EP1888812A1 - Procede pour ameliorer les proprietes barriere de couches barriere ceramiques - Google Patents

Procede pour ameliorer les proprietes barriere de couches barriere ceramiques

Info

Publication number
EP1888812A1
EP1888812A1 EP06723683A EP06723683A EP1888812A1 EP 1888812 A1 EP1888812 A1 EP 1888812A1 EP 06723683 A EP06723683 A EP 06723683A EP 06723683 A EP06723683 A EP 06723683A EP 1888812 A1 EP1888812 A1 EP 1888812A1
Authority
EP
European Patent Office
Prior art keywords
ceramic
barrier
layer
phps
improving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06723683A
Other languages
German (de)
English (en)
Inventor
Manfred Hoffmann
Wolfgang Lohwasser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3A Composites International AG
Original Assignee
Alcan Technology and Management Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcan Technology and Management Ltd filed Critical Alcan Technology and Management Ltd
Publication of EP1888812A1 publication Critical patent/EP1888812A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1229—Composition of the substrate
    • C23C18/1245—Inorganic substrates other than metallic
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1204—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
    • C23C18/1208—Oxides, e.g. ceramics
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1204—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
    • C23C18/122—Inorganic polymers, e.g. silanes, polysilazanes, polysiloxanes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/14—Decomposition by irradiation, e.g. photolysis, particle radiation or by mixed irradiation sources
    • C23C18/143—Radiation by light, e.g. photolysis or pyrolysis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/02—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by baking
    • B05D3/0254—After-treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/06—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation
    • B05D3/061—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation using U.V.
    • B05D3/065—After-treatment
    • B05D3/067—Curing or cross-linking the coating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/02—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to macromolecular substances, e.g. rubber
    • B05D7/04—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to macromolecular substances, e.g. rubber to surfaces of films or sheets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/50—Multilayers
    • B05D7/52—Two layers

Definitions

  • the invention relates to a method for improving the fürtr ⁇ ttssperrwir- effect for water vapor and gases in a flexible carrier material having at least one barrier layer of ceramic material.
  • Barrier layers of metals or of inorganic or ceramic materials are known and are deposited on plastic films, in particular for packaging applications, using methods of the vacuum thin-film technique.
  • Lacquers known for this purpose are the or- cocer or, for example, also the coating systems described in OS-A-5 645 923, which lead to an improvement of the barrier effect up to a factor of 10. Due to their organic components, these lacquers can not completely prevent the permeability through a pore, but only reduce it, since they themselves are permeable to most gases, in particular to water vapor.
  • multi-layer structures which have been produced by alternating coating by means of PVD or plasma CVD technology with an inorganic barrier layer and a subsequently to be cured liquid lacquer layer have been investigated for some years.
  • the liquid coating layers have the task to cover each of the defects of the vacuum coating and so again to provide a perfect surface as possible for the following vacuum coating available.
  • the lacquer layer should be applied as thin as possible and even have the lowest possible permeability, so that by the lacquer layer and the above-described sealing effect as well as possible.
  • a disadvantage of the prior art is that in order to achieve so-called flexible Ultrabarriere Jardin with a required permeability to water vapor of ⁇ 10 "4 g / (m 2 24 h), as for example for flexible OLED displays or for organic photovoltaic structures be required, the required barriers achieved only by very many (for example 5-10) layer pairs of lacquer layer and ceramic layer and the many coating processes lead to high costs and high reject rates in production.
  • the invention is based on the object of providing a method of the type called to provide a way in which in ceramic barrier layers, the residual permeability to water vapor can be further reduced compared to the methods of the prior art.
  • the ceramic barrier layers are coated with a solution of perhydropolysilazane (PHPS) and subsequently cured to form a silicon oxide layer.
  • PHPS perhydropolysilazane
  • PHPS can be applied to the barrier layers dissolved in an organic solvent.
  • Suitable solvents are for example XyIoI or DBE (dibasic ester) dissolved.
  • DBE is a substance made from a mixture of methyl esters of glutaric, adipic and succinic acids.
  • a solution of max. 10% by volume, preferably max. 3 vol.% PHPS used in organic solvent a solution of max. 10% by volume, preferably max. 3 vol.% PHPS used in organic solvent.
  • the curing of the coating applied to the ceramic layer can be carried out at a suitable temperature of max. 100 0 C are performed.
  • the curing of the coating applied to the ceramic layer can also be effected by irradiation with high-energy UV light.
  • a PHPS solution is applied to each barrier layer prior to deposition of the subsequent barrier layer and cured.
  • the liquid coating according to the invention with a PHPS solution gives an ideal "smoothing layer" for the subsequent ceramic barrier layer.
  • the need for cross-linking of the inorganic Si-O-Si network relatively high temperatures of> 250 ° C, already mild temperatures is formed with the use of perhydropolysilazane of ⁇ 100 0 C, or by UV curing with high-energy UV light, a dense SiO 2 layer.
  • To convert PHPS to SiO 2 water in the form of atmospheric moisture is required, with H 2 and NH 3 subsequently escaping from the layer.
  • the SiO 2 layer thicknesses are in the range of about 500 nm.
  • the flexible carrier material is, for example, a plastic film in the form of a tape, a plastic film or a laminate with a plastic film onto which the deposition of the ceramic barrier layer takes place.
  • the PHPS solution may, for example, be applied by means of smooth or anilox rollers to a tape-shaped plastic film with a ceramic barrier layer deposited thereon.
  • a suitable barrier layer of ceramic material is, for example, a 10 nm to 200 nm thick ceramic layer of Al 2 O 3 or of SiO x produced in a vacuum.
  • the preferred thickness of the ceramic layer of Al 2 O 3 or SiO x is between about 40 and 150 nm.
  • x of the ceramic layer of SiO x is a number between 0.9 and 1.2, in a second preferred variant a number between 1.3 and 2, in particular between 1.5 and 1.8.
  • the ceramic barrier layer (s) is coated with a solution of perhydropolysilazane (PHPS) and subsequently cured to form a silicon oxide layer (SiO x ).
  • PHPS perhydropolysilazane

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Ceramic Engineering (AREA)
  • Laminated Bodies (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

L'invention concerne un procédé pour améliorer un effet barrière d'un matériau de support flexible empêchant le passage de vapeur d'eau et de gaz, ledit matériau présentant au moins une couche barrière constituée d'un matériau céramique. Selon ce procédé, les couches barrière céramiques sont enduites d'une solution de perhydropolysilazane (PHPS) puis durcies en formant une couche d'oxyde de silicium.
EP06723683A 2005-04-11 2006-03-24 Procede pour ameliorer les proprietes barriere de couches barriere ceramiques Withdrawn EP1888812A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH6472005 2005-04-11
PCT/EP2006/002700 WO2006108503A1 (fr) 2005-04-11 2006-03-24 Procede pour ameliorer les proprietes barriere de couches barriere ceramiques

Publications (1)

Publication Number Publication Date
EP1888812A1 true EP1888812A1 (fr) 2008-02-20

Family

ID=36577366

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06723683A Withdrawn EP1888812A1 (fr) 2005-04-11 2006-03-24 Procede pour ameliorer les proprietes barriere de couches barriere ceramiques

Country Status (7)

Country Link
US (1) US20090029056A1 (fr)
EP (1) EP1888812A1 (fr)
JP (1) JP2008536711A (fr)
AU (1) AU2006233551A1 (fr)
CA (1) CA2603736A1 (fr)
MX (1) MX2007011281A (fr)
WO (1) WO2006108503A1 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2600460T3 (es) 2005-05-10 2017-02-09 Intermune, Inc. Derivados de piridona-2-ona como moduladores del sistema de proteína cinasa activada por estrés
EP2174780B8 (fr) 2008-10-10 2012-05-16 Kertala Lizenz AG Structure de carreaux enroulable, procédé de fabrication et utilisation
FR2980394B1 (fr) * 2011-09-26 2013-10-18 Commissariat Energie Atomique Structure multicouche offrant une etancheite aux gaz amelioree
US20140322510A1 (en) * 2011-12-16 2014-10-30 Konica Minolta, Inc. Gas barrier film
WO2013161894A1 (fr) * 2012-04-25 2013-10-31 コニカミノルタ株式会社 Film barrière au gaz, substrat pour dispositif électronique, et dispositif électronique
JP6507523B2 (ja) * 2014-08-22 2019-05-08 コニカミノルタ株式会社 有機エレクトロルミネッセンス素子
CN110950668A (zh) * 2019-12-19 2020-04-03 江西省萍乡市南坑高压电瓷厂 一种高疏水性电瓷的制造方法
US11557499B2 (en) * 2020-10-16 2023-01-17 Applied Materials, Inc. Methods and apparatus for prevention of component cracking using stress relief layer

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0646611B1 (fr) * 1993-09-30 1999-01-27 Toppan Printing Co., Ltd. Matériau stratifié formant barrière à gaz
JP3696939B2 (ja) * 1995-08-11 2005-09-21 東京応化工業株式会社 シリカ系被膜の形成方法
US20010038894A1 (en) * 2000-03-14 2001-11-08 Minoru Komada Gas barrier film
CN1432035A (zh) * 2000-06-06 2003-07-23 陶氏化学公司 用于聚合物与容器的阻隔层
JP5291275B2 (ja) * 2000-07-27 2013-09-18 有限会社コンタミネーション・コントロール・サービス コーティング膜が施された部材及びコーティング膜の製造方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2006108503A1 *

Also Published As

Publication number Publication date
MX2007011281A (es) 2007-11-12
AU2006233551A1 (en) 2006-10-19
CA2603736A1 (fr) 2006-10-19
JP2008536711A (ja) 2008-09-11
WO2006108503A1 (fr) 2006-10-19
US20090029056A1 (en) 2009-01-29

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