EP1903157A2 - Dispositif de protection contre les bruits ambiants - Google Patents

Dispositif de protection contre les bruits ambiants Download PDF

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Publication number
EP1903157A2
EP1903157A2 EP06022659A EP06022659A EP1903157A2 EP 1903157 A2 EP1903157 A2 EP 1903157A2 EP 06022659 A EP06022659 A EP 06022659A EP 06022659 A EP06022659 A EP 06022659A EP 1903157 A2 EP1903157 A2 EP 1903157A2
Authority
EP
European Patent Office
Prior art keywords
housing
environmental noise
noise shielding
cooling element
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06022659A
Other languages
German (de)
English (en)
Other versions
EP1903157A3 (fr
Inventor
Peter Heiland
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Integrated Dynamics Engineering GmbH
Original Assignee
Integrated Dynamics Engineering GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Integrated Dynamics Engineering GmbH filed Critical Integrated Dynamics Engineering GmbH
Priority to EP06022659A priority Critical patent/EP1903157A3/fr
Priority to US11/855,057 priority patent/US10513846B2/en
Priority to JP2007241707A priority patent/JP4680970B2/ja
Publication of EP1903157A2 publication Critical patent/EP1903157A2/fr
Publication of EP1903157A3 publication Critical patent/EP1903157A3/fr
Withdrawn legal-status Critical Current

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Classifications

    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
    • E04B1/00—Constructions in general; Structures which are not restricted either to walls, e.g. partitions, or floors or ceilings or roofs
    • E04B1/62—Insulation or other protection; Elements or use of specified material therefor
    • E04B1/74—Heat, sound or noise insulation, absorption, or reflection; Other building methods affording favourable thermal or acoustical conditions, e.g. accumulating of heat within walls
    • E04B1/82—Heat, sound or noise insulation, absorption, or reflection; Other building methods affording favourable thermal or acoustical conditions, e.g. accumulating of heat within walls specifically with respect to sound only
    • E04B1/8218—Heat, sound or noise insulation, absorption, or reflection; Other building methods affording favourable thermal or acoustical conditions, e.g. accumulating of heat within walls specifically with respect to sound only soundproof enclosures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/24—Means for preventing or suppressing noise

Definitions

  • the invention relates to an environmental noise shielding device and a method for shielding a device from environmental noise.
  • acoustic shielding of sensitive devices In practice, devices for acoustic shielding of sensitive devices are known. Especially in the semiconductor industry so-called acoustic hoods are used to shield sensitive inspection machines.
  • Such a sound-absorbing housing usually acts at the same time also insulating against heat. Therefore, especially when a device is introduced into the housing, which produces waste heat, it can lead to significant temperature increases of the interior of the housing. Such a temperature increase is undesirable in many cases.
  • the interior of the soundproof hood has substantially the same temperature as the outdoor area, so that, for example, wafers, which are introduced into the interior, are not subject to temperature fluctuations.
  • vents are constructed sound absorbing in a special way, usually still a passage opening is created for sound, whereby the soundproofing effect of the housing is reduced.
  • the invention is based on the object to provide a device for protecting a sensitive device from environmental noise, in which the mentioned disadvantages of the prior art are reduced.
  • object of the invention to provide a device with which the soundproofing effect is improved.
  • Another object of the invention to provide a soundproofing device, wherein the internal temperature can be maintained at the level of the outside temperature.
  • the object of the invention is already achieved by a Scholärmabtubvorraum and by a method for shielding a device from ambient sound according to one of the independent claims.
  • an environmental noise shielding device which includes a housing defining a space for housing an insulating device.
  • An ambient noise shielding device is understood to mean a device in which a device to be insulated can be arranged, and in which the volume is reduced by the housing of the device, the sound level is therefore lower in the space for receiving a device to be insulated than in the environment.
  • At least one cooling element is arranged in the space.
  • a cooling element is understood to be any device with which the space for receiving the device to be insulated can be cooled.
  • the cooling element is coupled in a preferred embodiment of the invention with at least one supply device, which is arranged outside of the device.
  • the supply device is preferably substantially decoupled from the housing, that is to say vibrations of the supply device are not transmitted to the housing of the device to be insulated.
  • compressor cooling elements for cooling, for example, compressor cooling elements, Peltier elements or cooling coil circuits may be used, which may be attached to one or more locations of the inner wall of the housing or may be part of the walls or ceilings.
  • the choice of the cooling element depends primarily on the requirements of the cooling capacity. Since the waste heat, in particular of inspection devices in the semiconductor industry, is often quite small, Peltier elements or cooling coil circuits in which the heat is dissipated via a fluid, in particular water, are sufficient for many applications. For applications with higher cooling capacity, a refrigerant compressor can also be used.
  • the cooling element in the housing of the environmental noise shielding device is preferably designed to produce a sound level of less than 30 dB, preferably less than 20 dB, and more preferably less than 15 dB.
  • cooling elements are used which generate little, preferably no noise inside the housing.
  • cooling elements are used which even emit no measurable sound level in the housing. This is easy to realize, especially with cooling coils.
  • a supply means arranged outside the environmental noise shielding apparatus for example, a heat exchanger, can emit sound without appreciably affecting the sound level in the environmental noise shielding apparatus.
  • a supply device arranged outside the ambient noise shielding device is shown in FIG In many cases not necessary and therefore can be omitted.
  • the one or more cooling elements are preferably integrated in the wall or ceiling of the housing, in particular it is provided to accommodate a cooling element substantially in the ceiling of the housing.
  • a temperature sensor is arranged in the space, which is designed to control a supply device for refrigerant.
  • the temperature can be kept constant inside the housing.
  • a further temperature sensor is arranged outside the room, with which the temperature outside the housing can be measured.
  • the temperature of the room in the housing can be adapted to the outside temperature. Temperature fluctuations when moving sensitive devices or components to be examined in the ambient noise shield largely avoided.
  • the environmental noise screening device has at least one opening flap which, as provided in a preferred embodiment of the invention, can be actuated automatically.
  • the environmental noise shielding device can be integrated in an automatic transport system in which, for example, samples to be examined are brought into the housing of the environmental noise shielding device via an automation device.
  • the space of the environmental noise shielding device is preferably substantially fluid-tight lockable.
  • the sound-insulating effect is increased and it is a more accurate temperature control possible.
  • the space preferably occupies between 0.2 and 7 and more preferably between 0.5 and 1.5 m 3 of space.
  • the Schalldämmconnect is at a frequency of 250 Hz over 3 dB, preferably above 8 dB and more preferably above 30 dB.
  • the sound reduction index is more than 15 dB, preferably more than 30 dB and particularly preferably more than 50 dB.
  • the invention further relates to a vibration isolation system comprising an environmental noise shielding device according to the invention.
  • the ambient noise shielding device is preferably mounted vibration-isolated, in particular it is provided to arrange the Processdärmabtubvortechnisch on a vibration-isolated plate.
  • the invention relates to a method for shielding a device from ambient sound, wherein a device to be shielded is introduced into a housing, the housing is closed and a cooling device arranged in the housing is controlled by a sensor also arranged in the housing.
  • the temperature in the housing is adapted outside the housing via a further sensor, which is arranged outside the housing.
  • the environmental noise shielding device 1 has a housing 2 to be insulated, which defines a space 3 for receiving a device 4 to be insulated.
  • a cooling element 5 is arranged, which is connected via a flexible supply line 7 with a supply device 6, designed here as a refrigerant compressor. Via the supply device 6, the cooling element 5 is cooled and so the space 3, within which the device to be insulated is arranged, cooled.
  • FIG. 2 shows an alternative embodiment of an environmental noise shielding device 1, in which a temperature sensor 8 is arranged in the housing 2.
  • the temperature sensor 8 is located in the vicinity of the device 4 to be insulated.
  • the temperature sensor 8 is connected to a control device 9, which controls the supply device 6. About the control device 9, the temperature of the space 3 can be kept substantially constant.
  • the housing 2 of the environmental noise shielding device 1 is provided with a Sample transport device 10 is coupled.
  • samples (not shown) can be introduced into the space 3 of the environmental noise shielding device 1 via an automatic door 11 and fed to the device 4 to be insulated.
  • a sensor 8 is arranged, which is connected to a control device 9.
  • Another sensor 12 is disposed outside of the housing 2. About this sensor 12, the outside temperature is measured.
  • the control device 9 controls the supply device, which is connected to the cooling element 5.
  • the control device 9 is designed such that it adjusts the temperature in the space 3 of the ambient noise shielding device 1 of the outside temperature, which is measured with the sensor 12.
  • the housing 2 has a flap 13, which is struck by gas springs 14 on the housing 2. Via the flap 13, the space 3 of the housing 2 can be closed substantially airtight.
  • Fig. 5 shows another view of the housing 2 of the environmental noise shielding device 1.
  • detachable handles 15 are attached, with which the environmental noise shielding device can be carried.
  • the environmental noise shielding device 1 has a receptacle 24 for lifting, for example by means of a forklift. Also, the receptacle 24 is removable.
  • Fig. 6 shows a detailed view of the area A of Fig. 5.
  • the housing walls are designed as a multilayer composite material.
  • the walls have an outer laminate film 16, which is glued to a chipboard 17.
  • Behind the chipboard is an insulation made of mineral wool 18.
  • a sound insulation mat 19 is glued to a further chipboard 20.
  • the sound insulation mat 19 is filled with steel shot.
  • On the other chipboard 20, a film 21 is also glued.
  • the wall elements are connected to each other by means of screws 23. Between the individual wall elements are located for noise shielding and fluid-tight design of the housing seals 22, designed here as silicone gaskets.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Architecture (AREA)
  • Acoustics & Sound (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Civil Engineering (AREA)
  • Structural Engineering (AREA)
  • Casings For Electric Apparatus (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
  • Specific Sealing Or Ventilating Devices For Doors And Windows (AREA)
  • Soundproofing, Sound Blocking, And Sound Damping (AREA)
EP06022659A 2006-09-19 2006-10-30 Dispositif de protection contre les bruits ambiants Withdrawn EP1903157A3 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP06022659A EP1903157A3 (fr) 2006-09-19 2006-10-30 Dispositif de protection contre les bruits ambiants
US11/855,057 US10513846B2 (en) 2006-09-19 2007-09-13 Environmental noise shielding apparatus
JP2007241707A JP4680970B2 (ja) 2006-09-19 2007-09-19 環境ノイズ遮蔽装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP06019536 2006-09-19
EP06022659A EP1903157A3 (fr) 2006-09-19 2006-10-30 Dispositif de protection contre les bruits ambiants

Publications (2)

Publication Number Publication Date
EP1903157A2 true EP1903157A2 (fr) 2008-03-26
EP1903157A3 EP1903157A3 (fr) 2008-05-14

Family

ID=38814382

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06022659A Withdrawn EP1903157A3 (fr) 2006-09-19 2006-10-30 Dispositif de protection contre les bruits ambiants

Country Status (3)

Country Link
US (1) US10513846B2 (fr)
EP (1) EP1903157A3 (fr)
JP (1) JP4680970B2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3094566A1 (fr) * 2019-03-29 2020-10-02 Sbs Synovate Dispositif de ventilation pour enceinte acoustique, enceinte acoustique et procédé correspondant

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* Cited by examiner, † Cited by third party
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US9359914B2 (en) * 2014-08-19 2016-06-07 General Electric Company Silencing and cooling assembly with fibrous medium
US9578791B1 (en) * 2015-08-17 2017-02-21 Asia Vital Components Co., Ltd. Internal frame structure with heat isolation effect and electronic apparatus with the internal frame structure
CN112714562B (zh) * 2020-12-08 2022-06-28 浙江吴浙建设有限公司 一种具有隔音性能的建筑动力机电设备

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EP1544873A2 (fr) * 2003-12-19 2005-06-22 Siemens Aktiengesellschaft Dispositif de refroidissement pour supraconducteur

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3094566A1 (fr) * 2019-03-29 2020-10-02 Sbs Synovate Dispositif de ventilation pour enceinte acoustique, enceinte acoustique et procédé correspondant

Also Published As

Publication number Publication date
US20080067000A1 (en) 2008-03-20
EP1903157A3 (fr) 2008-05-14
JP4680970B2 (ja) 2011-05-11
JP2008147621A (ja) 2008-06-26
US10513846B2 (en) 2019-12-24

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