EP2068103A2 - Module de mesure destiné à la mesure rapide de composants électriques, électroniques et mécaniques à des températures cryogènes et dispositif de mesure doté d'un tel module de mesure - Google Patents

Module de mesure destiné à la mesure rapide de composants électriques, électroniques et mécaniques à des températures cryogènes et dispositif de mesure doté d'un tel module de mesure Download PDF

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Publication number
EP2068103A2
EP2068103A2 EP08020788A EP08020788A EP2068103A2 EP 2068103 A2 EP2068103 A2 EP 2068103A2 EP 08020788 A EP08020788 A EP 08020788A EP 08020788 A EP08020788 A EP 08020788A EP 2068103 A2 EP2068103 A2 EP 2068103A2
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EP
European Patent Office
Prior art keywords
measuring
contact element
cold head
measuring module
cryocooler
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP08020788A
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German (de)
English (en)
Other versions
EP2068103A3 (fr
EP2068103B1 (fr
Inventor
Olivier Zogmal
Daniel Guy Baumann
Frank Lehnert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bruker Switzerland AG
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Bruker Biospin SAS
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Publication of EP2068103A2 publication Critical patent/EP2068103A2/fr
Publication of EP2068103A3 publication Critical patent/EP2068103A3/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D19/00—Arrangement or mounting of refrigeration units with respect to devices or objects to be refrigerated, e.g. infrared detectors
    • F25D19/006—Thermal coupling structure or interface
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D2600/00—Control issues
    • F25D2600/04—Controlling heat transfer

Definitions

  • the invention relates to a measuring module for measuring and testing a measuring object with an evacuable measuring chamber for receiving the measured object and a contact element, wherein the measuring object is thermally connected during the measuring and / or testing process with a first contact surface of the contact element, and at least one cold head which can be thermally connected to a second contact surface of the contact element, wherein the cold head can be cooled down to cryogenic temperatures by means of a cryocooler consisting of at least one cold stage, and wherein the contact element consists of thermally highly conductive material, and the first and second Contact surface lie on opposite sides of the contact element, and wherein the cold head and the contact element during the measuring and / or testing process are in an evacuated environment and are thermally conductively connected to each other.
  • Such a measuring device is known from [2].
  • the thermal noise of electronic components can be reduced.
  • the thermal noise is caused by statistical movements of the charge carriers and by irregular, temperature-dependent lattice vibrations, which are transmitted to the charge carriers by collisions. It manifests itself by a noise voltage V R at the ends of electrical conductors.
  • suitable electronic and electrical components e.g., cables, resistors, transistors, etc.
  • quality inspection e.g., thermal cycling
  • test facilities are needed that allow individual electronic components and entire electronic circuits to be cooled to their use and test temperature, with the aim of identifying their properties and specifications and performing quality tests on them.
  • the simplest and most widely used method for cooling to cryogenic temperatures is with the aid of liquid nitrogen (LN2) or, more rarely, with liquid helium (LHe).
  • LN2 liquid nitrogen
  • LHe liquid helium
  • the components to be measured are immersed in a Dewar vessel filled with LN2 or LHe and cooled. Quality checks (eg temperature cycling tests) and / or the determination of electrical or mechanical properties of components can be carried out in this way.
  • the object to be cooled is attached to a thermally well-conductive contact element which is cooled by a cooling medium (e.g., LN2 or LHe) to the desired temperature.
  • a cooling medium e.g., LN2 or LHe
  • the whole assembly is housed in an evacuated chamber, which also prevents the formation of condensation and ice [2].
  • LN2 or LHe a cooling medium
  • such systems are efficient only at temperatures just above the boiling point of the cooling medium. If specimens need to be tested well above the boiling point (but far below room temperature), then this must be achieved by heating the contact element additionally, which in turn leads to increased loss of cooling medium and increased costs (especially if the cooling medium is LHe).
  • Another disadvantage here is that the user always has to rely on the cooling medium and must always ensure that there is sufficient reserve of it.
  • such a system has the disadvantage that the user must understand how to deal with cryogenic liquids.
  • measuring modules are known in which the cooling is not carried out by a cryogenic cooling medium, but by a cryocooler with a closed cooling circuit [2].
  • the disadvantage of this measuring module is that the cryocooler must first be switched off and then followed by a long wait until the cryocooler has warmed up sufficiently, and the chamber in which the specimen is located can be opened.
  • cryocooler including cold head is housed in a cooling chamber, which is spatially separated from the measuring chamber and independently of this is evacuated that the contact element thermally insulated from the outer wall of the measuring module attached part of a partition between the measuring chamber and the cooling chamber is and makes a local thermal connection from the measuring chamber to the cooling chamber, and that a contacting device is provided for changing the heat flow in the hermetically sealed state of the measuring module, with the help of the heat flow between the cold head and the contact element either made or greatly enlarged, or interrupted or greatly reduced.
  • the measuring module With the measuring module according to the invention, a cooling process without cryogenic liquids can be realized, wherein the test temperature of the measured objects within the given temperature range can be freely selected by the variably adjustable heat flow between the cold head and the contact element.
  • the cryocooler may remain cold during cooling or warming up of the measurement object.
  • the cooling rates for the measurement object can thus be shortened compared to the prior art by about the specified by the cryocooler manufacturer cooling time of the cryocooler, because the cryocooler does not need to be cooled again.
  • the typical cooling time of a cryocooler is between about 40 and 60 minutes. In addition, an unnecessary thermal load of the cryocooler is avoided.
  • the separate chambers for the measurement object and the cryocooler also allow optimal thermal isolation between the measuring chamber and the cooling head.
  • the cooling rate .DELTA.T K / .DELTA.t and the warm-up rate .DELTA.T W / .DELTA.t are freely adjustable with the measurement module according to the invention and can be chosen so that the measurement object is not damaged.
  • the desired cooling cycles can be carried out automatically, with their number being freely selectable.
  • the measuring module according to the invention is easy to use and allows easy mounting and changing of the measuring objects.
  • the contacting device comprises a pneumatic, hydraulic or electric drive, or a combination thereof, or a manual drive with which the cold head and the contact element can be mechanically moved towards or away from each other, wherein the cold head and the contact element either pressed against each other or spatially be separated so that the heat flow between them is increased or decreased.
  • the drive allows both the contacting of the measuring object with the cooling head over the two contact surfaces of the contact element as well as the separation of the same contact in a simple and fast manner.
  • the contacting device may comprise a connecting element which is arranged between the cold head and the contact element and permanently in close thermal communication with the cold head and the contact element, wherein the connecting element has at least one cavity which can be filled with a well-conducting fluid at cryogenic temperatures whereby the thermal conductivity of the connecting element and thereby also the heat flow between the cold head and the contact element can be changed.
  • This also shortened cooling times and warm-up times can be realized, which can be dispensed with movable mechanical components, resulting in a structurally very simple solution.
  • the contact element comprises a heat exchanger, which is operated with a cryogenic fluid, in particular liquid nitrogen or liquid helium, and serves for precooling of the contact element.
  • a cryogenic fluid in particular liquid nitrogen or liquid helium
  • This embodiment is a high cooling rate for measurement objects having a high heat capacity, so that the cooling time can be further shortened.
  • At least one temperature sensor and at least one heater are provided, which serve to regulate the temperature of the contact element.
  • Further temperature sensors can also be attached to the measurement object, so that its temperature can be measured and regulated directly.
  • the cryocooler has two stages, each with a cold head, wherein the cold head of the first stage is thermally connected to a heat exchanger, which serves for the liquefaction of nitrogen gas.
  • This embodiment has the advantage that the cryofluid required for the pre-cooling is generated autonomously, i. no longer needs to be purchased externally.
  • the invention also relates to a measuring device with a measuring module according to the invention described above, wherein the contact element is thermally insulated from the external environment of the measuring module.
  • the contact element may be fastened at one end of the bellows-shaped separating wall between the measuring chamber and the cooling chamber, whereby it is thermally insulated from the outer wall of the measuring module.
  • a measuring device which comprises a measuring module with a connecting element which is arranged between the cold head and contact element and permanently in close thermal communication with the cold head and the contact element, wherein the connecting element has at least one cavity, and wherein devices for supplying and pumping a are provided at cryogenic temperatures highly conductive fluid into and out of the cavity of the connecting element, whereby the heat flow between the cold head and the contact element can be increased or decreased.
  • a measuring device comprising a measuring module, in which the cryocooler has two stages, each with a cold head, wherein the cold head of the first stage with a heat exchanger, which is used for liquefaction of Nitrogen gas is used, is thermally connected, and wherein the first stage of the cryocooler is connected via the heat exchanger with a nitrogen separator, through which the nitrogen gas can be obtained directly from the air and fed to the heat exchanger.
  • Fig. 5a shows a measuring device according to the prior art.
  • a measuring module 10 ' is used for cooling, measuring and testing a measuring object 6.
  • the measuring object 6 to be cooled is fastened to a thermally highly conductive contact element 5' , which is cooled by a cooling medium (eg LN2 or LHe) to the desired temperature.
  • a cooling medium eg LN2 or LHe
  • the whole assembly is housed in an evacuated chamber 4 ' , whereby the formation of condensation and ice is avoided.
  • the desired measurement temperature can be controlled, for example, by means of a controller 36, a heater 7 and temperature sensors 35a, 35b .
  • the supply of the cooling medium via valves 12, 13 are regulated.
  • a measuring module 10 " comprises a cold head 1b and a contact element 5".
  • the cold head 1 b can be cooled down to cryogenic temperatures by means of the cryocooler 1 a comprising at least one cold stage.
  • the contact element 5 " is made of material with good thermal conductivity and is positioned between the measuring object 6 and the cold head 1 b.
  • the cold head 1 b which is cooled by the first cooling stage of the cryocooler 1 a with a specific cooling power, is fixedly connected to a contact element 5 "which ideally assumes the temperature of the cold head 1 b without thermal load then the test object 6 to be tested are mounted.
  • the temperature of the contact element 5 "or of the measurement object 6 can be controlled with the controller 36, heater 7 and temperature sensors 35a, 35b.
  • Fig. 1a, 1b show a first embodiment 10a of a measuring module according to the invention.
  • the measuring module 10a according to the invention comprises a two-chamber system with a cooling chamber 3 and a measuring chamber 4, which can be evacuated independently of one another.
  • the cooling chamber 3 is the cryocooler 1 a with its cold head 1 b and a closed cooling circuit.
  • a Stirling, a Gifford-McMahon or a Pulse-Tube cooling apparatus may be used.
  • the cooling chamber 3 is evacuated during the measuring operation and thereby isolated the cryocooler 1 a thermally from its surroundings.
  • the measuring object 6 to be measured are located in the likewise evacuated measuring chamber 4 and is fixedly connected to a contact element 5b on a first contact surface 9a .
  • the contact element 5b is formed as part of the partition wall between the two chambers 3, 4 and serves as a local thermal connection from the cooling chamber 3 to the measuring chamber 4.
  • the contact element 5b is fixed to a thermally insulated to the outer wall of the measuring module body.
  • the heat flow between the cold head 1 b and the contact element 5 b is changed by mechanically moving towards or away from one another by means of a pneumatic, hydraulic or electric drive 8, a combination thereof, or by manual drive, the cold head 1 b and the contact element 5 b and that thereby the cold head 1 b and the contact element 5 b are pressed against each other ( Fig. 1 b) or spatially separated ( Fig. 1a ), so that the heat flow between them large resp. gets small.
  • the cold head 1 b contacted the contact element 5 b at a second contact surface 9b and the contact element 5b is cooled together with the measurement object 6 by the cryocooler to the desired temperature.
  • the contact between the cold head 1b and the second contact surface 9b of the contact element 5b is disconnected, so that the contact element 5b together with the measurement object 6 are reheated without the cryocooler 1a having to be switched off beforehand.
  • the controller 36 with connected heater 7 and temperature sensor 35a allows control of the temperature of the contact element 5b and thus of the measurement object 6 to the desired value.
  • the drive 8 moves the contact element 5b away from the cold head 1b and thereby interrupts the heat flow between them ( Fig. 1 b) ,
  • the heater 7 then allows a rapid warming of the contact element 5b and the measuring object 6.
  • the cryocooler 1a continues running, and the cold head 1 b cools, since it is no longer thermally loaded, to the lowest possible temperature. The user is not dependent on cryogenic liquids in this embodiment.
  • FIG Fig.2a and Fig.2b An improved embodiment 10b of the measuring module according to the invention is shown in FIG Fig.2a and Fig.2b shown. It leads to a massive reduction of the cooling times and differs from the previous embodiment in that a contact element 5a is provided with a heat exchanger through which a cryogenic liquid (LN2 or LHe) flows, thereby allowing pre-cooling of the contact element 5a and of the measurement object 6 , The inlet valve 12 and the outlet valve 13 control the flow of the cooling medium. During the cooling process, the valves 12 and 13 are opened, and the existing in a Dewar vessel 11 cryogenic liquid is pressed, for example by generating an overpressure in the Dewar vessel 11 by insulated lines in the heat exchanger of the contact element 5a, whereby this is pre-cooled. The cooling times down to the boiling point of the cryogenic liquid are massively shortened in this way compared to a cooling with the cryocooler alone (eg a Gifford-McMahon cryo
  • the valves 12 and 13 are closed again.
  • the drive 8 then moves the Contact element 5a down and connects this thermally with the cold head 1 b (see 2b ).
  • the temperature of the contact element 5a is measured with the temperature sensor 35a and can then be controlled by the heater 7.
  • FIG 3a and 3b Another embodiment 10c of the measuring module according to the invention is shown in FIG 3a and 3b illustrated.
  • This embodiment differs from that in FIG Fig.2a and Fig.2b in that a two-stage cryocooler 2a is used, and that the first stage of this cryocooler 2a serves to liquefy N2 gas in order to produce the contact element 5a already in the variant of FIG 3a and 3b is shown to pre-cool.
  • An inlet valve 20 controls the inflow of air to a nitrogen separator 21. The nitrogen already present in the air is first separated from the remaining gases by means of the nitrogen separator 21, before it is led to a heat exchanger 22 and liquefied there.
  • the heat exchanger 22 is thermally connected to a cold head 2b of the first stage of the cryocooler 2a, whereby it is cooled down to the required temperature.
  • the liquefied nitrogen is then passed by means of a pump 23 through an outlet valve 24 , which serves to control the nitrogen liquefied in the heat exchanger 22, and conveyed into the dewar vessel 11.
  • the valves 20, 24 allow the switching on and off of nitrogen liquefaction. If the valves 12, 13 for pre-cooling of the contact element 5a are opened or closed, then the valves 20, 24 are closed or opened.
  • a cold head 2c of the second stage of the cryocooler 2a takes over the contacting of the contact element 5a analogous to the cold head 1 b in Fig. 2a, 2b ,
  • FIG. 4 shows a further variant of the measuring module according to the invention, in which no moving mechanical parts needed within the vacuum range become.
  • the heat flow between the cold head 1 b and the contact element 5 b is changed by the fact that between both elements, a connecting element 31 is installed, which is permanently in close thermal connection with the cold head 1 b and the contact element 5 b.
  • the connecting element 31 has at least one cavity into which a well-conducting at cryogenic temperatures gas is pressed or pumped out again, whereby the heat flow between the cold head and the contact element is large resp. gets small.
  • the well-conducting gas at cryogenic temperatures eg He
  • the thermal conductivity of the connecting element 31 increases or decreases.
  • the connecting element 31 is connected via an inlet valve 33 to a gas pressure cylinder 37 and via an outlet valve 34 to a vacuum pump 32 .
  • the inlet valve 33 is opened, the outlet valve 34 is closed, and the connecting element 31 is filled with gas via the gas pressure cylinder 37.
  • the thermal conductivity of the connecting element becomes large, and as a result, the contact element 5b and the measuring object 6 are cooled.
  • the measuring object 6 has reached the desired temperature, its temperature is controlled by the sensor 35 a and the heater 7.
  • the inlet valve 33 is closed and the outlet valve 34 is opened. Thereafter, the connecting element 31 is pumped empty with the vacuum pump 32, whereby the thermal conductivity of the connecting element 31 is again small, and the contact element 5 b can be reheated with the help of the heater 7 easily.
  • the inventive separation of the measuring chamber 4 and the cooling chamber 3 optimum isolation of the measuring chamber 4 from the cold head 1 b, 2c realized as soon as the cold head 1 b, 2c of the contact element 5a, 5b is moved away.
  • the invention Measuring module 10a, 10b, 10c with the two-chamber system according to the invention has the advantage that the cryocooler 1a, 2a always remains cold during the cooling or warming up of the measurement object 6. As a result, the cooling rates for the measurement object 6 become shorter, because the cryocooler 1 a, 2 a does not have to be cooled down anew, and, moreover, an unnecessary thermal load of the cryocooler 1 a, 2 a is avoided.
  • the measuring module according to the invention and thus also the measuring device according to the invention has a high flexibility, since the contact element 5a, 5b can be easily adapted or changed depending on the application.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
EP08020788.9A 2007-12-05 2008-11-29 Module de mesure destiné à la mesure rapide de composants électriques, électroniques et mécaniques à des températures cryogènes et dispositif de mesure doté d'un tel module de mesure Active EP2068103B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102007055712A DE102007055712A1 (de) 2007-12-05 2007-12-05 Messmodul zur schnellen Messung von elektrischen, elektronischen und mechanischen Bauteilen bei kryogenen Temperaturen sowie Messeinrichtung mit einem solchen Messmodul

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EP2068103A2 true EP2068103A2 (fr) 2009-06-10
EP2068103A3 EP2068103A3 (fr) 2018-03-21
EP2068103B1 EP2068103B1 (fr) 2020-08-19

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2513151A (en) * 2013-04-17 2014-10-22 Siemens Plc Improved thermal contact between cryogenic refrigerators and cooled components
NL1040379C2 (en) * 2013-09-06 2015-03-09 Janssen Prec Engineering Actuated thermal switch.
CN112986730A (zh) * 2021-02-08 2021-06-18 国网内蒙古东部电力有限公司呼伦贝尔供电公司 一种适用于极寒环境下的配电变压器交接试验移动式检测装置

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JP5947023B2 (ja) * 2011-11-14 2016-07-06 東京エレクトロン株式会社 温度制御装置、プラズマ処理装置、処理装置及び温度制御方法
US10041894B1 (en) * 2015-09-09 2018-08-07 Amazon Technologies, Inc. Thermal conductivity measurement of anisotropic substrates
US10126359B2 (en) * 2017-01-12 2018-11-13 Sensata Technologies Free piston stirling cooler temperature control system for semiconductor test
JP6770758B2 (ja) * 2019-01-15 2020-10-21 株式会社 Ｓｙｎａｘ コンタクタおよびハンドラ
US11619691B2 (en) * 2019-05-02 2023-04-04 General Electric Company Integrated cooling circuit for use with a superconducting magnet
US20240292568A1 (en) * 2023-02-27 2024-08-29 The United States Of America As Represented By The Secretary Of The Navy Cryogenic Platform
CN117387816B (zh) * 2023-10-18 2025-01-17 中国原子能科学研究院 一种温度调整装置及中子衍射残余应力测量系统

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2513151A (en) * 2013-04-17 2014-10-22 Siemens Plc Improved thermal contact between cryogenic refrigerators and cooled components
GB2513151B (en) * 2013-04-17 2015-05-20 Siemens Plc Improved thermal contact between cryogenic refrigerators and cooled components
NL1040379C2 (en) * 2013-09-06 2015-03-09 Janssen Prec Engineering Actuated thermal switch.
CN112986730A (zh) * 2021-02-08 2021-06-18 国网内蒙古东部电力有限公司呼伦贝尔供电公司 一种适用于极寒环境下的配电变压器交接试验移动式检测装置

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Publication number Publication date
EP2068103A3 (fr) 2018-03-21
DE102007055712A1 (de) 2009-06-18
US7667476B2 (en) 2010-02-23
US20090146676A1 (en) 2009-06-11
EP2068103B1 (fr) 2020-08-19

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