EP2060795A3 - Pompe à vide - Google Patents

Pompe à vide Download PDF

Info

Publication number
EP2060795A3
EP2060795A3 EP08018521.8A EP08018521A EP2060795A3 EP 2060795 A3 EP2060795 A3 EP 2060795A3 EP 08018521 A EP08018521 A EP 08018521A EP 2060795 A3 EP2060795 A3 EP 2060795A3
Authority
EP
European Patent Office
Prior art keywords
lubricant
vacuum pump
flange
rolling bearing
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP08018521.8A
Other languages
German (de)
English (en)
Other versions
EP2060795A2 (fr
EP2060795B1 (fr
Inventor
Jörg Stanzel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2060795A2 publication Critical patent/EP2060795A2/fr
Publication of EP2060795A3 publication Critical patent/EP2060795A3/fr
Application granted granted Critical
Publication of EP2060795B1 publication Critical patent/EP2060795B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/059—Roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F04D29/063—Lubrication specially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Rolling Contact Bearings (AREA)
EP08018521.8A 2007-11-15 2008-10-23 Pompe à vide Active EP2060795B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200710054632 DE102007054632A1 (de) 2007-11-15 2007-11-15 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP2060795A2 EP2060795A2 (fr) 2009-05-20
EP2060795A3 true EP2060795A3 (fr) 2013-11-06
EP2060795B1 EP2060795B1 (fr) 2019-03-20

Family

ID=40042850

Family Applications (1)

Application Number Title Priority Date Filing Date
EP08018521.8A Active EP2060795B1 (fr) 2007-11-15 2008-10-23 Pompe à vide

Country Status (3)

Country Link
EP (1) EP2060795B1 (fr)
JP (1) JP5412087B2 (fr)
DE (1) DE102007054632A1 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011109929A1 (de) * 2011-08-10 2013-02-14 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102012220040A1 (de) * 2012-11-02 2014-05-08 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102012023727B4 (de) * 2012-12-05 2020-03-19 Pfeiffer Vacuum Gmbh Schmiermitteleinrichtung für ein Wälzlager
DE102013210109A1 (de) * 2013-05-29 2014-12-04 Pfeiffer Vacuum Gmbh Vakuumpumpe
BE1022719B1 (nl) * 2015-02-13 2016-08-23 Atlas Copco Airpower Naamloze Vennootschap Compressorinrichting
GB2552700A (en) 2016-08-04 2018-02-07 Edwards Ltd Turbomolecular pump lubricant supply systems
EP3473858B1 (fr) * 2017-10-17 2020-07-01 Pfeiffer Vacuum Gmbh Procédé d'optimisation de durée de vie des paliers à rouleaux d'une pompe à vide
JP7141332B2 (ja) * 2018-12-28 2022-09-22 株式会社荏原製作所 真空ポンプ装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2310481A1 (fr) * 1975-05-06 1976-12-03 Rava Edoardo Perfectionnements aux pompes turbomoleculaires
US4140441A (en) * 1977-04-11 1979-02-20 Patterson Williams G Turbomolecular pump lubrication system
EP1477721A2 (fr) * 2003-05-13 2004-11-17 Pfeiffer Vacuum GmbH Dispositif de graissage des paliers d'un arbre tournant

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6053695A (ja) * 1983-09-02 1985-03-27 Hitachi Ltd タ−ボ分子ポンプ
DE3817290A1 (de) * 1988-05-20 1989-11-30 Leybold Ag Turbomolekularpumpe
DE8909636U1 (de) * 1989-08-11 1990-12-06 Leybold AG, 6450 Hanau Vakuumpumpe mit einem Rotor und mit unter Vakuum betriebenen Rotorlagerungen
JP2978339B2 (ja) * 1992-09-21 1999-11-15 株式会社日立製作所 真空ポンプ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2310481A1 (fr) * 1975-05-06 1976-12-03 Rava Edoardo Perfectionnements aux pompes turbomoleculaires
US4140441A (en) * 1977-04-11 1979-02-20 Patterson Williams G Turbomolecular pump lubrication system
EP1477721A2 (fr) * 2003-05-13 2004-11-17 Pfeiffer Vacuum GmbH Dispositif de graissage des paliers d'un arbre tournant

Also Published As

Publication number Publication date
EP2060795A2 (fr) 2009-05-20
JP5412087B2 (ja) 2014-02-12
DE102007054632A1 (de) 2009-05-20
JP2009121467A (ja) 2009-06-04
EP2060795B1 (fr) 2019-03-20

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