EP1936203A2 - Pompe à vide dotée d'un ventilateur - Google Patents

Pompe à vide dotée d'un ventilateur Download PDF

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Publication number
EP1936203A2
EP1936203A2 EP07022564A EP07022564A EP1936203A2 EP 1936203 A2 EP1936203 A2 EP 1936203A2 EP 07022564 A EP07022564 A EP 07022564A EP 07022564 A EP07022564 A EP 07022564A EP 1936203 A2 EP1936203 A2 EP 1936203A2
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
fan
housing
section
motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP07022564A
Other languages
German (de)
English (en)
Other versions
EP1936203B1 (fr
EP1936203A3 (fr
Inventor
Jürgen Metzger
Stefan Sänger
Jürgen Wagner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1936203A2 publication Critical patent/EP1936203A2/fr
Publication of EP1936203A3 publication Critical patent/EP1936203A3/fr
Application granted granted Critical
Publication of EP1936203B1 publication Critical patent/EP1936203B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04Heating; Cooling; Heat insulation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00Application
    • F04C2220/10Vacuum

Definitions

  • the invention relates to a vacuum pump for generating coarse or fine vacuum with a housing which gas inlet and gas outlet, a motor and a fan.
  • the invention also relates to a method of operating a vacuum pump for generating coarse or fine vacuum with a housing having gas inlet and gas outlet, a motor with a motor shaft, and a fan.
  • the amount of gas delivered and thus the cooling effect achieved depends inter alia on the speed of the shaft.
  • the heat balance of the vacuum pump is therefore rigidly coupled to the operation of the electric motor.
  • this is often undesirable and makes compromises among other things in the speed position necessary, which may be necessary from the perspective of vacuum technology, for example, to control a process.
  • the object of the invention is therefore to present a cooling system for a vacuum pump, which avoids the disadvantages of the prior art.
  • the fan has its own fan motor, it is possible to adjust the gas flow generated by it independently of the speed of the motor of the vacuum pump. By the fan motor, it is also possible to place the fan at the most favorable for the heat balance location on the vacuum pump.
  • the cooling can thus be fully aligned with the needs and now represents no compromise between vacuum and cooling requirements.
  • cooling fins in which the fan promotes air. This can be achieved by placing it so that its gas stream blows into the space between the cooling fins.
  • This measure can be improved by a hood surrounding at least a part of the vacuum pump and ensures that the gas flow of the fan is directed into the space between the cooling fins.
  • the fan is arranged in a separate section of the housing of the vacuum pump. This allows the fan to be brought close to the areas of the housing where cooling is needed.
  • control electronics which contains cool electronic components to hold
  • pumping system in which much heat due to the compression of the gas, each arranged in a separate housing section are. This allows a thermal separation of the areas.
  • the vacuum pump can then be designed in a development that the fan flows against that portion of the housing, which includes the pumping system. As a result, the cooling air is used most effectively for cooling.
  • the vacuum pump with sections housing construction can be further developed such that the section with the control electronics is cooled by free convection.
  • the air flow of the fan can be fully exploited for the cooling of the hot sections of the vacuum pump.
  • the last development relates to the pumping system of the vacuum pump.
  • rotary vane pumps With rotary vane pumps, the advantages of independent cooling from the drive are particularly evident. Since a lubricant is used for lubrication and sealing, unfavorable cooling behavior can lead to its destruction.
  • the first figure shows a vacuum pump, which is constructed of four sections and surrounded by a hood 1.
  • This hood is shown in the figure part a) in the disassembled state, while it is mounted in the imaging part b) on the vacuum pump and surrounds a part of the housing of this vacuum pump.
  • the vacuum pump itself rests on a foot 10.
  • the sections of the vacuum pump contain different functional units.
  • the control section 2 contains the control electronics, which processes the mains voltage for the energization of the coils of the drive.
  • a fan 6 is arranged, which sucks in air and promotes in the space between the housing provided on the cooling ribs 8, whereby a cooling effect is achieved.
  • the suction and conveying effect of the fan is illustrated by the dashed arrows.
  • a peripheral section 4 has the gas connections, ie gas inlet 9 and outlet. At the periphery of the foot 10 is also arranged. This has means, such as elastomer body, with which the vibration transmission between the vacuum pump and the ground is reduced.
  • those components are arranged with which the gas is compressed so far that it can be expelled against the atmosphere.
  • These four sections are arranged axially in succession, wherein the Intermediate section between the peripheral section and control section is located. On the opposite side of the intermediate portion of the peripheral portion of the pump portion is provided.
  • the sections of the vacuum pump are at least partially surrounded by the hood 1. It is designed in the example so that it covers the lower part of the vacuum pump. Below here refers to the direction in which the foot of the vacuum pump is mounted. While it is shaped so that the control and intermediate sections are completely concealed, it is less high in the area of the pump section so that it covers only the lower part.
  • cooling fins 8 are provided, which may also be present in the upper part.
  • the hood covers at least a portion of the cooling fins, so that channels are formed, which are limited by hood, housing and cooling fins. It also hides the fan. So that this air can suck in and then convey into the channels, the hood has an opening. In the example, this is designed as a plurality of ventilation slots 7. The number and shape of the air vents may vary depending on the vacuum pump and the gas flow requirements of the fan.
  • FIG. 2 shows in a vertical section through the vacuum pump the structure of control and intermediate section.
  • the control section 2 has a closed housing which has cooling fins 11. This is cooled by free convection.
  • electronic components are arranged, which form a control electronics 12 and are mounted for example on a circuit board. These electronic components transform a supply voltage such that voltages and currents can be applied in a suitable form to the coils of the drive in order to subsequently achieve a rotation of a drive shaft.
  • the supply voltage can be a standard mains voltage such as 220 V with 50 Hz or one of the common Industrial voltages should be like 48V.
  • Such components of the control electronics which generate heat to a particular extent, may be arranged such that they touch the inner wall of the housing of the control section. This is preferably realized in the region of the cooling fins 11. It is also conceivable to embed the control electronics completely or partially in a potting compound. This also increases the heat dissipation. In addition, this achieves a higher mechanical stability.
  • the intermediate section 3 has several components in its housing.
  • a switch 15 is used to turn on and off the vacuum pump. Other switches can be arranged there, with which, for example, a standby circuit or a speed position can be realized.
  • a socket 16 to which the power supply is connected. This voltage is given on the one hand to the control electronics, on the other hand to a small power supply 17, which supplies via auxiliary electrical line connections an auxiliary electronics 18 with operating voltage. This is used to implement the switching state of the switch 15 in a control signal, which is also given via suitable electrical line connections to the control electronics.
  • the auxiliary electronics also has means by which the fan motor 6a is supplied with voltage and switched on / off. In a development, further communication means are arranged in this intermediate section.
  • switch, plug and socket which are arranged on the housing wall similar to the switch 15. These components are then connected via electrical line connections or the like with an extended auxiliary electronics, which includes, for example, means for operating a fieldbus or serial interface and the like. Status information such as "pump in operation”, current speed or activated standby of the vacuum pump can be queried by external control means via this interface.
  • a seal 14 is provided between the housing of the intermediate portion 3 and the control portion 2. On the one hand, this ensures a seal of the interior against moisture and dust, on the other hand, it represents a thermal barrier, so that the heat input into the control section from the direction of the intermediate section is made more difficult. Such a seal is also provided between the intermediate portion and the peripheral portion 4, so that tightness and difficult heat transfer are also provided here.
  • the fan which has the fan motor and a fan blade 6b. Dashed arrows illustrate the gas flow generated by the fan: air is drawn in and conveyed between the cooling fins 8.
  • Cooling fins 11 can be seen in section. They are oriented with their longitudinal axis in the direction of gravity to optimize the free convection.
  • the cooling fins of the control section are not covered by the hood 1, so as not to hinder the air flow of the free convection.
  • electrical supply lines go through a provided in the intermediate section cable channel to the peripheral section 4. This cable channel is protected at both ends by channel seals 21 and 22 against moisture and heat transfer.
  • a cable bushing 27 is provided on the side of the engine control.
  • the coils 26 of the drive are arranged.
  • the energization of these coils is effected by the control electronics 12.
  • a rotationally symmetrical separating element 23 is provided inside the coils and separates them hermetically from the interior of the separating element. In this projecting end of a shaft 24, are mounted on the permanent magnet 25.
  • dashed arrows illustrate the gas flow generated by the fan.
  • the suction takes place through the ventilation slots 7, the gas is then conveyed in the direction of the peripheral portion.
  • ventilation slots are also arranged in the bottom of the vacuum pump. The foot of the vacuum pump then has the task of creating a distance through which air can be sucked.
  • Figure 3 illustrates that the invention is not limited to a fan alone.
  • a plurality of fans may be provided.
  • two fans are provided in the lower part of the intermediate section, each of them conveying cooling air into the channels mounted on either side of the vacuum pump, in particular the peripheral and pumping sections.
  • Other fans may be arranged to assist in cooling the cooling source to supply heat sources from the vacuum pump with cooling air.
  • a section through the peripheral and the pumping section 5 of the vacuum pump shows Figure 4 ,
  • the example shows a single-stage, lubricant-sealed rotary vane vacuum pump.
  • This has a pumping system 30 in the pump section. This is connected on one end face over a large area with the peripheral section, so that there is a good heat transfer there.
  • the housing of the pumping section 5 is connected in good heat-conducting manner to the peripheral section, so that the heat is transferred from the peripheral section to a body with a large surface area.
  • a provided in this pumping system cylindrical bore is penetrated by the shaft 24 eccentric.
  • the shaft can be made in one or more pieces. It is rotatably supported by a first sliding bearing 31 and a second sliding bearing 32.
  • lubricant derived from the lubricant reservoir 35 surrounding the pumping system.
  • Sliders 33 run around in the cylindrical bore, the scoop space 34 being formed between sliders and wall of the cylindrical bore becomes. Gas passes through the gas inlet 9 in this pump chamber.
  • permanent magnets 25 are fixed, which cooperate with the coils 26 provided in the peripheral portion, whereby the shaft is rotated. Together, permanent magnets and coils form an electric motor.
  • This example is a brushless DC motor.
  • the pump section is in Figure 5 shown in section along AA '. It is clarified in this illustration, the eccentric position of the shaft 24 and the position of the slide 33. Between these springs not shown are provided.
  • the housing of the pump section has cooling ribs 8.
  • the hood 1 covers the cooling fins, whereby flow channels 42 arise. Through these flow channels, which can be interconnected, the gas supplied by the fan flows, absorbs heat from the housing and transports them in the sequence away from the housing. This heat is generated in the pumping system 30 and is discharged via the lubricant reservoir to the housing.
  • the hood is designed so that the channels are open at their end. This is easiest to accomplish, in that the hood does not cover the pump section side end face of the vacuum pump.
  • an intermediate member 40 is arranged, which has, for example, high elastomer components. This provides both a thermal barrier and a reduction in vibration transfer from the pump housing to the hood. Fasteners, such as screws 41, fix the hood.
  • the vacuum pump shown in this embodiment has a favorable heat balance.
  • a first strong heat source is due to the heat of compression in the pump section 5.
  • Another strong heat source is the peripheral portion, since there the coils of the drive are arranged, in which power loss is converted into heat.
  • heat is introduced into the peripheral section via the end face of the pumping system 30, since at this point the pumping system and the peripheral section are in contact with each other over a large area.
  • These heat sources are kept away from the control section by the intermediate section. Due to the order of the sections, the distance is maximized.
  • the thermal resistances of the seals which are provided between the intermediate section and its neighboring sections. These passive measures cause a very favorable heat balance. To these is added the active cooling by the fan (s).
  • This embodiment presents an oil-sealed rotary vane vacuum pump. It is conceivable, however, to adapt the invention to other vacuum pumps for generating coarse or fine vacuum by replacing the pump section. In this pump section then other pumping principles are used. Conceivable pumping principles are, for example, dry reciprocating compressors, dry rotary vane or barrier vane pumps.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP07022564.4A 2006-12-13 2007-11-21 Pompe à vide dotée d'un ventilateur Not-in-force EP1936203B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102006058842A DE102006058842A1 (de) 2006-12-13 2006-12-13 Vakuumpumpe mit Lüfter

Publications (3)

Publication Number Publication Date
EP1936203A2 true EP1936203A2 (fr) 2008-06-25
EP1936203A3 EP1936203A3 (fr) 2014-01-01
EP1936203B1 EP1936203B1 (fr) 2018-01-10

Family

ID=39217913

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07022564.4A Not-in-force EP1936203B1 (fr) 2006-12-13 2007-11-21 Pompe à vide dotée d'un ventilateur

Country Status (4)

Country Link
US (1) US20080145258A1 (fr)
EP (1) EP1936203B1 (fr)
JP (1) JP2008151124A (fr)
DE (1) DE102006058842A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3434905A1 (fr) 2017-07-25 2019-01-30 Pfeiffer Vacuum Gmbh Pompe à vide et procédé destiné au fonctionnement d'une pompe à vide

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH706231B1 (fr) * 2012-03-05 2016-07-29 Ateliers Busch Sa Installation de pompage et procédé de contrôle d'une telle installation.
US9611852B2 (en) * 2013-03-29 2017-04-04 Agilent Technology, Inc. Thermal/noise management in a scroll pump
US10208753B2 (en) 2013-03-29 2019-02-19 Agilent Technologies, Inc. Thermal/noise management in a scroll pump
US10704552B2 (en) * 2016-02-02 2020-07-07 Powerex/Iwata Air Technology Inc. Vacuum system
GB2557359A (en) * 2016-12-08 2018-06-20 Edwards Ltd Vacuum Pump
EP4043733B1 (fr) * 2022-06-17 2024-03-27 Pfeiffer Vacuum Technology AG Pompe à vide avec ventilateurs commandables séparément
KR102522429B1 (ko) * 2022-07-07 2023-04-19 주식회사 부쉬코리아 냉각을 위한 방폭팬과 라디에이터를 포함하는 진공펌프유닛
EP4506537B1 (fr) * 2023-08-08 2025-10-08 Pfeiffer Vacuum Technology AG Pompe à vide à spirales

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1242744A1 (fr) 1999-11-29 2002-09-25 Thomas Industries, Inc. Carter de pompe

Family Cites Families (12)

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US1970033A (en) * 1931-06-24 1934-08-14 Rotorite Corp Fluid compressor
US2476041A (en) * 1946-03-15 1949-07-12 Singer Mfg Co Air blower lubrication
US3670190A (en) * 1971-03-11 1972-06-13 Robbins & Myers Electric motor and higher speed fan assembly
US4268230A (en) * 1979-04-26 1981-05-19 Varian Associates, Inc. Gas ballast for oil sealed mechanical vacuum vane pump
DE3136775A1 (de) * 1981-09-16 1983-03-31 Isartaler Schraubenkompressoren GmbH, 8192 Geretsried "kuehleranordnung fuer eine verdichteranlage"
US4961016A (en) * 1989-08-09 1990-10-02 General Motors Corporation Dual-face cooling fan for a dynamoelectric machine
DE4017193A1 (de) * 1990-05-29 1991-12-05 Leybold Ag Geraeuscharme vakuumpumpe
IT1288737B1 (it) * 1996-10-08 1998-09-24 Varian Spa Dispositivo di pompaggio da vuoto.
US5957667A (en) * 1997-05-23 1999-09-28 Ballard Generation Systems Inc. Oilless compressor with a pressurizable crankcase and motor containment vessel
EP1379786B1 (fr) * 2001-04-17 2005-03-16 TM.C. S.P.A. Termomeccanica Compressori Unite compresseur a vis avec systeme de refroidissement d'huile incorpore
DE10156179A1 (de) * 2001-11-15 2003-05-28 Leybold Vakuum Gmbh Kühlung einer Schraubenvakuumpumpe
JP3916513B2 (ja) * 2002-06-05 2007-05-16 株式会社神戸製鋼所 スクリュ圧縮機

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1242744A1 (fr) 1999-11-29 2002-09-25 Thomas Industries, Inc. Carter de pompe

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3434905A1 (fr) 2017-07-25 2019-01-30 Pfeiffer Vacuum Gmbh Pompe à vide et procédé destiné au fonctionnement d'une pompe à vide

Also Published As

Publication number Publication date
JP2008151124A (ja) 2008-07-03
EP1936203B1 (fr) 2018-01-10
EP1936203A3 (fr) 2014-01-01
DE102006058842A1 (de) 2008-06-19
US20080145258A1 (en) 2008-06-19

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