EP1837722A3 - Pièce de micro-mécanique en matériau isolant et son procédé de fabrication - Google Patents

Pièce de micro-mécanique en matériau isolant et son procédé de fabrication Download PDF

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Publication number
EP1837722A3
EP1837722A3 EP07104385A EP07104385A EP1837722A3 EP 1837722 A3 EP1837722 A3 EP 1837722A3 EP 07104385 A EP07104385 A EP 07104385A EP 07104385 A EP07104385 A EP 07104385A EP 1837722 A3 EP1837722 A3 EP 1837722A3
Authority
EP
European Patent Office
Prior art keywords
micro
manufacture
thermal material
mechanical piece
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP07104385A
Other languages
German (de)
English (en)
Other versions
EP1837722B1 (fr
EP1837722A2 (fr
Inventor
Thierry Conus
Marc Lippuner
Philippe Marmy
Benjamin Krähenbühl
Michael Reber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ETA SA Manufacture Horlogere Suisse
Original Assignee
ETA SA Manufacture Horlogere Suisse
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from EP06111727A external-priority patent/EP1837721A1/fr
Priority claimed from CH00595/06A external-priority patent/CH707669B1/fr
Application filed by ETA SA Manufacture Horlogere Suisse filed Critical ETA SA Manufacture Horlogere Suisse
Priority to EP07104385.5A priority Critical patent/EP1837722B1/fr
Publication of EP1837722A2 publication Critical patent/EP1837722A2/fr
Publication of EP1837722A3 publication Critical patent/EP1837722A3/fr
Application granted granted Critical
Publication of EP1837722B1 publication Critical patent/EP1837722B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B15/00—Escapements
    • G04B15/14—Component parts or constructional details, e.g. construction of the lever or the escape wheel
    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B17/00—Mechanisms for stabilising frequency
    • G04B17/04—Oscillators acting by spring tension
    • G04B17/06—Oscillators with hairsprings, e.g. balance
    • G04B17/063—Balance construction
    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B17/00—Mechanisms for stabilising frequency
    • G04B17/04—Oscillators acting by spring tension
    • G04B17/06—Oscillators with hairsprings, e.g. balance
    • G04B17/066—Manufacture of the spiral spring

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Micromachines (AREA)

Abstract

Une pièce de micro-mécanique en matériau isolant, tel qu'un spiral (1) en silicium de mouvement horloger à tendance à coller à une pièce voisine lorsqu'il est en mouvement, tel que le coq (9) comme représenté dans la partie gauche de la figure. Cet inconvénient est éliminé, comme représenté dans la partie droite de la figure, en effectuant sur tout ou partie de la surface un faible dépôt d'une couche d'un matériau conducteur tel qu'un métal, de préférence inoxydable et amagnétique, tel que de l'or, du platine du rhodium ou du silicium.
EP07104385.5A 2006-03-24 2007-03-19 Pièce de micro-mécanique en matériau isolant et son procédé de fabrication Active EP1837722B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP07104385.5A EP1837722B1 (fr) 2006-03-24 2007-03-19 Pièce de micro-mécanique en matériau isolant et son procédé de fabrication

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP06111727A EP1837721A1 (fr) 2006-03-24 2006-03-24 Pièce de micro-mécanique en matériau isolant et son procédé de fabrication
CH00595/06A CH707669B1 (fr) 2006-04-10 2006-04-10 Pièce de micro-mécanique en matériau électriquement isolant ou en silicium ou un de ses composés et son procédé de fabrication.
EP07104385.5A EP1837722B1 (fr) 2006-03-24 2007-03-19 Pièce de micro-mécanique en matériau isolant et son procédé de fabrication

Publications (3)

Publication Number Publication Date
EP1837722A2 EP1837722A2 (fr) 2007-09-26
EP1837722A3 true EP1837722A3 (fr) 2008-06-04
EP1837722B1 EP1837722B1 (fr) 2016-02-24

Family

ID=38442240

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07104385.5A Active EP1837722B1 (fr) 2006-03-24 2007-03-19 Pièce de micro-mécanique en matériau isolant et son procédé de fabrication

Country Status (1)

Country Link
EP (1) EP1837722B1 (fr)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008029429A1 (de) * 2007-10-18 2009-04-23 Konrad Damasko Verfahren zum Herstellen von mechanischen Funktionselementen für Uhrwerke sowie nach diesem Verfahren hergestelltes Funktionselement
DE602007013123D1 (de) * 2007-11-28 2011-04-21 Manuf Et Fabrique De Montres Et De Chronometres Ulysse Nardin Le Locle S A Mechanischer oszillator mit einem optimierten thermoelastischen koeffizienten
EP2104008A1 (fr) 2008-03-20 2009-09-23 Nivarox-FAR S.A. Organe régulateur monobloc et son procédé de fabrication
ATE474250T1 (de) 2008-03-20 2010-07-15 Nivarox Sa Monoblock-doppelspirale und ihr herstellungsverfahren
EP2104005A1 (fr) 2008-03-20 2009-09-23 Nivarox-FAR S.A. Balancier composite et son procédé de fabrication
EP2104007A1 (fr) 2008-03-20 2009-09-23 Nivarox-FAR S.A. Spiral monobloc en matériau à base de silicium et son procédé de fabrication
EP2105807B1 (fr) 2008-03-28 2015-12-02 Montres Breguet SA Spiral à élévation de courbe monobloc et son procédé de fabrication
EP2184653A1 (fr) * 2008-11-06 2010-05-12 Montres Breguet S.A. Spiral à élévation de courbe en matériau micro-usinable
US10324419B2 (en) 2009-02-06 2019-06-18 Domasko GmbH Mechanical oscillating system for a clock and functional element for a clock
EP3101484A1 (fr) * 2009-02-06 2016-12-07 DAMASKO GmbH Systeme oscillant mecanique pour montres et procede de fabrication d'un systeme oscillant mecanique pour montres
CH703172B1 (fr) 2010-05-18 2014-11-14 Montres Breguet Sa Spiral à élévation de courbe en silicium.
KR20150082572A (ko) 2012-11-16 2015-07-15 니바록스-파 에스.에이. 기후 변화에 대한 민감성이 저하된 공진기
EP2781968A1 (fr) 2013-03-19 2014-09-24 Nivarox-FAR S.A. Résonateur moins sensible aux variations climatiques
HK1209578A2 (en) 2015-02-17 2016-04-01 Master Dynamic Limited Silicon hairspring
CN107615182B (zh) 2015-06-15 2020-02-07 西铁城时计株式会社 时钟的调速装置
EP3534222B1 (fr) * 2018-03-01 2025-11-05 Rolex Sa Procédé de réalisation d'un oscillateur thermo-compensé
EP3742237B1 (fr) 2019-05-23 2024-10-16 Nivarox-FAR S.A. Composant notamment horloger avec une topologie de surface et son procede de fabrication
FI3859449T3 (fi) * 2020-01-30 2026-03-13 Eta Sa Mft Horlogere Suisse Kierukkajousikäyttönauha

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0732635A1 (fr) * 1995-03-17 1996-09-18 C.S.E.M. Centre Suisse D'electronique Et De Microtechnique Sa Pièce de micro-mécanique et procédé de réalisation
WO1999036941A2 (fr) * 1998-01-15 1999-07-22 Cornell Research Foundation, Inc. Isolation en tranchee pour dispositifs micromecaniques
US20020171150A1 (en) * 2000-11-09 2002-11-21 Joachim Rudhard Method for producing a micromechanical structure and a micromechanical structure
WO2004020329A1 (fr) * 2002-08-30 2004-03-11 Samsung Electronics Co., Ltd. Actionneur a peignes pour systeme microelectromecanique et procede de fabrication dudit actionneur
WO2004029733A2 (fr) * 2002-09-25 2004-04-08 Fore Eagle Co Ltd Pieces mecaniques
EP1422436A1 (fr) * 2002-11-25 2004-05-26 CSEM Centre Suisse d'Electronique et de Microtechnique SA Ressort spiral de montre et son procédé de fabrication

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1171806B1 (fr) * 1999-04-21 2016-08-10 Richemont International S.A. Mouvement d'horlogerie comprenant un microgenerateur et procede de controle pour mouvements d'horlogerie
EP1482282B1 (fr) * 2002-03-04 2008-01-16 Citizen Holdings Co., Ltd. Chronometre electrique

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0732635A1 (fr) * 1995-03-17 1996-09-18 C.S.E.M. Centre Suisse D'electronique Et De Microtechnique Sa Pièce de micro-mécanique et procédé de réalisation
WO1999036941A2 (fr) * 1998-01-15 1999-07-22 Cornell Research Foundation, Inc. Isolation en tranchee pour dispositifs micromecaniques
US20020171150A1 (en) * 2000-11-09 2002-11-21 Joachim Rudhard Method for producing a micromechanical structure and a micromechanical structure
WO2004020329A1 (fr) * 2002-08-30 2004-03-11 Samsung Electronics Co., Ltd. Actionneur a peignes pour systeme microelectromecanique et procede de fabrication dudit actionneur
WO2004029733A2 (fr) * 2002-09-25 2004-04-08 Fore Eagle Co Ltd Pieces mecaniques
EP1422436A1 (fr) * 2002-11-25 2004-05-26 CSEM Centre Suisse d'Electronique et de Microtechnique SA Ressort spiral de montre et son procédé de fabrication

Also Published As

Publication number Publication date
EP1837722B1 (fr) 2016-02-24
EP1837722A2 (fr) 2007-09-26

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