EP2279973A1 - Dispositif pour le traitement d'un substrat de feuille - Google Patents

Dispositif pour le traitement d'un substrat de feuille Download PDF

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Publication number
EP2279973A1
EP2279973A1 EP09166492A EP09166492A EP2279973A1 EP 2279973 A1 EP2279973 A1 EP 2279973A1 EP 09166492 A EP09166492 A EP 09166492A EP 09166492 A EP09166492 A EP 09166492A EP 2279973 A1 EP2279973 A1 EP 2279973A1
Authority
EP
European Patent Office
Prior art keywords
foil substrate
roller
foil
redirecting
roll
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP09166492A
Other languages
German (de)
English (en)
Inventor
Jozef Lenssen
Alexander Leonardus Lambertus Broekhof
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Helianthos BV
Original Assignee
Helianthos BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Helianthos BV filed Critical Helianthos BV
Priority to EP09166492A priority Critical patent/EP2279973A1/fr
Priority to PCT/EP2010/060689 priority patent/WO2011012542A1/fr
Priority to TW99124407A priority patent/TW201121866A/zh
Publication of EP2279973A1 publication Critical patent/EP2279973A1/fr
Withdrawn legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H23/00—Registering, tensioning, smoothing or guiding webs
    • B65H23/04—Registering, tensioning, smoothing or guiding webs longitudinally
    • B65H23/32—Arrangements for turning or reversing webs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H23/00—Registering, tensioning, smoothing or guiding webs
    • B65H23/02—Registering, tensioning, smoothing or guiding webs transversely
    • B65H23/022—Registering, tensioning, smoothing or guiding webs transversely by tentering devices
    • B65H23/025—Registering, tensioning, smoothing or guiding webs transversely by tentering devices by rollers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2404/00—Parts for transporting or guiding the handled material
    • B65H2404/10—Rollers
    • B65H2404/12—Rollers with at least an active member on periphery
    • B65H2404/123—Rollers with at least an active member on periphery moving in parallel to roller axis
    • B65H2404/1231—Arrangement of axially movable active elements, i.e. movable in parallel to roller axis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2701/00—Handled material; Storage means
    • B65H2701/10—Handled articles or webs
    • B65H2701/19—Specific article or web
    • B65H2701/1942—Web supporting regularly spaced non-adhesive articles

Definitions

  • the invention relates to a device for processing a foil substrate, comprising a holder for a roll of the foil substrate and a transporter unit for unwinding the rolled foil substrate and transporting it along a process path.
  • Such devices can for example be plasma processing devices or chemical vapour deposition devices in a roll-to-roll process or a roll-to-sheet process, e.g., for production of flexible electronic or optical components, flexible displays or photovoltaic foils.
  • WO 98/13882 discloses a method of manufacturing a photovoltaic foil.
  • the process uses a temporary substrate on which flexible thin-film solar cells are deposited.
  • the use of the temporary substrate allows relatively high processing temperatures while using (semi-)continuous roll-to-roll (or reel-to-reel) production processes.
  • the active layers of such solar cells comprise a transparent conductive oxide layer (TCO), an active absorbent layer (e.g., thin-film silicon), and a back contact layer (e.g. a reflective metal layer).
  • TCO transparent conductive oxide layer
  • an active absorbent layer e.g., thin-film silicon
  • a back contact layer e.g. a reflective metal layer
  • the active absorber layer which can for instance be a thin film silicon layer, is deposited, e.g., using plasma enhanced CVD.
  • the reflective back contact can then be deposited by means of physical vapor deposition and a pattern can be prepared for monolithic interconnection.
  • the film can then be laminated to a permanent carrier foil. Wet etching techniques can be used to remove the temporary substrate foil.
  • the foil can be stretched when it follows its path during the depositing process steps, e.g., with the aid of rollers positioned at regular distances of each other on the same side of the foil substrate.
  • the rollers push on one of the foil surface, so that each roller deflects the process path over a certain angle. Since all rollers push on the same side, the cumulative effect is that the foil substrate follows a polygonal or curved process path, with the processing stations being directed to the convex outer surface of the foil substrate. If a large number of rollers are used, it is desirable to redirect the process path to prevent that the process path curls up too much. Redirecting could be done with the aid of a turning roller on the opposite side of the foil substrate. However, such a turning roller would act upon the surface with the freshly deposited layer, which could be damaged as a result.
  • the object of the invention is achieved with a device for processing a foil substrate, comprising a holder for a roll of the foil substrate and a transporter unit for unwinding the rolled foil substrate and transporting it in a transport direction along a process path, wherein the device comprises at least one redirecting roller with an axis of rotation which is parallel to the surface of the passing foil substrate and which is not under right angles with the transport direction.
  • the foil passes the redirecting roller, the foil is redirected under an angle which is dependent on the angle between the roller and the transport direction of the foil before passing the redirection roller, and which is also dependent on the angle between the roll-on direction and the tangential roll-off direction of the foil passing the roller.
  • a single roller under an angle of 45 degrees with the transport direction can redirect the foil under an angle of 90 degrees if the foil is turned over 180 degrees over the circumference of the roller.
  • a number of stretching members such as rollers, is configured to push upon one side of the foil substrate, the stretching members extending along the full width of the foil substrate in a direction perpendicular to the transportation direction.
  • the stretching members create a polygonal process path, wherein one or more processing stations can be positioned at the convex side of the process path.
  • the processing stations can for example be chemical vapour deposition stations.
  • the device can for example comprise two subsequent redirecting rollers each turning the process path over a right angle. These two redirecting rollers can for example be parallel. As a result, after the foil substrate passes the two redirecting rollers the transportation direction will be the same but offset over a certain distance in comparison to the transportation direction of the foil before passing the redirecting rollers. Alternatively, the two redirecting rollers can for example be under right angles with each other.
  • the device according to the present invention can also have more than two, e.g., three or four redirecting rollers, for gradually redirecting the processed foil substrate into the desired direction.
  • the redirecting rollers can comprise independently moveable axial segments, which compensate for the lateral movement of the foil.
  • the segments can be moved actively by a programmed driver or they can be moved passively, e.g., by a tracer following a guiding surface when the roller is turned, wherein either the tracer of the guiding surface is connected to the axial segment.
  • the tracer can for example be a tracer pin or tracer wheel.
  • the foil material itself may exert a force acting against the lateral movement. Depending on the type of foil material used and on further process conditions, this force exerted by the foil may be sufficient to compensate for the lateral movement.
  • a suitable type of roller turner that could be useful in a device according to the present invention is a roller turner as disclosed in NL 9402031 , disclosing the use of such a roller to correct lateral movement of a conveyor belt.
  • Figure 1 shows a device 1 according to the present invention for manufacturing a photovoltaic foil by depositing the various layers on a foil substrate 2 in a roll-to-roll process.
  • the device 1 comprises a holder 3 for a roll of foil substrate 2 and rollers 4 for transporting the foil substrate 2 along a process path with chemical vapor deposition (CVD) stations 5.
  • the foil substrate 2 runs in a direction indicated in the drawing by reference sign A, A', A", A"', A"", and A V respectively.
  • the CVD stations 5 deposit a layer onto a deposition side 6 of the foil substrate 2 opposite the side 7 contacted by the rollers 4.
  • the process path includes a first curved section 8, a redirecting section 9 and a second curved section 10.
  • the turner rollers 4 push on the passing foil substrate 2 at regular distances. Since each roller 4 deflects the path of the foil substrate 2 over a small angle, the process path curves.
  • the foil substrate 2 runs in an almost vertical direction A' to a final roller 11 turning the foil substrate 2 over more than 90 degrees to a horizontal direction A".
  • the foil substrate 2 runs to a first redirecting roller 12.
  • the axis of rotation of the redirecting roller 12 and of the final roller 11 are within the same plane making an angle of 45 degrees with each other.
  • the foil substrate 2 runs over 180 degrees over the circumference of the redirecting roller 12. Due to the fact that the redirecting roller 12 is positioned under an angle of 45 degrees with the roll-on direction A" of the foil substrate 2, the foil substrate 12 is redirected to a horizontal roll-off direction A"' under right angles with the horizontal roll-on direction A" of the foil substrate 2. Subsequently the foil substrate 2 passes a second redirecting roller 13, which is parallel to and in the same plane as the first redirecting roller 12. Again, the foil substrate 2 passes the circumference of the second redirecting roller 13 over 180 degrees and is again redirected over 90 degrees to a horizontal direction A"" parallel to the direction A" of the foil between the final roller 11 and the first redirecting roller 12.
  • the foil substrate 2 passes a first roller 14 of the second curved process path section 10. This way, the upwards direction A' of the substrate foil 2 is turned to a downwards direction A V without using a turner roller contacting the freshly processed lower surface 6 of the foil substrate 2.
  • the foil substrate is rewound to a roll 15.
  • the roll 15 is operatively connected to a transporter unit 16. By winding the roll 15, the roll 3 is unwound and the foil substrate is transported in the transport direction along the process path 8, 9, 10.
  • Figure 2 shows a set of two parallel redirection rollers 20, 21.
  • a foil 22 is transported in a direction indicated with arrow B.
  • the first roller 20 is under an angle of about 45 degrees with the transport direction B.
  • the foil 22 passes the roller 20 over 180 degrees relative to the longitudinal axis of the roller 20 over the circumference of the roller 20.
  • the foil substrate 22 is redirected over an angle of 90 degrees in plan view to a roll-off direction B'.
  • the foil 22 passes the second redirection roller 21 which is substantially parallel to the first redirection roller 20.
  • the foil 22 passes the second redirection roller 21 over 180 degrees relative to the longitudinal axis of the second roller 21 of its circumference, resulting in a redirection of again 90 degrees in plan view, and a new curved process path, parallel to the first process path can be followed with a transport direction B", which is in plan view the same as the transport direction B of the first flow path.
  • the roller 34 is provided with four axially moveable segments 40, only one of which is shown in the drawing of Figure 4 for reasons of clarity.
  • the axially moveable segment 40 comprises an outer shell 41 shaped as a quarter of a cylinder and having a concave inner surface with a slider head 42 in the middle of the concave surface extending in a direction parallel to the longitudinal axis of the roller 34.
  • the slider head 42 is arranged on a guiding rail 43 on the cylindrical surface of a cylindrical core 44 of the roller 34.
  • the guiding rail 43 extends into a direction parallel to the longitudinal axis of the roller 34.
  • the slider head 42 is slideable over the guiding rail 43.
  • a stationary bus 45 fits over one end of the cylindrical core 44 of the roller 34.
  • the bus 45 does not rotate with the cylindrical core 44. To minimize friction between the bus 45 and the core 44, sufficient play between the two parts should be provided.
  • the stationary bus 45 is made of a single part with the guiding surface 36.
  • the axially moveable segment 40 has a tapered end 46 directed to the guiding surface 36.
  • the tapered end 46 carries a shoe 47 with a tracer wheel 48 contacting the guiding surface 36.
  • the tracer wheel 48 moves along the stationary guiding surface 36.
  • the tracer wheel 48 moves to the first rounded turning point 37, the guiding surface 36 pushes the axial segment 40 away towards the other end of the roller 34.
  • the foil substrate 2 will tend to move towards the guiding surface 36.
  • the guiding surface 36 is arranged in such a way that the second rounded turning point 38 is in line with the first roll-on contact line of the foil substrate with the roller 34.
  • the roller 34 is rotated, the axial segment 40 is pushed away against the lateral movement of the foil substrate 2 until the tracer wheel 48 reaches the first rounded turning point 37.
  • This point 37 is in line with the last roll-off contact line between the foil substrate 2 and the roller 34, where the foil substrate departs from the roller 34.
  • the axial segment is allowed to slide back towards the second rounded turning point 38 of the guiding surface 36, e.g., under the action of a spring or the like.

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
EP09166492A 2009-07-27 2009-07-27 Dispositif pour le traitement d'un substrat de feuille Withdrawn EP2279973A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP09166492A EP2279973A1 (fr) 2009-07-27 2009-07-27 Dispositif pour le traitement d'un substrat de feuille
PCT/EP2010/060689 WO2011012542A1 (fr) 2009-07-27 2010-07-23 Dispositif pour traiter un substrat une feuille
TW99124407A TW201121866A (en) 2009-07-27 2010-07-23 Device for processing a foil substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP09166492A EP2279973A1 (fr) 2009-07-27 2009-07-27 Dispositif pour le traitement d'un substrat de feuille

Publications (1)

Publication Number Publication Date
EP2279973A1 true EP2279973A1 (fr) 2011-02-02

Family

ID=41503769

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09166492A Withdrawn EP2279973A1 (fr) 2009-07-27 2009-07-27 Dispositif pour le traitement d'un substrat de feuille

Country Status (3)

Country Link
EP (1) EP2279973A1 (fr)
TW (1) TW201121866A (fr)
WO (1) WO2011012542A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013179019A (ja) * 2012-02-02 2013-09-09 Nitto Denko Corp ガイド部材、ガイド機構及び有機ｅｌデバイスの製造方法
CN103583083A (zh) * 2011-10-19 2014-02-12 日东电工株式会社 有机el器件的制造方法及制造装置
EP2773165A4 (fr) * 2011-10-24 2015-08-19 Nitto Denko Corp Procédé de fabrication de dispositifs à électroluminescence organique et appareil de fabrication

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3095131A (en) * 1959-07-06 1963-06-25 Mount Hope Machinery Ltd Web guiding method and apparatus
DE4322114A1 (de) * 1992-08-25 1994-01-13 Barmag Barmer Maschf Umlenkwalze
NL9402031A (nl) 1994-12-02 1996-07-01 Kevin Machinebouw B V Geleiderol en een daarvan voorzien transportbandsamenstel.
WO1998013882A1 (fr) 1996-09-26 1998-04-02 Akzo Nobel N.V. Procede de fabrication d'une feuille photovoltaique
CH690548A5 (fr) * 1995-05-08 2000-10-13 Bobst Sa Dispositif de renvoi d'une bande de matériau.
US20020108709A1 (en) * 2000-05-26 2002-08-15 K.K. Mashintex Waste peeling apparatus
US20080029640A1 (en) * 2006-07-31 2008-02-07 Industrial Technology Research Institute Apparatus and system for roll-to-roll processing

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3095131A (en) * 1959-07-06 1963-06-25 Mount Hope Machinery Ltd Web guiding method and apparatus
DE4322114A1 (de) * 1992-08-25 1994-01-13 Barmag Barmer Maschf Umlenkwalze
NL9402031A (nl) 1994-12-02 1996-07-01 Kevin Machinebouw B V Geleiderol en een daarvan voorzien transportbandsamenstel.
CH690548A5 (fr) * 1995-05-08 2000-10-13 Bobst Sa Dispositif de renvoi d'une bande de matériau.
WO1998013882A1 (fr) 1996-09-26 1998-04-02 Akzo Nobel N.V. Procede de fabrication d'une feuille photovoltaique
US20020108709A1 (en) * 2000-05-26 2002-08-15 K.K. Mashintex Waste peeling apparatus
US20080029640A1 (en) * 2006-07-31 2008-02-07 Industrial Technology Research Institute Apparatus and system for roll-to-roll processing

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103583083A (zh) * 2011-10-19 2014-02-12 日东电工株式会社 有机el器件的制造方法及制造装置
EP2770803A4 (fr) * 2011-10-19 2015-08-19 Nitto Denko Corp Procédé et appareil de fabrication d'un dispositif organique à diodes électroluminescentes
US9224953B2 (en) 2011-10-19 2015-12-29 Nitto Denko Corporation Method and apparatus for manufacturing organic el device
CN103583083B (zh) * 2011-10-19 2016-08-17 日东电工株式会社 有机el器件的制造方法及制造装置
EP2773165A4 (fr) * 2011-10-24 2015-08-19 Nitto Denko Corp Procédé de fabrication de dispositifs à électroluminescence organique et appareil de fabrication
JP2013179019A (ja) * 2012-02-02 2013-09-09 Nitto Denko Corp ガイド部材、ガイド機構及び有機ｅｌデバイスの製造方法

Also Published As

Publication number Publication date
WO2011012542A1 (fr) 2011-02-03
TW201121866A (en) 2011-07-01

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