EP2277808A4 - Installation de stockage d articles - Google Patents

Installation de stockage d articles

Info

Publication number
EP2277808A4
EP2277808A4 EP09731295.3A EP09731295A EP2277808A4 EP 2277808 A4 EP2277808 A4 EP 2277808A4 EP 09731295 A EP09731295 A EP 09731295A EP 2277808 A4 EP2277808 A4 EP 2277808A4
Authority
EP
European Patent Office
Prior art keywords
articles
storage installation
installation
storage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP09731295.3A
Other languages
German (de)
English (en)
Other versions
EP2277808A1 (fr
EP2277808B1 (fr
Inventor
Yoshitaka Inui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daifuku Co Ltd
Original Assignee
Daifuku Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Co Ltd filed Critical Daifuku Co Ltd
Publication of EP2277808A1 publication Critical patent/EP2277808A1/fr
Publication of EP2277808A4 publication Critical patent/EP2277808A4/fr
Application granted granted Critical
Publication of EP2277808B1 publication Critical patent/EP2277808B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3214—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicle
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3404—Storage means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/137—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/137—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed
    • B65G1/1373—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed for fulfilling orders in warehouses
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3216—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3218—Conveying cassettes, containers or carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
EP09731295.3A 2008-04-11 2009-01-15 Installation de stockage d articles Active EP2277808B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008103926A JP5234328B2 (ja) 2008-04-11 2008-04-11 物品収納設備
PCT/JP2009/050474 WO2009125616A1 (fr) 2008-04-11 2009-01-15 Installation de stockage d’articles

Publications (3)

Publication Number Publication Date
EP2277808A1 EP2277808A1 (fr) 2011-01-26
EP2277808A4 true EP2277808A4 (fr) 2013-09-18
EP2277808B1 EP2277808B1 (fr) 2015-11-11

Family

ID=41161752

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09731295.3A Active EP2277808B1 (fr) 2008-04-11 2009-01-15 Installation de stockage d articles

Country Status (8)

Country Link
US (1) US8814490B2 (fr)
EP (1) EP2277808B1 (fr)
JP (1) JP5234328B2 (fr)
KR (1) KR101350252B1 (fr)
CN (1) CN101998926B (fr)
SG (1) SG189765A1 (fr)
TW (1) TWI441764B (fr)
WO (1) WO2009125616A1 (fr)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010184760A (ja) * 2009-02-10 2010-08-26 Muratec Automation Co Ltd 移載システム
EP2452898B1 (fr) * 2009-11-27 2016-12-07 Daifuku Co., Ltd. Chariot convoyeur au plafond
JP5800193B2 (ja) * 2011-11-07 2015-10-28 株式会社ダイフク 物品収納設備
JP5545498B2 (ja) * 2011-12-21 2014-07-09 株式会社ダイフク 物品保管設備及び物品保管設備におけるメンテナンス方法
JP5733580B2 (ja) * 2012-11-13 2015-06-10 株式会社ダイフク 物品搬送装置及びそれを備えた物品収納設備
CN103318812B (zh) * 2013-07-09 2015-04-01 京东方科技集团股份有限公司 一种堆垛机用货叉组件及堆垛机、搬送卡匣的方法
WO2015071951A1 (fr) * 2013-11-12 2015-05-21 株式会社ダイフク Installation de stockage d'articles
JP6275824B2 (ja) * 2014-03-20 2018-02-07 株式会社日立国際電気 基板処理装置、半導体装置の製造方法及びプログラム
KR102206058B1 (ko) * 2016-06-27 2021-01-20 무라다기카이가부시끼가이샤 반송 시스템
US11684155B2 (en) 2017-01-27 2023-06-27 143046 Canada Inc. Pivotable overhead storage unit
EP3573497A4 (fr) 2017-01-27 2020-09-09 143046 Canada Inc. Unité de rangement en hauteur
FR3072371A1 (fr) * 2017-10-12 2019-04-19 Exotec Solutions Systeme de stockage et de transport d'objets entreposes dans des rayonnages d'un entrepot
CN107934329B (zh) * 2017-11-14 2020-08-11 深圳市招科智控科技有限公司 港口集装箱立体存放系统及方法
CN108001923A (zh) * 2017-12-27 2018-05-08 广州大学 一种物品自动存放装置
CN110615221B (zh) * 2019-09-19 2024-06-07 基点生物科技(成都)有限公司 一种样本架存储输送方法及循环系统
WO2021062550A1 (fr) 2019-10-04 2021-04-08 143046 Canada Inc. Unité de rangement en hauteur avec contenants de rangement pivotants
KR20230145771A (ko) * 2022-04-11 2023-10-18 삼성전자주식회사 반도체 캐리어 저장 시스템, 이를 포함하는 반도체 제조 시스템 및 이를 이용한 반도체 제조 방법
KR20240142793A (ko) * 2023-03-22 2024-10-02 세메스 주식회사 기판 이송 장치 및 기판 이송 방법

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5516884Y2 (fr) * 1975-10-09 1980-04-19
JPS5250487A (en) 1975-10-20 1977-04-22 Nakayama Seikosho:Kk Automatic control system using phenomenal configuration produced objec t of control as control deviation signal
JPH0224594Y2 (fr) * 1985-01-18 1990-07-05
JPS6260703A (ja) * 1985-09-09 1987-03-17 Hitachi Kiden Kogyo Ltd 移載装置の出入装置
JP3067528B2 (ja) 1994-06-20 2000-07-17 株式会社ダイフク 荷保管設備
JP3669057B2 (ja) 1996-06-03 2005-07-06 アシスト シンコー株式会社 ストッカへの搬送システム
JP3408162B2 (ja) * 1998-09-28 2003-05-19 三洋電機株式会社 自動販売機の商品搬出装置
JP3469789B2 (ja) * 1998-09-28 2003-11-25 三洋電機株式会社 自動販売機の商品搬出装置
JP2001171807A (ja) * 1999-12-22 2001-06-26 Tcm Corp サイドフォークリフトを用いた棚設備
JP2000159304A (ja) * 2000-01-01 2000-06-13 Advanced Display Inc カセットの搬送方法および該方法に用いる自動倉庫
JP2003054705A (ja) * 2001-08-07 2003-02-26 Nippon Yusoki Co Ltd 自動倉庫システム
JP3991852B2 (ja) * 2002-12-09 2007-10-17 村田機械株式会社 天井搬送車システム
JP4045451B2 (ja) * 2003-12-26 2008-02-13 村田機械株式会社 天井走行車システム
JP2005272053A (ja) * 2004-03-24 2005-10-06 Daifuku Co Ltd 物品収納設備
JP4387283B2 (ja) * 2004-10-25 2009-12-16 富士通株式会社 収納棚用搬送機構およびその制御方法並びにその制御プログラム
US7670555B2 (en) * 2006-09-08 2010-03-02 Rex A. Hoover Parallel gripper for handling multiwell plate
JP4807579B2 (ja) * 2006-09-13 2011-11-02 株式会社ダイフク 基板収納設備及び基板処理設備
JP4363432B2 (ja) * 2006-09-21 2009-11-11 村田機械株式会社 移載装置
CN101139032B (zh) * 2007-10-17 2011-05-11 郑卫星 转向架立体存储库
JP5250487B2 (ja) 2009-06-11 2013-07-31 日立アプライアンス株式会社 炊飯器

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
No further relevant documents disclosed *

Also Published As

Publication number Publication date
TW200942468A (en) 2009-10-16
JP5234328B2 (ja) 2013-07-10
WO2009125616A1 (fr) 2009-10-15
EP2277808A1 (fr) 2011-01-26
KR20100136497A (ko) 2010-12-28
CN101998926B (zh) 2013-06-19
SG189765A1 (en) 2013-05-31
US20110158776A1 (en) 2011-06-30
US8814490B2 (en) 2014-08-26
EP2277808B1 (fr) 2015-11-11
CN101998926A (zh) 2011-03-30
JP2009256004A (ja) 2009-11-05
TWI441764B (zh) 2014-06-21
KR101350252B1 (ko) 2014-01-10

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