante à pression atmosphérique
DE112023000574B4 (de)	2022-01-13	2026-02-26	Sigray, Inc.	Mikrofokus-röntgenquelle zur erzeugung von röntgenstrahlen mit hohem fluss und niedriger energie
WO2023168204A1 (fr)	2022-03-02	2023-09-07	Sigray, Inc.	Système de fluorescence à rayons x et source de rayons x avec matériau cible électriquement isolant
US12181423B1 (en)	2023-09-07	2024-12-31	Sigray, Inc.	Secondary image removal using high resolution x-ray transmission sources

Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
WO2000057449A1 (fr) *	1999-03-23	2000-09-28	Medtronic Ave Inc.	Dispositif a rayons x et son procede de fabrication
WO2003081631A1 (fr) *	2002-03-26	2003-10-02	Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.	Source de rayons x ayant un foyer de petite taille

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5148462A (en) *	1991-04-08	1992-09-15	Moltech Corporation	High efficiency X-ray anode sources
US5509046A (en) *	1994-09-06	1996-04-16	Regents Of The University Of California	Cooled window for X-rays or charged particles
DE19509516C1 (de) *	1995-03-20	1996-09-26	Medixtec Gmbh Medizinische Ger	Mikrofokus-Röntgeneinrichtung
JP2001035428A (ja) *	1999-07-22	2001-02-09	Shimadzu Corp	Ｘ線発生装置
GB2385708B (en) *	2000-09-07	2004-11-17	Radi Medical Technologies Ab	X-ray tube electrodes

2005
- 2005-11-07 DE DE102005053386A patent/DE102005053386A1/de not_active Withdrawn
2006
- 2006-10-27 EP EP06022475A patent/EP1783809A3/fr not_active Withdrawn
- 2006-11-01 JP JP2006297364A patent/JP2007134325A/ja not_active Withdrawn
- 2006-11-06 KR KR1020060108682A patent/KR20070049071A/ko not_active Withdrawn
- 2006-11-07 CN CNA2006101484303A patent/CN1971834A/zh active Pending
- 2006-11-07 US US11/593,636 patent/US20080089484A1/en not_active Abandoned

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
WO2000057449A1 (fr) *	1999-03-23	2000-09-28	Medtronic Ave Inc.	Dispositif a rayons x et son procede de fabrication
WO2003081631A1 (fr) *	2002-03-26	2003-10-02	Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.	Source de rayons x ayant un foyer de petite taille

Also Published As

Publication number	Publication date
US20080089484A1 (en)	2008-04-17
EP1783809A2 (fr)	2007-05-09
JP2007134325A (ja)	2007-05-31
CN1971834A (zh)	2007-05-30
DE102005053386A1 (de)	2007-05-16
KR20070049071A (ko)	2007-05-10

Legal Events

Date	Code	Title	Description
2007-04-06	PUAI	Public reference made under article 153(3) epc to a published international application that has entered the european phase	Free format text: ORIGINAL CODE: 0009012
2007-05-09	AK	Designated contracting states	Kind code of ref document: A2 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
2007-05-09	AX	Request for extension of the european patent	Extension state: AL BA HR MK YU
2008-05-16	PUAL	Search report despatched	Free format text: ORIGINAL CODE: 0009013
2008-06-18	AK	Designated contracting states	Kind code of ref document: A3 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
2008-06-18	AX	Request for extension of the european patent	Extension state: AL BA HR MK RS
2009-02-25	AKX	Designation fees paid
2009-05-08	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN
2009-06-10	18D	Application deemed to be withdrawn	Effective date: 20081219
2009-07-23	REG	Reference to a national code	Ref country code: DE Ref legal event code: 8566

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