EP2286471A2 - Actionneur de traction-compression diélectrique - Google Patents

Actionneur de traction-compression diélectrique

Info

Publication number
EP2286471A2
EP2286471A2 EP09741646A EP09741646A EP2286471A2 EP 2286471 A2 EP2286471 A2 EP 2286471A2 EP 09741646 A EP09741646 A EP 09741646A EP 09741646 A EP09741646 A EP 09741646A EP 2286471 A2 EP2286471 A2 EP 2286471A2
Authority
EP
European Patent Office
Prior art keywords
dielectric
particles
actuator according
electrodes
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP09741646A
Other languages
German (de)
English (en)
Inventor
Lukas Düring
Gabor Kovacs
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Eidgenoessische Materialpruefungs und Forschungsanstalt
Original Assignee
Eidgenoessische Materialpruefungs und Forschungsanstalt
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eidgenoessische Materialpruefungs und Forschungsanstalt filed Critical Eidgenoessische Materialpruefungs und Forschungsanstalt
Publication of EP2286471A2 publication Critical patent/EP2286471A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
    • H10N30/067—Forming single-layered electrodes of multilayered piezoelectric or electrostrictive parts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/09—Forming piezoelectric or electrostrictive materials
    • H10N30/098—Forming organic materials

Definitions

  • the present invention relates to an actuator according to the preamble of claim 1 and a method for producing such actuators.
  • actuators such as electric motors, stepper motors or piezoelectric crystals are used in robotics (including microtechnology), where they convert electrical energy into mechanical work.
  • these small-format actuators have a poor efficiency; in a larger format they are heavy.
  • actuators based on electroactive polymers are finding increasing interest, in particular also dielectric actuators which convert electrical voltage into mechanical work, as well as for tactile applications such as a tactile glove or a tactile display for Braille writing (see “Miniatured Electrostatic Tactile Display with High Structural Compliance, M. Jungmann, H: F: Schlaak, Proceedings of the Conference “Eurohaptics 2002”).
  • dielectric actuators of an incompressible elastomeric film or an incompressible elastomeric film which is coated on both sides with electrodes consist dielectric actuators of an incompressible elastomeric film or an incompressible elastomeric film which is coated on both sides with electrodes.
  • the elastomer foil is compressed in the field direction by the Coulomb force acting in the electrodes (ie in a direction parallel to the direction of the field lines), the elastomer, since incompressible, at the same time extending perpendicular to the field direction ; a reduction in the applied voltage causes the elastomeric film to return to its original configuration.
  • the dielectric actuator can now work on the deformation of the elastomer work. Either when applying a voltage, when the elastomer compressed in the field direction expands perpendicular to the field direction due to its incompressible properties, or when reducing the voltage in the field direction, when the elastic energy stored in the elastomer becomes free during the recovery.
  • dielectric actuators are the high energy density, which can be more than 0.2 J / cm 3 , which corresponds to more than twice the energy density of piezoelectric actuators.
  • Next advantageous is the possibility of simple encapsulation, so that such actuators are used depending on the elastomer used under a variety of environmental conditions.
  • the material costs for such actuators are low; they are also light and noiseless.
  • the elastomer acts as a dielectric in the dielectric actuator, the aim being to achieve the highest possible dielectric constant and the highest possible electrical breakdown strength.
  • silicones or acrylics are used, for example.
  • 3M acrylic elastomer VHB4910 which allows maximum elongation (up to 300%).
  • a mechanical pre-stretching of the elastomeric film or the elastomeric film leads to increased dielectric strength and lower thickness, which in turn results in a smaller thickness of the film or foil and thus to lower electrical voltages for the same electrostatic pressure.
  • the thickness of an elastomeric film is in the micron range, z.Bsp. at 20 microns, which hardly even with highly stretchable dielectric layers between the electrodes gives a usable working area across the thickness (or height) of the actuator; Accordingly, dielectric actuators are stacked or formed as a spiral, so that the working paths of the individual actuators or the individual turns of the spiral can add up to the resulting work path on the height of the stack or the spiral for an application is sufficient (while the labor of the area of the actuators, not depending on their number).
  • the electrodes are usually applied as a coating on the elastomer, wherein graphite powder is used, which is included in the stacking of actuators between each superposed elastomer sections.
  • graphite powder is used, which is included in the stacking of actuators between each superposed elastomer sections.
  • the individual graphite grains in the coating can slide freely on each other and so do not hinder the deformation.
  • the actuator according to the invention has the characterizing features of claim 1. Furthermore, a method for producing the actuator according to the invention has the characterizing features of claim 13.
  • the electrodes can transmit a tensile stress directed perpendicular to the surface of the dielectric makes it possible for the actuator to perform work in the field direction already when a voltage is applied, which is done by pulling force exerted by the actuator. This opens up further fields of application compared to conventional dielectric actuators, which only deliver work in the field direction if, during the voltage reduction, the energy stored in the dielectric is released. Due to the fact that the ability to deliver work in the field direction via pressure remains unaffected, the actuator according to the invention can furthermore still be used in the previous fields of application.
  • the method according to the invention provides a simple and favorable route for the production.
  • Fig. 1 a dielectric actuator according to the prior art
  • FIG. 2 shows an inventive actuator with the structure of the actuator of Fig. 1, wherein a section between two adjacent dielectric layers is shown,
  • 3a shows a stack of single actuators formed from a folded film strip
  • FIG. 3b shows the film strip of Figure 3a, min to be coated areas.
  • FIG. 1 schematically shows a section through a conventional dielectric actuator 1, which has an encapsulation 2 and a stack 4 consisting of dielectric single actuators 3.
  • the stack 4 is limited end by end pieces 5, with transmission elements 6 for the transmission of the mechanical movement of the actuator 1 to the environment.
  • Projections 7 block the end pieces 5 in their outermost position which corresponds to the passive state of the actuator 1: if no voltage is applied to the individual actuators 3, the elastic and incompressible dielectrics enclosed in each case between their electrodes are in the uncompressed state, i. They have maximum height (or thickness) and therefore their minimum diameter. Similarly, the sprayed on both sides of a dielectric layer powder layer of graphite, which forms the electrode layer.
  • each individual actuator 3 When a voltage is applied, the electrodes of each individual actuator 3 charge and generate an electric field whose field lines extend parallel to the longitudinal axis 10 of the actuator 1.
  • the coulomb force prevailing between the charges causes the elastic dielectric in the single actuator 3 to be compressed, ie it loses height in the field direction, the displaced mass causing an increase in the diameter.
  • the sum of the height changes of the individual actuators 3 then leads to a displacement of the (or both) transmission elements 6 in the direction of the arrows 11.
  • the electrodes consist of a layer of basically loose graphite powder, or of graphite powder whose grains or particles are not connected to each other, the individual, separated by electrodes dielectrics can separate from each other when z.Bsp. the transmission members 6 are blocked or tensioned. In other words, the actuator 1 can not do any work by pulling (direction of the arrows 11). On the other hand, it is advantageous that an electrode made of loose graphite powder can easily follow the diameter increase of the dielectric, i. not hindered.
  • the actuator 1 can perform work as soon as the voltage applied to the individual actuators 3 is reduced, with the result that the dielectrics, relieved of the Coulomb forces, return to their original height: the pressure exerted thereby by the elastic dielectrics is exerted of the Graphite powder layer transferred existing electrodes and moves the end pieces 5 away from each other, so that work can be done in the direction of arrows 12 to the environment.
  • the prior art dielectrics are made of a dielectric polymer that combines properties such as elasticity (storage of work), incompressibility, and sufficient dielectric constant sufficiently well in view of the intended application.
  • Figure 2 shows a section of an inventive actuator 20, which basically has the same structure as the actuator 1 of Figure 1; The detail shown corresponds approximately to the area indicated by the dotted line 13 (FIG. 1). The longitudinal axis of the actuator 20 is denoted by 14.
  • An encapsulation 21 is apparent, which encapsulates a stack 22 of single actuators 23 in an operable manner.
  • Each individual actuator 23 is formed by a surface-shaped, here preferably disk-shaped dielectric 24, which is provided on both sides on the flat side with likewise planar electrodes 25 (for example positive charge) and 26 (for example negative charge).
  • End pieces 29 correspond to the end pieces 5 of FIG. 1.
  • the dielectrics used are electroactive polymers, preferably dielectric polymers, eg.
  • stickiness refers in particular to surfaces which are characterized by adhesiveness and have high cohesive forces. Stickiness is thus a physical-mechanical phenomenon. Here, the adhesion comes about through the mechanical entanglement and crosslinking of filamentous surface structures. In the transition to the nanoscale, as is the case with the smallest particles for electrodes, atomic forces occur, such as van der Waals forces or hydrogen bonds in the foreground. The nature of the thing is the transition from the sticky surface for larger particles to sticking due z.Bsp. the van der Waals forces fluent; However, the expert can easily determine whether he wants to choose a dielectric with high adhesiveness or whether the adhesion by z.Bsp. With regard to the concrete actuator to be produced in case of doubt by simple experiments. van der Waal's powers suffice. If this is not the case, it can, as described below, fix particles on a non-sticky dielectric by applying a voltage.
  • the electrical connections of the electrodes are omitted to relieve the figure and to the relevant state of the art (for example, the publications DE 10 2004 011 029 and WO 2007/0292275 referenced).
  • the formation of the electrodes 25, 26 is the subject of the present invention, this does not apply to their electrical connections, which are conventional and can be produced by the person skilled in the art at any time according to the intended application.
  • an elastic, slightly compressible spacer sleeve 27 is arranged, which fills in the passive state of the actuator 20, the gap between the individual actuators 23 and the enclosure 21, but as far as yielding and elastic, in the active state, the enlargement of the diameter (in the direction of the arrow 28) and in the transition to the passive state to fill the gap again.
  • the electrodes 25, 26 of the illustrated embodiment do not consist of a layer of loose grains or particles of graphite powder, which, for example. has been sprayed onto the dielectric, but from a single layer of particles 30 of this powder, the particles 30 being distributed on the surface of the dielectric they touch. It can be seen that each individual layer of particles 30, which respectively forms one electrode 25, 26, is assigned in common to two adjacent individual actuators 23. As a result, the contraction of the dielectrics 24 by the individual NEN particle is transferred to the adjacent dielectric 24, until the adhesion of the individual particle produced by the Coulomb force to the dielectrics assigned to it is overcome. (Of course, the particles 30 can also transmit pressure).
  • the electrodes 25, 26 are designed according to the invention in such a way that they can transmit a tensile stress directed perpendicular to the surface of the dielectric, wherein as described above they are preferably designed such that they consist of a powder layer with conductive particles 30 and the layer has substantially a single layer of particles 30 dispersed on the surface of the dielectric they contact.
  • the dielectric used is preferably a tacky, dielectric polymer (for example VHB 4910/4905 from 3M), on which the particles, once applied, adhere on their own.
  • a corresponding method for the production of an actuator according to the invention is once that a powder layer of conductive particles is applied to predetermined areas of the sticky dielectric.
  • a stack 22 is to produce individual actuators 23, which in terms of ease of manufacture z.Bsp. consists of an S-shaped folded film strip of a suitable dielectric (see WO 2007/029275) or from a spirally wound film strip, the coating with powder must be such that after folding or joining the spiral only one the opposing surfaces of the dielectric 24 (which interposes an electrode 25, 26 between them). close) is coated. Otherwise, an electrode consisting of only a single layer of particles 30 would be difficult to manufacture.
  • FIG. 3 a shows a stack 40 of individual actuators 41, which is formed from a zig-zag folded film strip 42 made of a dielectric polymer. It can be seen that each individual layer 43 of the folded film strip 42 has on both sides an electrode (consisting of particles 30, FIG. 2).
  • Figure 3b shows the unfolded film strip 42 with its indicated by the dotted lines 44 folding points.
  • the predetermined regions 45 to be coated are covered with the particles 30 symbolized by dots (FIG. 2). During folding, therefore, there is only a single layer of particles 30 between adjacent layers 43 (FIG. 3 a). If the regions 46 were likewise coated, an electrode consisting of two layers would be present between adjacent layers 43 (FIG. 3 a) Particles 30 would be what is not permitted according to the invention.
  • the person skilled in the art will select the predetermined areas for the coating in such a way that only a layer of particles 30 is enclosed between them in the stack of opposing surfaces of the dielectric.
  • the surface sections can also be divided into any suitable manner, but always so that the coating results in the stack as the only layer of particles 30.
  • the production process according to the invention therefore comprises the application of a powder layer of conductive powder to the predetermined regions, which is conventional, e.g. by spraying, can be made.
  • the next step comprises the distribution of the sprayed-on powder in the predetermined regions on the surface of the dielectric such that they are uniformly and substantially completely covered by sprayed-on particles.
  • the Distribution occurs mechanically, particularly preferably characterized in that the applied powder is rubbed by a pressed on the surface of the dielectric stamp (made of silicone or sponge rubber), which by some reciprocating movements in the predetermined range 45, or in the case of disk-shaped layers 43rd can also be done by rotation of the punch.
  • This mechanical movement dissolves clots or aggregates of particles and covers exposed areas on the surface with particles 30.
  • the particles 30 are pressed against the surface so that they then adhere to the sticky surface.
  • particles not adhering to the surface of the dielectric are removed from it. This is preferably done by suction or blowing away the loose particles.
  • a silicone RTV 23 stamp was placed in a Petri dish filled with Ketjenblack EC-600JD graphite powder and the powder attached to the stamp was placed on a dielectric.
  • the dielectric consisting of the elastomer VHB 4910 from 3M had a diameter of 20 mm and a height of about 70 ⁇ m. Circular movements of the stamp allowed the particles to be evenly distributed at high density over the entire surface of the dielectric material to be coated, and the excess and non-adherent powder amount to be removed from the surface by suction.
  • an actuator was built of a length of 40 mm. After attaching the electrical supply line and the force application points at both ends, the actuator could be activated with up to 4.2 kV.
  • a single layer of particles 30 can also be produced on a non-tacky dielectric, namely when the particles are small (500 nm, but preferably 200 nm or less), as is the case with carbon nanotubes or fullerenes, or with correspondingly small graphite particles.
  • these small particles are brought so close to the molecules of the dielectric that adhesion by van der Waals forces occurs.
  • larger particles can be applied as the only layer on a dielectric by applying an electrical voltage after application on both sides of the dielectric, so that particles that touch the surfaces adhere by the electrostatic attraction and the other particles easily by suction can be removed. This leaves on each surface a single layer of particles 30, which in turn can be covered by another dielectric 24, and so on until the desired stack is made.
  • the single layer of particles forming an electrode may also comprise conductive metallic particles such as aluminum, iron, copper and / or gold particles.
  • conductive metallic particles such as aluminum, iron, copper and / or gold particles.
  • the effect according to the invention can be achieved if the layer of particles is not located between the dielectrics but is let into the surface of one of the two adjacent dielectrics. So for example. in the form of metal ions implanted in a dielectric polymer. These metal ions then also form an electrode which can transmit tensile stresses directed perpendicular to the surface of the dielectric.
  • a foam is used as the dielectric, which, since elastic and compressible, does not expand or not substantially perpendicular to the field direction when compressed in the field direction.
  • foams may consist of the following materials: Polyurethane soft foam (such as Bayflex, Elastoflex, Elastofoam) as well as closed-cell, cross-linked foams based on polyamide (ZOTEK N®) or other special polymers (polyethylene).
  • ZOTEK N® polyamide
  • a metal plate may be used, ie an electrode which is designed to transmit a tension directed perpendicular to the surface of the dielectric.
  • the electrode is only partially formed as a single layer.
  • such an embodiment can not transmit the maximum possible tensile forces per se, since the area of the single-layer layer is reduced.
  • Such embodiments are encompassed by the present invention.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Micromachines (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

L'invention concerne un actionneur de traction-compression comportant une pile de diélectriques élastiques séparés mutuellement par des électrodes et comprimés lors de l'application d'une tension électrique en raison de la force de Coulomb qui est alors produite. Comme les électrodes sont capables de transmettre une contrainte de traction perpendiculaire à la surface du diélectrique, l'actionneur peut fournir un travail par le biais d'une force de traction. Les électrodes sont de préférence composées d'une couche individuelle de particules de graphite réparties sur la surface du diélectrique avec lequel elles se trouvent en contact.
EP09741646A 2008-05-09 2009-05-05 Actionneur de traction-compression diélectrique Withdrawn EP2286471A2 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CH7132008 2008-05-09
CH8062008 2008-05-28
PCT/CH2009/000141 WO2009135328A2 (fr) 2008-05-09 2009-05-05 Actionneur de traction-compression diélectrique

Publications (1)

Publication Number Publication Date
EP2286471A2 true EP2286471A2 (fr) 2011-02-23

Family

ID=41058663

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09741646A Withdrawn EP2286471A2 (fr) 2008-05-09 2009-05-05 Actionneur de traction-compression diélectrique

Country Status (2)

Country Link
EP (1) EP2286471A2 (fr)
WO (1) WO2009135328A2 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011080128A1 (de) 2011-07-29 2013-01-31 Robert Bosch Gmbh Verfahren zur Herstellung biegbarer EAP-Generatoren
DE102015206191B4 (de) * 2015-04-08 2017-03-23 Festo Ag & Co. Kg Greifvorrichtung zum Greifen von Gegenständen
DE102019123898B4 (de) * 2019-09-05 2022-05-12 Brainchain Ag Elastisches Dielektrikum mit mikroskalinen Poren, und Herstellungsverfahren

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2110590A1 (fr) * 2008-04-14 2009-10-21 Robert Bosch Gmbh Organe de verrouillage

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4277103B2 (ja) * 2004-02-03 2009-06-10 国立大学法人信州大学 カーボンナノファイバーを用いる高分子アクチュエータ
WO2006123317A2 (fr) * 2005-05-19 2006-11-23 Ecole Polytechnique Federale De Lausanne (Epfl) Polymere electroactif dielectrique
ITPI20050095A1 (it) * 2005-09-05 2005-12-05 Federico Carpi Attuatore, sensore e generator a polimeri elettroattivi in configurazione ripiegata

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2110590A1 (fr) * 2008-04-14 2009-10-21 Robert Bosch Gmbh Organe de verrouillage

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
RANDAZZO M ET AL: "Architecture for the semi-automatic fabrication and assembly of thin-film based dielectric elastomer actuators", ELECTROACTIVE POLYMER ACTUATORS AND DEVICES (EAPAD) 2008, PROCEEDINGS OF SPIE, US, vol. 6927, 10 April 2008 (2008-04-10), pages 69272D1 - 69272D10, XP002536275, ISSN: 0277-786X, DOI: 10.1117/12.784981 *

Also Published As

Publication number Publication date
WO2009135328A3 (fr) 2010-01-14
WO2009135328A2 (fr) 2009-11-12

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