EP2320090A2 - Pompe à vide poussé - Google Patents

Pompe à vide poussé Download PDF

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Publication number
EP2320090A2
EP2320090A2 EP10013671A EP10013671A EP2320090A2 EP 2320090 A2 EP2320090 A2 EP 2320090A2 EP 10013671 A EP10013671 A EP 10013671A EP 10013671 A EP10013671 A EP 10013671A EP 2320090 A2 EP2320090 A2 EP 2320090A2
Authority
EP
European Patent Office
Prior art keywords
lubricant
rotor
vacuum pump
high vacuum
stator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP10013671A
Other languages
German (de)
English (en)
Other versions
EP2320090A3 (fr
EP2320090B1 (fr
Inventor
Mirko Mekota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2320090A2 publication Critical patent/EP2320090A2/fr
Publication of EP2320090A3 publication Critical patent/EP2320090A3/fr
Application granted granted Critical
Publication of EP2320090B1 publication Critical patent/EP2320090B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/059—Roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F04D29/063—Lubrication specially adapted for elastic fluid pumps

Definitions

  • the invention relates to a high vacuum pump according to the preamble of the first claim.
  • Vacuum pumps of molecular and turbomolecular design have proven to produce high vacuum.
  • a generic vacuum pump has a fast rotating rotor that rotates at tens of thousands of revolutions per minute.
  • Various types of storage are known, including non-contact magnetic bearings and bearings, such as ball bearings with oil or grease lubrication and ceramic balls. These known bearings lead to an electrically insulated suspension of the rotor, so that it can come to a charging of the rotor with appropriate fluids to be pumped.
  • uncontrolled electrical discharge, so-called flashovers, between rotor and stator which lead to mechanical damage to these components and are therefore undesirable.
  • the EP-A 1915512 Suggests two solutions to this problem.
  • the first solution provides a filamentous and conductive body contacting the rotor.
  • the second solution is to generate by geometric design at a specific location flashovers between the rotor and stator.
  • the first solution is disadvantageous in that the body and its contacting point on the rotor are subject to wear due to the contact which occurs even at a low relative speed. The abrasion generated by this wear accumulates in the ball bearing and destroys it.
  • the second solution has the disadvantage that the component to which the flashovers take place, erosion damage occur. This erosion means wear, so that the arrangement lacks long-term stability. After some time, the arrangement does not work anymore and uncontrolled flashovers occur again.
  • the means for lubricating the rolling bearing are adapted such that such a discharge of the rotor is caused to prevent flashovers between the rotor and the stator. Damage to the rotor and stator is thus prevented. Since the already existing means for lubricating the bearing are adjusted and used, this is done advantageously without the use of other components. This is inexpensive and avoids mistakes. In addition, this solution is very low wear compared to the prior art and allows long service life.
  • a further embodiment provides that a conductive feed wick is used. In addition to the advantages mentioned above, this is advantageous because a lasting good discharge due to the constant contact is effected.
  • Another embodiment provides to use a conductive lubricant. This is a virtually completely wear-free solution.
  • the conductive lubricant comprises carbon nanotubes.
  • the addition of these carbon nanotubes causes a well-defined in the sense of the claim formulated to claim 1 sufficiently good conductivity, without a deterioration of the essential properties for use in a high vacuum pump properties of the lubricant occurs.
  • the means is designed as a lubricant circuit. This improves the discharge of the rotor, since an additional transport takes place. This solution is also advantageous in a vibration-decoupled mounting of the rolling bearing in elastomeric bodies, since the discharge via the lubricant circuit and not interrupted by the elastomer body contact from outer ring to housing of the high vacuum pump of the bearing.
  • FIG Fig. 1 A section through a high vacuum pump 100 is shown in FIG Fig. 1 shown.
  • the high vacuum pump has a housing 102 which has a flange 104 and which allows releasable attachment to a container to be evacuated.
  • the flange defines the gas inlet 106.
  • the housing surrounds the components of the stator 120, which includes a bladed stator disk 122 and a spacer 124. Depending on requirements such as pumping speed and compression, the number of stator disks is dimensioned.
  • other molecular pumping principles can be used, for example, according to the Holweck, Siegbahn and 9.kanal principle.
  • the stator cooperates with the rotor 110, which includes a bladed rotor disk 114 and a shaft 112.
  • the number of rotor disks mounted on the shaft corresponds to the number of stator disks.
  • the rotor may also include other pump-active elements that interact with stator elements, such as a Holweck cylinder.
  • a motor coil 128 is disposed in the housing and puts the shaft and thus the rotor in rapid rotation.
  • the shaft is rotatably supported by a permanent magnetic bearing 126.
  • the gas inlet remote end of the shaft is supported by a bearing assembly 170.
  • the bearing assembly comprises a roller bearing 130, which in this example is designed as a grease-lubricated ball bearing.
  • a roller bearing 130 On the shaft sits the inner ring 134 of the ball bearing, the outer ring 132 is supported by means of a Axialschwingringes 140 and a Radialschwingringes 142 in the axial and radial directions swingable in the housing.
  • Axialschwingring and Radialschwingring are designed as electrically non-conductive elastomer rings.
  • Between inner ring and outer ring balls 136 are arranged as rolling elements.
  • a cover plate 144 closes the space between the inner ring and outer ring and holds the lubricant reservoir 144 in the rolling bearing.
  • the lubricant supply contains the grease as a lubricant and is designed as a lifetime lubrication.
  • the described type of bearing with contact-free permanent magnet bearing and roller bearings causes, especially when ceramic balls are used in the rolling bearing, a good electrical insulation of the rotor relative to the stator.
  • the insulation is removed, in which a conductive grease is used in the lubricant supply.
  • the electrical charging of the rotor is prevented because it is earthed via the rolling bearing and the grease.
  • either axial or radial ring or both may be made of electrically conductive material, such as an embedded conductive material elastomer.
  • an electrical conductor may be provided between the outer ring and the housing.
  • Both fat and axial and radial resonant rings can be loaded with carbon nanotubes for improved electrical conductivity.
  • the achieved conductivity must only be so dimensioned that the charging of the rotor is so low that the field strengths between rotor and stator reach no value that allows discharge by flashover or sparks.
  • the Fig. 2 shows a section through the bearing assembly of the high vacuum pump in an alternative embodiment.
  • This alternative bearing arrangement 270 comprises a ball bearing 230 whose inner ring 234 is fixed on the shaft 212.
  • the outer ring 232 is oscillatable by means of a Axialschwingrings 240 and a Radialschwingrings 242 Housing 202 is supported. Between the inner ring and outer ring are the balls 236.
  • the lubrication takes place through a lubricant circuit 268. This is in Fig. 2 illustrated by arrows. Part of this lubricant circuit is the lubricant reservoir 252. It has at least one supply wick 250 which is in sliding contact with a conically shaped and arranged on the shaft spray nut 256.
  • the lubricant 250 shown by dots is transferred from the lubricant reservoir to the spray nut. About the centrifugal force, the lubricant is conveyed along the cone in the space between the bearing inner ring and bearing outer ring and there causes the lubrication. The lubricant falls from the intermediate space back into the lubricant reservoir and can be re-supplied to the ball bearing there by capillary action via the feed wick in the next circulation of the lubricant circuit.
  • grounding of the rotor via the means for lubricating the ball bearing can be done via two alternative ways, whereby both ways can be realized simultaneously.
  • the lubricant itself can be made conductive. This is achieved by the addition of conductive substances to lubricants, such as graphite. Carbon nanotubes prove to be particularly advantageous. Lubricant circulation and filling of the lubricant reservoir then cause a conductive connection from shaft to housing. The charging of the rotor is thereby kept so low that there is no electrical discharge or spark between the rotor and stator.
  • the feed wick can be made of conductive material.
  • Feed wick and lubricant reservoir comprise a felt-like material which stores the lubricant in its pores and promotes it via capillary action. Electrical conductivity is sufficiently effected by admixture of metallic fibers or conductive carbon fiber.
  • the Fig. 3 shows a section through the bearing assembly of the high vacuum pump in a third embodiment.
  • the bearing assembly 370 has a ball bearing 330. Its inner ring 334 is fixed on the shaft 312. Its outer ring 332 is supported in the housing 302 by means of an axial oscillating ring 340 and a radial oscillating ring 342 in the axial and radial directions.
  • a lubricant-containing lubricant circuit 368 is provided, which in Fig. 3 is illustrated by arrows.
  • the lubricant circuit comprises a lubricant pump 352, which contains the lubricant 350, which in Fig. 3 is illustrated by dots through which feed channel 360 feeds into a feed nozzle 362.
  • the lubricant is conveyed to the conically shaped spray nut 356.
  • the lubricant is conveyed by the centrifugal force along the cone in the ball bearing. From there it enters the drainage channel 364 and through this back into the lubricant pump.
  • the adaptation of the means for lubricating the ball bearing in this example is to carry out the lubricant itself conductive. This is achieved in an advantageous variant via the addition of carbon nanotubes.
  • the lubricant circuit then causes a conductive connection from shaft to housing. As a result, the charging of the rotor is kept so low that none of the electrical discharges occurring between the rotor and the stator occur in the prior art.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP10013671.2A 2009-11-06 2010-10-15 Pompe à vide poussé Not-in-force EP2320090B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200910052180 DE102009052180A1 (de) 2009-11-06 2009-11-06 Hochvakuumpumpe

Publications (3)

Publication Number Publication Date
EP2320090A2 true EP2320090A2 (fr) 2011-05-11
EP2320090A3 EP2320090A3 (fr) 2017-06-07
EP2320090B1 EP2320090B1 (fr) 2019-02-20

Family

ID=43500019

Family Applications (1)

Application Number Title Priority Date Filing Date
EP10013671.2A Not-in-force EP2320090B1 (fr) 2009-11-06 2010-10-15 Pompe à vide poussé

Country Status (2)

Country Link
EP (1) EP2320090B1 (fr)
DE (1) DE102009052180A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2808549A1 (fr) * 2013-05-29 2014-12-03 Pfeiffer Vacuum Gmbh Pompe à vide
CN108678975A (zh) * 2018-07-17 2018-10-19 中国工程物理研究院机械制造工艺研究所 一种抗振动分子泵

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011109930A1 (de) * 2011-08-10 2013-02-14 Pfeiffer Vacuum Gmbh Wälzlager und Vakuumpumpe mit Wälzlager
DE102011119907A1 (de) * 2011-12-01 2013-06-06 Pfeiffer Vacuum Gmbh Wälzlager für eine Vakuumpumpe
EP3594498B1 (fr) 2019-11-06 2022-01-05 Pfeiffer Vacuum Gmbh Système avec un dispositif de recyclage des gaz

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1915512A2 (fr) 2005-08-16 2008-04-30 Edwards Vacuum, Inc. Pompe turbomoleculaire a commande de charge statique

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10037423A1 (de) * 2000-07-21 2002-02-07 Atecs Mannesmann Ag Wälzlageranordnung für einen Elektromotor (stromisoliertes Wälzlager
DE102006053237A1 (de) * 2006-11-11 2008-05-29 Pfeiffer Vacuum Gmbh Lagermodul für eine Vakuumpumpe
GB0712777D0 (en) * 2007-07-02 2007-08-08 Edwards Ltd Vacuum Pump

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1915512A2 (fr) 2005-08-16 2008-04-30 Edwards Vacuum, Inc. Pompe turbomoleculaire a commande de charge statique

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2808549A1 (fr) * 2013-05-29 2014-12-03 Pfeiffer Vacuum Gmbh Pompe à vide
JP2014231835A (ja) * 2013-05-29 2014-12-11 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプ
CN104214112A (zh) * 2013-05-29 2014-12-17 普发真空有限公司 真空泵
CN104214112B (zh) * 2013-05-29 2017-08-25 普发真空有限公司 真空泵
CN108678975A (zh) * 2018-07-17 2018-10-19 中国工程物理研究院机械制造工艺研究所 一种抗振动分子泵

Also Published As

Publication number Publication date
DE102009052180A1 (de) 2011-05-12
EP2320090A3 (fr) 2017-06-07
EP2320090B1 (fr) 2019-02-20

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