EP2175456A3 - Instrument d'analyse de rayons X doté d'une fenêtre d'ouverture mobile - Google Patents

Instrument d'analyse de rayons X doté d'une fenêtre d'ouverture mobile Download PDF

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Publication number
EP2175456A3
EP2175456A3 EP09000179A EP09000179A EP2175456A3 EP 2175456 A3 EP2175456 A3 EP 2175456A3 EP 09000179 A EP09000179 A EP 09000179A EP 09000179 A EP09000179 A EP 09000179A EP 2175456 A3 EP2175456 A3 EP 2175456A3
Authority
EP
European Patent Office
Prior art keywords
ray
aperture
aperture window
analysis instrument
window
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP09000179A
Other languages
German (de)
English (en)
Other versions
EP2175456A2 (fr
Inventor
Carsten Michaelsen
Stefanie Belgard
Jürgen Graf
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
InCoaTec GmbH
Original Assignee
InCoaTec GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by InCoaTec GmbH filed Critical InCoaTec GmbH
Priority to US12/461,830 priority Critical patent/US7983388B2/en
Publication of EP2175456A2 publication Critical patent/EP2175456A2/fr
Publication of EP2175456A3 publication Critical patent/EP2175456A3/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/02—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
    • G21K1/04—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators using variable diaphragms, shutters, choppers

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
EP09000179A 2008-10-08 2009-01-09 Instrument d'analyse de rayons X doté d'une fenêtre d'ouverture mobile Withdrawn EP2175456A3 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US12/461,830 US7983388B2 (en) 2008-10-08 2009-08-26 X-ray analysis instrument with adjustable aperture window

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102008050851A DE102008050851B4 (de) 2008-10-08 2008-10-08 Röntgenanalyseinstrument mit verfahrbarem Aperturfenster

Publications (2)

Publication Number Publication Date
EP2175456A2 EP2175456A2 (fr) 2010-04-14
EP2175456A3 true EP2175456A3 (fr) 2011-09-21

Family

ID=41507839

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09000179A Withdrawn EP2175456A3 (fr) 2008-10-08 2009-01-09 Instrument d'analyse de rayons X doté d'une fenêtre d'ouverture mobile

Country Status (3)

Country Link
US (1) US7983388B2 (fr)
EP (1) EP2175456A3 (fr)
DE (1) DE102008050851B4 (fr)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010062472A1 (de) 2010-12-06 2012-06-06 Bruker Axs Gmbh Punkt-Strich-Konverter
KR101864164B1 (ko) * 2011-05-18 2018-06-04 삼성전자주식회사 노광 시스템과, 이 시스템으로 제조되는 포토마스크 및 웨이퍼
JP5931394B2 (ja) * 2011-10-07 2016-06-08 株式会社東芝 Ｘ線診断装置及び線量分布データ生成方法
CN105188551A (zh) * 2013-03-15 2015-12-23 祖马牙科有限责任公司 成像系统和方法
JP6025211B2 (ja) * 2013-11-28 2016-11-16 株式会社リガク Ｘ線トポグラフィ装置
JP6202684B2 (ja) * 2014-06-05 2017-09-27 株式会社リガク Ｘ線回折装置
US9991014B1 (en) * 2014-09-23 2018-06-05 Daniel Gelbart Fast positionable X-ray filter
DE102015224143B3 (de) * 2015-12-03 2017-02-23 Incoatec Gmbh Verfahren zur Justage der Primärseite eines Röntgendiffraktometers und zugehöriges Röntgendiffraktometer
CN106226339A (zh) * 2016-09-20 2016-12-14 清华大学 中子产生设备，中子成像设备以及成像方法
EP3364421B1 (fr) 2017-02-17 2019-04-03 Rigaku Corporation Dispostif optique aux rayons x
US10839972B2 (en) * 2017-03-14 2020-11-17 Joseph T. Young High resolution X-Ray imaging system
CN107315022A (zh) * 2017-07-21 2017-11-03 中国地质大学（武汉） 一种x射线准直定位调节装置及系统
JP7129109B2 (ja) * 2018-03-22 2022-09-01 国立研究開発法人量子科学技術研究開発機構 磁性体観察方法および磁性体観察装置
CN115768353B (zh) 2020-06-10 2026-02-10 上海西门子医疗器械有限公司 确定单槽准直板的目标位置的方法、装置和准直器组件
US11879854B2 (en) * 2020-09-23 2024-01-23 Baker Hughes Oilfield Operations Llc Positioning of x-ray imaging system using an optical camera
US11984235B2 (en) * 2021-10-15 2024-05-14 Canon U.S.A., Inc. Shutter mechanism

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61199700U (fr) * 1985-05-31 1986-12-13
US20030152192A1 (en) * 2002-01-31 2003-08-14 Kiyoshi Hasegawa X-ray analyzer
US20040066903A1 (en) * 2002-09-03 2004-04-08 Rigaku Corporation X-ray optical system for small angle scattering
US20040170250A1 (en) * 2003-02-28 2004-09-02 Osmic, Inc. X-ray optical system with adjustable convergence
US20060062350A1 (en) * 2004-09-21 2006-03-23 Boris Yokhin Combined X-ray reflectometer and diffractometer

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3980407A (en) * 1975-01-17 1976-09-14 Electromask, Inc. Shutter plate movement
US5771270A (en) * 1997-03-07 1998-06-23 Archer; David W. Collimator for producing an array of microbeams
US6041099A (en) 1998-02-19 2000-03-21 Osmic, Inc. Single corner kirkpatrick-baez beam conditioning optic assembly
DE19833524B4 (de) 1998-07-25 2004-09-23 Bruker Axs Gmbh Röntgen-Analysegerät mit Gradienten-Vielfachschicht-Spiegel
US6330301B1 (en) * 1999-12-17 2001-12-11 Osmic, Inc. Optical scheme for high flux low-background two-dimensional small angle x-ray scattering
ES2291162T3 (es) * 2000-09-27 2008-03-01 Euratom Colimador de microhaz para investigaciones de drx de alata resolucion con difractometros convencionales.
JP3548556B2 (ja) * 2001-12-28 2004-07-28 株式会社リガク Ｘ線回折装置
US6917667B2 (en) * 2002-09-03 2005-07-12 Rigaku Corporation Method and apparatus for making parallel X-ray beam and X-ray diffraction apparatus
DE102004052350B4 (de) 2004-10-28 2008-01-10 Bruker Axs B.V. Röntgendiffraktometer mit Wechselapertur
CN100483564C (zh) * 2005-09-22 2009-04-29 同方威视技术股份有限公司 一种用于调整x射线束流的准直器
DE102006015933B3 (de) 2006-04-05 2007-10-31 Incoatec Gmbh Vorrichtung und Verfahren zum Justieren eines optischen Elements
US7651270B2 (en) * 2007-08-31 2010-01-26 Rigaku Innovative Technologies, Inc. Automated x-ray optic alignment with four-sector sensor
US7706503B2 (en) * 2007-11-20 2010-04-27 Rigaku Innovative Technologies, Inc. X-ray optic with varying focal points

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61199700U (fr) * 1985-05-31 1986-12-13
US20030152192A1 (en) * 2002-01-31 2003-08-14 Kiyoshi Hasegawa X-ray analyzer
US20040066903A1 (en) * 2002-09-03 2004-04-08 Rigaku Corporation X-ray optical system for small angle scattering
US20040170250A1 (en) * 2003-02-28 2004-09-02 Osmic, Inc. X-ray optical system with adjustable convergence
US20060062350A1 (en) * 2004-09-21 2006-03-23 Boris Yokhin Combined X-ray reflectometer and diffractometer

Also Published As

Publication number Publication date
DE102008050851A1 (de) 2010-04-22
US7983388B2 (en) 2011-07-19
DE102008050851B4 (de) 2010-11-11
US20100086104A1 (en) 2010-04-08
EP2175456A2 (fr) 2010-04-14

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