EP2175139A2 - Agencement de pompes doté d'une unité de pompes et d'une unité d'entraînement dotée d'un moteur électrique comprenant un boîtier de moteur encapsulé - Google Patents

Agencement de pompes doté d'une unité de pompes et d'une unité d'entraînement dotée d'un moteur électrique comprenant un boîtier de moteur encapsulé Download PDF

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Publication number
EP2175139A2
EP2175139A2 EP09172319A EP09172319A EP2175139A2 EP 2175139 A2 EP2175139 A2 EP 2175139A2 EP 09172319 A EP09172319 A EP 09172319A EP 09172319 A EP09172319 A EP 09172319A EP 2175139 A2 EP2175139 A2 EP 2175139A2
Authority
EP
European Patent Office
Prior art keywords
pump
motor
housing
electric motor
motor housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP09172319A
Other languages
German (de)
English (en)
Other versions
EP2175139A3 (fr
Inventor
Hubert Engmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Gardner Denver Thomas GmbH
Original Assignee
ILMVAC GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ILMVAC GmbH filed Critical ILMVAC GmbH
Publication of EP2175139A2 publication Critical patent/EP2175139A2/fr
Publication of EP2175139A3 publication Critical patent/EP2175139A3/fr
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F04C29/045—Heating; Cooling; Heat insulation of the electric motor in hermetic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F04C23/003—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle having complementary function
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F04C23/006—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle having complementary function
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/30—Use in a chemical vapor deposition [CVD] process or in a similar process
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/30—Casings or housings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/02—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • F04C27/009—Shaft sealings specially adapted for pumps

Definitions

  • the present invention relates to a pump assembly with pump unit and drive unit, the latter having an electric motor with a sealed motor housing.
  • an electric motor has a rotor and a stator, between which an air gap extends.
  • a mounted motor shaft is provided, which is preferably led out via a shaft seal from the motor housing.
  • a vacuum pump which also uses an electric motor as a drive.
  • the motor is arranged in a vacuum-tight motor housing, which is connected to the housing of the vacuum pump.
  • the vacuum-tight design of the motor housing a Decoupling done to the environment, so that the seal at the entry point of the motor shaft in the pump chamber must not be realized with high density.
  • lubricants or the like from the engine into the pumping area.
  • aggressive media from the pump chamber can get into the engine area and there lead to corrosion of the individual engine components. This makes it necessary, for example, to pour the electrical winding of the stator into a potting compound.
  • the object of the present invention is to provide a pump assembly with an electric motor which is used as a drive of a pump, wherein the problems of a bidirectionally tight transition between the motor housing and the driven pump to be solved at the point of passage.
  • vacuum pump arrangements in particular the leakage rate at the point of passage of the drive shaft should be reduced.
  • the penetration or permanent retention of such media should be prevented in the motor housing to protect in this way the electric motor from corrosion and other damage.
  • the pump assembly according to the invention has an electric motor, which is characterized in that at least one inlet nozzle and an outlet nozzle are mounted on the motor housing, which face each other such that a flowing between these nozzle due to a pressure difference medium through the air gap between the rotor and stator to be led.
  • a substantially gleichverteilter Condition of the contained medium is achieved.
  • This can be achieved in principle both by generating a uniform negative pressure in the motor housing and by flooding the motor housing with an inert corrosion protection medium (eg nitrogen).
  • the claimed here pump assembly uses of these two basic ways to create a negative pressure in the motor housing, which is provided with a vacuum pump.
  • the inlet connection of the motor housing are connected to an evacuation space and the outlet connection to the suction side of a first vacuum pump.
  • a negative pressure can be generated in this way, at the same time possible evaporation residues or other media penetrated into the motor housing are continuously removed.
  • On a complete encapsulation of the electrical winding of the stator can be dispensed with, so that an impregnation of the winding is sufficient.
  • the shaft seal is designed at the break-through point of the motor housing as a dry running seal, which does not require lubricant.
  • non-contact gap or labyrinth seals have proven to be advantageous. The latter seals can lead to a very good sealing effect at a high speed of the motor shaft and are still essentially free from wear. Since lubricants are not needed, there is also no risk that these or components thereof in a coupled machine unit, For example, a vacuum region of a pump can penetrate.
  • the use of the two ports on the motor housing allows the generation of a climate within the motor housing, which can be adapted to the application for which the electric motor is used as a drive.
  • the shaft seal by which the motor shaft is guided to the coupled unit, must ensure in this way no hundred percent tightness, so that the execution of this seal significantly simplified.
  • the gas-tight coupling of the motor housing to the housing of the driven unit is much easier to realize because there are no moving parts to be sealed.
  • the electric motor described here can thus be used not only in pump arrangements but in principle as a drive for any machine arrangements in which it on a good seal arrives, however, the provision of an adapted to the application climate in the motor housing but not a hundred percent tight connection between the driven unit and motor unit allowed.
  • Fig. 1 is the general structure of a pump assembly according to the invention with an electric motor 01 can be seen.
  • the electric motor 01 initially comprises a conventionally constructed stator 02 with an electrical winding, as well as a rotor 03, which is connected to a motor shaft 04.
  • an air gap 05 is formed between the stator 02 and the rotor 03, which can be kept very small to generate large torques.
  • the motor shaft 04 is mounted in bearings 06.
  • the said components of the engine are arranged in a motor housing 08, which is constructed in one or more pieces may be, but substantially gas-tight to the environment should be completed.
  • the motor housing 08 comprises a cylindrical housing sleeve 09, a flange-side bearing cap 10 and a cover plate 11.
  • the two covers 10, 11 are gas-tightly secured to the housing sleeve 09 by means of sealing rings 12.
  • the nozzle For the arrangement of the nozzle is in many applications of importance that a flowing through the interior of the motor housing medium as far as possible completely fills and flows through all areas. An improvement can be achieved in this regard, for example, by the arrangement of multiple inlet and outlet ports.
  • the nozzles may also be arranged along a common axial line, but in turn such that the air gap 05 extends between the nozzle, so that it is flowed through in each case.
  • a shaft seal 16 is further arranged, in the example shown, a labyrinth seal.
  • the motor shaft 04 extends from the closed motor housing 08 also.
  • a lubricant-free shaft seal 16 is used.
  • labyrinth seals or comparable non-contact seals can be achieved at the point of passage of the housing, a high degree of tightness in the operating condition, since the electric motor is operated at a high speed.
  • the labyrinth seal has the advantage that there is hardly any wear and no abrasion.
  • the preferably made of stainless steel motor shaft 04 drives outside the motor housing a working unit 20 (in particular a pump unit), in which it is coupled to the drive shaft or is formed integrally therewith.
  • the working unit 20 is arranged in a working housing 21, which in turn is connected in a gas-tight manner to the motor housing 08 via sealing rings 12.
  • Fig. 2 shows the basic structure of a pump assembly in which the working unit is formed by a pump unit 22.
  • the pump unit comprises a pump, a pump housing, which forms the working housing, and a drive shaft, which is coupled to the motor shaft 04.
  • Pump housing and motor housing are connected to each other gas-tight.
  • the evacuation of the motor housing on the other hand by design measures, for example the use of hybrid rolling bearings with Fomblin® grease filling for the bearing of the motor shaft.
  • the rotor and the housing parts can be coated with resistant materials or manufactured from such materials.
  • the housing parts may for example be made of stainless steel or aluminum or coated with a nickel layer.
  • the first vacuum pump 24 is formed directly by the pump of the pump unit 22.
  • Fig. 3 shows another application of the electric motor, in which this is traversed by a purge gas.
  • the pump unit 22 is used in this application, for example, the promotion of aggressive media. As far as these media reach the motor housing in small quantities through the shaft seal 16, they could cause significant damage to the engine at a larger residence time.
  • the inlet port 14 is connected to a purge gas reservoir 25 and is supplied from there with purge gas.
  • the purge gas fed into the engine with overpressure is supplied via the Outlet nozzle 15 discharged.
  • the purge gas carries off the penetrated aggressive media, which due to the above-mentioned arrangement of the two nozzles 14, 15 no areas remain in the motor housing in which could collect aggressive media.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)
  • Motor Or Generator Frames (AREA)
EP09172319.7A 2008-10-07 2009-10-06 Agencement de pompes doté d'une unité de pompes et d'une unité d'entraînement dotée d'un moteur électrique comprenant un boîtier de moteur encapsulé Withdrawn EP2175139A3 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102008042656A DE102008042656A1 (de) 2008-10-07 2008-10-07 Elektromotor mit gekapseltem Motorgehäuse

Publications (2)

Publication Number Publication Date
EP2175139A2 true EP2175139A2 (fr) 2010-04-14
EP2175139A3 EP2175139A3 (fr) 2013-04-17

Family

ID=41571878

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09172319.7A Withdrawn EP2175139A3 (fr) 2008-10-07 2009-10-06 Agencement de pompes doté d'une unité de pompes et d'une unité d'entraînement dotée d'un moteur électrique comprenant un boîtier de moteur encapsulé

Country Status (2)

Country Link
EP (1) EP2175139A3 (fr)
DE (1) DE102008042656A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2489975A (en) * 2011-04-14 2012-10-17 Edwards Ltd Vacuum pumping system
CN106026483A (zh) * 2016-08-01 2016-10-12 珠海格力节能环保制冷技术研究中心有限公司 车辆、驱动系统及其电机
CN108566018A (zh) * 2018-07-09 2018-09-21 电子科技大学中山学院 一种旋转式密封的无刷直流电机

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0329790A1 (fr) 1987-07-09 1989-08-30 Fanuc Ltd. Procede de refroidissement de moteurs
DE69214812T2 (de) 1991-06-05 1997-05-15 Unique Mobility Inc Elektrische maschinen
EP1075074A2 (fr) 1999-08-05 2001-02-07 Ebara Corporation Machine de transfert de gaz
DE10158734A1 (de) 2001-11-16 2003-06-05 Lat Suhl Ag Elektrische Maschine mit schutzgasgefülltem Hohlraum
DE102004024554A1 (de) 2004-05-18 2005-12-15 Pfeiffer Vacuum Gmbh Ölgedichtete Drehschiebervakuumpumpe
DE102006032765A1 (de) 2006-07-14 2008-01-17 Leybold Vacuum Gmbh Vakuumpumpe

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1178505B (de) * 1963-06-28 1964-09-24 Licentia Gmbh Anordnung zur Erzeugung eines Vakuums oder Unterdruckes sowie zur Vermeidung von Ver-schmutzungen im Gehaeuse einer mit Fluessigkeits-kuehlung im Rotor und Stator ausgeruesteten elektrischen Maschine
US4625132A (en) * 1984-08-07 1986-11-25 Anorad Linear motor with seal
US5240391A (en) * 1992-05-21 1993-08-31 Carrier Corporation Compressor suction inlet duct
DE4443387C1 (de) * 1994-12-06 1996-01-18 Saskia Hochvakuum Und Labortec Zweistufige mechanische Vakuumpumpanordnung
EP0987501A3 (fr) * 1998-09-14 2001-08-29 Fujitsu General Limited Dispositif de conditionnement d'air
DE10004263A1 (de) * 2000-02-01 2001-08-02 Leybold Vakuum Gmbh Dynamische Dichtung
AU2002223456A1 (en) * 2000-12-04 2002-06-18 Luk Automobiltechnik Gmbh And Co. Kg Method for operating a vacuum pump and a conveyor unit comprising a vacuum pump
BE1013937A3 (fr) * 2001-02-01 2002-12-03 Scroll Tech Compresseur scelle de hauteur reduite et incorporation d'un tube d'aspiration.
US6807821B2 (en) * 2003-01-22 2004-10-26 Bristol Compressors, Inc. Compressor with internal accumulator for use in split compressor
JP4694771B2 (ja) * 2003-03-12 2011-06-08 財団法人国際科学振興財団 ポンプおよびポンプ部材の製造方法
US8021127B2 (en) * 2004-06-29 2011-09-20 Johnson Controls Technology Company System and method for cooling a compressor motor
US7285882B2 (en) * 2005-05-12 2007-10-23 Sullair Corporation Integrated electric motor driven compressor
US20090269220A1 (en) * 2006-05-16 2009-10-29 Calsonic Kansei Corporation Electric compressor
DE102006050943B4 (de) * 2006-10-28 2020-04-16 Pfeiffer Vacuum Gmbh Vakuumpumpe und Verfahren zum Betrieb derselben

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0329790A1 (fr) 1987-07-09 1989-08-30 Fanuc Ltd. Procede de refroidissement de moteurs
DE69214812T2 (de) 1991-06-05 1997-05-15 Unique Mobility Inc Elektrische maschinen
EP1075074A2 (fr) 1999-08-05 2001-02-07 Ebara Corporation Machine de transfert de gaz
DE10158734A1 (de) 2001-11-16 2003-06-05 Lat Suhl Ag Elektrische Maschine mit schutzgasgefülltem Hohlraum
DE102004024554A1 (de) 2004-05-18 2005-12-15 Pfeiffer Vacuum Gmbh Ölgedichtete Drehschiebervakuumpumpe
DE102006032765A1 (de) 2006-07-14 2008-01-17 Leybold Vacuum Gmbh Vakuumpumpe

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2489975A (en) * 2011-04-14 2012-10-17 Edwards Ltd Vacuum pumping system
US9664195B2 (en) 2011-04-14 2017-05-30 Edwards Limited Vacuum pumping system
CN106026483A (zh) * 2016-08-01 2016-10-12 珠海格力节能环保制冷技术研究中心有限公司 车辆、驱动系统及其电机
CN108566018A (zh) * 2018-07-09 2018-09-21 电子科技大学中山学院 一种旋转式密封的无刷直流电机
CN108566018B (zh) * 2018-07-09 2023-11-10 深圳市八达威科技有限公司 一种旋转式密封的无刷直流电机

Also Published As

Publication number Publication date
DE102008042656A1 (de) 2010-04-15
EP2175139A3 (fr) 2013-04-17

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