EP1904827A2 - Biosensorstruktur aus photonischem kristall und herstellungsverfahren - Google Patents

Biosensorstruktur aus photonischem kristall und herstellungsverfahren

Info

Publication number
EP1904827A2
EP1904827A2 EP06785860A EP06785860A EP1904827A2 EP 1904827 A2 EP1904827 A2 EP 1904827A2 EP 06785860 A EP06785860 A EP 06785860A EP 06785860 A EP06785860 A EP 06785860A EP 1904827 A2 EP1904827 A2 EP 1904827A2
Authority
EP
European Patent Office
Prior art keywords
sensor
refractive index
porous
nanoporous
specific binding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06785860A
Other languages
English (en)
French (fr)
Inventor
Brian T. Cunningham
Ian Block
Leo Li-Ying Chan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Illinois at Urbana Champaign
University of Illinois System
Original Assignee
University of Illinois at Urbana Champaign
University of Illinois System
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/177,707 external-priority patent/US7521769B2/en
Priority claimed from US11/177,708 external-priority patent/US7479404B2/en
Application filed by University of Illinois at Urbana Champaign, University of Illinois System filed Critical University of Illinois at Urbana Champaign
Publication of EP1904827A2 publication Critical patent/EP1904827A2/de
Withdrawn legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/75Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
    • G01N21/77Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
    • G01N21/7703Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides
    • G01N21/774Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides the reagent being on a grating or periodic structure
    • G01N21/7743Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides the reagent being on a grating or periodic structure the reagent-coated grating coupling light in or out of the waveguide
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00Nanooptics, e.g. quantum optics or photonic crystals
    • CCHEMISTRY; METALLURGY
    • C12BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
    • C12MAPPARATUS FOR ENZYMOLOGY OR MICROBIOLOGY; APPARATUS FOR CULTURING MICROORGANISMS FOR PRODUCING BIOMASS, FOR GROWING CELLS OR FOR OBTAINING FERMENTATION OR METABOLIC PRODUCTS, i.e. BIOREACTORS OR FERMENTERS
    • C12M23/00Constructional details, e.g. recesses, hinges
    • C12M23/20Material Coatings
    • CCHEMISTRY; METALLURGY
    • C12BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
    • C12MAPPARATUS FOR ENZYMOLOGY OR MICROBIOLOGY; APPARATUS FOR CULTURING MICROORGANISMS FOR PRODUCING BIOMASS, FOR GROWING CELLS OR FOR OBTAINING FERMENTATION OR METABOLIC PRODUCTS, i.e. BIOREACTORS OR FERMENTERS
    • C12M41/00Means for regulation, monitoring, measurement or control, e.g. flow regulation
    • C12M41/30Means for regulation, monitoring, measurement or control, e.g. flow regulation of concentration
    • C12M41/36Means for regulation, monitoring, measurement or control, e.g. flow regulation of concentration of biomass, e.g. colony counters or by turbidity measurements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122Basic optical elements, e.g. light-guiding paths
    • G02B6/1225Basic optical elements, e.g. light-guiding paths comprising photonic band-gap structures or photonic lattices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/75Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
    • G01N21/77Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
    • G01N2021/7769Measurement method of reaction-produced change in sensor
    • G01N2021/7776Index

Definitions

  • a grating of a photonic crystal sensor of the invention has a grating period that is small compared to the wavelength of incident light such that no diffractive orders other than the reflected and transmitted zeroth orders are allowed.
  • a photonic crystal sensor can comprise a grating, which is comprised of or coated with a high dielectric constant dielectric material, sandwiched between a substrate layer and a cover layer that fills the grating grooves. Optionally, a cover layer is not used.
  • the grating structure selectively couples light at a narrow band of wavelengths. This highly sensitive coupling condition can produce a resonant grating effect on the reflected radiation spectrum, resulting in a narrow band of reflected or transmitted wavelengths. The depth and period of the grating are less than the wavelength of the resonant grating effect.
  • the reflected or transmitted color of a photonic crystal sensor structure can be modified by the addition of molecules such as specific binding substances or binding partners or both to the upper surface of the cover layer or the grating surface.
  • the added molecules increase the optical path length of incident radiation through the sensor structure, and thus modify the wavelength at which maximum reflectance or transmittance will occur.
  • a low-k nanoporous material is an inorganic, porous, oxide-like low dielectric material, wherein the refractive index, n, is about 1.1 to about 2.2, and preferably about 1.1 to about 1.5.
  • a low-k nanoporous material can be, for example, porous silica xerogels and aerogels (about 1.1- about 2.2); porous HSQ (about 1.7- about 2.2); porous SiLKTM (a B staged polymer) (about 1.5- about 2.0); porous MSQ (about 1.8- about 2.2); porous PAE (about 1.8- about 2.2).
  • the nanoporous material is NANOGLASS®, which is porous SiO 2 . Porosity is created in the SiO 2 thereby reducing the dielectric constant from about 3.9 to as low as 1.9.
  • the PDMS replicas are then used to imprint a thin film of uncured NANOGLASS ⁇ (Honeywell Elec. Mat.), a low-index sol-gel glass, spun-on to a glass substrate. Once the low-index dielectric becomes rigid, the flexible PDMS mold is removed and the sol-gel glass is fully cured by further baking.
  • the sensor structure is completed by evaporating 175nm of TiO 2 onto the patterned surface. A subsequent surface treatment with dimethyldichlorosilane encourages bio-adsorption and promotes sensor stability.
  • a schematic illustrating the cross-section of the device is shown in Figure 7.
  • the polymer devices were provided as an array of sensors aligned and attached to bottomless 96-well standard microtiter plates (SRU Biosystems).
  • the porous glass devices are fabricated on 75mm x 25mm x lmm glass microscope slides.
  • Adhesive rubber wells (Research International Corp.) are attached to the glass surface to provide liquid containment for 5-6 sensors on each slide.
  • FIG. 11 gives a spatial profile of PWV shift versus polymer thickness, where each PWV shift was measured in buffer after the wash step.
  • Each monolayer of polyelectrolyte is approximately 4.4 nm thick and has a refractive index of 1.49. See, e.g., Picart et al., Determination of structural parameters characterizing thin films by optical methods: A comparison between scanning angle reflectometry and optical waveguide lightmode spectroscopy. Journal of Chemical Physics, 2001. 115(2): p. 1086-1094.
  • the porous glass sensor exhibits an average surface sensitivity ⁇ 1.5x that of the polymer sensor.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Wood Science & Technology (AREA)
  • Organic Chemistry (AREA)
  • Zoology (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Nanotechnology (AREA)
  • Genetics & Genomics (AREA)
  • Microbiology (AREA)
  • Sustainable Development (AREA)
  • Biomedical Technology (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Biotechnology (AREA)
  • Immunology (AREA)
  • Biophysics (AREA)
  • Clinical Laboratory Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Plasma & Fusion (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
EP06785860A 2005-07-08 2006-06-29 Biosensorstruktur aus photonischem kristall und herstellungsverfahren Withdrawn EP1904827A2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/177,707 US7521769B2 (en) 2005-07-08 2005-07-08 Photonic crystal biosensor structure and fabrication method
US11/177,708 US7479404B2 (en) 2005-07-08 2005-07-08 Photonic crystal biosensor structure and fabrication method
PCT/US2006/025400 WO2007008440A2 (en) 2005-07-08 2006-06-29 Photonic crystal biosensor fabrication method

Publications (1)

Publication Number Publication Date
EP1904827A2 true EP1904827A2 (de) 2008-04-02

Family

ID=37637689

Family Applications (2)

Application Number Title Priority Date Filing Date
EP06785860A Withdrawn EP1904827A2 (de) 2005-07-08 2006-06-29 Biosensorstruktur aus photonischem kristall und herstellungsverfahren
EP06851538A Withdrawn EP1920235A2 (de) 2005-07-08 2006-06-29 Bionsensor mit photonischer kristallstruktur und herstellungsverfahren

Family Applications After (1)

Application Number Title Priority Date Filing Date
EP06851538A Withdrawn EP1920235A2 (de) 2005-07-08 2006-06-29 Bionsensor mit photonischer kristallstruktur und herstellungsverfahren

Country Status (6)

Country Link
EP (2) EP1904827A2 (de)
JP (2) JP2009510391A (de)
AU (2) AU2006269532B2 (de)
CA (2) CA2614556A1 (de)
NZ (2) NZ565682A (de)
WO (2) WO2008027025A2 (de)

Cited By (4)

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US12174512B2 (en) 2018-12-18 2024-12-24 Interdigital Ce Patent Holdings Device for forming an outgoing electromagnetic wave from an incident electromagnetic wave
US12210155B2 (en) 2018-06-29 2025-01-28 Interdigital Ce Patent Holdings Optical device comprising a multi-layers waveguides
US12214493B2 (en) 2018-12-18 2025-02-04 Interdigital Ce Patent Holdings, Sas Optical manipulation apparatus
US12228756B2 (en) 2018-12-21 2025-02-18 Interdigital Ce Patent Holdings, Sas Optical device

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CN101403742B (zh) * 2008-10-29 2012-05-23 东南大学 利用光电镊对微纳米生物粒子进行介电表征的方法
WO2011044682A1 (en) * 2009-10-16 2011-04-21 Opalux Incorporated Photonic crystal combinatorial sensor
US8437965B2 (en) * 2010-03-01 2013-05-07 Empire Technology Development Llc Sensing chemicals in aqueous environments
JP5149321B2 (ja) * 2010-03-24 2013-02-20 株式会社東芝 電磁場シミュレーション方法、電磁場シミュレーション装置、半導体装置の製造方法
JP2012098272A (ja) * 2010-08-23 2012-05-24 Nsk Ltd 標的物質濃度測定装置および標的物質濃度測定方法
EP2500314A1 (de) 2011-03-14 2012-09-19 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Photonischer Kristallsensor
KR102061533B1 (ko) * 2015-03-13 2020-01-02 롬 앤드 하스 일렉트로닉 머트어리얼즈 엘엘씨 나노구조 물질 방법 및 장치
CN105655719B (zh) * 2016-01-07 2017-11-17 内蒙古科技大学 电磁波透射增强装置
WO2017151582A1 (en) 2016-02-29 2017-09-08 The University Of North Carolina At Chapel Hill Array of micro-elements for high resolution and high content imaging and sorting of cells
WO2018155556A1 (ja) * 2017-02-23 2018-08-30 デンカ株式会社 フォトニック結晶
JP7345782B2 (ja) * 2018-07-31 2023-09-19 積水化学工業株式会社 検査方法、検査用器具及び検査装置
CN120703879A (zh) 2018-10-22 2025-09-26 加州理工学院 基于三维工程材料的彩色多光谱图像传感器
NL2023516B1 (en) 2019-05-28 2020-12-08 Illumina Inc Manufacturing a flowcell with a planar waveguide
EP4031868A1 (de) * 2019-09-17 2022-07-27 F. Hoffmann-La Roche AG Biomolekulare detektionsvorrichtung
CN114556166B (zh) * 2019-10-18 2024-05-28 加州理工学院 具有超材料分色的cmos彩色图像传感器
US12320988B2 (en) 2019-10-18 2025-06-03 California Institute Of Technology Broadband polarization splitting based on volumetric meta-optics
WO2021133109A1 (ko) 2019-12-24 2021-07-01 삼성전자주식회사 센서 디바이스 및 센서 디바이스 제조방법
RU2725011C1 (ru) * 2019-12-24 2020-06-29 Самсунг Электроникс Ко., Лтд. Сенсорное устройство для распознавания смесей летучих соединений и способ его изготовления
JP7264134B2 (ja) * 2020-08-26 2023-04-25 横河電機株式会社 分光分析装置、光学系、及び方法
US20220252779A1 (en) * 2021-02-08 2022-08-11 Applied Materials, Inc. Method for amorphous, high-refractive-index encapsulation of nanoparticle imprint films for optical devices
CN113744767A (zh) * 2021-08-31 2021-12-03 广东工业大学 一种利用dvd光盘制备具有光栅结构二氧化钛薄膜的方法及其制成的薄膜和应用
CN116147766A (zh) * 2022-12-27 2023-05-23 北京工业大学 一种覆盖parylene提升传感芯片灵敏度及重复利用的方法

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US7264973B2 (en) * 2000-10-30 2007-09-04 Sru Biosystems, Inc. Label-free methods for performing assays using a colorimetric resonant optical biosensor
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Cited By (4)

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Publication number Priority date Publication date Assignee Title
US12210155B2 (en) 2018-06-29 2025-01-28 Interdigital Ce Patent Holdings Optical device comprising a multi-layers waveguides
US12174512B2 (en) 2018-12-18 2024-12-24 Interdigital Ce Patent Holdings Device for forming an outgoing electromagnetic wave from an incident electromagnetic wave
US12214493B2 (en) 2018-12-18 2025-02-04 Interdigital Ce Patent Holdings, Sas Optical manipulation apparatus
US12228756B2 (en) 2018-12-21 2025-02-18 Interdigital Ce Patent Holdings, Sas Optical device

Also Published As

Publication number Publication date
JP2009510391A (ja) 2009-03-12
AU2006344709B2 (en) 2012-01-19
CA2614556A1 (en) 2007-01-18
NZ565681A (en) 2009-11-27
AU2006344709A1 (en) 2008-03-06
CA2615417A1 (en) 2007-01-08
AU2006269532B2 (en) 2011-06-30
JP2009520947A (ja) 2009-05-28
WO2007008440A3 (en) 2007-04-05
AU2006269532A1 (en) 2007-01-18
NZ565682A (en) 2009-11-27
WO2008027025A2 (en) 2008-03-06
WO2008027025A3 (en) 2008-05-08
WO2007008440A2 (en) 2007-01-18
EP1920235A2 (de) 2008-05-14

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