EP1889341A2 - Eine laservorrichtung bildender laserdiodenstapel - Google Patents

Eine laservorrichtung bildender laserdiodenstapel

Info

Publication number
EP1889341A2
EP1889341A2 EP06742865A EP06742865A EP1889341A2 EP 1889341 A2 EP1889341 A2 EP 1889341A2 EP 06742865 A EP06742865 A EP 06742865A EP 06742865 A EP06742865 A EP 06742865A EP 1889341 A2 EP1889341 A2 EP 1889341A2
Authority
EP
European Patent Office
Prior art keywords
cooling body
laser
layer
wafers
laser diodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06742865A
Other languages
English (en)
French (fr)
Inventor
Fabrice Monti Di Sopra
Bruno Frei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lasag AG
Original Assignee
Lasag AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lasag AG filed Critical Lasag AG
Priority to EP06742865A priority Critical patent/EP1889341A2/de
Publication of EP1889341A2 publication Critical patent/EP1889341A2/de
Withdrawn legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/40Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4025Array arrangements, e.g. constituted by discrete laser diodes or laser bar
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/02Structural details or components not essential to laser action
    • H01S5/022Mountings; Housings
    • H01S5/0235Method for mounting laser chips
    • H01S5/02355Fixing laser chips on mounts
    • H01S5/02365Fixing laser chips on mounts by clamping
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/02Structural details or components not essential to laser action
    • H01S5/022Mountings; Housings
    • H01S5/0235Method for mounting laser chips
    • H01S5/02355Fixing laser chips on mounts
    • H01S5/0237Fixing laser chips on mounts by soldering
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/02Structural details or components not essential to laser action
    • H01S5/024Arrangements for thermal management
    • H01S5/02407Active cooling, e.g. the laser temperature is controlled by a thermo-electric cooler or water cooling
    • H01S5/02423Liquid cooling, e.g. a liquid cools a mount of the laser
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/40Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4018Lasers electrically in series
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/40Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4025Array arrangements, e.g. constituted by discrete laser diodes or laser bar
    • H01S5/4031Edge-emitting structures

Definitions

  • the invention relates to a laser device formed by a stack of laser diodes each arranged on a wafer formed of an electrically conductive material and a good conductor of heat. These plates provide on the one hand an electrical connection between the laser diodes to allow the passage of an electric supply current and on the other hand to conduct the heat produced by these laser diodes in the direction of a cooling body which evacuates or dissipate the heat of the laser diodes.
  • the invention relates to a quasi-continuous or continuous light wave laser diode stack (QCW or CW laser diode).
  • FIG 1 is shown partially a laser device of the type mentioned above.
  • This device 2 comprises laser diodes 4 in bar form, shown schematically, and metal plates 6 between which the laser diodes are arranged.
  • the plates 6 are provided electrically conductive.
  • the electrical connection between the wafers 6 and the laser diodes 4 is performed in a manner known to those skilled in the art.
  • the latter can be associated with a lower electrically insulating portion and of greater thickness than the material constituting the laser diode.
  • the various elements or layers associated with a laser diode are schematically represented therewith in the form of a bar 4.
  • the arrangement of the wafers 6 and the laser diodes thus allows the passage of an electric current in the direction X. Some heat transmission is also obtained in this direction X via the metal plates 6.
  • the wafers 6 are copper.
  • This cooling body conventionally presents a conduit 12 for a circulation of water. Since the electric current must pass through the diodes in the X direction, it is necessary that the wafers 6 are electrically insulated from one another. To do this, in the prior art of FIG. 1, an electrically insulating ceramic layer 14 is welded to the body 10 by means of a solder forming a film 16.
  • each wafer 6 is welded to the layer 14 also at the same time. 18.
  • the welding of the pads 6 must be carried out in a structured manner, to avoid short circuits between these plates 6. It is therefore necessary to prevent the solder between a wafer 6 and the ceramic layer 14 is in contact with the solder for welding another wafer.
  • the device of the prior art described herein before has several disadvantages.
  • performing a structured weld to attach the wafers to the insulating layer is a complex operation that requires special precautions.
  • a weld defines an interface which forms a brake on the transfer of heat towards the cooling body 10.
  • two solder layers are present on either side of the layer 14 , which decreases the efficiency of the cooling of the laser diodes.
  • each plate is assembled in its lower part to an electrically insulating layer by welding.
  • This insulating layer is flat and has the same dimensions as those of the end of the wafer.
  • Each plate is therefore first welded to a clean insulating layer.
  • each assembly thus formed is welded to the cooling body by means of a solder provided on the cooling body and structured to correspond to the separate zones provided for the plurality of "wafer-insulating layer" assemblies.
  • This last embodiment of the prior art has manufacturing problems.
  • the structured weld defines a precise location for each wafer on the cooling body. This poses a machining problem for the various elements, in particular tolerances for the thickness of the wafers and for the thickness of the diodes. Indeed, variations in these thicknesses cause a problem of alignment of the stack of diodes and platelets with solder areas. But decreasing the tolerances in the machining of wafers and diodes increases the manufacturing price.
  • the thickness of the diodes can vary substantially in the standard assortment of a laser diode manufacturer. It should also be noted that this thickness is not standardized so that it also varies from one supplier to another.
  • a method as described in document US 2004/0082112 thus poses a real problem of assembly.
  • Another problem is that the layer of structured solder must be of low height to remain substantially in the separate areas provided.
  • the tolerance in the machining of the height of the wafers is also critical. If during the prior assembly of the stack of wafers and laser diodes the lower ends of the wafers are arranged in the same geometrical plane to ensure that each plate will rest well on the solder deposited in the corresponding zone on the cooling body during the welding of the wafers to this body, the laser diodes attached to the wafers on the side of their upper ends will not emit in the same emission plane, this which then poses a problem of collimation or focusing of the laser beam generated by the plurality of diodes.
  • An object of the present invention is to solve the aforementioned problems by providing a laser device with a stack of laser diodes that can be manufactured by a reliable industrial process whose implementation is relatively easy.
  • the present invention relates to a laser device formed by a stack of laser diodes each arranged on a wafer formed of an electrically conductive material and having a good thermal conductivity, these wafers being arranged next to each other, two wafers adjacent ones being located on either side of one of the laser diodes.
  • These plates provide on the one hand an electrical connection between the laser diodes which allows the passage of an electric supply current and, on the other hand, to conduct the heat produced by these laser diodes in the direction of a cooling body to which the plates are fixed by means of a fixing material, each plate being provided at its end on the side of said cooling body with an electrically insulating layer forming an interface between, on the one hand, the cooling body and said material fastening and, on the other hand, the wafer.
  • This laser device is characterized in that said electrically insulating layer has a thickness of about 100 microns or greater and said fixing material forms a through layer between said platelets.
  • the electrically insulating layer is a thick layer arranged on the lower face of the end of each wafer located opposite the cooling body.
  • the thickness of the insulating layer is selected so that the fixing material, in particular a solder, can go up a little along the lateral faces of this insulating layer while remaining below the height of the insulating layer.
  • FIG. 1 already described, schematically represents a laser device with a stack of laser diodes according to the prior art;
  • FIG. 2 diagrammatically represents an embodiment of the present invention.
  • FIG. 3 shows in perspective an alternative embodiment of the invention. - AT -
  • the laser device 34 comprises, as in the prior art, pads 6 formed of an electrically conductive material and good heat conductor. Laser diodes 4 are arranged between the plates 6 so as to allow the passage of an electric supply current of these diodes.
  • the number of diodes and platelets may vary, in particular depending on the intended application for the laser devices.
  • the wafers 6 may be entirely of metal or of another metallized material on the surface.
  • the plates 6 are arranged above a cooling body 10 having a conduit 12 for the circulation of a cooling fluid.
  • the plates 6 and the cooling body 10 are made for example of copper. Other materials that are good conductors of heat are obviously conceivable.
  • the wafers 6 are formed of an electrically conductive material with good thermal conductivity to allow evacuation of the heat produced by the laser diodes towards the cooling body 10.
  • the wafers are attached at their lower end to the body of the cooling by means of a fixing material 26 selected so as to conduct the heat sufficiently.
  • the fastening material 26 is also an electrical conductor.
  • Each plate 6 has at its lower end, that is to say at the end fixed to the cooling body 10, an electrically insulating layer 38 which is arranged to form an interface between, on the one hand, the body 10 and the fixing material 26 and, on the other hand, the wafer 6 considered.
  • the fastening material is a solder.
  • each plate 6 has at its lower end 24 located opposite the cooling body 10 a relatively thick layer of electrically insulating material.
  • the thickness H1 of the insulating layer 38 is about 100 microns. Given the thickness of this layer 38, a material having a good thermal conductivity will be selected. In the context of the present invention, a thickness H1 greater than 100 microns is preferred.
  • the brazing layer covers the underside of the layer 38 and also rises a little along the lateral faces of this layer 38, so as not to rise above the height H1 of the thick layer 38.
  • the solder layer 26 has about a height H2 less than the height H1 from the lower surface of the insulating layer 38.
  • the insulating layer 38 on the lower end 24 of each of the wafers defines an insulating block which is fixed to the cooling body by a fixing material preferably having a good thermal conductivity.
  • the solder 26 forms a relatively thick through layer. It is thus possible to deposit solder necessary for welding the wafers on the cooling body so as to form a continuous layer, that is to say unstructured, and the wafers are then made to be welded. It is also conceivable to provide the solder 26 once the plates 6 are arranged facing the body 10. All welding methods known to those skilled in the art are available to optimize the method of fixing the wafers 6 to 10.
  • FIG 3 partially shows a variant of the laser device of Figure 2 which highlights the advantages of the present invention.
  • the wafers 6 have varying lengths. However, thanks to the thick insulating layer, for example between 150 and 250 microns, and a continuous solder layer 26 which is also thick, for example between 200 and 300 microns, it is ensured that each insulating layer is correctly coated with solder on its lower face.
  • the stack of wafers and diodes is made so that the diodes emit substantially in one and the same transmission plane.
  • the machining tolerance on the height of the pads is therefore reported from the side of the weld to the cooling body.
  • the average height H of penetration of the insulating layers 38 in the solder 26 is in this example approximately equal to half the thickness of this insulating layer.
  • the thickness W of the plates 6 and the thickness D of the diodes 4 can vary without causing any problem for welding to the cooling body.

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Semiconductor Lasers (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
EP06742865A 2005-05-13 2006-05-10 Eine laservorrichtung bildender laserdiodenstapel Withdrawn EP1889341A2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP06742865A EP1889341A2 (de) 2005-05-13 2006-05-10 Eine laservorrichtung bildender laserdiodenstapel

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP05010406 2005-05-13
EP06742865A EP1889341A2 (de) 2005-05-13 2006-05-10 Eine laservorrichtung bildender laserdiodenstapel
PCT/EP2006/004389 WO2006122691A2 (fr) 2005-05-13 2006-05-10 Dispositif laser forme par un empilement de diodes laser

Publications (1)

Publication Number Publication Date
EP1889341A2 true EP1889341A2 (de) 2008-02-20

Family

ID=35159808

Family Applications (2)

Application Number Title Priority Date Filing Date
EP06742866A Withdrawn EP1889342A2 (de) 2005-05-13 2006-05-10 Eine laservorrichtung bildender laserdiodenstapel
EP06742865A Withdrawn EP1889341A2 (de) 2005-05-13 2006-05-10 Eine laservorrichtung bildender laserdiodenstapel

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP06742866A Withdrawn EP1889342A2 (de) 2005-05-13 2006-05-10 Eine laservorrichtung bildender laserdiodenstapel

Country Status (3)

Country Link
US (1) US7848371B2 (de)
EP (2) EP1889342A2 (de)
WO (2) WO2006122691A2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105470810B (zh) * 2015-12-15 2019-01-08 西安炬光科技股份有限公司 一种宏通道液冷高功率半导体激光器模块和装置
CN105790062B (zh) * 2016-03-22 2019-02-26 西安炬光科技股份有限公司 一种基于各向异性衬底的半导体激光器
CN105790063B (zh) * 2016-03-22 2019-01-08 西安炬光科技股份有限公司 一种应用于半导体激光器的衬底
DE102024122877A1 (de) * 2024-08-09 2026-02-12 Laserline Gesellschaft für Entwicklung und Vertrieb von Diodenlasern mbH Diodenlaseranordnung

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5099488A (en) * 1991-03-27 1992-03-24 Spectra Diode Laboratories, Inc. Ribbed submounts for two dimensional stacked laser array
US5394426A (en) 1992-11-13 1995-02-28 Hughes Aircraft Company Diode laser bar assembly
US5305344A (en) * 1993-04-29 1994-04-19 Opto Power Corporation Laser diode array
US5764675A (en) * 1994-06-30 1998-06-09 Juhala; Roland E. Diode laser array
US5898211A (en) * 1996-04-30 1999-04-27 Cutting Edge Optronics, Inc. Laser diode package with heat sink
RU2117371C1 (ru) * 1996-09-30 1998-08-10 Акционерное общество закрытого типа "Энергомаштехника" Матрица лазерных диодов
US5848083A (en) * 1996-10-24 1998-12-08 Sdl, Inc. Expansion-matched high-thermal-conductivity stress-relieved mounting modules
US5923692A (en) * 1996-10-24 1999-07-13 Sdl, Inc. No wire bond plate (NWBP) packaging architecture for two dimensional stacked diode laser arrays
US6636538B1 (en) * 1999-03-29 2003-10-21 Cutting Edge Optronics, Inc. Laser diode packaging
US6700913B2 (en) * 2001-05-29 2004-03-02 Northrop Grumman Corporation Low cost high integrity diode laser array

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2006122691A2 *

Also Published As

Publication number Publication date
WO2006122691A2 (fr) 2006-11-23
WO2006122692A2 (fr) 2006-11-23
EP1889342A2 (de) 2008-02-20
US20080310469A1 (en) 2008-12-18
WO2006122692A3 (fr) 2007-04-19
WO2006122691A3 (fr) 2007-04-19
US7848371B2 (en) 2010-12-07

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